| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 09/03/1997 | EP0793168A2 Pipeline processing method and device for instruction execution |
| 09/03/1997 | EP0793147A1 Overlay measuring method using correlation function |
| 09/03/1997 | EP0793146A1 Photoimageable, dielectric, crosslinkable, copolyester film-forming mixture |
| 09/03/1997 | EP0792956A2 Radiant heating apparatus and method |
| 09/03/1997 | EP0792954A2 Method for growing single-crystalline semiconductor film and apparatus used therefor |
| 09/03/1997 | EP0792952A1 Method of manufacturing silicon moncrystal using continuous czochralski method |
| 09/03/1997 | EP0792947A2 Process using an inductively coupled plasma reactor |
| 09/03/1997 | EP0792721A1 Polishing apparatus |
| 09/03/1997 | EP0792716A1 Method for making a shaped wire connection |
| 09/03/1997 | EP0792671A1 Bulk delivery of ultra-high purity gases at high flow rates |
| 09/03/1997 | EP0792572A1 An apparatus for generation of a linear arc discharge for plasma processing |
| 09/03/1997 | EP0792571A1 Method and device for measuring ion flow in a plasma |
| 09/03/1997 | EP0792530A1 Low cost, high average power, high brightness solid state laser |
| 09/03/1997 | EP0792525A1 A varicap diode and method of manufacturing a varicap diode |
| 09/03/1997 | EP0792524A1 Polycrystalline ferroelectric capacitor heterostructure employing hybrid electrodes |
| 09/03/1997 | EP0792523A1 Silicon carbide semiconductor devices having buried silicon carbide conduction barrier layers therein and methods of forming same |
| 09/03/1997 | EP0792520A1 Transistor structure with specific gate and pad areas |
| 09/03/1997 | EP0792519A1 Interconnection elements for microelectronic components |
| 09/03/1997 | EP0792518A1 Method for fabricating a self-limiting silicon based interconnect for testing bare semiconductor dice |
| 09/03/1997 | EP0792517A1 Electrical contact structures from flexible wire |
| 09/03/1997 | EP0792516A1 Silicon nitride etch process with critical dimension gain |
| 09/03/1997 | EP0792515A1 Method of making a chemical-mechanical polishing slurry and the polishing slurry |
| 09/03/1997 | EP0792514A1 Integrated circuit with complementary isolated bipolar transitors and method of making same |
| 09/03/1997 | EP0792513A1 Damascene process for reduced feature size |
| 09/03/1997 | EP0792463A1 Mounting spring elements on semiconductor devices, and wafer-level testing methodology |
| 09/03/1997 | EP0792462A1 Probe card assembly and kit, and methods of using same |
| 09/03/1997 | EP0792388A1 Method for directly depositing metal containing patterned films |
| 09/03/1997 | EP0792195A1 Non-aminic photoresist adhesion promoters for microelectronic applications |
| 09/03/1997 | EP0731909A4 Sensors employing interference of electromagnetic waves passing through waveguides having functionalized surfaces |
| 09/03/1997 | EP0705439B1 Process and device for testing an integrated circuit soldered on a board |
| 09/03/1997 | EP0616573A4 Groove width trimming. |
| 09/03/1997 | EP0600063B1 Method of manufacturing cmos semiconductor components with local interconnects |
| 09/03/1997 | EP0420958B1 Gas etching of wafers to remove oxide layers |
| 09/03/1997 | CN1158607A Thermosetting resin compositions containing maleimide and/or vinyl compounds |
| 09/03/1997 | CN1158581A Method of marking works |
| 09/03/1997 | CN1158516A Boosting pulse generation circuit |
| 09/03/1997 | CN1158502A Thin film transistor for antistatic circuit and method for fabricating the same |
| 09/03/1997 | CN1158501A Intermediate potential generation circuit |
| 09/03/1997 | CN1158500A Potential generation circuit |
| 09/03/1997 | CN1158499A Transfer molding apparatus having laminated chase block |
| 09/03/1997 | CN1158498A Method for fabricating capacitor of semiconductor device and structure of the same |
| 09/03/1997 | CN1158497A Method for packing semiconductor |
| 09/03/1997 | CN1158496A Method for forming thin film transistor |
| 09/03/1997 | CN1158495A Method for forming fine patterns of semiconductor device |
| 09/03/1997 | CN1158494A Method and apparatus for capturing and removing contaminant particles from interior region of ion implanter |
| 09/03/1997 | CN1158493A Method and apparatus for purging barrel reactors |
| 09/03/1997 | CN1158492A Susceptor and baffle therefor |
| 09/03/1997 | CN1158289A Method of producing semiconductor wafers |
| 09/02/1997 | US5664254 Substrate processing apparatus and substrate processing method |
| 09/02/1997 | US5663926 Semiconductor device having an internal voltage step-up control circuit |
| 09/02/1997 | US5663917 Semiconductor circuit having MOS circuit for use in strong electric field |
| 09/02/1997 | US5663913 Semiconductor memory device having high speed parallel transmission line operation and a method for forming parallel transmission lines |
| 09/02/1997 | US5663911 Semiconductor device having a booster circuit |
| 09/02/1997 | US5663902 System and method for disabling static current paths in fuse logic |
| 09/02/1997 | US5663893 Method for generating proximity correction features for a lithographic mask pattern |
| 09/02/1997 | US5663892 Method of compacting layouts of semiconductor integrated circuit designed in a hierarchy |
| 09/02/1997 | US5663884 Multiprocessing apparatus |
| 09/02/1997 | US5663865 Ceramic electrostatic chuck with built-in heater |
| 09/02/1997 | US5663797 Method and apparatus for detecting the endpoint in chemical-mechanical polishing of semiconductor wafers |
| 09/02/1997 | US5663784 Slit-scanning type light exposure apparatus |
| 09/02/1997 | US5663783 Stage-drive controlling device, projection exposure apparatus including the same, and method of controlling the driving of a stage |
| 09/02/1997 | US5663662 Library group and semiconductor integrated circuit structured thereof |
| 09/02/1997 | US5663657 For measuring photovoltage/reflectivity of a semiconductor surface |
| 09/02/1997 | US5663654 For testing an array of semiconductor dice located on a wafer |
| 09/02/1997 | US5663653 Wafer probe station for low-current measurements |
| 09/02/1997 | US5663652 Method for measuring current distribution in an integrated circuit by detecting magneto-optic polarization rotation in an adjacent magneto-optic film |
| 09/02/1997 | US5663651 Method of separately determining plug resistor and interfacial resistor and test pattern for the same |
| 09/02/1997 | US5663637 Rotary signal coupling for chemical mechanical polishing endpoint detection with a westech tool |
| 09/02/1997 | US5663622 Positioning control system |
| 09/02/1997 | US5663599 Metal layout pattern for improved passivation layer coverage |
| 09/02/1997 | US5663598 Electrical circuit bonding interconnect component and flip chip interconnect bond |
| 09/02/1997 | US5663596 Semiconductor chip |
| 09/02/1997 | US5663594 Ball grid array type of semiconductor device |
| 09/02/1997 | US5663590 Product of process for formation of vias (or contact openings) and fuses in the same insulation layer with minimal additional steps |
| 09/02/1997 | US5663588 Semiconductor device having an SOI structure of mesa isolation type and manufacturing method therefor |
| 09/02/1997 | US5663586 Fet device with double spacer |
| 09/02/1997 | US5663585 Semiconductor memory device |
| 09/02/1997 | US5663584 Schottky barrier MOSFET systems and fabrication thereof |
| 09/02/1997 | US5663583 Low-noise and power ALGaPSb/GaInAs HEMTs and pseudomorpohic HEMTs on GaAs substrate |
| 09/02/1997 | US5663582 High frequency static induction transistor having high output |
| 09/02/1997 | US5663579 Method of growing single semiconductor crystal and semiconductor device with single semiconductor crystal |
| 09/02/1997 | US5663578 Thin film transistor with self-aligned bottom gate |
| 09/02/1997 | US5663574 Power semiconductor component with monolithically integrated sensor arrangement as well as manufacture and employment thereof |
| 09/02/1997 | US5663570 High-frequency wireless communication system on a single ultrathin silicon on sapphire chip |
| 09/02/1997 | US5663568 Apparatus for controlling a charged particle beam and a lithographic process in which the apparatus is used |
| 09/02/1997 | US5663391 1,1,1,5,5,5-hexafluoro-2,4-pentanedione |
| 09/02/1997 | US5663108 Semiconductors |
| 09/02/1997 | US5663107 Global planarization using self aligned polishing or spacer technique and isotropic etch process |
| 09/02/1997 | US5663106 Method of encapsulating die and chip carrier |
| 09/02/1997 | US5663104 Method of manufacturing a semiconductor device for power supply use |
| 09/02/1997 | US5663103 Method of manufacturing an insulated-gate field-effect transistor in a semiconductor device in which source/drain electrodes are defined by formation of silicide on a gate electrode and a field-effect transistor |
| 09/02/1997 | US5663102 Method for forming multi-layered metal wiring semiconductor element using cmp or etch back |
| 09/02/1997 | US5663101 Semiconductor structure having multiple levels of self-aligned interconnection metallization, and methods for its preparation |
| 09/02/1997 | US5663100 Method for forming contact holes in semiconductor device |
| 09/02/1997 | US5663098 Method for deposition of a conductor in integrated circuits |
| 09/02/1997 | US5663097 Method of fabricating a semiconductor device having an insulating side wall |
| 09/02/1997 | US5663096 Grinding |
| 09/02/1997 | US5663095 Method of making a micro-dimensional coupling conductor |
| 09/02/1997 | US5663094 Process for producing semiconductor device with wire for three conductive layers |
| 09/02/1997 | US5663093 Method for forming a cylindrical capacitor having a central spine |