H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/1997
08/26/1997	US5660673 Apparatus for dry etching
08/26/1997	US5660672 In-situ monitoring of conductive films on semiconductor wafers
08/26/1997	US5660671 Magnetron plasma processing apparatus and processing method
08/26/1997	US5660642 Moving zone Marangoni drying of wet objects using naturally evaporated solvent vapor
08/26/1997	US5660634 Rotary-cup liquid supply device
08/26/1997	US5660629 Apparatus for detecting the diameter of a single-crystal silicon
08/26/1997	US5660585 Clean-room island for the processing of objects
08/26/1997	US5660581 Grinding apparatus
08/26/1997	US5660528 Liquid delivery system at specified rate using ultrasonic vibrators
08/26/1997	US5660519 Method for mounting components and an apparatus therefor
08/26/1997	US5660517 Semiconductor processing system with wafer container docking and loading station
08/26/1997	US5660472 In a thermal processing chamber
08/26/1997	US5660381 Carrier device
08/26/1997	US5660335 Directing pure liquid jets against the semiconductor material under pressure and forcing through a nozzle at high velocity impingement; contamination-free
08/26/1997	US5660321 Method for controlling solder bump height and volume for substrates containing both pad-on and pad-off via contacts
08/26/1997	US5660319 Ultrasonic bonding process
08/26/1997	US5660318 Apparatus for inner lead bonding (ILB) comprising a heat dissipation pin and method of ILB using such an apparatus
08/26/1997	US5660316 Method and apparatus for bonding semiconductor electronic devices
08/26/1997	US5660122 Finely adjustable mounting system and panel for holding planar articles and storage unit using both
08/26/1997	US5660114 Transport system for thin film sputtering system
08/26/1997	US5660047 Refrigeration system and method for cooling a susceptor using a refrigeration system
08/26/1997	US5659952 Method of fabricating compliant interface for semiconductor chip
08/21/1997	WO1997030494A1 Heat sink including a surface on which an electronic component can be mounted
08/21/1997	WO1997030480A1 Low resistivity thin film conductor for high temperature integrated circuit electronics
08/21/1997	WO1997030479A1 Deposition of a conductor in a via hole or trench
08/21/1997	WO1997030476A1 Chromium refractory metal alloys conductors for use in high temperature integrated circuits
08/21/1997	WO1997030474A1 DIE ATTACHED SiC AND DIE ATTACH PROCEDURE FOR SiC
08/21/1997	WO1997030473A1 A METHOD AND A DEVICE FOR OXIDATION OF A SEMICONDUCTOR LAYER OF SiC
08/21/1997	WO1997030472A1 Methods and apparatus for etching semiconductor wafers
08/21/1997	WO1997030471A1 System and method for cooling workpieces processed by an ion implantation system
08/21/1997	WO1997030470A1 Ion implantation system for implanting workpieces
08/21/1997	WO1997030467A1 Ion beam shield for implantation systems
08/21/1997	WO1997030466A1 Large area uniform ion beam formation
08/21/1997	WO1997030465A1 Loadlock assembly for an ion implantation system
08/21/1997	WO1997030464A1 Plasma chamber for controlling ion dosage in ion implantation
08/21/1997	WO1997030418A2 Method and device for bonding a wire conductor
08/21/1997	WO1997030328A1 Surface roughness measuring apparatus and method
08/21/1997	WO1997030188A1 Method for depositing fluorine doped silicon dioxide films
08/21/1997	WO1997022139A3 Read-only storage cell arrangement and method for producing the same
08/21/1997	WO1997019462A3 Vertically integrated semiconductor component and method of producing the same
08/21/1997	WO1997002733A3 Microwave/millimeter wave circuit structure with discrete flip-chip mounted elements, and method of fabricating the same
08/21/1997	EP0782766A3 Microwave/millimeter wave circuit structure with discrete flip-chip mounted elements, and method of fabricating the same
08/21/1997	DE19651109A1 Semiconductor device having high integration
08/21/1997	DE19605302A1 Kühlkörper mit einer Montagefläche für ein elektronisches Bauteil Cooling body with a mounting surface for an electronic component
08/21/1997	DE19603685C1 Mikrowellengerät Microwave
08/20/1997	EP0790706A2 Memory system
08/20/1997	EP0790649A2 Integrated ciruit having integral decoupling capacitor
08/20/1997	EP0790647A2 Semiconductor body having a solder layer and method of soldering the semiconductor body on a metal suppporting plate
08/20/1997	EP0790646A2 Method of forming a wiring layer filling a contact hole
08/20/1997	EP0790645A2 Intermetal dielectric planarization
08/20/1997	EP0790643A2 Method of dry etching for patterning refractory metal layer improved in etching rate, anisotropy and selectivity to silicon oxide
08/20/1997	EP0790642A2 Method and apparatus for removing contaminant particles from surfaces in semiconductor processing equipment
08/20/1997	EP0790641A1 Wafer cooling device
08/20/1997	EP0790636A2 Plasma applicators
08/20/1997	EP0790635A2 Chemical vapor deposition system including dedicated cleaning gas injection
08/20/1997	EP0790619A2 Current limiting during block writes of memory circuits
08/20/1997	EP0790331A1 Apparatus for gripping and holding of substrates
08/20/1997	EP0790329A1 Method and apparatus for improved low pressure collimated magnetron sputter deposition of metal films
08/20/1997	EP0789981A1 Thermal reactor optimization
08/20/1997	EP0789935A1 Heterojunction energy gradient structure
08/20/1997	EP0789934A1 Ballast monitoring for radio frequency power transistors
08/20/1997	EP0789933A2 Silicon-on-insulator device with floating collector
08/20/1997	EP0789788A1 In situ getter pump system and method
08/20/1997	EP0728367A4 A flash eprom transistor array and method for manufacturing the same
08/20/1997	EP0727086A4 Ultra high density, non-volatile ferromagnetic random access memory
08/20/1997	EP0701499A4 Improved polishing pads and methods for their use
08/20/1997	EP0679262B1 Non-contact current injection apparatus and method for use with linear bipolar circuits
08/20/1997	EP0674799B1 Memory array with field oxide islands eliminated
08/20/1997	EP0643883A4 Sub-nanoscale electronic systems, devices and processes.
08/20/1997	EP0641483B1 Centrifugal wafer carrier cleaning apparatus
08/20/1997	EP0640244B1 Plasma treatment apparatus and method in which a uniform electric field is induced by a dielectric window
08/20/1997	EP0597053B1 Device for heat-treating a magazine for lead frames with electronic components
08/20/1997	EP0570589B1 Apparatus for stocking and positioning ICs
08/20/1997	EP0557523B1 Device for carrying thin plate-like substrate
08/20/1997	CN2260386Y Positioning apparatus for semiconductor processing
08/20/1997	CN2260385Y Thermal insulation arrangement for high temp. diffusion stove
08/20/1997	CN1157487A Fabrication method of semiconductor device
08/20/1997	CN1157486A Lead frame taping apparatus and taping method
08/20/1997	CN1157485A Method for making complementary MOS field-effect transistor
08/20/1997	CN1157484A Method for making complementary MOS field-effect transistor
08/20/1997	CN1157483A Method for making dielectric layer of integrated circuit
08/20/1997	CN1157482A Electrostatic chuck
08/20/1997	CN1157481A Semiconductor device and method of fabricating same
08/20/1997	CN1157480A Method of forming unilateral, graded-channel semiconductor device using gate electrode disposable spacer
08/20/1997	CN1157478A Method for preparation of standard chip
08/20/1997	CN1157477A Method of epitaxial film growth for semiconductor devices
08/20/1997	CN1157476A Semiconductor device and making method thereof
08/20/1997	CN1157475A Ultrastrong acid catalytic non-developing gas phase photoresist
08/20/1997	CN1157458A Method for reading and restoring data in data storage element
08/20/1997	CN1157448A Active matrix display device
08/20/1997	CN1035704C Method and apparatus for forming film
08/19/1997	USRE35591 Memory cell array semiconductor integrated circuit device
08/19/1997	US5659656 Semiconductor electrical heater and method for making same
08/19/1997	US5659517 Semiconductor memory device with an improved hierarchical power supply line configuration
08/19/1997	US5659514 Memory cell and current mirror circuit
08/19/1997	US5659505 Electrically programmable and erasable nonvolatile semiconductor memory device and operating method therefor
08/19/1997	US5659504 Method and apparatus for hot carrier injection
08/19/1997	US5659501 Method and device for supplying negative programming voltages to non-volatile memory cells in a non-volatile memory device
08/19/1997	US5659500 Nonvolatile memory array with compatible vertical source lines
08/19/1997	US5659499 Magnetic memory and method therefor

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