Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/1994
03/01/1994US5290729 Stacked type capacitor having a dielectric film formed on a rough surface of an electrode and method of manufacturing thereof
03/01/1994US5290728 Method for producing a semiconductor device
03/01/1994US5290727 Method for suppressing charge loss in EEPROMs/EPROMS and instabilities in SRAM load resistors
03/01/1994US5290726 DRAM cells having stacked capacitors of fin structures and method of making thereof
03/01/1994US5290725 Semiconductor memory device and a method for producing the same
03/01/1994US5290724 Method of forming an electrostatic discharge protection circuit
03/01/1994US5290723 Method of manufacturing a nonvolatile semiconductor memory
03/01/1994US5290721 Depositing gate oxide film, electroconductive layer as float-ing gate, patterning, oxidation, forming second electrocon-ductive layer, etching
03/01/1994US5290720 Transistor with inverse silicide T-gate structure
03/01/1994US5290719 Method of making complementary heterostructure field effect transistors
03/01/1994US5290718 Simplified high reliability gate oxide process
03/01/1994US5290717 Method of manufacturing semiconductor devices having a resist patern coincident with gate electrode
03/01/1994US5290716 Method of manufacturing semiconductor devices
03/01/1994US5290715 Method of making dielectrically isolated metal base transistors and permeable base transistors
03/01/1994US5290714 Method of forming semiconductor device including a CMOS structure having double-doped channel regions
03/01/1994US5290713 Process of manufacturing a semiconductor device by using a photoresist mask which does not encircle an area of implanted ions
03/01/1994US5290712 Implanting ions of element of amorphous semiconductor film in film except a fine region therein, heat treating film at temperature not higher than its melting point to generate crystal nucleus in fine region, crystal growth at nucleus
03/01/1994US5290711 Method for fabricating semiconductor devices which lessens the effect of electrostatic discharge
03/01/1994US5290710 Method for testing integrated circuits on a carrier substrate
03/01/1994US5290709 Method of manufacturing semiconductor device
03/01/1994US5290664 Method for preparing electrode for semiconductor device
03/01/1994US5290658 Positive type photoresist composition comprising polyaromatic hydroxy quinone diazide esters as the photosensitive ingredient
03/01/1994US5290657 Improved sensitivity while maintaining heat resistance and film thickness retention
03/01/1994US5290609 Method of forming dielectric film for semiconductor devices
03/01/1994US5290588 Titanium, tungsten alloys
03/01/1994US5290423 Electrochemical interconnection
03/01/1994US5290399 Surface planarizing methods for integrated circuit devices
03/01/1994US5290397 Multilayer photoresists on substrates from images on silicon diene-styrene copolymers, masking and etching
03/01/1994US5290396 Trench planarization techniques
03/01/1994US5290394 Method of manufacturing a thin Hg1-x Cdx Te film
03/01/1994US5290393 Crystal growth method for gallium nitride-based compound semiconductor
03/01/1994US5290384 Apparatus for controlled spray etching
03/01/1994US5290383 Plasma-process system with improved end-point detecting scheme
03/01/1994US5290382 Methods and apparatus for generating a plasma for "downstream" rapid shaping of surfaces of substrates and films
03/01/1994US5290381 Plasma etching apparatus
03/01/1994US5290361 Surface treating cleaning method
03/01/1994US5290358 System for controlling thickness profile of deposited thin film layers over three-dimensional topography: gaseous reactant beam provision, beam collimation, specific angle of incidence of beam, reaction probability of beam with surface
03/01/1994US5290354 Coatings for microelectronic devices and substrates
03/01/1994US5290197 Method for mounting a wiring board on a liquid crystal display substrate
03/01/1994US5290134 Pick and place for automatic test handler
03/01/1994US5290081 Chip mounter
03/01/1994US5289639 Fluid treatment apparatus and method
03/01/1994US5289632 Applying conductive lines to integrated circuits
03/01/1994US5289631 Method for testing, burn-in, and/or programming of integrated circuit chips
03/01/1994CA2104487A1 Hermetic protection for integrated circuits
03/01/1994CA2104484A1 Hermetic protection for integrated circuits
03/01/1994CA2104340A1 Hermetic protection for integrated circuits
03/01/1994CA2097791A1 High aspect ratio, flexible thick film positive photoresist
03/01/1994CA1327338C Process for producing devices containing silicon nitride films
02/1994
02/24/1994DE4328111A1 Prodn. of mask ROMs - by forming gate oxide film, gate electrode, and source and drain regions on semiconductor substrate
02/24/1994DE4327662A1 Fine, highly accurate resist pattern prodn. using positive photoresist - contg. naphtho-quinone-di:azide and novolak resin with alkaline coating, pref. contrast enhancing or antireflective coating
02/24/1994DE4327660A1 Configurable integrated circuit mfg. device, e.g. for field programmable gate array - uses logic function determination data to load required logic function configuration via data input terminals
02/24/1994DE4325331A1 Gallium arsenide phosphide epitaxial disc - having layer system of gallium arsenide phosphide and used to mfr. light emitting diodes
02/24/1994DE4227237A1 Microstructuring substrate surface - by casting shadow of beam of atom agglomerates onto surface
02/23/1994EP0584030A1 Process for the abatement of propylene carbonate emissions
02/23/1994EP0584028A1 As-deposited large grain aluminium
02/23/1994EP0583997A1 Topographical selective patterns
02/23/1994EP0583974A1 Diamond temperature and radiation sensor
02/23/1994EP0583942A2 Phase-shifting lithographic masks having phase-shifting layers of differing compositions
02/23/1994EP0583911A1 MOS transistor channel structure
02/23/1994EP0583897A2 Field-effect transistor with structure for suppressing hot-electron effects, and method of fabricating the transistor
02/23/1994EP0583877A1 Improved semiconductor bond pad structure and method
02/23/1994EP0583876A2 Planar contact with a void
02/23/1994EP0583866A1 Void free oxide fill for interconnect spaces
02/23/1994EP0583784A2 Apparatus and method for interlevel dielectric planarization
02/23/1994EP0583678A2 Process to create surface pattern and applications thereof
02/23/1994EP0583625A2 Method of increasing the layout efficiency of dies on a wafer, and increasing the ratio of I/O area to active area per die
02/23/1994EP0583585A2 Individually powering-up unsingulated dies on a wafer
02/23/1994EP0583374A1 Method and apparatus for plasma deposition
02/23/1994EP0404760B1 Semiconductor component with two connections and process and device for manufacturing it
02/23/1994CN1082770A Electronic devices having metallurgies containing copper-semiconductor compounds
02/23/1994CN1082769A Realization of SI/n+ buried tayer structure and element internal interconnection by high energy ion injection
02/23/1994CN1082725A A method for forming a patterned polyimide coating film on a substrate
02/23/1994CN1082567A A polymeric substrate containing polymeric microelements and methods of making and using the same
02/23/1994CN1082541A Fluoro taxols
02/22/1994US5289422 Semiconductor device having dummy wiring pattern therein and manufacturing method thereof
02/22/1994US5289421 Dynamic random access memory with low noise characteristics
02/22/1994US5289416 Semiconductor integrated device and wiring correction arrangement therefor
02/22/1994US5289411 Floating gate memory array device having improved immunity to write disturbance
02/22/1994US5289405 Semiconductor memory circuit device having memory cells constructed on a Bicmos gate array
02/22/1994US5289384 Device simulator for semiconductor device
02/22/1994US5289312 Catadioptric reduction projection optical system
02/22/1994US5289260 Pattern defect detection device and a spatial frequency filter used therein
02/22/1994US5289043 Switching system for selectively enabling electrical power to be applied to plural loads
02/22/1994US5289039 Resin encapsulated semiconductor device
02/22/1994US5289038 Bump electrode structure and semiconductor chip having the same
02/22/1994US5289037 Conductor track configuration for very large-scale integrated circuits
02/22/1994US5289035 Containign titanium nitride
02/22/1994US5289033 Packaging of semiconductor chips with resin
02/22/1994US5289032 Tape automated bonding(tab)semiconductor device and method for making the same
02/22/1994US5289031 Silicon oxide and/or silicon nitride barrier layer for heavy metals
02/22/1994US5289030 Semiconductor device with oxide layer
02/22/1994US5289029 Semiconductor integrated circuit device having wells biased with different voltage levels
02/22/1994US5289028 High power semiconductor device with integral on-state voltage detection structure
02/22/1994US5289026 Array of electrically erasable non-volatile memory devices
02/22/1994US5289025 Integrated circuit having a boosted node
02/22/1994US5289024 Bipolar transistor with diffusion compensation
02/22/1994US5289022 CCD shift register having a plurality of storage regions and transfer regions therein
02/22/1994US5289021 Basic cell architecture for mask programmable gate array with 3 or more size transistors
02/22/1994US5289020 Heterojunction bipolar transistor