Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
04/1997
04/09/1997CN1147150A Electrode structure, forming method and mounting body for semiconductor device, and semiconductor device
04/09/1997CN1147149A Method for making capacitor element
04/09/1997CN1147148A Method of manufacturing semiconductor device
04/09/1997CN1147147A Method for forming fine patterns of semiconductor device
04/09/1997CN1147146A Deprocessing method for analyzing failure in semiconductor device
04/09/1997CN1147145A Method for fabricating diffusion barrier metal layer in semiconductor device
04/09/1997CN1147144A In situ removal of contaminants from interior surfaces of ion beam implanter
04/09/1997CN1147101A Parts testing method
04/09/1997CN1147098A Phase shift mask
04/09/1997CN1147032A Method for preparing molten silicon melt from polycrystalline silicon charge
04/09/1997CN1147026A Method of cleaning vacuum processing apparatus
04/09/1997CN1147025A Copper and copper alloy micro-etching agent
04/09/1997CN1034533C VLSI static random access memory
04/08/1997US5619462 Fault detection for entire wafer stress test
04/08/1997US5619447 Ferro-electric memory array architecture and method for forming the same
04/08/1997US5619420 Semiconductor cell having a variable transistor width
04/08/1997US5619393 High-dielectric-constant material electrodes comprising thin ruthenium dioxide layers
04/08/1997US5619376 Illuminating optical apparatus for uniformly illuminating a reticle
04/08/1997US5619329 Contactless thickness measuring apparatus and measuring method for the same
04/08/1997US5619304 Reduction exposure apparatus with improved resolution characteristic and raised light intensity
04/08/1997US5619155 IC-chip operation inhibitor
04/08/1997US5619124 Reference voltage generator in a semiconductor integrated device
04/08/1997US5619071 For an integrated circuit
04/08/1997US5619069 Bipolar device and production thereof
04/08/1997US5619065 Semiconductor package and method for assembling the same
04/08/1997US5619064 III-V semiconductor gate structure and method of manufacture
04/08/1997US5619061 Micromechanical microwave switching
04/08/1997US5619057 Complex film overlying a substrate with defined work function
04/08/1997US5619056 SRAM semiconductor device
04/08/1997US5619055 Semiconductor integrated circuit device
04/08/1997US5619054 CMOS transistor and isolated back gate electrodes on an SOI substrate
04/08/1997US5619052 Interpoly dielectric structure in EEPROM device
04/08/1997US5619051 Semiconductor nonvolatile memory cell
04/08/1997US5619048 Semiconductor integrated circuit device
04/08/1997US5619045 Thin film transistor
04/08/1997US5619044 Comprising crystallizing catalyst promoter
04/08/1997US5619017 Microelectronic bonding with lead motion
04/08/1997US5618892 2,4-diamino-s-triazinyl group-containing polymer and negative radiation-sensitive resist composition containing the same
04/08/1997US5618761 Method of manufacturing a perovskite thin film dielectric
04/08/1997US5618760 Method of etching a pattern on a substrate using a scanning probe microscope
04/08/1997US5618759 Methods of and apparatus for immobilizing semiconductor wafers during sawing thereof
04/08/1997US5618757 Method for improving the manufacturability of the spin-on glass etchback process
04/08/1997US5618756 Coating part of substrate with organic material, depositing layer of tungsten silicide which selectively deposits on uncoated part of substrate
04/08/1997US5618755 Method of manufacturing a polycide electrode
04/08/1997US5618754 Method of fabricating a semiconductor device having an Au electrode
04/08/1997US5618753 Method for forming electrodes on mesa structures of a semiconductor substrate
04/08/1997US5618752 Method of fabrication of surface mountable integrated circuits
04/08/1997US5618751 Method of making single-step trenches using resist fill and recess
04/08/1997US5618750 Method of making fuse with non-corrosive termination of corrosive fuse material
04/08/1997US5618749 Method of forming a semiconductor device having a capacitor and a resistor
04/08/1997US5618748 Manufacturing method of CMOS transistor with no reduction of punch-through voltage
04/08/1997US5618747 Process for producing a stacked capacitor having polysilicon with optimum hemispherical grains
04/08/1997US5618746 Forming gate insulation film and electrodes, ion implanting, forming insulating film, plug film, diffusing blocking film, conductive layer, dielectric layer
04/08/1997US5618745 Method of manufacturing a one transistor one-capacitor memory cell structure with a trench containing a conductor penetrating a buried insulating film
04/08/1997US5618743 MOS transistor having adjusted threshold voltage formed along with other transistors
04/08/1997US5618742 Method of making flash EPROM with conductive sidewall spacer contacting floating gate
04/08/1997US5618741 Manufacture of electronic devices having thin-film transistors
04/08/1997US5618739 Method of making light valve device using semiconductive composite substrate
04/08/1997US5618738 Manufacturing method for magnetoresistance elements
04/08/1997US5618688 Method of forming a monolithic semiconductor integrated circuit having an N-channel JFET
04/08/1997US5618655 Solvent extraction using cyclohexane and isopropyl acetate, separating aqueous and organic phases
04/08/1997US5618575 Control oxidation of vapor deposition
04/08/1997US5618461 Reflectance method for accurate process calibration in semiconductor wafer heat treatment
04/08/1997US5618446 Method for forming a step on a deposition surface of a substrate for a superconducting device utilizing an oxide superconductor
04/08/1997US5618397 High density, large scale integrated circuits
04/08/1997US5618384 Method for forming residue free patterned conductor layers upon high step height integrated circuit substrates using reflow of photoresist
04/08/1997US5618383 Narrow lateral dimensioned microelectronic structures and method of forming the same
04/08/1997US5618381 Multiple step method of chemical-mechanical polishing which minimizes dishing
04/08/1997US5618379 Selective deposition process
04/08/1997US5618351 Thermal processing apparatus and process
04/08/1997US5618350 Processing apparatus
04/08/1997US5618349 Thermal treatment with enhanced intra-wafer, intra-and inter-batch uniformity
04/08/1997US5618348 Air elimination system
04/08/1997US5618345 Method of producing self-supporting thin film of silicon single crystal
04/08/1997US5618227 Apparatus for polishing wafer
04/08/1997US5617991 Method for electrically conductive metal-to-metal bonding
04/08/1997US5617945 Device transfer mechanism for IC test handler
04/08/1997CA2094407C Propylene carbonate recovery process
04/03/1997WO1997012504A1 Method for surface mounting a heatsink to a printed circuit board
04/03/1997WO1997012502A1 Methods and apparatus for generating plasma
04/03/1997WO1997012401A1 A silicide agglomeration fuse device
04/03/1997WO1997012399A1 Metal stack for integrated circuit having two thin layers of titanium with dedicated chamber depositions
04/03/1997WO1997012396A1 Electrostatic clamping method and apparatus for dielectric workpieces in vacuum processors
04/03/1997WO1997012395A1 Circuit having trim pads formed in scribe channel
04/03/1997WO1997012394A1 Method of electrically connecting a semiconductor chip to at least one contact surface
04/03/1997WO1997012393A1 Capped interlayer dielectric for chemical mechanical polishing
04/03/1997WO1997012392A1 Process for cleaning and drying semiconductors and equipment therfor
04/03/1997WO1997012391A1 Improved interface between titanium and aluminum-alloy in metal stack for integrated circuit
04/03/1997WO1997012390A1 Method of producing a gate electrode
04/03/1997WO1997012389A1 Double-spacer technique for forming a bipolar transistor with a very narrow emitter
04/03/1997WO1997012388A1 Apparatus and method for making laminated electrical and electronic devices
04/03/1997WO1997012341A1 Chip module
04/03/1997WO1997012281A1 Process for producing surfactant having a low metal ion level and developer produced therefrom
04/03/1997WO1997012082A1 Preparation of a semiconductor thin film
04/03/1997WO1997012079A1 Flexible continuous cathode contact circuit for electrolytic plating of c4, tab microbumps, and ultra large scale interconnects
04/03/1997WO1997012030A1 Apparatus and methods for active programmable matrix devices
04/03/1997WO1997011791A1 Apparatus for cleaning semiconductor wafers
04/03/1997WO1997011623A1 Modular system
04/03/1997WO1997007536A3 Ridge-shaped laser in a channel
04/03/1997WO1996018194A3 Semiconductor memory with non-volatile memory transistor