Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/1997
06/11/1997CN1151613A Semiconductor device having capacitance element with excellent area efficiency
06/11/1997CN1151610A Method for forming metal wire
06/11/1997CN1151609A Method for planarizing non planar layer
06/11/1997CN1151535A Exposure method and exposure system
06/11/1997CN1151344A Robotic arm supporting object by interactive mechanism
06/11/1997CN1151342A Polishing device having pad which has grooves and holes
06/11/1997CN1035141C Mfg. method for a semiconductor memory device
06/10/1997US5638329 MOS semiconductor device with memory cells each having storage capacitor and transfer transistor
06/10/1997US5638327 Flash-EEPROM memory array and method for biasing the same
06/10/1997US5638325 Circuitry for resetting an electrically erasable memory device
06/10/1997US5638319 Non-volatile random access memory and fabrication method thereof
06/10/1997US5638292 Method for automatically optimizing cell placement
06/10/1997US5638286 Latch-up verification device
06/10/1997US5638252 Electrical device and method utilizing a positive-temperature-coefficient ferroelectric capacitor
06/10/1997US5638223 Projection type exposure apparatus and method with detachable and attachable lens barrel units
06/10/1997US5638179 Method for measuring amount of bend of moving mirror
06/10/1997US5638168 Lens evaluating device
06/10/1997US5638026 High input impedance circuit and semiconductor integrated device provided therewith
06/10/1997US5638023 Charge pump circuit
06/10/1997US5638006 Method and apparatus for wafer level prediction of thin oxide reliability using differentially sized gate-like antennae
06/10/1997US5638005 Predictive waveform acquisition
06/10/1997US5637961 Concentric rings with different RF energies applied thereto
06/10/1997US5637951 Electron source for multibeam electron lithography system
06/10/1997US5637950 Field emission devices employing enhanced diamond field emitters
06/10/1997US5637925 Uses of uniaxially electrically conductive articles
06/10/1997US5637924 Semiconductor device having planarized wiring with good thermal resistance
06/10/1997US5637923 Semiconductor device, carrier for carrying semiconductor device
06/10/1997US5637920 High contact density ball grid array package for flip-chips
06/10/1997US5637919 Semiconductor chip
06/10/1997US5637916 Carrier based IC packaging arrangement
06/10/1997US5637915 Semiconductor device affixed to an upper and a lower leadframe
06/10/1997US5637914 Lead frame and semiconductor device encapsulated by resin
06/10/1997US5637913 Leadframe semiconductor integrated circuit device using the same and method of and process for fabricating the two
06/10/1997US5637912 Three-dimensional monolithic electronic module having stacked planar arrays of integrated circuit chips
06/10/1997US5637911 Semiconductor device
06/10/1997US5637909 Semiconductor device and method of manufacturing the same
06/10/1997US5637907 Three dimensional semiconductor circuit structure with optical interconnection
06/10/1997US5637903 Depleted gate transistor for high voltage operation
06/10/1997US5637900 Latchup-free fully-protected CMOS on-chip ESD protection circuit
06/10/1997US5637899 Semiconductor device
06/10/1997US5637898 Vertical field effect transistors having improved breakdown voltage capability and low on-state resistance
06/10/1997US5637897 Nonvolatile semiconductor memory device with dual insulation layers between adjacent gate structures
06/10/1997US5637896 High coupling ratio flash memory cell
06/10/1997US5637895 Non-volatile semiconductor memory device
06/10/1997US5637894 Solid state image sensor device with single-layered transfer electrodes
06/10/1997US5637892 Electrostatic discharge protection in integrated circuits, systems and methods
06/10/1997US5637889 Composite power transistor structures using semiconductor materials with different bandgaps
06/10/1997US5637884 Thin film transistor having increased on current
06/10/1997US5637858 Method for producing identity cards
06/10/1997US5637832 Solder ball array and method of preparation
06/10/1997US5637538 Method and apparatus for processing a specimen
06/10/1997US5637535 Semiconductor device with reliable electrodes of projecting shape and method of forming same
06/10/1997US5637534 Plasma etching surface of semiconductor insulating layer using carbonless chlorine-based gas, filling via hole to form plug comprising aluminum or alloy thereof
06/10/1997US5637533 Method for fabricating a diffusion barrier metal layer in a semiconductor device
06/10/1997US5637532 Interconnect decoupling scheme
06/10/1997US5637531 Method of making a crystalline multilayer structure at two pressures the second one lower than first
06/10/1997US5637530 II-VI compound semiconductor epitaxial layers having low defects, method for producing and devices utilizing same
06/10/1997US5637529 Method for forming element isolation insulating film of semiconductor device
06/10/1997US5637528 Semiconductor device manufacturing method including dry oxidation
06/10/1997US5637527 Forming platinum film at a sidewall and top area of in-situ phosphorus doped polysilicon chrage storage electrode, in which platinum restrains a leakage current through titanium or tantalum barrier film, while capacitance is increased
06/10/1997US5637525 Method of forming a CMOS circuitry
06/10/1997US5637524 Forming buffer film and oxidizable film, forming anti-oxidation film, etching, doping, removing anti-oxidation film, doping, forming mask pattern, forming isolation film, removing mask, oxidizable film and buffer film
06/10/1997US5637523 Method of forming a capacitor and a capacitor construction
06/10/1997US5637522 Method for producing a dynamic random access memory device which includes memory cells having capacitor formed above cell transistor and peripheral circuit for improving shape and aspect ratio of contact hole in the peripheral circuit
06/10/1997US5637520 Process for fabricating integrated devices including flash-EEPROM memories and transistors
06/10/1997US5637519 Method of fabricating a lightly doped drain thin-film transistor
06/10/1997US5637518 Method of making a field effect transistor having an elevated source and an elevated drain
06/10/1997US5637516 Method for producing MOS transistors and bipolar transistors on the same semiconductor wafer
06/10/1997US5637515 Method of making thin film transistor using lateral crystallization
06/10/1997US5637514 Method of forming a field effect transistor
06/10/1997US5637513 Fabrication method of semiconductor device with SOI structure
06/10/1997US5637512 Forming silicon film on substrate, heating, cleaning by immersion in solution, forming silicon oxide film by electronic cyclotron resonance plasma vapor deposition
06/10/1997US5637443 Process for producing patterned resin films which includes pretreatment with water soluble salt aqueous solution prior to film development
06/10/1997US5637436 Using a solvent mixtures
06/10/1997US5637425 Method for fabricating phase shift mask comprising a polymethylmethacrylate phase shift film
06/10/1997US5637406 Heat conductivity
06/10/1997US5637395 Photocurable rubber or acryl-based pressure sensitive adhesive; three dimensional network
06/10/1997US5637388 Layered resinoid/diamond blade for precision cutting operations and method of manufacturing same
06/10/1997US5637352 From organometallic adduct
06/10/1997US5637351 Low temperature vacuum deposition
06/10/1997US5637274 Improved bonding strength
06/10/1997US5637273 Method for molding of integrated circuit package
06/10/1997US5637237 Method for hot wall reactive ion etching using a dielectric or metallic liner with temperature control to achieve process stability
06/10/1997US5637189 Dry etch process control using electrically biased stop junctions
06/10/1997US5637180 Plasma processing method and plasma generator
06/10/1997US5637151 Method for reducing metal contamination of silicon wafers during semiconductor manufacturing
06/10/1997US5637145 Method of vapor phase epitaxial growth
06/10/1997US5636964 Method of transferring a substrate
06/10/1997US5636963 Method of handling wafers in a vacuum processing apparatus
06/10/1997US5636781 Apparatus and method for removing known good die using hot shear process
06/10/1997US5636762 System and method for dispensing liquid from storage containers
06/10/1997US5636745 Tray for a component and an apparatus for accurately placing a component within the tray
06/10/1997US5636724 Device for transferring a transport object between two end positions
06/10/1997US5636683 Heating device for embodying connections by a meltable material
06/10/1997US5636430 General-purpose lead working machine
06/10/1997US5636401 Cleaning apparatus and cleaning method
06/05/1997WO1997020353A1 Low resistance contact semiconductor diode
06/05/1997WO1997020350A2 Semiconductor device with schottky contact and a process for the production thereof
06/05/1997WO1997020348A1 Structure for esd protection in semiconductor chips
06/05/1997WO1997020346A1 Novel metallization sidewall passivation technology for deep sub-half micrometer ic applications