Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/1997
06/05/1997WO1997020345A1 Manufacturing process for thin-film circuits comprising integrated capacitors
06/05/1997WO1997020343A1 Semiconductor device manufacturing method, chemical-mechanical polishing method, and device used for the polishing method
06/05/1997WO1997020342A1 Forming contacts on semiconductor substrates for radiation detectors and imaging devices
06/05/1997WO1997020341A1 Thermal processing apparatus and process
06/05/1997WO1997020337A2 Read-only memory cell array and method for the fabrication thereof
06/05/1997WO1997020336A2 Process for producing an integrated circuit device with at least one mos transistor
06/05/1997WO1997020254A1 Photosensitive composition
06/05/1997WO1997019868A1 Aligner for a substrate carrier
06/05/1997WO1997017720A3 Circuit structure having a flip-mounted matrix of devices
06/05/1997DE19650331A1 Verfahren zur Herstellung eines Halbleiterbauelementes sowie Halbleiterbauelement A process for producing a semiconductor device and semiconductor device
06/05/1997DE19649917A1 Semiconductor device insulation by field oxide
06/05/1997DE19649893A1 Conductive adhesive for bonding e.g. semiconductors to circuit boards
06/05/1997DE19649686A1 High voltage MOSFET structure for smart power IC
06/05/1997DE19649640A1 Vorrichtung und Verfahren zum Erfassen von Partikeln in einer Prozesskammer einer Ionenimplantationsanlage Apparatus and method for detecting particles in a process chamber of an ion implanter
06/05/1997DE19649447A1 Vinyl-4-t-butoxycarbonyloxybenzal-vinylalkohol-vinylacetat-Copolymer, Vinyl-4-t-butoxycarbonyloxybenzal-vinyl-4- hydroxybenzal-vinylalkohol-vinylacetat und deren Herstellungsverfahren Vinyl 4-t-butoxycarbonyloxybenzal-vinyl alcohol-vinyl acetate copolymer, vinyl 4-t-butoxycarbonyloxybenzal-vinyl-4-hydroxybenzal-vinyl alcohol-vinyl acetate and their method of preparation
06/05/1997DE19648949A1 Test card for integrated circuits measuring low current levels
06/05/1997DE19648475A1 Micro-contact pin structure for IC test card
06/05/1997DE19648062A1 Belichtungsgerät zum Bestrahlen von Dice-Band und Verfahren zu dessen Belichtung An exposure apparatus for irradiating dicing tape and method of exposure
06/05/1997DE19641838A1 Abschlußstruktur für Halbleiterbauteile sowie Verfahren zur Herstellung derartiger Abschlußstrukturen Termination structure for semiconductor devices as well as methods for preparing such termination structures
06/05/1997DE19640384A1 Highly integrated semiconductor memory manufacture
06/05/1997DE19629774A1 Semiconductor device
06/05/1997DE19626853A1 Wafer holder with pair of lateral holder straps
06/05/1997DE19619737A1 Semiconductor device e.g. DRAM with fuse
06/05/1997DE19615740A1 Diamond-coated composite structure for electronics
06/05/1997DE19546140A1 Photoempfindliche Zusammensetzung A photosensitive composition
06/05/1997DE19544929A1 Verfahren und Vorrichtung zum flußmittelfreien Aufbringen eines Lötmittels auf ein Substrat oder einen Chip Method and apparatus for fluxless applying a solder to a substrate or a chip
06/05/1997DE19544659A1 Semiconductor device with Zener diode
06/05/1997DE19544327A1 Festwert-Speicherzellenanordnung und Verfahren zu deren Herstellung Read-only memory cell arrangement, and processes for their preparation
06/05/1997DE19544326A1 Halbleiterbauelement mit Schottkykontakt A semiconductor device comprising Schottky
06/05/1997CA2238833A1 Photosensitive composition
06/04/1997EP0777329A2 A BiMOS logic circuit directly controllable by a CMOS block formed on same IC chip
06/04/1997EP0777274A1 A high density interconnected circuit module with a compliant layer as part of a stress-reducing molded substrate
06/04/1997EP0777273A2 Semiconductor device
06/04/1997EP0777272A2 Semiconductor device
06/04/1997EP0777269A2 MOS transistor and fabrication process therefor
06/04/1997EP0777268A2 Integrated circuit fabrication
06/04/1997EP0777267A1 Oxide etch process with high selectivity to nitride suitable for use on surfaces of uneven topography
06/04/1997EP0777266A1 Polishing method, semiconductor device fabrication method, and semiconductor fabrication apparatus
06/04/1997EP0777265A2 Method and device for dissolving surface layer of semiconductor substrate
06/04/1997EP0777264A1 Semiconductor wafer alignment member and clamp ring
06/04/1997EP0777263A2 Method and apparatus for alignment and bonding
06/04/1997EP0777262A1 Wafer heater assembly
06/04/1997EP0777259A1 Apparatus for delivering fluid to a point of use location
06/04/1997EP0777258A2 Self-cleaning plasma processing reactor
06/04/1997EP0777256A2 Deceleration after mass selection for ion implantation.
06/04/1997EP0777147A1 Method of forming a pattern and projecting exposure apparatus
06/04/1997EP0776997A1 Device and method for changing czochralski crucible rotation rate
06/04/1997EP0776991A1 Plasma annealing of thin films
06/04/1997EP0776990A1 Substrate support apparatus for a deposition chamber
06/04/1997EP0776988A2 Temperature regulation apparatus
06/04/1997EP0776730A1 Workpiece retaining device and method for producing the same
06/04/1997EP0776725A1 Method of marking works
06/04/1997EP0776571A1 Method of operating a ccd imager, and ccd imager suitable for the implementation of such a method
06/04/1997EP0776527A1 Electrostatic discharge protection circuit
06/04/1997EP0776256A1 Stainless steel acid treatment
06/04/1997EP0554246B1 Cvd of metal films from beta-diketonate complexes
06/04/1997CN1151086A Stacked capacitor having corrugated electrode
06/04/1997CN1151085A Semiconductor device and process for fabricating the same
06/04/1997CN1151034A Photolithography method and photolithography system for performing method
06/04/1997CN1035090C Switching transistor circuit arrangement
06/04/1997CN1035087C Method of manufacturing superconducting circuitous pattern
06/03/1997US5636258 In-situ temperature measurement using X-ray diffraction
06/03/1997US5636256 Apparatus used for total reflection fluorescent X-ray analysis on a liquid drop-like sample containing very small amounts of impurities
06/03/1997US5636172 Reduced pitch laser redundancy fuse bank structure
06/03/1997US5636160 Nonvolatile semiconductor memory having a stress relaxing voltage applied to erase gate during data write
06/03/1997US5636159 Magnetoresistive memory using large fractions of memory cell films for data storage
06/03/1997US5636158 Irregular pitch layout for a semiconductor memory device
06/03/1997US5636127 Method and apparatus for carrying and locating sheet frame
06/03/1997US5636115 Voltage booster circuit
06/03/1997US5636098 Barrier seal for electrostatic chuck
06/03/1997US5636005 Optical projection aligner equipped with rotatable fly-eye lens unit
06/03/1997US5636000 Projection optical system and projection exposure apparatus using the same
06/03/1997US5635892 High Q integrated inductor
06/03/1997US5635854 Programmable logic integrated circuit including verify circuitry for classifying fuse link states as validly closed, validly open or invalid
06/03/1997US5635850 Intelligent test line system
06/03/1997US5635849 Miniature probe positioning actuator
06/03/1997US5635823 Current detector circuit
06/03/1997US5635822 Safeguard for integrated power stages employing multiple bond-wires to a current lead of the package
06/03/1997US5635774 Zero power latchup suppression circuit
06/03/1997US5635765 Semiconductors having first and second refractory metal silicide layers which have differing stoichiometries
06/03/1997US5635764 Layer of nickel-gold alloy interposed between solder layer and ground metal and/or electrode
06/03/1997US5635762 Flip chip semiconductor device with dual purpose metallized ground conductor
06/03/1997US5635759 Semiconductor device for mounting high-frequency element
06/03/1997US5635756 Semiconductor device, lead frame therefor and memory card to provide a thin structure
06/03/1997US5635755 For connecting packaged miniaturized integrated circuits to external circuits
06/03/1997US5635753 Integrated circuit
06/03/1997US5635752 Semiconductor device having source and drain regions which include horizontally extending secondary defect layers
06/03/1997US5635750 Micromechanical relay with transverse slots
06/03/1997US5635749 High performance field effect transistor with lai region
06/03/1997US5635747 Nonvolatile semiconductor memories with a cell structure suitable for a high speed operation and a low power supply voltage
06/03/1997US5635746 Silicided layer partly constituted by high resistivity layer with nitrogen or oxygen ions introduced so that a high resistivity silicided layer part and a low resistivity silicided layer part coexist
06/03/1997US5635744 Semiconductor memory and semiconductor device having SOI structure
06/03/1997US5635742 Lateral double-diffused mosfet
06/03/1997US5635741 Capacitors having high dielectric constant and low leakage for microcircuits of computers and infrared detectors
06/03/1997US5635740 Semiconductor device and method of manufacturing the same
06/03/1997US5635735 Field effect transistor with an improved Schottky gate structure
06/03/1997US5635734 Insulated gate type semiconductor device in which the reliability and characteristics thereof are not deteriorated due to pressing action and power inverter using the same
06/03/1997US5635732 Silicon carbide LOCOS vertical MOSFET device
06/03/1997US5635731 SRAM cell with no PN junction between driver and load transistors and method of manufacturing the same
06/03/1997US5635671 Mold runner removal from a substrate-based packaged electronic device