| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/29/1997 | US5625212 Semiconductor memory device and method of manufacturing the same |
| 04/29/1997 | US5625204 Compound semiconductors and a method for thin film growth |
| 04/29/1997 | US5625200 Complementary TFT devices with diode-effect elimination means independent of TFT-channel geometry |
| 04/29/1997 | US5625199 Article comprising complementary circuit with inorganic n-channel and organic p-channel thin film transistors |
| 04/29/1997 | US5625195 High-energy implantation process using an ion implanter of the low-or medium-current type and corresponding devices |
| 04/29/1997 | US5624874 Barrier layer enhancement in metallization scheme for semiconductor device fabrication |
| 04/29/1997 | US5624873 Depositing amorphous film on substrate, exposing to particle flux to promote solid phase crystallization growth, annealing, passivating |
| 04/29/1997 | US5624871 Controlled annealing of refractory metal layers on silicon substrate yields metal silicides, also metal oxysilicide/nitride layers, for combining reduced resistance connectors and diffusion barriers |
| 04/29/1997 | US5624870 Method of contact planarization |
| 04/29/1997 | US5624869 Method of forming a film for a multilayer Semiconductor device for improving thermal stability of cobalt silicide using platinum or nitrogen |
| 04/29/1997 | US5624868 Techniques for improving adhesion of silicon dioxide to titanium |
| 04/29/1997 | US5624867 Pre-annealing palladium-covered silicon layer to convert all palladium to silicide, then doping, selective etching and post-annealing for more diffusion, for improved connections in high density integrated circuits |
| 04/29/1997 | US5624866 Semiconductor device provided with trench element isolation film and method for fabricating the same |
| 04/29/1997 | US5624865 High pressure reoxidation anneal of silicon nitride for reduced thermal budget silicon processing |
| 04/29/1997 | US5624864 Semiconductor device having capacitor and manufacturing method thereof |
| 04/29/1997 | US5624863 Semiconductor processing method of forming complementary N-type doped and P-type doped active regions within a semiconductor substrate |
| 04/29/1997 | US5624862 Method of making a mask ROM with a groove |
| 04/29/1997 | US5624861 Method of manufacturing semiconductor device |
| 04/29/1997 | US5624860 Vertical field effect transistor and method |
| 04/29/1997 | US5624859 Method for providing device isolation and off-state leakage current for a semiconductor device |
| 04/29/1997 | US5624858 Method of manufacturing a semiconductor device with increased breakdown voltage |
| 04/29/1997 | US5624857 Process for fabricating double well regions in semiconductor devices |
| 04/29/1997 | US5624856 Method for forming a lateral bipolar transistor |
| 04/29/1997 | US5624855 Process of producing insulated-gate bipolar transistor |
| 04/29/1997 | US5624854 Method of formation of bipolar transistor having reduced parasitic capacitance |
| 04/29/1997 | US5624853 Method for forming heterojunction bipolar transistors |
| 04/29/1997 | US5624852 Manufacturing process for obtaining integrated structure bipolar transistors with controlled storage time |
| 04/29/1997 | US5624851 Process of fabricating a semiconductor device in which one portion of an amorphous silicon film is thermally crystallized and another portion is laser crystallized |
| 04/29/1997 | US5624791 Pattern forming method using mask |
| 04/29/1997 | US5624789 Metal ion reduction in top anti-reflective coatings for photoresisis |
| 04/29/1997 | US5624787 Nitrogenous compound and sulfonium compound for positive photoresists |
| 04/29/1997 | US5624773 Resolution-enhancing optical phase structure for a projection illumination system |
| 04/29/1997 | US5624720 Process for forming a deposited film by reacting between a gaseous starting material and an oxidizing agent |
| 04/29/1997 | US5624707 Method of forming ABO3 films with excess B-site modifiers |
| 04/29/1997 | US5624583 Method of manufacturing semiconductor device |
| 04/29/1997 | US5624582 Optimization of dry etching through the control of helium backside pressure |
| 04/29/1997 | US5624536 Processing apparatus with collimator exchange device |
| 04/29/1997 | US5624529 Dry etching method for compound semiconductors |
| 04/29/1997 | US5624501 Apparatus for cleaning semiconductor wafers |
| 04/29/1997 | US5624499 CVD apparatus |
| 04/29/1997 | US5624498 Showerhead for a gas supplying apparatus |
| 04/29/1997 | US5624304 Techniques for assembling polishing pads for chemi-mechanical polishing of silicon wafers |
| 04/29/1997 | US5624303 Semiconductor wafer polishing pad comprising polymeric matrix having bonding molecules covalently bonded thereto, abrasive particles covalently bonded to bonding molecules in uniform distribution |
| 04/29/1997 | US5624299 Chemical mechanical polishing apparatus with improved carrier and method of use |
| 04/29/1997 | US5623853 Precision motion stage with single guide beam and follower stage |
| 04/29/1997 | US5623813 Memory module container |
| 04/24/1997 | WO1997015174A1 Integrated prober, handler and tester for semiconductor components |
| 04/24/1997 | WO1997015110A1 Magnetic transmission couplings |
| 04/24/1997 | WO1997015081A1 Semiconductor resistor device |
| 04/24/1997 | WO1997015075A1 Metallization of buried contact solar cells |
| 04/24/1997 | WO1997015074A1 Method and device for detecting end point of plasma treatment, method and device for manufacturing semiconductor device, and semiconductor device |
| 04/24/1997 | WO1997015073A1 Semiconductor treatment apparatus |
| 04/24/1997 | WO1997015072A1 A method for producing a semiconductor device comprising an implantation step |
| 04/24/1997 | WO1997015071A1 Manufacture of a semiconductor device with selectively deposited semiconductor zone |
| 04/24/1997 | WO1997015070A2 Fabrication method and contact bump structure for high-density surface-mount connections of solid-state device chips |
| 04/24/1997 | WO1997015069A1 Metals removal process |
| 04/24/1997 | WO1997015068A2 Improved metal-to-metal via-type antifuse and methods of programming |
| 04/24/1997 | WO1997015067A2 A method of biaxially aligning crystalline material |
| 04/24/1997 | DE19642915A1 CMOS integrated semiconductor circuit device, e.g. logic circuit of microprocessor |
| 04/24/1997 | DE19629886A1 Mfg. semiconductor device with buried electrode conductor |
| 04/24/1997 | DE19623822A1 Evaluation method for semiconductor device |
| 04/24/1997 | DE19614164A1 Laminated connection on semiconductor substrate formation method for DRAM |
| 04/24/1997 | DE19612450A1 Semiconductor module with two metal connections on substrate |
| 04/24/1997 | DE19540235A1 Insulating or dielectric layer prodn. in IC, esp. DRAM |
| 04/24/1997 | DE19539340A1 Electronic device, e.g. MOS transistor for submicron VLSI or ULSI circuits |
| 04/24/1997 | DE19538903A1 Method for ion implantation into conductive and semiconductive workpieces |
| 04/24/1997 | DE19538792A1 Kontaktsonden-Anordnung zum elektrischen Verbinden einer Prüfeinrichtung mit den kreisförmigen Anschlußflächen eines Prüflings Contact probe arrangement for electrically connecting a testing device with the circular contact pads of a device under test |
| 04/23/1997 | EP0769816A1 High breakdown voltage PM junction and method for making it |
| 04/23/1997 | EP0769814A1 Method for separating devices on a common substrate, in particular electronic device elements |
| 04/23/1997 | EP0769813A2 Integrated circuit with planarized dielectric layer between successive polysilicon layers |
| 04/23/1997 | EP0769812A2 Method of manufacturing chip-size package-type semiconductor device |
| 04/23/1997 | EP0769811A1 Method of fabricating self aligned DMOS devices |
| 04/23/1997 | EP0769810A2 Bipolar transistor and method of fabricating it |
| 04/23/1997 | EP0769809A1 Process for suppressing crystalline defects in silicon wafers |
| 04/23/1997 | EP0769808A2 Wet etching process with high selectivity between Cu and Cu3Ge |
| 04/23/1997 | EP0769807A2 Reticle container with corner holding |
| 04/23/1997 | EP0769806A2 Apparatus and method for fabricating metal paths in semiconductor substrates through high pressure extrusion |
| 04/23/1997 | EP0769800A2 An apparatus for controlling a charged particle beam and a lithographic process in which the apparatus is used |
| 04/23/1997 | EP0769798A1 Method and apparatus for ion beam formation in an ion implanter |
| 04/23/1997 | EP0769788A2 Low dielectric constant material for use as an insulation element in an electronic device |
| 04/23/1997 | EP0769787A1 X-ray optical element |
| 04/23/1997 | EP0769754A1 Monolithic fingerprint sensor |
| 04/23/1997 | EP0769743A2 Semiconductor memory device having small chip size and shortened redundancy access time |
| 04/23/1997 | EP0769726A2 Process for projection exposure of a workpiece with alignment marks on the rear side and device for executing the process |
| 04/23/1997 | EP0769725A2 Photoresist development method and apparatus |
| 04/23/1997 | EP0769577A2 Process and apparatus for pulling single crystals from a melt in a crucible |
| 04/23/1997 | EP0769346A1 Composite solder paste for flip chip bumping |
| 04/23/1997 | EP0769208A1 Self-aligned contact trench dmos transistor structure and methods of fabricating same |
| 04/23/1997 | EP0769207A1 Method of fabricating self-aligned contact trench dmos transistors |
| 04/23/1997 | EP0769206A1 Thin film of abo 3? with excess a-site and b-site modifiers and method of fabricating integrated circuits with same |
| 04/23/1997 | EP0769205A1 Device for treating wafer-shaped objects, especially silicon wafers |
| 04/23/1997 | EP0769204A2 Novolac polymer planarization films for microelectronic structures |
| 04/23/1997 | EP0769196A1 Micromechanical component and process for producing the same |
| 04/23/1997 | EP0769079A1 Apparatus for uniformly heating a substrate |
| 04/23/1997 | EP0678125B1 Device and process for the electrolytic separation of metals with the aid of a rotating cathode system |
| 04/23/1997 | EP0552195B1 A hybrid semiconductor structure |
| 04/23/1997 | EP0526646B1 Semiconductor device having an isolation region enriched in oxygen and a fabrication process thereof |
| 04/23/1997 | EP0439619B1 Contact member relative to electrically charged material |
| 04/23/1997 | EP0400876B1 Method and apparatus for testing circuit boards |
| 04/23/1997 | EP0344292B1 A process of fabricating self-aligned semiconductor devices |