Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/1994
01/05/1994EP0576791A1 Multi-zone illuminator with embedded process control sensors
01/05/1994EP0576773A1 Integrated circuit entirely protected against ultraviolet rays
01/05/1994EP0576708A1 Integrated circuit with leadframe
01/05/1994EP0576566A1 A method for the preparation and doping of highly insulating monocrystalline gallium nitride thin films
01/05/1994DE4321593A1 Ensuring optimum conditions prior to laser joining - whereby IR emission from the parts is monitored and compared with predetermined value prior to joining process
01/05/1994DE4321211A1 Semiconductor integrated circuit device for burn-in test - has mode switch for applying input signal to semiconductor circuit during normal operation and applying fixed potential during testing
01/05/1994DE4321053A1 Pressure-packed semiconductor device - has semiconductor substrate pressed against heat compensators to produce electrical contacts without solder
01/05/1994DE4320089A1 Semiconductor memory cell capacitor prodn. process - produces capacitor with low dielectric leakage current
01/05/1994DE4319071A1 Semiconductor device with low ON resistance - has groove in layer surface, and second conductivity layer(s) with exposed surface
01/05/1994DE4319070A1 Semiconductor device with multilevel interconnect structure - comprises etch preventing film between inter level insulation layers of poly:phenyl silsequioxane with openings, and interconnect layers, avoiding recess formation
01/05/1994DE4223878A1 Herstellungsverfahren für eine Halbleiterspeicheranordnung Manufacturing method for a semiconductor memory arrangement
01/05/1994DE4221434A1 Herstellverfahren für einen Speicherkondensator Manufacturing method for a storage capacitor
01/05/1994DE4221433A1 Halbleiterspeicheranordnung und Verfahren zu ihrer Herstellung A semiconductor memory device and methods for their preparation
01/05/1994DE4221432A1 Globales Planarisierungsverfahren für integrierte Halbleiterschaltungen oder mikromechanische Bauteile Global planarization method for semiconductor integrated circuits or micromechanical components
01/05/1994DE4221431A1 Herstellverfahren für einen Schlüsselkondensator Manufacture for a key capacitor
01/04/1994US5276855 Logic synthesis apparatus for incorporating additional rules to the knowledge base without causing competition
01/04/1994US5276724 X-ray exposure apparatus
01/04/1994US5276723 Floating diffusion type charge detection circuit for use in charge transfer device
01/04/1994US5276648 Testing method for a semiconductor memory device
01/04/1994US5276647 Static random access memory including stress test circuitry
01/04/1994US5276646 High voltage generating circuit for a semiconductor memory circuit
01/04/1994US5276645 Semiconductor memory with reduced peak current
01/04/1994US5276582 ESD protection using npn bipolar transistor
01/04/1994US5276498 Adaptive spatial filter for surface inspection
01/04/1994US5276423 Circuit units, substrates therefor and method of making
01/04/1994US5276400 Test circuit for imaging sensing integrated circuits
01/04/1994US5276360 Redundant control circuit incorporated in semiconductor integrated circuit device for producing control signal indicative of replacement with redundant unit
01/04/1994US5276347 Gate overlapping LDD structure
01/04/1994US5276346 Semiconductor integrated circuit device having protective/output elements and internal circuits
01/04/1994US5276345 Durability
01/04/1994US5276344 Field effect transistor having impurity regions of different depths and manufacturing method thereof
01/04/1994US5276343 Semiconductor memory device having a bit line constituted by a semiconductor layer
01/04/1994US5276340 Semiconductor integrated circuit having a reduced side gate effect
01/04/1994US5276338 Bonded wafer structure having a buried insulation layer
01/04/1994US5276337 Accuracy of alignment and O/L measurement systems by means of tunable source and handling of signal
01/04/1994US5276334 Charged particle beam exposure method and apparatus
01/04/1994US5276331 Electron beam exposure system
01/04/1994US5276330 High accuracy beam blanker
01/04/1994US5276289 Electronic circuit device and method of producing the same
01/04/1994US5275977 Insulating film forming method for semiconductor device interconnection
01/04/1994US5275976 Process chamber purge module for semiconductor processing equipment
01/04/1994US5275974 Integrated circuits
01/04/1994US5275973 Method for forming metallization in an integrated circuit
01/04/1994US5275972 Anisotropic dry etching; glass flow process
01/04/1994US5275971 Method of forming an ohmic contact to III-V semiconductor materials
01/04/1994US5275970 Method of forming bonding bumps by punching a metal ribbon
01/04/1994US5275969 Semiconductor laser
01/04/1994US5275966 Low temperature process for producing antimony-containing semiconductor materials
01/04/1994US5275965 Trench isolation using gated sidewalls
01/04/1994US5275963 Depositing thick passivating layer; forming plurality of first stud openings
01/04/1994US5275962 Forming plurality of moat regions
01/04/1994US5275961 Method of forming insulated gate field-effect transistors
01/04/1994US5275960 Method of manufacturing MIS type FET semiconductor device with gate insulating layer having a high dielectric breakdown strength
01/04/1994US5275959 Forming intermediate insulator film; ion implantation of boron into channel region
01/04/1994US5275958 Method for producing semiconductor chips
01/04/1994US5275921 Forming a thin film from a base polymer obtained from polyvinylphenol and having a protective tert-butoxy group
01/04/1994US5275917 Photocurable composition
01/04/1994US5275910 Positive radiation-sensitive resist composition
01/04/1994US5275909 Positive-working radiation sensitive mixtures and articles containing alkali-soluble binder, o-quinonediazide photoactive compound and BLANKOPHOR FBW acting dye
01/04/1994US5275908 Lithographic plates with chemical resistance or photoresists with heat resistance
01/04/1994US5275897 Precisely aligned lead frame using registration traces and pads
01/04/1994US5275896 Photolithography and photoresists
01/04/1994US5275895 Method of manufacturing phase-shifting mask
01/04/1994US5275894 Phase shifting mask
01/04/1994US5275872 Limiting lateral diffusion of dopants forming source and drain regions providing stable channel region length
01/04/1994US5275851 Low temperature crystallization and patterning of amorphous silicon films on electrically insulating substrates
01/04/1994US5275782 Preparing aluminum silicide rapidly solidified powder; molding by hot working; applying vacuum; cutting
01/04/1994US5275734 Chemical pre-treatment and biological destruction of propylene carbonate waste streams effluent streams to reduce the biological oxygen demand thereof
01/04/1994US5275715 Electroplating process for enhancing the conformality of titanium and titanium nitride films in the manufacture of integrated circuits and structures produced thereby
01/04/1994US5275714 Method of producing an absorber layer for solar cells with the aid of electrodeposition
01/04/1994US5275697 Chemical machining by controlled dissolution in solution containing at least two kinds of ions of crystalline material
01/04/1994US5275695 Depositing two layers of radiation-sensitive resist material; patterning to form recesses; etching
01/04/1994US5275692 Method for fabricating integrated circuits
01/04/1994US5275690 Method and apparatus for wet chemical processing of semiconductor wafers and other objects
01/04/1994US5275689 Solubilizing acid labile polymer by reaction with organic acid
01/04/1994US5275687 Process for removing surface contaminants from III-V semiconductors
01/04/1994US5275683 Mount for supporting substrates and plasma processing apparatus using the same
01/04/1994US5275667 Method of characterizing the level of cleanliness of an inorganic surface
01/04/1994US5275629 Infrared light transmission window in walls between susceptor and pyrometer
01/04/1994US5275546 Plastic encapsulation apparatus for an integrated circuit lead frame and method therefor
01/04/1994US5275521 Wafer transfer device
01/04/1994US5275479 System of doors between two mobile containers, particularly two ultraclean containers
01/04/1994US5275330 Solder ball connect pad-on-via assembly process
01/04/1994US5275326 Guide hole sleeves for boat transports supporting semiconductor device assemblies
01/04/1994US5275324 Wire bonding apparatus
01/04/1994US5275237 Liquid filled hot plate for precise temperature control
01/04/1994US5275184 Apparatus and system for treating surface of a wafer by dipping the same in a treatment solution and a gate device for chemical agent used in the apparatus and the system
01/04/1994US5275058 Method and apparatus for detecting wire bond pull test failure modes
01/04/1994US5274916 Method of manufacturing ceramic multilayer electronic component
01/04/1994US5274914 Method of producing surface package type semiconductor package
01/04/1994US5274913 Method of fabricating a reworkable module
01/04/1994US5274911 Electronic components with leads partly solder coated
01/04/1994CA1325793C Plasma deposited coatings and low temperature, plasma method of making same
12/1993
12/29/1993EP0576384A1 Laser exposure of photosensitive polyimide
12/29/1993EP0576375A1 Diode structure for pad protection
12/29/1993EP0576297A1 Device for normal or oblique illumination of a mask
12/29/1993EP0576263A2 Method for fabricing nano-scale devices and nano-scale device fabricated by that method
12/29/1993EP0576025A2 Semiconductor device and production method thereof
12/29/1993EP0576009A1 Optical semiconductor device and fabrication method therefor
12/29/1993EP0576001A1 Power semiconductor integrated circuit device with uniform electric field distribution