Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/1998
03/12/1998CA2263254A1 Alkysulfonyloximes for high-resolution i-line photoresists of high sensitivity
03/11/1998EP0828301A2 Photovoltaic element and method of and apparatus for manufacturing the same
03/11/1998EP0828300A2 Converging solar module
03/11/1998EP0828299A2 Compound semiconductor and thin film solar cell
03/11/1998EP0828295A2 Gate array LSI
03/11/1998EP0828294A1 Semiconductor integrated circuit device and method for manufacturing the same
03/11/1998EP0828293A1 Reflow soldering method for surface mounted semiconductor device
03/11/1998EP0828292A1 Semiconductor device and its manufacture
03/11/1998EP0828291A2 Fine pitch via formation using diffusion patterning techniques
03/11/1998EP0828290A2 Method of forming power semiconductor devices with controllable integrated buffer
03/11/1998EP0828289A1 Semiconductor wafer with low surface roughness and semiconductor device
03/11/1998EP0828288A2 Energy relieving crack stop
03/11/1998EP0828287A2 Improvements in or relating to semiconductors
03/11/1998EP0828286A2 Method of manufacturing mirror-polished silicon wafers, and apparatus for processing silicon wafers
03/11/1998EP0828256A2 Nonvolatile semiconductor memory device
03/11/1998EP0828172A1 Optical projection system and exposure apparatus
03/11/1998EP0828171A2 Projection optical system
03/11/1998EP0828163A1 Circuit with means to carry out a structural test without a dedicated test pin
03/11/1998EP0827814A1 Workpiece transfer robot
03/11/1998EP0827809A1 Polishing apparatus
03/11/1998EP0827808A2 Apparatus for applying an urging force to a wafer
03/11/1998EP0827634A1 Floating gate non-volatile memory device, and a method of manufacturing the device
03/11/1998EP0827632A1 Semiconductor device having a semiconductor chip electrically connected to a wiring substrate
03/11/1998EP0827631A1 Process for structuring porous silicon and a structure containing porous silicon
03/11/1998EP0827630A1 Method of planarizing a layer of material
03/11/1998EP0744082A4 Besoi wafer and process for stripping outer edge thereof
03/11/1998EP0617839B1 Method of making semiconductor components, in particular on GaAs or InP, with recovery of the substrate by chemical means
03/11/1998EP0570595B1 Vertical insulated gate semiconductor device and method for its manufacture
03/11/1998EP0492609B1 Semiconductor device with voltage stress testing pads
03/11/1998CN1175805A Clock skew minimization system and method for integrated circuits
03/11/1998CN1175796A Semiconductor device and method for producing the same
03/11/1998CN1175794A Semiconductor device packaged in plastic package and metal mold employable for production thereof
03/11/1998CN1175793A LED display packaging with substrate removal and method of fabrication
03/11/1998CN1175791A Nonvolatile semiconductor memory and fabricating method
03/11/1998CN1175790A Thermal processing apparatus for semiconductor wafers
03/11/1998CN1175789A Fabrication method of semiconductor device and abrasive liquid used therein
03/11/1998CN1175788A Method of forming resist pattern on semiconductor wafer
03/11/1998CN1037727C Etching liquid for etching porous silicon, etching process using same
03/11/1998CN1037723C Method of mfg. read-only memory using ion implantation
03/11/1998CN1037722C Nonvolatile semiconductor memories with memory cell structure
03/10/1998US5726999 Method and apparatus for universal programmable boundary scan driver/sensor circuit
03/10/1998US5726997 Apparatus and method for testing of integrated circuits
03/10/1998US5726994 Address multiplex semiconductor memory device for enabling testing of the entire circuit or for only partial components thereof
03/10/1998US5726945 Semiconductor device with reduced power consumption and thin film transistor used in semiconductor memory device for achieving reduction in power consumption
03/10/1998US5726941 Semiconductor integrated circuit
03/10/1998US5726930 Semiconductor memory device
03/10/1998US5726882 Non-volatile semiconductor memory device with verify mode for verifying data written to memory cells
03/10/1998US5726844 Protection circuit and a circuit for a semiconductor-on-insulator device
03/10/1998US5726758 Position detecting system
03/10/1998US5726741 Photolithographic projection systems including grating masks and related methods
03/10/1998US5726740 Projection exposure apparatus having illumination device with ring-like or spot-like light source
03/10/1998US5726739 Projection exposure apparatus and device manufacturing method using the same
03/10/1998US5726738 Aperture for off-axis illumination and projection exposure apparatus employing the same
03/10/1998US5726726 Liquid crystal display and method of producing the same
03/10/1998US5726710 Low noise high performance charge detection system
03/10/1998US5726601 Integrated circuit and method for producing the same
03/10/1998US5726598 Semiconductor device having voltage sensing element
03/10/1998US5726590 Interface in a semiconductor integrated circuit
03/10/1998US5726580 Universal wafer carrier for wafer level die burn-in
03/10/1998US5726548 Moving stage apparatus and system using the same
03/10/1998US5726542 Stage apparatus
03/10/1998US5726502 Bumped semiconductor device with alignment features and method for making the same
03/10/1998US5726501 Semiconductor device having a solder drawing layer
03/10/1998US5726499 Semiconductor device having a minute contact hole
03/10/1998US5726497 Upward plug filled via hole device
03/10/1998US5726495 Heat sink having good heat dissipating characteristics
03/10/1998US5726494 Semiconductor device having a plated heat sink
03/10/1998US5726491 Tape carrier package
03/10/1998US5726490 Semiconductor device
03/10/1998US5726489 Film carrier semiconductor device
03/10/1998US5726488 Semiconductor device having semiconductor elements formed in a retrograde well structure
03/10/1998US5726487 Semiconductor device having an improved thin film transistor
03/10/1998US5726486 Semiconductor device having a bipolar transistor
03/10/1998US5726482 Device-under-test card for a burn-in board
03/10/1998US5726478 Integrated power semiconductor component having a substrate with a protective structure in the substrate
03/10/1998US5726477 Threshold adjustment in field effect semiconductor devices
03/10/1998US5726476 Semiconductor device having a particular CMOS structure
03/10/1998US5726475 Semiconductor device having different impurity concentration wells
03/10/1998US5726471 Programmable non-volatile memory cell and method of forming a programmable non-volatile memory cell
03/10/1998US5726470 Nonvolatile semiconductor memory device and method of fabrication of the same
03/10/1998US5726468 Compound semiconductor bipolar transistor
03/10/1998US5726467 Multiple narrow-line-channel fet having improved noise characteristics
03/10/1998US5726464 Light emitting device using porous semi-conductor material
03/10/1998US5726463 Silicon carbide MOSFET having self-aligned gate structure
03/10/1998US5726462 Semiconductor structures having electrically insulating and conducting portions formed from an AlSb-alloy layer
03/10/1998US5726461 Active matrix substrate and switching element
03/10/1998US5726459 GE-SI SOI MOS transistor and method of fabricating same
03/10/1998US5726458 Hot carrier injection test structure and technique for statistical evaluation
03/10/1998US5726413 Apparatus for generating a plasma for processing substrates
03/10/1998US5726391 Furan polymer
03/10/1998US5726102 Method for controlling etch bias in plasma etch patterning of integrated circuit layers
03/10/1998US5726100 Method of forming contact vias and interconnect channels in a dielectric layer stack with a single mask
03/10/1998US5726099 Method of chemically mechanically polishing an electronic component using a non-selective ammonium persulfate slurry
03/10/1998US5726098 Method of manufacturing semiconductor device having multilevel interconnection
03/10/1998US5726097 Method of forming multilevel interconnections using high density plasma metal clean
03/10/1998US5726096 From wf6 and silane, removing fluorine atoms with excess silane
03/10/1998US5726095 Method for making MOSFET device having controlled parasitic isolation threshold voltage
03/10/1998US5726094 Process for producing a diffusion region adjacent to a recess in a substrate
03/10/1998US5726093 Two-step planer field oxidation method
03/10/1998US5726092 Minimize bird's peak defect
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