| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 04/15/1997 | US5621237 Semiconductor device |
| 04/15/1997 | US5621236 Gate-to-drain overlapped MOS transistor fabrication process and structure thereby |
| 04/15/1997 | US5621235 TiSi2 /TiN clad interconnect technology |
| 04/15/1997 | US5621233 Electrically programmable read-only memory cell |
| 04/15/1997 | US5621232 Semiconductor device including a local interconnection between an interconnection layer and an adjoining impurity region |
| 04/15/1997 | US5621230 Low capacitance floating diffusion structure for a solid state image sensor |
| 04/15/1997 | US5621228 Heterojunction field effect transistor with non-alloy ohmic contact electrodes |
| 04/15/1997 | US5621227 Method and apparatus for monolithic optoelectronic integrated circuit using selective epitaxy |
| 04/15/1997 | US5621225 Light emitting diode display package |
| 04/15/1997 | US5621224 Semiconductor device including a silicon film having an irregular surface |
| 04/15/1997 | US5621222 Superlattice semiconductor device |
| 04/15/1997 | US5621218 Method and apparatus inspecting bonding-wire status using a plurality of light sources |
| 04/15/1997 | US5621190 Ceramic package main body |
| 04/15/1997 | US5621019 Monomer having vinyl group, polymer thereof and photosensitive resin including those |
| 04/15/1997 | US5620932 Method of oxidizing a semiconductor wafer |
| 04/15/1997 | US5620930 Trench etching in an integrated-circuit semiconductor device |
| 04/15/1997 | US5620928 Ultra thin ball grid array using a flex tape or printed wiring board substrate and method |
| 04/15/1997 | US5620927 Solder ball attachment machine for semiconductor packages |
| 04/15/1997 | US5620926 Method for forming a contact with activation and silicide forming heat treatment |
| 04/15/1997 | US5620925 Method of manufacturing semiconductor device using a hagolen plasma treatment step |
| 04/15/1997 | US5620924 Method of preventing deterioration of film quality of transparent conductive film |
| 04/15/1997 | US5620922 Method for fabricating CMOS device having low and high resistance portions and wire formed from a single gate polysilicon |
| 04/15/1997 | US5620920 Process for fabricating a CMOS structure with ESD protection |
| 04/15/1997 | US5620919 Methods for fabricating integrated circuits including openings to transistor regions |
| 04/15/1997 | US5620918 Method of producing cylindrical storage node of capacitor on semiconductor substrate |
| 04/15/1997 | US5620916 Method for improving via/contact coverage in an integrated circuit |
| 04/15/1997 | US5620914 Manufacturing method of semiconductor device |
| 04/15/1997 | US5620913 Method of making a flash memory cell |
| 04/15/1997 | US5620912 Method of manufacturing a semiconductor device using a spacer |
| 04/15/1997 | US5620911 Method for fabricating a metal field effect transistor having a recessed gate |
| 04/15/1997 | US5620910 Forming active layer on substrate, irradiating laser into active layer in atmosphere including oxygen, nitrogen halogen, forming film by vapor deposition |
| 04/15/1997 | US5620909 Method of depositing thin passivating film on microminiature semiconductor devices |
| 04/15/1997 | US5620907 Method for making a heterojunction bipolar transistor |
| 04/15/1997 | US5620906 Method for producing semiconductor device by introducing hydrogen ions |
| 04/15/1997 | US5620905 Method of fabricating thin film semiconductor integrated circuit |
| 04/15/1997 | US5620828 Positive photoresist composition containing quinonediazide esterification product, novolak resin and pocyhydroxy alkali dissolution accelerator |
| 04/15/1997 | US5620739 Thin film capacitors on gallium arsenide substrate and process for making the same |
| 04/15/1997 | US5620615 Method of etching or removing W and WSix films |
| 04/15/1997 | US5620611 Method to improve uniformity and reduce excess undercuts during chemical etching in the manufacture of solder pads |
| 04/15/1997 | US5620581 Apparatus for electroplating metal films including a cathode ring, insulator ring and thief ring |
| 04/15/1997 | US5620578 Sputtering apparatus having an on board service module |
| 04/15/1997 | US5620560 Method and apparatus for heat-treating substrate |
| 04/15/1997 | US5620559 Hydrogen radical processing |
| 04/15/1997 | US5620558 Using etching solution containing hydrofluoric acid, cupric chloride and hydrochloric acid; increased resolution, reproducible control |
| 04/15/1997 | US5620526 Step-wise etching process with nitrogen trifluoride |
| 04/15/1997 | US5620525 Apparatus for supporting a substrate and introducing gas flow doximate to an edge of the substrate |
| 04/15/1997 | US5620357 Polishing method and apparatus for automatic reduction of wafer taper in single-wafer polishing |
| 04/15/1997 | US5620327 Antistatic socket apparatus |
| 04/15/1997 | US5620295 Transfer apparatus |
| 04/15/1997 | US5620131 Method of solder bonding |
| 04/15/1997 | US5620129 Device and method for forming and attaching an array of conductive balls |
| 04/15/1997 | US5619794 Complex structure molding process and apparatus |
| 04/15/1997 | US5619791 Method for fabricating highly conductive vias |
| 04/13/1997 | CA2185203A1 Method and apparatus for forming amorphous carbon thin film by plasma chemical vapor deposition |
| 04/12/1997 | WO1997046071A1 Sucked material detector, sucked material detecting method using the same detector, shift detecting method using the same detector, and cleaning method using the same detector |
| 04/10/1997 | WO1997013324A1 A semi-conductor integrated circuit |
| 04/10/1997 | WO1997013277A1 Mos transistor with high output voltage endurance |
| 04/10/1997 | WO1997013276A1 Integrated resistor networks having reduced cross talk |
| 04/10/1997 | WO1997013273A1 Formation of source/drain from doped glass |
| 04/10/1997 | WO1997013272A1 An efficient and economical method of planarization of multilevel metallization structures in integrated circuits using cmp |
| 04/10/1997 | WO1997013271A1 A method of accurate compositional analysis of dielectric films on semiconductors |
| 04/10/1997 | WO1997013226A1 Enhanced security semiconductor device, semiconductor circuit arrangement, and method of production thereof |
| 04/10/1997 | WO1997013209A1 Method of producing a digital signal processor |
| 04/10/1997 | WO1997013158A1 Wafer defect management system |
| 04/10/1997 | DE19641414A1 Fault identification and classification method for semiconductor wafer |
| 04/10/1997 | DE19640811A1 Process defect of semiconductor module examination method |
| 04/10/1997 | DE19637722A1 Field effect transistor e.g. high power FET |
| 04/10/1997 | DE19637285A1 Adhesively bonding lead frame of semiconductor component to heat sink |
| 04/10/1997 | DE19637105A1 Field effect transistor structure with insulated gate for VLSI integrated circuit |
| 04/10/1997 | DE19614331A1 Semiconductor component with conductive layer |
| 04/10/1997 | DE19607212C1 Prodn. of smart cards and data cards as composite injection moulding |
| 04/10/1997 | DE19601261C1 Mesastructure semiconductor element manufacturing method |
| 04/10/1997 | CA2235927A1 A semi-conductor integrated circuit |
| 04/10/1997 | CA2233843A1 Method of producing a digital signal processor |
| 04/09/1997 | EP0767502A2 Semiconductor light-emitting device |
| 04/09/1997 | EP0767499A2 Bipolar transistor with a reduced collector series resistance and method for fabricating the same |
| 04/09/1997 | EP0767498A1 Semiconductor memory device and method of manufacturing the same |
| 04/09/1997 | EP0767497A1 A semiconductor device having pull-up or pull-down resistance |
| 04/09/1997 | EP0767493A2 Isolation for electrical connection of stacked integrated semiconductor device structures |
| 04/09/1997 | EP0767492A2 Integrated circuit test system |
| 04/09/1997 | EP0767491A2 Method of forming a contact |
| 04/09/1997 | EP0767490A1 Method of etching silicon carbide |
| 04/09/1997 | EP0767489A2 Nonvolatile semiconductor memory, and method of manufacturing the same |
| 04/09/1997 | EP0767488A2 A method of fabricating a DRAM with increased capacitance |
| 04/09/1997 | EP0767487A1 Improvements in or relating to semiconductor device fabrication |
| 04/09/1997 | EP0767486A2 Semiconductor substrate and producing method thereof |
| 04/09/1997 | EP0767254A1 Method and apparatus for cleaning a vacuum line in a CVD system |
| 04/09/1997 | EP0766909A1 Vertical interconnect process for silicon segments |
| 04/09/1997 | EP0766908A1 Method and device for coating printed-circuit boards, in particular for the manufacture of multi-chip-modules |
| 04/09/1997 | EP0766880A1 Holographic technique for extreme microcircuitry size reduction |
| 04/09/1997 | EP0766870A2 Method of manufacturing a progammable semiconductor device in the form of an anti-fuse |
| 04/09/1997 | EP0766829A2 Method of cleaning probe tips of probe cards and apparatus for implementing the method |
| 04/09/1997 | EP0766604A1 Method and apparatus for controlled particle deposition on wafers |
| 04/09/1997 | EP0673311A4 C-axis perovskite thin films grown on silicon dioxide. |
| 04/09/1997 | EP0570484B1 System for generating a high density plasma |
| 04/09/1997 | CN1147314A Low voltage one transistor flash EEPROM cell using Fowler-Nordheim Programming and erase |
| 04/09/1997 | CN1147154A Trench DMOS semiconductor device and method of fabricating the same |
| 04/09/1997 | CN1147153A Method and apparatus for fabricating self-assembling microstructures |
| 04/09/1997 | CN1147152A Input protection circuit for use in semiconductor device having improved electrostatic breakdown voltage |
| 04/09/1997 | CN1147151A Semiconductor device and process for producing the same, and lead frame used in said process |