Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/1998
03/31/1998US5733713 Forming carbon layer on light reflecting layer; then photosensitive resin; irradiation; development
03/31/1998US5733709 Semiconductor processing method of forming a field effect transistor
03/31/1998US5733704 Resist compositions for chemically amplified resists comprising a di(t-butyl)malonyl methyl side group in the base polymer
03/31/1998US5733690 Adjustment marks
03/31/1998US5733687 Photomask, exposing method using photomask, and manufacturing method of photomask
03/31/1998US5733686 Phase-shifting mask
03/31/1998US5733661 Metal oxide containing ions of an organic carboxylic acid salt and/or ions of an inorganic oxoacid salt
03/31/1998US5733641 Buffered substrate for semiconductor devices
03/31/1998US5733640 Thin film wiring
03/31/1998US5733499 Thin, no defects, circuits, filtering slurry
03/31/1998US5733434 Apparatus and method for cleaning semiconductor wafers
03/31/1998US5733426 Semiconductor wafer clamp device and method
03/31/1998US5733419 Electrodes, counterelectrodes, plasma discharge
03/31/1998US5733405 Plasma processing apparatus
03/31/1998US5733383 Semiconductor substrates with trenches and oxides
03/31/1998US5733369 Method for forming crystal
03/31/1998US5733368 Method of manufacturing silicon monocrystal using continuous czochralski method
03/31/1998US5733182 Ultra flat polishing
03/31/1998US5733181 Apparatus for polishing the notch of a wafer
03/31/1998US5733177 Process of polishing wafers
03/31/1998US5733090 Magazine conveying device
03/31/1998US5733024 Modular system
03/31/1998US5732465 Method of manufacturing one side resin sealing type semiconductor devices
03/31/1998US5732462 Fixture for assembling electronic circuit modules
03/31/1998CA2134426C Method of feeding gas into a chamber
03/27/1998CA2216415A1 Method for accelerated test of semiconductor devices
03/26/1998WO1998012908A1 Method and apparatus for packaging ic chip, and tape-shaped carrier to be used therefor
03/26/1998WO1998012871A1 Internet television apparatus
03/26/1998WO1998012779A1 METHOD OF MAKING AN InAsSb/InAsSbP DIODE LASER
03/26/1998WO1998012756A1 Semiconductor device and process for manufacturing the same
03/26/1998WO1998012755A1 Semiconductor device
03/26/1998WO1998012754A2 Electronic devices including electrodes comprising chromium nitride and a method of manufacturing such devices
03/26/1998WO1998012753A1 Short channel self aligned vmos field effect transistor
03/26/1998WO1998012742A1 Semiconductor device and method of fabricating the same
03/26/1998WO1998012741A1 Short channel non-self aligned vmos field effect transistor
03/26/1998WO1998012740A1 Multiple local oxidation for surface micromachining
03/26/1998WO1998012739A1 Semiconductor wafer polishing device
03/26/1998WO1998012738A1 Fluxless solder ball attachment process
03/26/1998WO1998012737A1 Magnetically levitated robot and method of increasing levitation force
03/26/1998WO1998012736A1 Swap out plate and assembly
03/26/1998WO1998012706A1 Device and method for testing integrated circuit dice in an integrated circuit module
03/26/1998WO1998012604A1 Method of monitoring a photolithographic process
03/26/1998WO1998012025A1 Coaxial drive loader arm
03/26/1998WO1998012000A1 Curing polymer layers on semiconductor substrates using variable frequency microwave energy
03/26/1998WO1998003991A3 Method of producing a buried, laterally insulated zone of very high conductivity in a semiconductor substrate
03/26/1998DE19723954A1 Clean room
03/26/1998DE19720663A1 Clean room for semiconductor mfr. obtained by particle filters
03/26/1998DE19709007A1 MOS capacitor semiconductor component for A=D or D=A converter
03/26/1998DE19700825C1 High-temperature heater for sputtering installations
03/26/1998DE19637438A1 Metallisation production on especially III-V semiconductor body
03/26/1998DE19637194A1 Gasgemisch und Verfahren zum Trockenätzen von Metallen, insbesondere Kupfer, bei niedrigen Temperaturen Gas mixture and process for dry etching of metals, in particular copper, at low temperatures
03/26/1998DE19635722A1 Stable organic lead, magnesium and niobium sol with variable rheology, obtained from various starting materials
03/25/1998EP0831565A1 High-melting electrical conductive connection and method of manufacturing
03/25/1998EP0831539A2 Fabrication process of solar cell
03/25/1998EP0831534A2 Semiconductor device with a passivation layer
03/25/1998EP0831532A2 Semiconductor memories
03/25/1998EP0831531A1 Semiconductor memory device and method of manufacturing the same
03/25/1998EP0831529A2 Semiconductor device and method of manufacturing the same
03/25/1998EP0831528A2 Multilayer wiring board for mounting semiconductor device and method of producing the same
03/25/1998EP0831527A1 Method of manufacturing semiconductor device
03/25/1998EP0831526A2 Electrostatic chuck, and method of and apparatus for processing sample using the chuck
03/25/1998EP0831525A2 Method for forming protruding electrode
03/25/1998EP0831524A1 Process for manufacturing a dual floating gate oxide flash memory cell
03/25/1998EP0831523A2 Semi-selective chemical vapor deposition of conducting material
03/25/1998EP0831522A1 Method and device for light-assisted patterning of porous silicon
03/25/1998EP0831521A2 Method for forming a silicide region
03/25/1998EP0831520A2 Method of manufacturing a MIS structure on silicon carbide (SiC)
03/25/1998EP0831519A1 Heat treatment method and single-crystal semiconductor substrate
03/25/1998EP0831518A1 Semiconductor device and method for producing the same
03/25/1998EP0831516A2 Device and method for processing a plasma to alter the surface of a substrate using neutrals
03/25/1998EP0831407A2 Ion implantation simulation method
03/25/1998EP0831401A1 Semiconductor integrated circuit device containing means for storing chip specific information
03/25/1998EP0831376A2 Scanning exposure method and mask therefor
03/25/1998EP0831369A2 Positive photosensitive composition
03/25/1998EP0831268A2 Apparatus for isolating and containing reactive medium
03/25/1998EP0831157A2 Crystal holding apparatus
03/25/1998EP0830896A2 Transfer port system
03/25/1998EP0830732A2 Method for etching photolithographically produced quartz crystal blanks for singulation
03/25/1998EP0830708A1 Plasma processing system with reduced particle contamination
03/25/1998EP0830707A1 Plasma sputter etching system with reduced particle contamination
03/25/1998EP0830686A1 Negative voltage switching circuit
03/25/1998EP0830642A1 Film-stripping process
03/25/1998EP0830324A1 Process for producing glass coatings for anodic bonding purposes
03/25/1998EP0830316A1 Point-of-use ammonia purification for electronic component manufacture
03/25/1998EP0793903B1 Coating for the structured production of conductors on the surface of electrically insulating substrates
03/25/1998EP0740795B1 Reversible chip contacting device
03/25/1998CN1177213A Solid photoing device
03/25/1998CN1177212A Method of fabricating flash memory device
03/25/1998CN1177211A Triple well flash memory fabrication process
03/25/1998CN1177210A Leadframe structure
03/25/1998CN1177209A Electronic component assembly and method of assembling
03/25/1998CN1177208A Method for improving memory cell array of memory access and height difference of peripheral
03/25/1998CN1177207A Method for forming isolation region of semiconductor device
03/25/1998CN1177206A Semiconductor device and mounting method therefor
03/25/1998CN1177205A Method of forming interlayer insulating film of semiconductor device
03/25/1998CN1177204A Etching method
03/25/1998CN1177203A Method for fabricating metal wire of semiconductor device
03/25/1998CN1177202A Method of forming plug in semiconductor device
03/25/1998CN1177201A Method of mfg. semiconductor device
03/25/1998CN1177169A Method for forming patterned metallic layer in thin film magnetic head
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