| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 09/09/1997 | US5665642 Process of making a semiconductor device with a multilayer wiring and pillar formation |
| 09/09/1997 | US5665641 Method to prevent formation of defects during multilayer interconnect processing |
| 09/09/1997 | US5665640 Method for producing titanium-containing thin films by low temperature plasma-enhanced chemical vapor deposition using a rotating susceptor reactor |
| 09/09/1997 | US5665639 Process for manufacturing a semiconductor device bump electrode using a rapid thermal anneal |
| 09/09/1997 | US5665638 Method for repairing a defect generated cell using a laser |
| 09/09/1997 | US5665635 Method for forming field oxide film in semiconductor device |
| 09/09/1997 | US5665633 Process for forming a semiconductor device having field isolation |
| 09/09/1997 | US5665632 Stress relaxation in dielectric before metalization |
| 09/09/1997 | US5665631 SOI substrate manufacturing method |
| 09/09/1997 | US5665630 Device separation structure and semiconductor device improved in wiring structure |
| 09/09/1997 | US5665628 Method of forming conductive amorphous-nitride barrier layer for high-dielectric-constant material electrodes |
| 09/09/1997 | US5665627 Method of irreversibly locking a portion of a semiconductor device |
| 09/09/1997 | US5665626 Method of making a chimney capacitor |
| 09/09/1997 | US5665625 Method of forming capacitors having an amorphous electrically conductive layer |
| 09/09/1997 | US5665623 Method of fabricating totally self-aligned contacts for dynamic randomaccess memory cells |
| 09/09/1997 | US5665622 Folded trench and rie/deposition process for high-value capacitors |
| 09/09/1997 | US5665621 Read-only-memory process with self-aligned coding |
| 09/09/1997 | US5665620 Method for forming concurrent top oxides using reoxidized silicon in an EPROM |
| 09/09/1997 | US5665619 Method of fabricating a self-aligned contact trench DMOS transistor structure |
| 09/09/1997 | US5665616 Process of manufacturing a semiconductor device |
| 09/09/1997 | US5665615 Method of making BiCMOS semiconductor device |
| 09/09/1997 | US5665614 Method for making fully self-aligned submicron heterojunction bipolar transistor |
| 09/09/1997 | US5665613 Method of making semiconductor device having SIMOX structure |
| 09/09/1997 | US5665611 Method of forming a thin film transistor using fluorine passivation |
| 09/09/1997 | US5665609 Prioritizing efforts to improve semiconductor production yield |
| 09/09/1997 | US5665608 Method of aluminum oxide low pressure chemical vapor deposition (LPCVD) system-fourier transform infrared (FTIR) source chemical control |
| 09/09/1997 | US5665607 Method for producing thin film solar cell |
| 09/09/1997 | US5665527 Process for generating negative tone resist images utilizing carbon dioxide critical fluid |
| 09/09/1997 | US5665526 Thermally stable photoimaging composition |
| 09/09/1997 | US5665523 Heat-resistant negative photoresist composition, photosensitive substrate, and process for forming negative pattern |
| 09/09/1997 | US5665519 Vertical orienting, chemical amplification type, acid catalyst |
| 09/09/1997 | US5665518 Photoresist and monomer and polymer for composing the photoresist |
| 09/09/1997 | US5665495 Method for fabricating a semiconductor with a photomask |
| 09/09/1997 | US5665296 Molding technique for molding plastic packages |
| 09/09/1997 | US5665260 Ceramic electrostatic chuck with built-in heater |
| 09/09/1997 | US5665252 Shaping by etching |
| 09/09/1997 | US5665251 RIE image transfer process for plating |
| 09/09/1997 | US5665210 Sputtering |
| 09/09/1997 | US5665209 Depositing a refractory metal film containing nitrogen on a substrate and heat treating film |
| 09/09/1997 | US5665203 Silicon etching method |
| 09/09/1997 | US5665202 Multi-step planarization process using polishing at two different pad pressures |
| 09/09/1997 | US5665201 High removal rate chemical-mechanical polishing |
| 09/09/1997 | US5665200 Substrate processing method and substrate processing apparatus |
| 09/09/1997 | US5665199 Methodology for developing product-specific interlayer dielectric polish processes |
| 09/09/1997 | US5665175 Semiconductors |
| 09/09/1997 | US5665168 Method for cleaning semiconductor silicon wafer |
| 09/09/1997 | US5665167 Plasma treatment apparatus having a workpiece-side electrode grounding circuit |
| 09/09/1997 | US5665159 System for controlling growth of a silicon crystal |
| 09/09/1997 | US5665132 Process for the sintering of hollow cylinders of silicon dioxide soot |
| 09/09/1997 | US5664989 Polishing pad, polishing apparatus and polishing method |
| 09/09/1997 | US5664986 Apparatus for polishing a dielectric layer formed on a substrate |
| 09/09/1997 | US5664927 Substrate processing method and apparatus |
| 09/09/1997 | US5664926 Stage assembly for a substrate processing system |
| 09/09/1997 | US5664925 Batchloader for load lock |
| 09/09/1997 | US5664679 Transport container for wafer-shaped objects |
| 09/09/1997 | US5664649 Adjustable shock absorber |
| 09/09/1997 | US5664497 Laser symbolization on copper heat slugs |
| 09/09/1997 | US5664369 Plant growing room |
| 09/09/1997 | US5664337 Automated semiconductor processing systems |
| 09/07/1997 | CA2199347A1 Amorphous carbon film, formation process therof, and semiconductor device making use of the film |
| 09/04/1997 | WO1997032460A1 Method and device for receiving, orientating and assembling of components |
| 09/04/1997 | WO1997032457A1 Method for manufacturing electronic circuit device |
| 09/04/1997 | WO1997032343A1 High-precision, linear mos capacitor |
| 09/04/1997 | WO1997032342A1 High capacity stacked dram device and process |
| 09/04/1997 | WO1997032341A1 Process for determining the crystal orientation in a wafer |
| 09/04/1997 | WO1997032340A1 Novel vertical diode structures with low series resistance |
| 09/04/1997 | WO1997032339A1 Heat-treating boat for semiconductor wafer |
| 09/04/1997 | WO1997032335A2 Control mechanisms for dosimetry control in ion implantation systems |
| 09/04/1997 | WO1997032309A1 Eeprom with split gate source side injection |
| 09/04/1997 | WO1997032241A1 Method of determining the radiation dose in a lithographic apparatus, and test mask and apparatus for performing the method |
| 09/04/1997 | WO1997032060A1 Process for preparing semiconductor monocrystalline thin film |
| 09/04/1997 | DE19708254A1 Perforating organic film by two successive pulsed laser beams |
| 09/04/1997 | DE19707695A1 Body contact structure apparatus for semiconductor module |
| 09/04/1997 | DE19700650A1 Metal conducting structure used in semiconductor device |
| 09/04/1997 | DE19638171C1 Controlled silicon oxide CVD as inter-metal dielectric |
| 09/04/1997 | DE19632846A1 Determining end point of etching process |
| 09/04/1997 | DE19619302A1 Semiconductor memory cell device with semiconductor substrate |
| 09/04/1997 | DE19609399A1 Verfahren zum Bestimmen der Kristallorientierung in einem Wafer A method for determining the crystal orientation in a wafer |
| 09/04/1997 | DE19607795A1 Method for detecting ionising contaminants in electronic components |
| 09/04/1997 | DE19607549A1 Development of substrate relief non edge profile |
| 09/04/1997 | DE19607098A1 Directional solidification of large pure silicon ingot |
| 09/04/1997 | DE19549486A1 High packing density read-only memory cell arrangement |
| 09/03/1997 | EP0793405A2 Multilayer electronic assembly utilizing a sinterable composition and related method of forming |
| 09/03/1997 | EP0793281A2 Electro-magnetic transducers |
| 09/03/1997 | EP0793275A2 Transistor having main cell and sub-cells |
| 09/03/1997 | EP0793274A1 Ferroelectric nonvolatile memory cell and a process for forming the memory cell |
| 09/03/1997 | EP0793273A1 Method for improving the intermediate dielectric profile, particularly for non-volatile memories |
| 09/03/1997 | EP0793272A2 A pad protection diode structure |
| 09/03/1997 | EP0793271A2 Semiconductor device having a metal silicide film and method of fabricating the same |
| 09/03/1997 | EP0793269A1 Semiconductor device having a chip with via hole soldered on a support, and its method of fabrication |
| 09/03/1997 | EP0793268A2 Process for filling a cavity in a semiconductor device |
| 09/03/1997 | EP0793267A2 Improved masking methods during semiconductor device fabrication |
| 09/03/1997 | EP0793266A2 Method for etching a compound semiconductor, a semi-conductor laser device and method for producing the same |
| 09/03/1997 | EP0793265A2 Method of processing a polysilicon film |
| 09/03/1997 | EP0793264A2 High-concentration doped semiconductor |
| 09/03/1997 | EP0793263A2 Fabrication process of a semiconductor substrate |
| 09/03/1997 | EP0793262A2 Multiple independent robot assembly and apparatus for processing and transferring semiconductor wafers |
| 09/03/1997 | EP0793261A2 Robotic transport apparatus having a guard against water |
| 09/03/1997 | EP0793260A1 Vertical wafer boat |
| 09/03/1997 | EP0793259A2 Apparatus and method for drying substrates |