| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 06/03/1997 | US5635670 Multilayer electronic component |
| 06/03/1997 | US5635669 Multilayer electronic component |
| 06/03/1997 | US5635463 Silicon wafer cleaning fluid with HN03, HF, HCl, surfactant, and water |
| 06/03/1997 | US5635428 Global planarization using a polyimide block |
| 06/03/1997 | US5635426 Method of making a semiconductor device having a silicide local interconnect |
| 06/03/1997 | US5635425 Plasma enhanced tetraethoxysilane deposition over patterned conducting layer after exposed portions are cleaned with nitrogen plasma |
| 06/03/1997 | US5635423 Simplified dual damascene process for multi-level metallization and interconnection structure |
| 06/03/1997 | US5635422 Diffusing dopants into a semiconductor wafer |
| 06/03/1997 | US5635420 Forming dielectric, adhesive conductive layers and electrode on semiconductor substrate, covering with thin ferroelectric film and forming islands of metal insertion materials on crystal grain boundaries of the film |
| 06/03/1997 | US5635419 Porous silicon trench and capacitor structures |
| 06/03/1997 | US5635418 Method of making a resistor |
| 06/03/1997 | US5635417 Method of making a read only memory device |
| 06/03/1997 | US5635416 Manufacturing method to fabricate a semiconductor integrated circuit with on-chip non-volatile memories |
| 06/03/1997 | US5635415 Method of manufacturing buried bit line flash EEPROM memory cell |
| 06/03/1997 | US5635414 Low cost method of fabricating shallow junction, Schottky semiconductor devices |
| 06/03/1997 | US5635413 Method of manufacturing field effect transistor |
| 06/03/1997 | US5635412 Doping silicon carbide substrate surrounding semiconductor feature with argon to amorphize substrate surface without annealing |
| 06/03/1997 | US5635411 Method of making semiconductor apparatus |
| 06/03/1997 | US5635410 Bias temperature treatment method |
| 06/03/1997 | US5635409 Real-time multi-zone semiconductor wafer temperature and process uniformity control system |
| 06/03/1997 | US5635338 Energy sensitive materials and methods for their use |
| 06/03/1997 | US5635337 Coating substrate with multiple photoresist layers having successively larger apertures to form step pattern, transferring configuration to substrate by concurrent etching of photoresist and substrate |
| 06/03/1997 | US5635336 Method for the preparation of a pattern overlay accuracy-measuring mark |
| 06/03/1997 | US5635335 Method for fabricating semiconductor device utilizing dual photoresist films imaged with same exposure mask |
| 06/03/1997 | US5635314 Adjustment the reduction of resolution on the edges by increasing the light intensity distribution due to interference; photolithography; semiconductors; accuracy |
| 06/03/1997 | US5635244 Clamping a wafer edge using a clamp having an overhang separated from the wafer surface a distance such as to prevent contacting the deposited material |
| 06/03/1997 | US5635241 Method for producing thin film and apparatus therefor |
| 06/03/1997 | US5635240 Electronic coating materials using mixed polymers |
| 06/03/1997 | US5635220 Molding die for sealing semiconductor device with reduced resin burrs |
| 06/03/1997 | US5635115 Filling circuit board cavities containing functionl element with molten sealing resin, curing |
| 06/03/1997 | US5635102 Highly selective silicon oxide etching method |
| 06/03/1997 | US5635093 Heating plate for heating an object placed on its surface and chemical treatment reactor equipped with said plate |
| 06/03/1997 | US5635083 Method and apparatus for chemical-mechanical polishing using pneumatic pressure applied to the backside of a substrate |
| 06/03/1997 | US5635053 Method and apparatus for cleaning electronic parts |
| 06/03/1997 | US5635042 Apparatus for automatic loading/unloading of rack carrying lead frame |
| 06/03/1997 | US5635022 Silicon oxide removal in semiconductor processing |
| 06/03/1997 | US5635021 Dry etching Method |
| 06/03/1997 | US5635009 Method for sticking an insulating film to a lead frame |
| 06/03/1997 | US5635000 Method for screening using electrostatic adhesion |
| 06/03/1997 | US5634980 Method for washing substrates |
| 06/03/1997 | US5634978 Ultra-low particle semiconductor method |
| 06/03/1997 | US5634974 Method for forming hemispherical grained silicon |
| 06/03/1997 | US5634973 Semiconductor having substrate selectively coated with epitaxial layer patterned by masking with group iiib oxide layer wherein epitaxial growth does not occur on mask |
| 06/03/1997 | US5634765 Substrate transport apparatus and substrate transport path adjustment method |
| 06/03/1997 | US5634586 Single point bonding method |
| 06/03/1997 | US5634268 Method for making direct chip attach circuit card |
| 06/03/1997 | US5634267 Method and apparatus for manufacturing known good semiconductor die |
| 06/03/1997 | US5634266 Method of making a dielectric chuck |
| 06/03/1997 | US5634231 Semiconductor manufacturing apparatus |
| 06/03/1997 | US5634230 Apparatus and method for cleaning photomasks |
| 05/31/1997 | CA2187961A1 Method and apparatus for alignment and bonding |
| 05/29/1997 | WO1997019579A1 Multilayered wiring board, prefabricated material for multilayered wiring board, process of manufacturing multilayered wiring board, electronic parts package, and method for forming conductive pillar |
| 05/29/1997 | WO1997019472A1 Contoured nonvolatile memory cell |
| 05/29/1997 | WO1997019471A1 Integrated photocathode |
| 05/29/1997 | WO1997019469A1 Semiconductor package with ground or power ring |
| 05/29/1997 | WO1997019468A1 Semiconductor storage device and process for manufacturing the same |
| 05/29/1997 | WO1997019467A1 Side trench isolation method using a two-component protective layer of polysilicon on silicon nitride for insulator layer planarisation by chemical-mechanical polishing |
| 05/29/1997 | WO1997019466A1 Method and apparatus for forming solder bumps on a substrate |
| 05/29/1997 | WO1997019465A1 Method in the manufacturing of a semiconductor device |
| 05/29/1997 | WO1997019464A1 Storage box for an object to be protected from physical/chemical contamination |
| 05/29/1997 | WO1997019462A2 Vertically integrated semiconductor component and method of producing the same |
| 05/29/1997 | WO1997019303A1 Temperature controlled chuck for vacuum processing |
| 05/29/1997 | CA2237887A1 Method in the manufacturing of a semiconductor device |
| 05/28/1997 | EP0776093A2 Configurable logic array |
| 05/28/1997 | EP0776092A2 Semiconductor device |
| 05/28/1997 | EP0776049A1 PMOS single-poly non-volatile memory structure |
| 05/28/1997 | EP0776048A2 MOS gated device base region with high breakdown resistance |
| 05/28/1997 | EP0776046A1 SOI CMOS logic circuit with transfer gates |
| 05/28/1997 | EP0776045A2 Semiconductor memory device and method for fabricating the same |
| 05/28/1997 | EP0776044A2 Memory cell array and method of producing the same |
| 05/28/1997 | EP0776040A2 Integrated circuit interconnect and method |
| 05/28/1997 | EP0776039A2 Improvements in or relating to semiconductor packages |
| 05/28/1997 | EP0776038A2 Integrated circuit driver for a liquid crystal device |
| 05/28/1997 | EP0776037A2 Low temperature integrated metallization process and apparatus |
| 05/28/1997 | EP0776036A1 Substrate having shallow trench isolation and method of manufacturing the same |
| 05/28/1997 | EP0776035A1 Substrate carrying device |
| 05/28/1997 | EP0776034A2 Method of manufacturing a CMOS |
| 05/28/1997 | EP0776033A2 Method for forming aluminium contacts by sputtering |
| 05/28/1997 | EP0776032A2 Plasma etching method |
| 05/28/1997 | EP0776031A2 A method for processing semiconductor material and apparatus therefor |
| 05/28/1997 | EP0776030A2 Apparatus and method for double-side polishing semiconductor wafers |
| 05/28/1997 | EP0776029A1 Improvements in or relating to semiconductor chip separation |
| 05/28/1997 | EP0776028A2 Process for reducing the carrier charge concentration for lowering the storage charge in semiconductor devices through two implantation steps |
| 05/28/1997 | EP0776027A2 Centrifugal wafer carrier cleaning apparatus |
| 05/28/1997 | EP0776026A1 Semiconductor device manufacturing apparatus employing vacuum system |
| 05/28/1997 | EP0776011A2 Magnetic memory and method therefor |
| 05/28/1997 | EP0775957A1 Test pattern generating method and test pattern generating system |
| 05/28/1997 | EP0775952A2 Work supplying method and apparatus to batch process apparatus for semiconductor wafer |
| 05/28/1997 | EP0775931A2 Method for manufacturing liquid crystal display |
| 05/28/1997 | EP0775669A2 Low volatility solvent-based precursors for nanoporous aerogels |
| 05/28/1997 | EP0775566A1 Holding cassette for precision substrates and method for the preparation thereof |
| 05/28/1997 | EP0775370A1 Process for producing a silicon capacitor |
| 05/28/1997 | EP0775367A1 Semiconductor device with integrated rc network and schottky diode |
| 05/28/1997 | EP0775304A1 Method of producing cavity structures |
| 05/28/1997 | EP0689686B1 A thin film mask for use in an x-ray lithographic process and its method of manufacture |
| 05/28/1997 | EP0539533B1 Single wafer robotic package |
| 05/28/1997 | EP0521163B1 Aluminum alloy wiring layer, manufacturing thereof, and aluminum alloy sputtering target |
| 05/28/1997 | DE19605628C1 Circuit for avoiding electrostatic discharge and latch-up |
| 05/28/1997 | CN1150866A Semiconductor device and method of production thereof |
| 05/28/1997 | CN1150865A Semiconductor storage device and method of manufacture of device |