Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
05/1997
05/20/1997US5631185 Using first conductive layer as mask for etching second conductive layer; simplification
05/20/1997US5631184 Method of producing a semiconductor device having a fin type capacitor
05/20/1997US5631183 Method of reducing word line resistance of a semiconductor memory
05/20/1997US5631182 Method of making a semiconductor memory circuit device
05/20/1997US5631181 Method of making a monolithic diode array
05/20/1997US5631180 Method of fabricating high threshold metal oxide silicon read-only-memory transistors
05/20/1997US5631179 Covering a semiconductor with layers of a tunnel oxide, a floating gater, an intergate dielectric over silicon nitride; reduced number of source pickups; ratio of polysilicon to contact space can be zero; integrated circuits
05/20/1997US5631178 Method for forming a stable semiconductor device having an arsenic doped ROM portion
05/20/1997US5631177 Process for manufacturing integrated circuit with power field effect transistors
05/20/1997US5631176 Method of making combined JFET & MOS transistor device
05/20/1997US5631175 Etching, forming a spacing, doping
05/20/1997US5631174 Preventing the formation of stringers causing short circuiting
05/20/1997US5631173 Method for forming collector up heterojunction bipolar transistor having insulative extrinsic emitter
05/20/1997US5631113 Patterns on semiconductor substrates, compensating for deflection of beam away from optical axis
05/20/1997US5631108 Mask for manufacturing semiconductor device and method of manufacture thereof
05/20/1997US5631050 Vapor deposition from plasma
05/20/1997US5631048 Method of forming a thin film on the surface of a substrate using a roll coater
05/20/1997US5631040 Method of fabricating a piezoelectric/electrostrictive actuator
05/20/1997US5630917 Cleaning of a PVD chamber containing a collimator
05/20/1997US5630904 Solutions containing ammonium or amine salts of carboxylic acids and fluorine compounds
05/20/1997US5630881 Thin-film forming apparatus with magnetic bearings and a non-contact seal and drive
05/20/1997US5630872 Formation of thin-film patterns of a metal oxide
05/20/1997US5630690 Enclosure for load lock interface
05/20/1997CA2080081C High electron mobility transistor having improved electron controllability
05/20/1997CA2054498C Mis transistor
05/15/1997WO1997017755A1 Push-pull power amplifier
05/15/1997WO1997017731A1 Field effect transistor
05/15/1997WO1997017730A1 Process for reducing defects in oxide layers on silicon carbide
05/15/1997WO1997017729A1 Silicon dioxide spacer for locos or recessed locos
05/15/1997WO1997017728A1 Transfer device, transfer method, processing device, and processing method
05/15/1997WO1997017727A1 A flip-chip assembly
05/15/1997WO1997017726A1 Low collector resistance bipolar transistor compatible with high voltage integrated circuits
05/15/1997WO1997017725A2 Method of etching a polysilicon pattern
05/15/1997WO1997017724A1 Semiconductor device having local wiring section and process for manufacturing the same
05/15/1997WO1997017723A1 GaAs SUBSTRATE WITH COMPOSITIONALLY GRADED AlGaAsSb BUFFER FOR FABRICATION OF HIGH-INDIUM FETS
05/15/1997WO1997017722A1 Facility for treating objects in a process tank
05/15/1997WO1997017721A2 Method for making a circuit structure having a flip-mounted matrix of devices
05/15/1997WO1997017720A2 Circuit structure having a flip-mounted matrix of devices
05/15/1997WO1997017619A1 Ic conveyor, ic posture changer and ic takeout apparatus
05/15/1997WO1997017167A1 Laser processing chamber with cassette cell
05/15/1997WO1997017166A1 Laser stripping improvement by modified gas composition
05/15/1997WO1997017164A1 Damage-free laser surface treatment method
05/15/1997WO1997017163A1 Process and apparatus for oblique beam revolution, for the effective laser stripping of sidewalls
05/15/1997WO1997017147A1 Process for brush cleaning
05/15/1997WO1997011482A3 Removal of halogens and photoresist from wafers
05/15/1997DE19646927A1 Semiconductor planar junction manufacturing method for transistor in e.g. 1 Giga DRAM
05/15/1997DE19644813A1 Semiconductor chip protective housing moulding apparatus for lead frame device
05/15/1997DE19643952A1 Vorrichtung und Verfahren zur Projektionsbelichtung Apparatus and method for projection exposure
05/15/1997DE19635571A1 Verfahren zur Herstellung einer kohlenstoffdotierten Verbindungshalbleiterschicht A process for producing a carbon-doped compound semiconductor layer
05/15/1997DE19630128A1 Semiconductor device manufacturing method using LOCOS method
05/15/1997DE19625668A1 Semiconductor memory device, e.g. DRAM
05/15/1997DE19541436A1 Anlage zur Behandlung von Gegenständen in einem Prozeßtank Plant for the treatment of objects in a process tank
05/15/1997CA2234116A1 Device for treating objects in a processing tank
05/14/1997EP0773587A2 Method of making a semiconductor power module
05/14/1997EP0773584A2 Device having resin package and method of producing the same
05/14/1997EP0773583A1 Method of manufacturing non-volatile semiconductor memory having erasing gate
05/14/1997EP0773582A2 Method of forming a trench isolation structure in an integrated circuit
05/14/1997EP0773581A1 Method of global planarization in fabricating integrated circuit devices
05/14/1997EP0773580A1 A method of chemically mechanically polishing an electronic component
05/14/1997EP0773579A2 Semiconductor device with improved insulating/passivating layer
05/14/1997EP0773576A1 Electron column optics for multibeam electron lithography system
05/14/1997EP0773480A1 Remover solution composition for resist and method for removing resist using the the same
05/14/1997EP0773448A1 Leakage current control system for low voltage CMOS circuits
05/14/1997EP0773436A2 Suspended microstructures
05/14/1997EP0773310A1 Process for producing a silicon wafer
05/14/1997EP0773269A2 Polishing slurry
05/14/1997EP0772888A1 Method of manufacturing a composite structure for use in electronic devices and structure, manufactured by said method
05/14/1997EP0772800A1 Lithographic device with a three-dimensionally positionable mask holder
05/14/1997EP0672295B1 Ion implantation target charge control system and method
05/14/1997EP0670055B1 Method of deposition
05/14/1997EP0651914A4 Structure for use in producing semiconductor devices with buried contacts and method for its preparation.
05/14/1997EP0648350B1 Metal ion reduction in top anti-reflective coatings for photoresists
05/14/1997EP0584076B1 Semiconductor wafer processing module
05/14/1997EP0481084B1 Dynamic ram in which timing of end of data read out is earlier than conventional
05/14/1997EP0471544B1 Semiconductor memory with a sequence of clocked access codes for test mode entry
05/14/1997CN1149930A Electronic component comprising thin-film structure with passive elements
05/14/1997CN1149766A 树脂密封型半导体器件 Resin-sealed type semiconductor device
05/14/1997CN1149765A Semiconductor packaging with transparent window and its producing method
05/14/1997CN1149764A Interconnection structure for mounting semiconductor device on substrate
05/14/1997CN1149763A Method for producing CMOS transistor
05/14/1997CN1149762A Assembling method and device for semiconductor
05/14/1997CN1149761A Crystal wafer temmperature on-site controller for single wafer tool
05/14/1997CN1149760A Method for processing thin wafers and solar cells of crystalline silicon
05/14/1997CN1149759A Method for forming fine contact hole in semiconductor device
05/14/1997CN1149758A Method for producing semiconductor substrate
05/14/1997CN1149757A Technology for producing lateral current limiting structure of semiconductor mesa
05/14/1997CN1149750A Monolithic ceramic electronic element and its producing method
05/14/1997CN1034896C 半导体存储器及其制造方法 Semiconductor memory and method of manufacturing
05/14/1997CN1034894C Self-alignment producing method for high electron mobility transistor
05/14/1997CN1034893C Method for removing contamination and minority carrier lifetime improvement in silicon
05/13/1997US5629944 Test mode setting circuit of test circuit for semiconductor memory
05/13/1997US5629888 Semiconductor memory device and method of operation thereof
05/13/1997US5629877 Process and device composite simulation system and simulation method
05/13/1997US5629838 Apparatus for non-conductively interconnecting integrated circuits using half capacitors
05/13/1997US5629835 Metal ball grid array package with improved thermal conductivity
05/13/1997US5629805 Aligner equipped with annular illumination system for annular illumination light with large illuminance
05/13/1997US5629638 Adaptive threshold voltage CMOS circuits
05/13/1997US5629633 Method for predicting an output current of a transistor
05/13/1997US5629632 System for testing electric properties of an object
05/13/1997US5629631 Interface card for a probe card assembly