H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/1997
03/26/1997	EP0764968A2 Method for radiofrequency wave etching
03/26/1997	EP0764885A2 Process for positioning of a mask relative to a workpiece and device for executing the process
03/26/1997	EP0764858A2 Device for producing radial polarisation and microlithographic projection illumination arrangement using the same
03/26/1997	EP0764852A2 Process for separate sensing of charges in semiconductors and appliance for the same
03/26/1997	EP0764726A1 Method for tuning barrel reactor purge system
03/26/1997	EP0764704A1 Use of preceramic polymers as electronic adhesives
03/26/1997	EP0764478A1 Method of and apparatus for cleaning workpiece
03/26/1997	EP0764352A1 Microelectronic contacts and assemblies
03/26/1997	EP0764345A1 Multi-layer lead frame
03/26/1997	EP0764344A1 Semifinished product for electronic or opto-electronic semiconductor component
03/26/1997	EP0764342A1 Electrostatic chuck
03/26/1997	EP0764322A1 Dna optical storage
03/26/1997	EP0764148A1 Process for preparing biscyanoacrylates
03/26/1997	EP0763989A1 Triple zone mascara brush
03/26/1997	EP0691035B1 Linear voltage-controlled resistance element
03/26/1997	EP0674805B1 Process for carrying out stable low pressure discharge processes
03/26/1997	EP0606220B1 Method of manufacturing a semiconductor accelerometer
03/26/1997	CN1146076A Semiconductor device
03/26/1997	CN1146073A Structure and production of silicone semiconductor diode and chip and their insulator
03/26/1997	CN1146072A Method for fabricating semiconductor device
03/26/1997	CN1146071A Method for forming fine pattern of semiconductor device
03/26/1997	CN1146070A Method for fabricating semiconductor device having fine contact holes
03/26/1997	CN1146068A Method for forming triple well
03/26/1997	CN1146052A Method for programming nonvolatile memory
03/26/1997	CN1034369C Continuous film feed device and method therefor
03/25/1997	US5615377 Method of simulating hot carrier deterioration of a P-MOS transistor
03/25/1997	US5615242 Charge transfer apparatus with output gate and driving method thereof
03/25/1997	US5615216 Semiconductor integrated circuit including test circuit
03/25/1997	US5615166 Semiconductor memory integrated circuit
03/25/1997	US5615156 Semiconductor memory device having plural memory mats with centrally located reserve bit or word lines
03/25/1997	US5615147 Low voltage one transistor flash EEPROM cell using Fowler-Nordheim programming and erase
03/25/1997	US5615145 Semiconductor memory with ferroelectric capacitors
03/25/1997	US5615144 Non-volatile ferroelectric memory device with leakage preventing function
03/25/1997	US5615089 BGA semiconductor device including a plurality of semiconductor chips located on upper and lower surfaces of a first substrate
03/25/1997	US5615047 Illumination apparatus and exposure apparatus using it
03/25/1997	US5615012 Method for detecting obstructed nozzles
03/25/1997	US5614990 For imaging features on a semiconductor wafer
03/25/1997	US5614984 Distance measuring device
03/25/1997	US5614841 Frequency multiplier using XOR/NXOR gates which have equal propagation delays
03/25/1997	US5614767 Alignment accuracy check pattern
03/25/1997	US5614765 Integrated circuit semiconductor device
03/25/1997	US5614762 Field effect transistors having comb-shaped electrode assemblies
03/25/1997	US5614760 Tape carrier package semiconductor device
03/25/1997	US5614758 Fully walled emitter-base in a bipolar transistor
03/25/1997	US5614756 Metal-to-metal antifuse with conductive
03/25/1997	US5614755 High voltage Shottky diode
03/25/1997	US5614753 Semiconductor device with leakage current prevention
03/25/1997	US5614752 Semiconductor device containing external surge protection component
03/25/1997	US5614751 Edge termination structure for power MOSFET
03/25/1997	US5614750 Buried layer contact for an integrated circuit structure
03/25/1997	US5614749 Silicon carbide trench MOSFET
03/25/1997	US5614748 Nonvolatile memory device and process for production of the same
03/25/1997	US5614746 Structure and process of manufacture of split gate flash memory cell
03/25/1997	US5614745 Contact structure between two conductive layers in semiconductor device and method of manufacturing the same
03/25/1997	US5614743 Microwave integrated circuit (MIC) having a reactance element formed on a groove
03/25/1997	US5614742 Micromechanical accelerometer with plate-like semiconductor wafers
03/25/1997	US5614739 HIGFET and method
03/25/1997	US5614733 Semiconductor device having crystalline thin film transistors
03/25/1997	US5614732 Gate insulated field effect transistors and method of manufacturing the same
03/25/1997	US5614731 Thin-film transistor element having a structure promoting reduction of light-induced leakage current
03/25/1997	US5614729 Top gate thin-film transistor
03/25/1997	US5614728 Thin film transistor and fabrication method thereof
03/25/1997	US5614447 Method for heat-treating a semiconductor body
03/25/1997	US5614446 Holding apparatus, a metal deposition system, and a wafer processing method which preserve topographical marks on a semiconductor wafer
03/25/1997	US5614445 Method of dicing semiconductor wafer
03/25/1997	US5614444 Method of using additives with silica-based slurries to enhance selectivity in metal CMP
03/25/1997	US5614443 Method of producing a frame made of connected semiconductor die mounting substrates
03/25/1997	US5614442 Method of making flip-chip microwave integrated circuit
03/25/1997	US5614439 Method of making a planar wiring in an insulated groove using alkylaluminum hydride
03/25/1997	US5614438 Lithium strontium cobalt oxide
03/25/1997	US5614437 Method for fabricating reliable metallization with Ta-Si-N barrier for semiconductors
03/25/1997	US5614435 Quantum dot fabrication process using strained epitaxial growth
03/25/1997	US5614434 Integrated circuits
03/25/1997	US5614432 Method for manufacturing LDD type MIS device
03/25/1997	US5614431 Method of making buried strap trench cell yielding an extended transistor
03/25/1997	US5614430 Anti-punchthrough ion implantation for sub-half micron channel length MOSFET devices
03/25/1997	US5614429 Method for fabricating EEPROM with control gate in touch with select gate
03/25/1997	US5614428 Process and structure for reduction of channeling during implantation of source and drain regions in formation of MOS integrated circuit structures
03/25/1997	US5614426 Method of manufacturing semiconductor device having different orientations of crystal channel growth
03/25/1997	US5614425 Method of fabricating a bipolar transistor operable at high speed
03/25/1997	US5614423 Method for fabricating a heterojunction bipolar transistor
03/25/1997	US5614422 Process for doping two levels of a double poly bipolar transistor after formation of second poly layer
03/25/1997	US5614421 Method of fabricating junction termination extension structure for high-voltage diode devices
03/25/1997	US5614420 Method of preventing mask tone error
03/25/1997	US5614351 Radiation-curable mixture, and radiation-sensitive recording material produced therefrom for high-energy radiation
03/25/1997	US5614335 Blanks for halftone phase shift photomasks, halftone phase shift photomasks, and methods for fabricating them
03/25/1997	US5614316 Adhesive tape for electronic parts and liquid adhesive
03/25/1997	US5614291 Semiconductor device and method of manufacturing the same
03/25/1997	US5614277 Monolithic electronic modules--fabrication and structures
03/25/1997	US5614271 Baking polysilazane coating
03/25/1997	US5614270 Silicon dioxide film on substrate by treatment with oxygen and hydrogen
03/25/1997	US5614252 Integrated circuits
03/25/1997	US5614249 Leak detection system for a gas manifold of a chemical vapor deposition apparatus
03/25/1997	US5614247 Apparatus for chemical vapor deposition of aluminum oxide
03/25/1997	US5614131 Method of making an optoelectronic device
03/25/1997	US5614070 Sputtering apparatus for forming metal lines
03/25/1997	US5614060 Process and apparatus for etching metal in integrated circuit structure with high selectivity to photoresist and good metal etch residue removal
03/25/1997	US5614055 High density plasma CVD and etching reactor
03/25/1997	US5614043 Method for fabricating electronic components incorporating ceramic-metal composites
03/25/1997	US5614026 Showerhead for uniform distribution of process gas

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