| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 03/11/1997 | US5609720 Thermal control of semiconductor wafer during reactive ion etching |
| 03/11/1997 | US5609691 Plasma CVD apparatus for forming a thin film of uniform thickness |
| 03/11/1997 | US5609690 Vacuum plasma processing apparatus and method |
| 03/11/1997 | US5609689 Vacuum process apparaus |
| 03/11/1997 | US5609688 Apparatus for producing semiconductor device |
| 03/11/1997 | US5609514 Wafer chamfering machine |
| 03/11/1997 | US5609511 Polishing method |
| 03/11/1997 | US5609459 For batch loading semiconductor wafers |
| 03/11/1997 | US5609376 Wafer carrier handle assembly |
| 03/11/1997 | US5609287 Solder material, junctioning method, junction material, and semiconductor device |
| 03/11/1997 | US5609148 Method and apparatus for dicing semiconductor wafers |
| 03/11/1997 | US5608974 Steam drying apparatus, cleaning apparatus incorporating the same, and steam drying process |
| 03/11/1997 | US5608943 Apparatus for removing process liquid |
| 03/06/1997 | WO1997008925A1 Method of establishing a connection between at least two electrical conductors, one of which is mounted on a supporting substrate |
| 03/06/1997 | WO1997008755A1 Off-state gate-oxide field reduction in cmos |
| 03/06/1997 | WO1997008749A1 Deformable substrate assembly for adhesively bonded electronic device |
| 03/06/1997 | WO1997008747A1 Method of producing an eeprom semiconductor structure |
| 03/06/1997 | WO1997008746A1 Container for housing semiconductor wafers, structure for housing semiconductor wafers, and method of putting in and taking out semiconductor wafers |
| 03/06/1997 | WO1997008745A1 Method and apparatus for peeling protective adhesive tape from semiconductor wafer |
| 03/06/1997 | WO1997008744A1 Laminate for forming ohmic electrode and ohmic electrode |
| 03/06/1997 | WO1997008743A1 Low mass susceptor |
| 03/06/1997 | WO1997008742A1 Procedure for drying silicon |
| 03/06/1997 | WO1997008741A1 Suction plate for wafer |
| 03/06/1997 | WO1997008734A1 Plasma reactor having an inductive antenna coupling power through a parallel plate electrode |
| 03/06/1997 | WO1997008700A1 Reduced area sense amplifier isolation layout in a dynamic ram architecture |
| 03/06/1997 | WO1997008589A1 Film-stripping process |
| 03/06/1997 | WO1997008536A1 Ultrafast optical technique for the characterization of altered materials |
| 03/06/1997 | WO1997008362A1 Method and apparatus for low energy electron enhanced etching of substrates |
| 03/06/1997 | WO1997008361A1 Surface treatment apparatus using gas jet |
| 03/06/1997 | WO1997004476A3 Method and apparatus for semiconductor etching and stripping |
| 03/06/1997 | WO1997003236A3 System and method for thermal processing of a semiconductor substrate |
| 03/06/1997 | DE19631389A1 Monolithischer spannungsvariabler Kondensator Monolithic voltage variable capacitor |
| 03/06/1997 | DE19609449A1 HF circuitry with silicon substrate with specific resistance of more than 100 ohms per cm |
| 03/06/1997 | DE19548056C1 Gate electrode mfg. method for MOS structure |
| 03/06/1997 | DE19532251A1 Apparatus for diffusion soldering |
| 03/06/1997 | DE19532250A1 Diffusion soldering of a multi-layered structure |
| 03/06/1997 | DE19531970A1 Verfahren zur Herstellung einer Verbindung zwischen zumindest zwei elektrischen Leitern, von denen einer auf einem Trägersubstrat angeordnet ist A method for producing a connection between at least two electrical conductors, one of which is arranged on a carrier substrate |
| 03/06/1997 | DE19524001A1 Verfahren zum Verpacken einer druckempfindlichen elektronischen Schaltung mit einer allseitig abdichtenden Schutzumhäusung A method of packaging a pressure-sensitive electronic circuitry on all sides with a sealing Schutzumhäusung |
| 03/06/1997 | CA2228168A1 Procedure for drying silicon |
| 03/06/1997 | CA2226520A1 Method for film stripping |
| 03/06/1997 | CA2203557A1 Multi-layered structure for fabricating an ohmic electrode and ohmic electrode |
| 03/06/1997 | CA2184435A1 Reflow soldering to mounting pads with vent channels to avoid skewing |
| 03/05/1997 | EP0760529A2 Lateral IGBT |
| 03/05/1997 | EP0760528A2 Semiconductor device on silicium base with a high blocking voltage edge termination |
| 03/05/1997 | EP0760515A2 Method for reading and restoring data in a data storage element |
| 03/05/1997 | EP0760400A2 Process for producing bismuth compounds, and bismuth compounds |
| 03/05/1997 | EP0760167A1 Semiconductor structure with one or more lateral highly blocking semiconductor components |
| 03/05/1997 | EP0760166A1 Gain cell dram structure and process for producing the same |
| 03/05/1997 | EP0760165A1 Electronic device comprising means for compensating an undesired capacitance |
| 03/05/1997 | EP0760162A1 Method for production of a structure with a low level of dislocations and having an oxide layer buried in a semiconductor substrate |
| 03/05/1997 | EP0760161A1 Process for applying a metallisation layer on an insulator and for piercing through-holes in said insulator by means of a single mask |
| 03/05/1997 | EP0760159A1 Fast magnetic scanning of heavy ion beams |
| 03/05/1997 | EP0760148A1 Electronic devices comprising an array |
| 03/05/1997 | EP0760020A1 Device having a switch comprising a chromium layer and method for depositing chromium layers by sputtering |
| 03/05/1997 | EP0759893A1 Coating of substrates |
| 03/05/1997 | EP0759845A1 Method and installation for encasing articles |
| 03/05/1997 | EP0759830A1 Device for holding and guiding a joining component |
| 03/05/1997 | EP0557318B1 Method of manufacturing semiconductor elements, in particular diodes |
| 03/05/1997 | EP0514547B1 SEMICONDUCTOR MEMORY HAVING A FERROELECTRIC CAPACITOR AND A TiON BARRIER FILM |
| 03/05/1997 | EP0388790B1 Method and apparatus for testing high pin count integrated circuits |
| 03/05/1997 | EP0354226B1 Process for forming isolation regions in a semiconductor substrate |
| 03/05/1997 | CN1144573A Stabilized amorphous silicon and devices containing same |
| 03/05/1997 | CN1144406A Planar dielectric line and integrated circuit using the same |
| 03/05/1997 | CN1144403A Semiconductor diode consisting of groove form casing component and packaging method |
| 03/05/1997 | CN1144402A High frequency static induction transistor having high output |
| 03/05/1997 | CN1144401A Semiconductor device and method for fabricating the same |
| 03/05/1997 | CN1144400A Semiconductor device having bond pad and process for forming the device |
| 03/05/1997 | CN1144399A Method of cleaning substrate |
| 03/05/1997 | CN1144398A Rotary type apparatus for processing semiconductor wafers and method of processing semiconductor wafers |
| 03/05/1997 | CN1144397A Method of manufacturing semiconductor device |
| 03/05/1997 | CN1144396A Fabricating method of semiconductor device and semiconductor device |
| 03/05/1997 | CN1144344A Method for forming photoresist pattern |
| 03/05/1997 | CN1034198C Semiconductor device having double-layered silicide structure |
| 03/04/1997 | WO1997012162A1 Feed screw and method of forming film of lubricant |
| 03/04/1997 | USH1637 Laser-assisted fabrication of bipolar transistors in silicon-on-sapphire (SOS) |
| 03/04/1997 | US5608749 Semiconductor laser diode and semiconductor laser diode array including plated heat sink (PHS) electrode |
| 03/04/1997 | US5608736 Method and apparatus for a universal programmable boundary scan driver/sensor circuit |
| 03/04/1997 | US5608638 Device and method for automation of a build sheet to manufacture a packaged integrated circuit |
| 03/04/1997 | US5608576 Projection method and projection system and mask therefor |
| 03/04/1997 | US5608575 Image projection method and semiconductor device manufacturing method using the same |
| 03/04/1997 | US5608569 Method for manufacturing an array of thin film actuated mirrors |
| 03/04/1997 | US5608557 Circuitry with gate line crossing semiconductor line at two or more channels |
| 03/04/1997 | US5608492 Scanning type exposure apparatus and method and device manufacturing method |
| 03/04/1997 | US5608385 Device for determining state of electricity generation of solar battery |
| 03/04/1997 | US5608340 Four-terminal semiconductor device |
| 03/04/1997 | US5608338 Evaluating the lifetime and reliability of a TFT in a stress test using gate voltage and temperature measurements |
| 03/04/1997 | US5608337 Method and apparatus of testing an integrated circuit device |
| 03/04/1997 | US5608335 Method for the testing of integrated circuit chips and corresponding integrated circuit device |
| 03/04/1997 | US5608334 Device testing system with cable pivot and method of installation |
| 03/04/1997 | US5608314 Incremental output current generation circuit |
| 03/04/1997 | US5608266 Thin film for a multilayer semiconductor device for improving thermal stability and a method thereof |
| 03/04/1997 | US5608265 Encapsulated semiconductor device package having holes for electrically conductive material |
| 03/04/1997 | US5608258 MOS precision capacitor with low voltage coefficient |
| 03/04/1997 | US5608257 Fuse element for effective laser blow in an integrated circuit device |
| 03/04/1997 | US5608256 Recessed sidewall-sealed and sandwiched poly-buffered LOCOS isolation regions, VLSI structures and methods |
| 03/04/1997 | US5608254 Method for forming electrical contact to the optical coating of an infrared detector using conductive epoxy |
| 03/04/1997 | US5608253 Advanced transistor structures with optimum short channel controls for high density/high performance integrated circuits |
| 03/04/1997 | US5608252 Semiconductor with implanted dielectric layer having patched pin-holes |
| 03/04/1997 | US5608251 Thin film semiconductor integrated circuit and method of fabricating the same |
| 03/04/1997 | US5608250 Volatile memory cell with interface charge traps |