Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
04/1997
04/17/1997WO1997014180A1 Semiconductor processing using vapor mixtures
04/17/1997WO1997014179A1 Semiconductor processing system with gas curtain
04/17/1997WO1997014178A1 Method and apparatus for chemical processing semiconductor wafers
04/17/1997WO1997014175A2 Novel shallow trench isolation technique
04/17/1997WO1997013947A1 Vacuum actuated mechanical latch
04/17/1997WO1997013889A1 Improved polishing slurries and methods for their use
04/17/1997WO1997013710A1 300mm MICROENVIRONMENT POD WITH DOOR ON SIDE
04/17/1997WO1997013709A1 Shipping and transport cassette with kinematic coupling
04/17/1997WO1997013708A1 300 mm SHIPPING CONTAINER
04/17/1997WO1997013646A1 Cleaning method
04/17/1997WO1997013590A1 Method and apparatus for chemical delivery through the brush
04/17/1997WO1997013586A1 Flip chip underfill system and method
04/17/1997WO1996039710A3 Method for etching photolithographically produced quartz crystal blanks for singulation
04/17/1997WO1996038857A3 Magnetically enhanced radio frequency reactive ion etching method and apparatus
04/17/1997WO1996029629A3 Microcontact printing on surfaces and derivative articles
04/17/1997DE19641857A1 Safety fuse circuit for semiconductor integrated circuit in VHS video recorder
04/17/1997DE19641420A1 Threshold voltage adjusting circuit
04/17/1997DE19640561A1 Insulated gate semiconductor device e.g. power MOSFET or IGBT
04/17/1997DE19639634A1 Transportvorrichtung für ein Transferelement in einer Speichereinrichtung für die Herstellung von Halbleitervorrichtungen Transport device for a transfer element in a memory device for the production of semiconductor devices,
04/17/1997DE19627838A1 Epitaxial wafer for LED manufacture
04/17/1997DE19623846A1 SOI-MOS transistor structure
04/17/1997DE19613265C1 Circuit element, e.g. laser diode
04/17/1997DE19539392A1 Fluxless soldering esp. flip-chip bonding apparatus
04/17/1997DE19538020A1 Large diameter single crystal silicon rod growth
04/17/1997DE19538005A1 Verfahren zum Erzeugen einer Grabenisolation in einem Substrat A method for generating a grave insulation in a substrate
04/17/1997DE19537879A1 Apparatus for treatment of substrates
04/17/1997CA2218384A1 300 mm shipping container
04/16/1997EP0768762A1 Output circuit
04/16/1997EP0768718A2 Short channel field effect transistor
04/16/1997EP0768716A2 Bipolar transistor and fabrication method thereof
04/16/1997EP0768715A2 Graded-channel semiconductor device and method of manufacturing the same
04/16/1997EP0768714A1 Construction method for power devices with deep edge ring
04/16/1997EP0768713A2 Circuit including protection means
04/16/1997EP0768712A2 Bump-type contact head for a circuit board and semiconductor module using the same
04/16/1997EP0768710A2 Electrode or wiring for a semiconductor device, an active matrix substrate and process for production thereof
04/16/1997EP0768709A2 A BiCMOS process with low base recombination current bipolar transistor
04/16/1997EP0768708A2 Method for forming bumps on substrates for electronic components
04/16/1997EP0768707A2 Molecular beam epitaxy process with growing layer thickness control
04/16/1997EP0768706A2 Clamping structure in air-tightly sealable container
04/16/1997EP0768705A2 Stage apparatus and linear motor, and exposure apparatus and device production method using the stage apparatus
04/16/1997EP0768704A2 A substrate cleaning method and a substrate cleaning apparatus
04/16/1997EP0768702A1 Gas injection slit nozzle for a plasma process reactor
04/16/1997EP0768701A1 A process for device fabrication in which the plasma etch is controlled by monitoring optical emission
04/16/1997EP0768676A2 A semiconductor memory with sequential clocked access codes for test mode entry
04/16/1997EP0768673A2 Improvements in or relating to integrated circuits
04/16/1997EP0768572A1 Photoresist composition
04/16/1997EP0768534A1 Method for fabrication of probe structure and circuit substrate therefor
04/16/1997EP0768532A2 Acceleration sensor and method for producing the same, and shock detecting device using the same
04/16/1997EP0768525A2 System for monitoring chamber exit gases by means of absorption spectroscopy, and semiconductor processing system incorporating the same
04/16/1997EP0768512A2 A process for fabricating a device using polarized light to determine film thickness
04/16/1997EP0768389A1 Pyrolytic boron nitride compact and method of manufacture
04/16/1997EP0768388A2 Method and apparatus for forming amorphous carbon film
04/16/1997EP0768352A1 Material for forming silica-base coated insulation film, process for producing the material, silica-base insulation film, semiconductor device, and process for producing the device
04/16/1997EP0768109A2 Exhaust gas treatment unit and process
04/16/1997EP0767972A1 Linear capacitors for high temperature applications
04/16/1997EP0767970A2 Method of manufacturing an electronic multilayer component
04/16/1997EP0767969A1 Preparation of semiconductor substrates
04/16/1997EP0767964A1 Anisotropically conducting adhesive and process for its production
04/16/1997EP0739542A4 Input/output transistors with optimized esd protection
04/16/1997EP0710161A4 Post treatment of a coated substrate with a gas containing excited halogen to remove residues
04/16/1997EP0676087A4 Fabricating stacks of ic chips by segmenting a larger stack.
04/16/1997EP0588992B1 Device for processing substrates within a plasma
04/16/1997EP0245515B1 Semiconductor device
04/16/1997CN1147806A Novel silicon carbide dummy wafer
04/16/1997CN1147805A Coating of substrates
04/16/1997CN1147782A Semiconductor wafer polishing apparatus and method
04/16/1997CN1147753A Electron source for multibeam electron lithography system
04/16/1997CN1147705A Nonradiative dielectric line apparatus and instrument for measuring characteristics of circuit board
04/16/1997CN1147696A Circuit for adjusting circuit element value in semiconductor integrated circuit
04/16/1997CN1147695A Semiconductor integrated circuit device and its producing method
04/16/1997CN1147694A Method for forming capacitor in memory cell in dynamic random access memory device
04/16/1997CN1147692A Method of forming metal wirings on semiconductor substrate by dry etching
04/16/1997CN1147691A Improvement in formation of gate electrode
04/16/1997CN1147690A Method and apparatus for in situ removal of contaminants from ion beam neutralization and implantation apparatuses
04/16/1997CN1147675A Semiconductor memory device having circuit array structure for fast operation
04/16/1997CN1147674A Semiconductor memory device and method of manufacturing the same
04/16/1997CN1147570A System and method for controlling growth of silicon crystal
04/16/1997CN1034617C Internal-connection amorphous silicon solar cell and manufacture method
04/15/1997US5621822 Method of detecting focus position of object from variable gray level image of object
04/15/1997US5621742 Method and apparatus for testing semiconductor integrated circuit devices
04/15/1997US5621741 Method and apparatus for testing terminal connections of semiconductor integrated circuits
04/15/1997US5621689 Nonvolatile semiconductor memory device having controlled charge pump load
04/15/1997US5621683 Semiconductor memory with non-volatile memory transistor
04/15/1997US5621682 Memory system
04/15/1997US5621681 Ferroelectric film used as gate insulating film; matched well with silicon in terms of lattice constant and thermal expansion coefficient
04/15/1997US5621679 Semiconductor memory device for achieving high bandwidth and method for arranging signal lines therefor
04/15/1997US5621668 Prediction control method and a prediction control device
04/15/1997US5621653 Method of and an apparatus for converting layout data in conductive portions
04/15/1997US5621606 Capacitor utilizing high dielectric constant material
04/15/1997US5621605 Neutralizing apparatus for charged body
04/15/1997US5621556 Method of manufacturing active matrix LCD using five masks
04/15/1997US5621530 Apparatus and method for verifying the coplanarity of a ball grid array
04/15/1997US5621521 Checking apparatus for array electrode substrate
04/15/1997US5621499 Scanning exposure apparatus
04/15/1997US5621347 Electronic circuit having electrically isolated digital and analog circuitry
04/15/1997US5621333 For use in testing an electronic device
04/15/1997US5621247 Having resistance varying member between two conductive materials
04/15/1997US5621242 Semiconductor package having support film formed on inner leads
04/15/1997US5621241 Enhancement in throughput and planarity during CMP using a dielectric stack containing HDP-SiO2 films
04/15/1997US5621239 Semiconductor device