| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 03/25/1997 | US5614025 Plasma processing apparatus |
| 03/25/1997 | US5614019 Masking, etching, vapor deposition |
| 03/25/1997 | US5614018 Doped barium strontium titanate layer |
| 03/25/1997 | US5613861 Photolithographically patterned spring contact |
| 03/25/1997 | US5613821 Cluster tool batchloader of substrate carrier |
| 03/25/1997 | US5613296 Method for concurrent formation of contact and via holes |
| 03/25/1997 | CA2080094C Multilayer circuit board with repaired i/o pin and process for repairing i/o pin on multilayer circuit board |
| 03/25/1997 | CA2066125C Electronic circuits and their fabrication |
| 03/20/1997 | WO1997010688A1 Method and apparatus for plasma cvd |
| 03/20/1997 | WO1997010614A1 Enhanced electromigration lifetime of metal interconnection lines |
| 03/20/1997 | WO1997010613A1 Grinding method of grinding device |
| 03/20/1997 | WO1997010612A1 Damascene process for reduced feature size |
| 03/20/1997 | WO1997010606A1 A polysilicon resistor and a method of manufacturing it |
| 03/20/1997 | WO1997010282A1 Beta-substituted organosilsesquioxanes and use thereof |
| 03/20/1997 | WO1997010088A2 Process for improving the contrast in the structuring of 3-dimensional surfaces |
| 03/20/1997 | WO1997010082A1 Wafer gripper |
| 03/20/1997 | WO1997010079A1 Concentric dual elbow |
| 03/20/1997 | WO1997006559A3 Process for producing a non-volatile memory cell |
| 03/20/1997 | WO1997006554A3 Semiconductor device provided with transparent switching element |
| 03/20/1997 | WO1997004478A3 Plasma treatment apparatus for large area substrates |
| 03/20/1997 | WO1996038858A3 Method and probe card for testing semiconductor devices |
| 03/20/1997 | DE19638180A1 Semiconductor on insulator memory device, e.g. DRAM |
| 03/20/1997 | DE19638160A1 Semiconductor component, e.g. DRAM, manufacturing method |
| 03/20/1997 | DE19637458A1 Verfahren zur Herstellung eines Zwischenschichtisolationsfilms einer Halbleitervorrichtung A process for preparing an interlayer insulation film of a semiconductor device |
| 03/20/1997 | DE19637189A1 Semiconductor component, e.g. MISFET |
| 03/20/1997 | DE19534780A1 Verfahren zum Erzeugen sehr kleiner Strukturweiten auf einem Halbleitersubstrat A method for generating very small feature sizes on a semiconductor substrate |
| 03/20/1997 | DE19534574A1 Dotierverfahren zur Herstellung von Homoübergängen in Halbleitersubstraten Doping for the production of homo-junctions in semiconductor substrates |
| 03/20/1997 | DE19534515A1 Identification of faulty parts in a complete layout of components |
| 03/20/1997 | DE19522923A1 Mfr. of crystalline, amorphous and epitaxial semiconductor layers on substrate |
| 03/20/1997 | CA2229451A1 A polysilicon resistor and a method of manufacturing it |
| 03/19/1997 | EP0763894A2 Semiconductor device controllable by field effect with several temperature sensors |
| 03/19/1997 | EP0763855A2 Asymmetrical FET and method of fabrication |
| 03/19/1997 | EP0763851A2 Method of forming an asymmetric, graded-channel semiconductor device using a disposable spacer |
| 03/19/1997 | EP0763850A1 Etch process for forming contacts over a silicide layer |
| 03/19/1997 | EP0763849A1 Process for preparing thin semiconductor films |
| 03/19/1997 | EP0763848A2 Refrigeration system and method for cooling a susceptor using a refrigeration system |
| 03/19/1997 | EP0763829A2 Method for programming a nonvolatile memory |
| 03/19/1997 | EP0763790A2 Level shifter capable of stably producing a level shifted voltage |
| 03/19/1997 | EP0763781A2 Antihalation compositions |
| 03/19/1997 | EP0763735A1 Method for analyzing impurities within silicon wafer |
| 03/19/1997 | EP0763259A1 Punch-through field effect transistor |
| 03/19/1997 | EP0763257A2 Method of manufacturing a semiconductor device with a bicmos circuit |
| 03/19/1997 | EP0763256A2 METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE WITH BiCMOS CIRCUIT |
| 03/19/1997 | EP0763255A1 Substrate anchor for undercut silicon on insulator microstructures |
| 03/19/1997 | EP0763149A1 Method and apparatus for low temperature deposition of cvd and pecvd films |
| 03/19/1997 | EP0763147A1 Method and apparatus for producing thin films |
| 03/19/1997 | EP0763146A1 LOW TEMPERATURE PLASMA-ENHANCED FORMATION OF TiN FILMS |
| 03/19/1997 | EP0680624B1 Phase shifting mask structure with absorbing/attenuating sidewalls for improved imaging and method of fabricating phase shifters with absorbing/attenuating sidewalls |
| 03/19/1997 | EP0546178B1 Equipment for neutralizing charged material |
| 03/19/1997 | EP0506926B1 Method and apparatus for forming diffusion junctions in solar cell substrates |
| 03/19/1997 | EP0497896B1 Non-photographic method for patterning organic polymer films |
| 03/19/1997 | EP0382360B1 Event qualified testing architecture for integrated circuits |
| 03/19/1997 | CN1145693A Silicon nitride circuit substrate |
| 03/19/1997 | CN1145692A Clampless vacuum heat transfer station |
| 03/19/1997 | CN1145691A Process and device for chemically treating substrates |
| 03/19/1997 | CN1145534A Flash eeprom cell and manfacturing methods thereof |
| 03/19/1997 | CN1145533A Method for forming electric circuit |
| 03/19/1997 | CN1145532A Method for fabricating field oxide layer in semiconductor device |
| 03/19/1997 | CN1145531A Method and appts. for making silicon chip |
| 03/19/1997 | CN1145530A Method for forming tungsten wiring |
| 03/19/1997 | CN1145529A Method of using Ge for silicon/silicon link and preparing silicon components lining chip |
| 03/19/1997 | CN1145350A Method for reducing shrinkage during firing of ceramic bodies |
| 03/19/1997 | CN1145336A Method of forming boron phosphorous silicate glass film |
| 03/18/1997 | US5613181 Co-sintered surface metallization for pin-join, wire-bond and chip attach |
| 03/18/1997 | US5613140 Quantum dot-tunnel device which can be selectively excited by a first light emitting source and the information thus stored can be read with a second light emitting source |
| 03/18/1997 | US5613077 Method and circuit for communication between a module and a bus controller in a wafer-scale integrated circuit system |
| 03/18/1997 | US5613000 Method and apparatus for changing the data setting modes in a bonding machine |
| 03/18/1997 | US5612914 Asymmetrical non-volatile memory cell, arrays and methods for fabricating same |
| 03/18/1997 | US5612913 Byte erasable EEPROM fully compatible with a single power supply flash-EPROM process |
| 03/18/1997 | US5612886 Method and system for dynamic dispatching in semiconductor manufacturing plants |
| 03/18/1997 | US5612853 Package for a power semiconductor device |
| 03/18/1997 | US5612851 Guard ring electrostatic chuck |
| 03/18/1997 | US5612850 Releasing a workpiece from an electrostatic chuck |
| 03/18/1997 | US5612739 Charge transfer device |
| 03/18/1997 | US5612643 Semiconductor integrated circuit which prevents malfunctions caused by noise |
| 03/18/1997 | US5612633 Circuit for simultaneously inputting and outputting signals on a single wire |
| 03/18/1997 | US5612626 System using induced current for contactless testing of wiring networks |
| 03/18/1997 | US5612575 Method of connecting the output pads on an integrated circuit chip, and multichip module thus obtained |
| 03/18/1997 | US5612574 Semiconductor structures using high-dielectric-constant materials and an adhesion layer |
| 03/18/1997 | US5612573 Electronic package with multilevel connections |
| 03/18/1997 | US5612572 Semiconductor device with an insulation groove |
| 03/18/1997 | US5612569 Semiconductor device |
| 03/18/1997 | US5612565 Semiconductor device having channel boundary with uneven shape |
| 03/18/1997 | US5612563 Vertically stacked vertical transistors used to form vertical logic gate structures |
| 03/18/1997 | US5612561 Involatile semiconductor memory |
| 03/18/1997 | US5612560 Electrode structure for ferroelectric capacitors for integrated circuits |
| 03/18/1997 | US5612559 Semiconductor device having pillar shaped transistor and a method for manufacturing the same |
| 03/18/1997 | US5612558 Hemispherical grained silicon on refractory metal nitride |
| 03/18/1997 | US5612557 Semiconductor device having an inter-layer insulating film disposed between two wiring layers |
| 03/18/1997 | US5612556 Monolithic integration of microwave silicon devices and low loss transmission lines |
| 03/18/1997 | US5612553 Semiconductor integrated circuit and method of fabricating same and method of arranging cells |
| 03/18/1997 | US5612551 AlPSb/InP single heterojunction bipolar transistor on InP substrate for high-speed, high-power applications |
| 03/18/1997 | US5612546 Thin film transistor structure |
| 03/18/1997 | US5612539 Method of evaluating lifetime related quality of semiconductor surface |
| 03/18/1997 | US5612514 For providing electronic/support connections for integrated circuits |
| 03/18/1997 | US5612513 Article and method of manufacturing an enclosed electrical circuit using an encapsulant |
| 03/18/1997 | US5612403 Low temperature flexible die attach adhesive and articles using same |
| 03/18/1997 | US5612304 Mixture includes alkanolamine, amino acid derivative, and polar solvent; photoresist strippers; corrosion resistance |
| 03/18/1997 | US5612260 Oxidation of silicon carbide to form silicon dioxide |
| 03/18/1997 | US5612259 Method for manufacturing a semiconductor device wherein a semiconductor chip is mounted on a lead frame |