Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/1997
06/17/1997US5639690 Eliminating variations of wiring resistance by causing breakage of an aluminum or aluminum alloy layer of a laminated structure at certain positions
06/17/1997US5639689 Method for fabricating storage electrode of semiconductor device
06/17/1997US5639688 Method of making integrated circuit structure with narrow line widths
06/17/1997US5639687 Method for forming an integrated circuit pattern on a semiconductor substrate using silicon-rich silicon nitride
06/17/1997US5639686 Method of fabricating circuit elements on an insulating substrate
06/17/1997US5639685 Semiconductor processing method of providing a conductively doped layer of hemispherical grain polysilicon
06/17/1997US5639684 Method of making a low capacitance antifuse having a pillar located between the first and second metal layers
06/17/1997US5639682 Method of forming a semiconductor device using a self-aligned contact
06/17/1997US5639681 Process for eliminating effect of polysilicon stringers in semiconductor devices
06/17/1997US5639679 Accuracy
06/17/1997US5639678 Miniaturized transistor
06/17/1997US5639677 Gold coating on rear surface of substrate to prevent parasitic carriers from being introduced into channel layer by superlattice layer during operation
06/17/1997US5639676 Trenched DMOS transistor fabrication having thick termination region oxide
06/17/1997US5639587 1,2-naphthoquinonediazidesulfonic monoester of specific polyhydroxy compounds and 1,2-napthoquinonediazidesulfonic esters of specific polyhydroxy compounds; high resolution and sensitivity
06/17/1997US5639562 Co-sintered surface metallization for pin-join, wire-bond and chip attach
06/17/1997US5639558 Insulating resin-coated bonding wire
06/17/1997US5639520 Application of optical processing for growth of silicon dioxide
06/17/1997US5639519 Method for igniting low pressure inductively coupled plasma
06/17/1997US5639390 Conductor pattern check apparatus for locating and repairing open circuits
06/17/1997US5639387 Method for etching crystalline bodies
06/17/1997US5639385 Method of fabricating a wafer probe card for testing an integrated circuit die
06/17/1997US5639357 Synchronous modulation bias sputter method and apparatus for complete planarization of metal films
06/17/1997US5639345 Two step etch back process having a convex and concave etch profile for improved etch uniformity across a substrate
06/17/1997US5639344 Etching material and etching process
06/17/1997US5639343 Method of characterizing group III-V epitaxial semiconductor wafers incorporating an etch stop layer
06/17/1997US5639342 Method of monitoring and controlling a silicon nitride etch step
06/17/1997US5639341 Dry etching with less particles
06/17/1997US5639325 Process for producing a glass-coated article
06/17/1997US5639323 Method for aligning miniature device components
06/17/1997US5639316 Thin film multi-layer oxygen diffusion barrier consisting of aluminum on refractory metal
06/17/1997US5639311 Method of cleaning brushes used in post CMP semiconductor wafer cleaning operations
06/17/1997US5639309 Plasma processing apparatus adjusted for a batch-processing of a plurality of wafers with plasma gases
06/17/1997US5639308 Plasma apparatus
06/17/1997US5639301 Processing apparatus having parts for thermal and non-thermal treatment of substrates
06/17/1997US5639300 Epitaxy with reusable template
06/17/1997US5639299 Surface roughness; light emitting diodes
06/17/1997US5639234 Treatment system and treatment apparatus
06/17/1997US5639206 Transferring device
06/17/1997US5639203 Semiconductor device transfer apparatus
06/17/1997US5639009 Apparatus and method for mounting tape carrier package onto liquid crystal display
06/17/1997US5638958 Cassette for holding planar objects
06/17/1997US5638715 Method and apparatus for fabricating high fin density heatsinks
06/17/1997US5638597 Manufacturing flexible circuit board assemblies with common heat spreaders
06/17/1997US5638596 Method of employing multi-layer tab tape in semiconductor device assembly by selecting, breaking, downwardly bending and bonding tab tape trace free ends to a ground or power plane
06/13/1997CA2192604A1 High numerical aperture ring field optical reduction system
06/12/1997WO1997021332A1 A high-frequency plasma process wherein the plasma is excited by an inductive structure in which the phase and anti-phase portions of the capacitive currents between the inductive structure and the plasma are balanced
06/12/1997WO1997021330A1 Process depending on plasma discharges sustained by inductive coupling
06/12/1997WO1997021254A1 Method of manufacturing a semiconductor diode laser
06/12/1997WO1997021244A1 A system for monitoring and analyzing manufacturing processes using statistical simulation with single step feedback
06/12/1997WO1997021243A1 Method for processing semiconductor wafer, method for manufacturing ic card, and carrier
06/12/1997WO1997021240A2 Cmos device
06/12/1997WO1997021226A1 Power supply independent current source for flash eprom erasure
06/12/1997WO1997021105A1 Wafer probe card having micro tips and manufacturing method thereof
06/12/1997WO1997020673A1 Process for manufacturing resin-encapsulated electronic product
06/12/1997WO1997020654A1 Process and device for applying a solder to a substrate or chip without flux
06/12/1997WO1997015952A3 An integrated cmos circuit
06/12/1997WO1997015070A3 Fabrication method and contact bump structure for high-density surface-mount connections of solid-state device chips
06/12/1997WO1997011483A3 Method of producing very small structural widths on a semiconductor substrate
06/12/1997DE4244822C2 Semiconductor device mfr. e.g. for ridge waveguide semiconductor laser prodn.
06/12/1997DE19705075A1 Thin film semiconductor layer reproducible doping method for esp. silicon@ layer
06/12/1997DE19650722A1 Belichtungsverfahren und -vorrichtung zum Bilden von Mikromustern An exposure method and apparatus for forming micropatterns
06/12/1997DE19649412A1 Apparatus for moving a substrate in coating installations
06/12/1997DE19624278A1 Silicon On Insulator structure with single crystal semiconductor substrate
06/12/1997DE19622431A1 Semiconductor memory device with static memory cell, e.g. SRAM
06/12/1997DE19610125C1 Semiconductor mfr. device, e.g. tape and reel handler, esp. for integrated circuit
06/12/1997DE19546179A1 Silicon on insulator wafer manufacturing method for production of thin layer substrate
06/12/1997DE19545903A1 Festwertspeicherzellenanordnung und Verfahren zu deren Herstellung Read-only memory cell arrangement and method for their preparation
06/12/1997DE19545554A1 CMOS-Anordnung CMOS device
06/12/1997DE19545422A1 Lithium borosilicate bonding glass
06/12/1997DE19545370C1 Assembly and joining method for dielectric micro-components
06/12/1997CA2238974A1 Method for processing semiconductor wafer, method for manufacturing ic card, and carrier
06/11/1997EP0778623A2 PMOS memory cell with hot electron injection programming and tunnelling erasing
06/11/1997EP0778622A2 Heterojunction bipolar transistor
06/11/1997EP0778618A2 Lead frame and method for manufacturing it
06/11/1997EP0778616A2 Method of packaging devices with a gel medium confined by a rim member
06/11/1997EP0778615A1 Bipolar transistor and method of fabricating the same
06/11/1997EP0778614A2 Process for forming integrated capacitors
06/11/1997EP0778613A1 Pattern formation method
06/11/1997EP0778612A2 Method of curing hydrogen silsesquioxane resin by electron beam to convert it to a silica containing ceramic coating
06/11/1997EP0778611A2 End effector for semiconductor wafer transfer device and method of moving a wafer with an end effector
06/11/1997EP0778610A1 Apparatus for transferring a substantially circular article
06/11/1997EP0778607A1 Method and apparatus for cleaning a plasma reactor
06/11/1997EP0778584A1 Semiconductor integrated circuit device with large-scale memory and controller embedded on one semiconductor chip, and method of testing the device
06/11/1997EP0778581A2 Nonvolatile memory device
06/11/1997EP0778580A1 Semiconductor memory device
06/11/1997EP0778528A2 Semiconductor memory having redundancy memory cells
06/11/1997EP0778498A2 Semiconductor exposure device
06/11/1997EP0778496A2 Method and apparatus for depositing antireflective coating
06/11/1997EP0778495A1 Resist composition with radiation sensitive acid generator
06/11/1997EP0778359A1 Reduction of particulate contamination in wafer processing
06/11/1997EP0778358A1 Method and apparatus for thin films formation by CVD
06/11/1997EP0777911A1 Semi-insulating wafer
06/11/1997EP0777910A1 Process for manufacture of mos gated device with reduced mask count
06/11/1997EP0777902A2 Electrically erasable and programmable read only memory with non-uniform dielectric thickness
06/11/1997EP0777762A1 Metal polyoxyalkylated precursor solutions in an octane solvent and method of making the same
06/11/1997EP0777760A1 Transport system for thin film sputtering system
06/11/1997EP0717762A4 Activated polishing compositions
06/11/1997EP0706582A4 Improved compositions and methods for polishing
06/11/1997EP0513185B1 Mosfet structure having reduced gate capacitance and method of forming same
06/11/1997CN1151752A Material for forming silica-base coated insulation film, process for producing the material, silica-base insulation film, semiconductor device, and process for producing the device