| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 09/11/1997 | DE19649684C1 Titanium mono:phosphide layer formation |
| 09/11/1997 | DE19609202A1 Photomask apparatus for structuring superconductor or semiconductor substrate |
| 09/11/1997 | DE19608949A1 Vorrichtung zur Erzeugung von leistungsfähigen Mikrowellenplasmen Device for generating microwave plasmas powerful |
| 09/11/1997 | DE19608683A1 Production of substrate |
| 09/11/1997 | DE19608003A1 Leistungs-Feldeffekt-Transistor Power field effect transistor |
| 09/10/1997 | EP0794613A1 Low noise-high linearity HEMT-HBT composite |
| 09/10/1997 | EP0794577A2 FET with a source/drain and gate structure and a method of producing the same |
| 09/10/1997 | EP0794576A2 DRAM trench capacitor with insulating collar |
| 09/10/1997 | EP0794575A2 Structure and method of manufacture for CMOS semiconductor device against latch-up effect |
| 09/10/1997 | EP0794574A1 Mass memory and method for its fabrication |
| 09/10/1997 | EP0794573A2 Semiconductor device and method of manufacturing the same |
| 09/10/1997 | EP0794572A2 Electronic component, method for making the same, and lead frame and mold assembly for use therein |
| 09/10/1997 | EP0794571A1 Prepunched leadframe for making electronic components |
| 09/10/1997 | EP0794569A2 Amorphous carbon film, formation process thereof, and semiconductor device making use of the film |
| 09/10/1997 | EP0794568A2 Blanket-selective deposition of cvd aluminum and reflectivity improvement using a self-aligning ultra-thin layer |
| 09/10/1997 | EP0794567A2 Process for forming a deep trench-type storage node for a DRAM |
| 09/10/1997 | EP0794566A1 Wafer spacing mask for a substrate support chuck and method of fabricating same |
| 09/10/1997 | EP0794565A1 Selective subcollector heterojunction bipolar transistors |
| 09/10/1997 | EP0794564A2 Process for fabricating discrete electronic elements |
| 09/10/1997 | EP0794563A2 Semiconductor device having oxygen-doped silicon layer so as to restrict diffusion from heavily doped silicon layer and process of fabrication thereof |
| 09/10/1997 | EP0794561A1 Method of growing a silicon single crystal thin film in vapor phase |
| 09/10/1997 | EP0794560A2 Production method for insulated semiconductor device |
| 09/10/1997 | EP0794559A2 Lead frame flash removing method and apparatus |
| 09/10/1997 | EP0794558A1 Hermetic seal for an electronic component having a secondary chamber |
| 09/10/1997 | EP0794553A2 High density plasma CVD and etching reactor |
| 09/10/1997 | EP0794528A2 End effector and method for loading and unloading disks at a processing station |
| 09/10/1997 | EP0794465A2 Photolithographic method of producing a semiconductor device, using an alignment correction method |
| 09/10/1997 | EP0794463A2 Resist develop process having a post develop dispense step |
| 09/10/1997 | EP0794462A2 Independently controllable shutters and variable area apertures for off axis illumination |
| 09/10/1997 | EP0794460A2 A process for device fabrication and an anti-reflective coating for use therein |
| 09/10/1997 | EP0794458A2 An energy-sensitive resist material and a process for device fabrication using an energy-sensitive resist material |
| 09/10/1997 | EP0794457A2 Positive working photosensitive composition |
| 09/10/1997 | EP0794267A2 A restrictor shield for a wafer processing apparatus |
| 09/10/1997 | EP0794016A1 Apparatus and method for stamping a surface |
| 09/10/1997 | EP0794015A1 Apparatus and method for patterning a surface |
| 09/10/1997 | EP0793903A1 Coating for the structured production of conductors on the surface of electrically insulating substrates |
| 09/10/1997 | EP0793860A1 Lateral bipolar transistor |
| 09/10/1997 | EP0793858A1 CONSTRUCTING CMOS VERTICALLY MODULATED WELLS BY CLUSTERED MeV BURIED IMPLANTED LAYER FOR LATERAL ISOLATION |
| 09/10/1997 | EP0793855A1 Plasma processor for large workpieces |
| 09/10/1997 | EP0793736A1 Process for preparing micromechanical components having free-standing microstructures or membranes |
| 09/10/1997 | EP0447085B1 Device for monotoring wire supply and consumption |
| 09/10/1997 | CN1159250A Integrated circuit contacts with secured stringers |
| 09/10/1997 | CN1159134A Thick film compositions for via fill and capture pad applications |
| 09/10/1997 | CN1159133A Manufacturing method of metal substrate for PCB (printed circuit board) |
| 09/10/1997 | CN1159077A Method of bulging substrate by holding soldering paste stacking |
| 09/10/1997 | CN1159076A Method for planarization of semiconductor device |
| 09/10/1997 | CN1159075A Trench scribe line for decreased chip spacing |
| 09/10/1997 | CN1159074A Ion implanter and ion implanting method using the same |
| 09/10/1997 | CN1159073A Phase shifting mask and method for fabricating the same |
| 09/10/1997 | CN1159072A Method of producing thin film tansistor |
| 09/10/1997 | CN1159071A Semiconductor substrate and producing method thereof |
| 09/10/1997 | CN1159059A Flash EEPROM cell, method of manufacturing the same, method of programming and method of reading the same |
| 09/10/1997 | CN1158912A Deposited-film forming process and deposited-film forming apparatus |
| 09/10/1997 | CN1035850C Method of manufacturing semiconductor device |
| 09/09/1997 | US5666480 Fault-tolerant hierarchical bus system and method of operating same |
| 09/09/1997 | US5666381 Communication system used in semiconductor device manufacturing equipment |
| 09/09/1997 | US5666319 Sense amplifier |
| 09/09/1997 | US5666311 Method of making semiconductor device having isolating trenches |
| 09/09/1997 | US5666307 PMOS flash memory cell capable of multi-level threshold voltage storage |
| 09/09/1997 | US5666304 Semiconductor memory device and method of fabricating the same |
| 09/09/1997 | US5666270 Bump electrode, semiconductor integrated circuit device using the same, multi-chip module having the semiconductor integrated circuit devices and method for producing semicondutcor device having the bump electrode |
| 09/09/1997 | US5666206 Exposure system and exposure method |
| 09/09/1997 | US5666200 Method of ellipsometric measurement, an ellipsometer and device for controlling the carrying out of layers using such method and apparatus |
| 09/09/1997 | US5666175 Optical systems for displays |
| 09/09/1997 | US5666077 Method and apparatus for detecting an operating voltage level in an integrated circuit |
| 09/09/1997 | US5666072 Semiconductor integrated circuit device having bipolar transistor and field effect transistor |
| 09/09/1997 | US5666064 Semiconductor device, carrier for carrying semiconductor device, and method of testing and producing semiconductor device |
| 09/09/1997 | US5666023 Device for producing a plasma, enabling microwave propagation and absorption zones to be dissociated having at least two parallel applicators defining a propogation zone and an exciter placed relative to the applicator |
| 09/09/1997 | US5666009 Wire bonding structure for a semiconductor device |
| 09/09/1997 | US5666008 Flip chip semiconductor device |
| 09/09/1997 | US5666007 Interconnect structures for integrated circuits |
| 09/09/1997 | US5666003 Packaged semiconductor device incorporating heat sink plate |
| 09/09/1997 | US5666002 Semiconductor device with wiring layer in tunnel in semiconductor substrate |
| 09/09/1997 | US5666001 Transistor wherein the base area is covered with an insulating layer which is overlaid with a conductive film that might be polysilicon crystal or aluminum |
| 09/09/1997 | US5666000 Microcavity capacitive device |
| 09/09/1997 | US5665999 Gradients |
| 09/09/1997 | US5665996 Vertical power transistor |
| 09/09/1997 | US5665995 Post passivation programmed mask ROM |
| 09/09/1997 | US5665994 Integrated device with a bipolar transistor and a MOSFET transistor in an emitter switching configuration |
| 09/09/1997 | US5665990 Metal oxide semiconductor device with self-aligned groove channel and method for manufacturing the same |
| 09/09/1997 | US5665981 Thin film transistors and method of promoting large crystal grain size in the formation of polycrystalline silicon alloy thin films |
| 09/09/1997 | US5665979 Coulomb-blockade element and method of manufacturing the same |
| 09/09/1997 | US5665905 Calibration standard for 2-D and 3-D profilometry in the sub-nanometer range and method of producing it |
| 09/09/1997 | US5665849 Modified hydrogen silsesquioxane spin-on glass |
| 09/09/1997 | US5665845 Electronic device with a spin-on glass dielectric layer |
| 09/09/1997 | US5665841 Acetal group-containing alkoxy-styrene polymers, method of preparing the same and chemical amplified photoresist composition mainly comprising the same |
| 09/09/1997 | US5665659 Method for forming metal layer of a semiconductor device |
| 09/09/1997 | US5665658 Method of forming a dielectric layer structure |
| 09/09/1997 | US5665657 Spin-on-glass partial etchback planarization process |
| 09/09/1997 | US5665655 Process for producing crackstops on semiconductor devices and devices containing the crackstops |
| 09/09/1997 | US5665652 Method for manufacturing a semiconductor device wherein electrodes on a semiconductor chip are electrically connected to lead terminals by plating bonding |
| 09/09/1997 | US5665651 Process for encapsulating a semiconductor device and lead frame |
| 09/09/1997 | US5665650 Method for manufacturing a high density electronic circuit assembly |
| 09/09/1997 | US5665649 Process for forming a semiconductor device base array and mounting semiconductor devices thereon |
| 09/09/1997 | US5665648 Integrated circuit spring contact fabrication methods |
| 09/09/1997 | US5665647 Electrical resistance |
| 09/09/1997 | US5665646 Method for manufacturing semiconductor device with low electric resistance silicide layer on silicon surface |
| 09/09/1997 | US5665645 Method of manufacturing a semiconductor device using reticles |
| 09/09/1997 | US5665644 Semiconductor processing method of forming electrically conductive interconnect lines and integrated circuitry |
| 09/09/1997 | US5665643 Manufacture of planarized insulating layer |