Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/1997
03/18/1997US5612257 Method of making flip-chip microwave integrated circuit
03/18/1997US5612255 One dimensional silicon quantum wire devices and the method of manufacture thereof
03/18/1997US5612254 Methods of forming an interconnect on a semiconductor substrate
03/18/1997US5612253 Method for forming ordered titanium nitride and titanium silicide upon a semiconductor wafer using a three-step anneal process
03/18/1997US5612252 Integrated circuits with low current density, metal contacts and apertures for electromagnetic migration
03/18/1997US5612251 Manufacturing method and device for a polycrystalline silicon
03/18/1997US5612250 Method for manufacturing a semiconductor device using a catalyst
03/18/1997US5612249 Post-gate LOCOS
03/18/1997US5612248 Method for forming field oxide or other insulators during the formation of a semiconductor device
03/18/1997US5612247 Method for fabricating isolation region for a semiconductor device
03/18/1997US5612246 Method for manufacturing semiconductor substrate having buck transistor and SOI transistor areas
03/18/1997US5612245 Method of manufacturing CMOS device
03/18/1997US5612244 Insulated gate semiconductor device having a cavity under a portion of a gate structure and method of manufacture
03/18/1997US5612243 Polycide local interconnect method and structure
03/18/1997US5612242 Trench isolation method for CMOS transistor
03/18/1997US5612241 Method of manufacturing a DRAM having peripheral circuitry in which source drain interconnection contact of a MOS transistor is made small by utilizing a pad layer
03/18/1997US5612240 Method for making electrical connections to self-aligned contacts that extends beyond the photo-lithographic resolution limit
03/18/1997US5612239 Transistors with connectors, dopes of p and n in silicon with silicon oxide and polycrystalline silicon, patterns and etching with drains
03/18/1997US5612238 Method of manufacturing first and second memory cell arrays with a capacitor and a nonvolatile memory cell
03/18/1997US5612237 Method of making flash EEPROM cell
03/18/1997US5612236 Method of forming a silicon semiconductor device using doping during deposition of polysilicon
03/18/1997US5612235 Method of making thin film transistor with light-absorbing layer
03/18/1997US5612234 Liquid crystal displays on substrates with insulating layers
03/18/1997US5612233 Method for manufacturing a single electron component
03/18/1997US5612232 Method of fabricating semiconductor devices and the devices
03/18/1997US5612230 Process for manufacturing a semiconductor device by applying a non-single-crystalline material on a sidewall inside of an opening portion for growing a single-crystalline semiconductor body
03/18/1997US5612229 Solar cells with reflecting layer with high conversion efficiency and high productive efficiency forming thin films by sputtering
03/18/1997US5612228 Thin film transistors with supports
03/18/1997US5612169 Used in manufacture of offset printing plates and photoresists
03/18/1997US5612144 Electrification removing component
03/18/1997US5612082 Metal oxide thin films used in integrated circuits
03/18/1997US5612068 Apparatus for the transfer of substrates
03/18/1997US5611946 Multi-wavelength laser system, probe station and laser cutter system using the same
03/18/1997US5611940 Microsystem with integrated circuit and micromechanical component, and production process
03/18/1997US5611888 Plasma etching of semiconductors
03/18/1997US5611884 Flip chip silicone pressure sensitive conductive adhesive
03/18/1997US5611876 Method of making a multilayer LTCC tub architecture for hermetically sealing semiconductor die, external electrical access for which is provided by way of sidewall recesses
03/18/1997US5611865 Alignment of a shadow frame and large flat substrates on a heated support
03/18/1997US5611863 Semiconductor processing apparatus and cleaning method thereof
03/18/1997US5611861 Rotary type apparatus for processing semiconductor wafers and method of processing semiconductor wafers
03/18/1997US5611858 Apparatus for transporting discoidal substrates in a vacuum coating apparatus
03/18/1997US5611855 Method for manufacturing a calibration wafer having a microdefect-free layer of a precisely predetermined depth
03/18/1997US5611685 Substrate heat treatment apparatus
03/18/1997US5611655 Vacuum process apparatus and vacuum processing method
03/18/1997US5611481 Integrated electronic device having flip-chip connection with circuit board and fabrication method thereof
03/18/1997US5611478 Lead frame clamp for ultrasonic bonding
03/18/1997US5611452 Sealable transportable container having improved liner
03/18/1997US5611448 Wafer container
03/18/1997US5611140 Method of forming electrically conductive polymer interconnects on electrical substrates
03/18/1997CA2092370C Forming resistors for integrated circuits
03/18/1997CA2058513C Soi-type thin film transistor and manufacturing method therefor
03/13/1997WO1997009741A1 An arrangement and method for detecting sequential processing effects in manufacturing using predetermined sequences within runs
03/13/1997WO1997009740A1 Process and device for testing a chip
03/13/1997WO1997009739A1 Solder deposit support
03/13/1997WO1997009738A1 Reduction of dislocations in a heteroepitaxial semiconductor structure
03/13/1997WO1997009737A1 Wafer support system
03/13/1997WO1996027206A3 Polysilicon polish for patterning improvement
03/13/1997DE19637162A1 Low temp. and pressure, direct bonding of nitride surface
03/13/1997DE19636735A1 Prodn. of multilayered circuit substrate
03/13/1997DE19636727A1 Halbleiterbauelement und Verfahren zur Herstellung des Halbleiterbauelements A semiconductor device and method of manufacturing the semiconductor device
03/13/1997DE19636553A1 Integrated semiconductor circuit device with e.g. thyristor for solid state relay
03/13/1997DE19636302A1 Silicon carbide semiconductor device, e.g. vertical high power MOSFET
03/13/1997DE19636054A1 Semiconductor device, e.g. DRAM
03/13/1997DE19629090A1 High power bipolar transistor, e.g. HBT, for handling HF signal
03/13/1997DE19600994A1 Verfahren und Vorrichtung zum Testen eines Chips A method and apparatus for testing a chip
03/13/1997DE19533313A1 Semiconductor transistor device structure for e.g. CMOS FET
03/13/1997DE19533169A1 Lotdepotträger Solder deposit
03/13/1997DE19530989C1 Verfahren zum Filmstrippen A method of film stripping
03/12/1997EP0762518A2 Improvements in or relating to semiconductor devices
03/12/1997EP0762517A2 Improvements in or relating to semiconductor devices
03/12/1997EP0762512A1 Schottky barrier diode
03/12/1997EP0762511A1 Bipolar transistor and method of manufacturing the same
03/12/1997EP0762510A2 Method for fabricating a monolithic semiconductor device with integrated surface micromachined structures
03/12/1997EP0762508A2 Semiconductor device having charge transfer device equipped with three semiconductor layers of same conductivity type with mutually different concentrations
03/12/1997EP0762502A1 DRAM cell array layout
03/12/1997EP0762501A1 Monolithic integrated device of PIN diode and field effect transistor and method of manufacturing the same
03/12/1997EP0762500A1 Planar PIN diode and method of manufacturing the same
03/12/1997EP0762499A1 Monolithic integrated device of PIN diode and field effect transistor and method of manufacturing the same
03/12/1997EP0762498A2 Fuse window with controlled fuse oxide thickness
03/12/1997EP0762497A1 Tape carrier package structure with reinforced outer leads
03/12/1997EP0762493A1 Semiconductor device having field oxide regions and a field implant and method of manufacturing the same
03/12/1997EP0762492A1 Semiconductor device manufacturing method
03/12/1997EP0762491A2 Electrostatic chuck member and a method of producing the same
03/12/1997EP0762490A2 Method of manufacturing a LDD-MOSFET
03/12/1997EP0762489A2 Method for fabricating a heterojunction bipolar transistor
03/12/1997EP0762488A2 Cleaning solution for cleaning semiconductor device and cleaning method using the same
03/12/1997EP0762486A2 Etching of nitride crystal
03/12/1997EP0762485A2 Method of manufacturing a contact hole
03/12/1997EP0762484A1 Method of forming an epitaxial layer with minimal autodoping
03/12/1997EP0762483A1 Wafer processing system
03/12/1997EP0762482A1 Apparatus for etching wafer
03/12/1997EP0762481A2 Method of storing and transporting wafers and method of determining the amount of organic materials attached to stored wafers
03/12/1997EP0762480A1 In-situ wafer temperature control apparatus for single wafer tools
03/12/1997EP0762470A2 Apparatus and method for temperature control in plasma processing
03/12/1997EP0762469A1 Method and apparatus for in situ removal of contaminants from ion beam neutralization and implantation apparatuses
03/12/1997EP0762215A1 Surface position detecting method and apparatus and scanning exposure method and apparatus
03/12/1997EP0762207A2 Positive working photosensitive composition and method of producing relief structures
03/12/1997EP0762206A2 Positive working photosensitive composition and method of producing relief structures
03/12/1997EP0761841A1 Method for forming film
03/12/1997EP0761831A1 Thin gold alloy wire for bonding