Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
02/1998
02/10/1998US5716865 Method of making split gate flash EEPROM cell by separating the tunneling region from the channel
02/10/1998US5716864 Method of manufacturing a non-volatile semiconductor memory device with peripheral transistor
02/10/1998US5716863 Method of manufacturing semiconductor device having elements different in gate oxide thickness and resistive elements
02/10/1998US5716862 High performance PMOSFET using split-polysilicon CMOS process incorporating advanced stacked capacitior cells for fabricating multi-megabit DRAMS
02/10/1998US5716861 Insulated-gate field-effect transistor structure and method
02/10/1998US5716859 Method of fabricating a silicon BJT
02/10/1998US5716857 Method for manufacturing a semiconductor device
02/10/1998US5716856 Arrangement and method for detecting sequential processing effects in manufacturing using predetermined sequences within runs
02/10/1998US5716759 Method and apparatus for producing integrated circuit devices
02/10/1998US5716758 Process for forming fine pattern for semiconductor device utilizing multiple interlaced exposure masks
02/10/1998US5716756 Positive or negative working mixtures
02/10/1998US5716753 Adhesion, accuracy
02/10/1998US5716713 Insulated metallized substrate; thermoconductivity
02/10/1998US5716673 Spin-on-glass process with controlled environment
02/10/1998US5716535 Aqueous solution containing ammonium fluoride, hydrogen fluoride and ammonium hydroxide
02/10/1998US5716495 Cleaning method
02/10/1998US5716494 Dry etching method, chemical vapor deposition method, and apparatus for processing semiconductor substrate
02/10/1998US5716486 Method and apparatus for tuning field for plasma processing using corrected electrode
02/10/1998US5716485 Electrode designs for controlling uniformity profiles in plasma processing reactors
02/10/1998US5716484 Contaminant reduction improvements for plasma etch chambers
02/10/1998US5716458 Method of washing and drying an article
02/10/1998US5716453 Prevents primer condensations from forming on wafers; improved photolithography
02/10/1998US5716450 Growing method of gallium nitride related compound semiconductor crystal and gallium nitride related compound semiconductor device
02/10/1998US5716218 Process for manufacturing an interconnect for testing a semiconductor die
02/10/1998US5716207 Heating furnace
02/10/1998US5716133 Shielded heat sensor for measuring temperature
02/10/1998US5715989 Microelectronic wire bonding using friction welding process
02/10/1998US5715929 Charging device for semiconductor processing installations
02/10/1998US5715872 Process and device for the shaping of leads of integrated circuits
02/10/1998US5715851 Wafer cassette and cleaning system adopting the same
02/10/1998US5715612 Method for precision drying surfaces
02/10/1998US5715610 Programmable method and apparatus for cleaning semiconductor elements
02/10/1998US5715593 Method of making plastic-packaged semiconductor integrated circuit
02/10/1998CA2082771C Method for forming interconnect structures for integrated circuits
02/10/1998CA2074848C Method of forming electrodes for trench capacitors
02/05/1998WO1998005123A1 Programmable switch, adjustable capacitance and resonant circuit effected by means of such a switch
02/05/1998WO1998005076A2 Semiconductor component for high voltage
02/05/1998WO1998005074A1 Ferroelectric based memory devices utilizing low curie point ferroelectrics and encapsulation
02/05/1998WO1998005071A1 Method of fabricating an integrated circuit using self-patterned thin films
02/05/1998WO1998005070A1 Static memory cell
02/05/1998WO1998005069A1 Heterolithic voltage controlled oscillator
02/05/1998WO1998005068A1 Method of manufacturing and transferring metallic droplets
02/05/1998WO1998005067A1 Electronic packages containing microsphere spacers
02/05/1998WO1998005066A2 Methods and apparatus for the in-process detection and measurement of thin film layers
02/05/1998WO1998005065A1 Bga mould assembly for encapsulating bga substrates of varying thickness
02/05/1998WO1998005064A1 Self-aligned gate fabrication process for silicon carbide static induction transistors
02/05/1998WO1998005063A1 Silicon epitaxial wafer and method for manufacturing the same
02/05/1998WO1998005062A1 Stratified structure with a ferroelectric layer and process for producing the same
02/05/1998WO1998005061A1 Method for manufacturing semiconductor device
02/05/1998WO1998005060A1 Multizone bake/chill thermal cycling module
02/05/1998WO1998005059A2 Automatic semiconductor part handler
02/05/1998WO1998004997A1 Method and apparatus for identifying characters on a plurality of silicon wafers
02/05/1998WO1998004959A1 Negative photoresist compositions and use thereof
02/05/1998WO1998004892A1 A rapid thermal anneal system and method including improved temperature sensing and monitoring
02/05/1998WO1998004646A1 Chemical mechanical polishing composition and process
02/05/1998WO1998004602A1 Perfluorinated hydrocarbon polymer-filled adhesive formulations and uses therefor
02/05/1998WO1998004366A1 Removal of material by radiation applied at an oblique angle
02/05/1998WO1997048032A3 Programmable metallization cell and method of making
02/05/1998WO1997042654A3 A method of making a monolithic microwave circuit with thick conductors
02/05/1998DE19733416A1 Packaging for semiconductor chip
02/05/1998DE19732625A1 Bipolar transistor packaging for HF device, e.g. DBS converter
02/05/1998DE19732432A1 Titanium nitride film formation by CVD
02/05/1998DE19724222A1 DRAM with novel capacitor cell layout
02/05/1998DE19723937A1 Gallium arsenide metal semiconductor FET for HF communications system
02/05/1998DE19723202A1 Crack resistant semiconductor component production
02/05/1998DE19708766A1 Lithographic mask production without need for SOI wafer
02/05/1998DE19708512A1 Phase shift mask with adhesion promoting layer
02/05/1998DE19703971A1 Field effect transistor for high integration circuit
02/05/1998DE19703223A1 Electrode manufacturing method for semiconductor device
02/05/1998DE19631147A1 Nichtflüchtige Speicherzelle A non-volatile memory cell
02/05/1998DE19631146A1 Nichtflüchtige Speicherzelle A non-volatile memory cell
02/05/1998DE19631046A1 Chip surface bond structure
02/05/1998DE19630984A1 Double poly metal-oxide-nitride-oxide-semiconductor EEPROM
02/05/1998DE19630593A1 Compact, direct mechanical- and electrical bonding of microcircuit to substrate
02/05/1998CA2261753A1 Semiconductor component for high voltage
02/04/1998EP0822741A2 Ultrasonic vibration bonding chip mounter
02/04/1998EP0822737A2 Unit type clip lead terminal, connecting method, connecting board and method of producing such board
02/04/1998EP0822600A1 Lateral gate, vertical drift region transistor
02/04/1998EP0822599A2 Trench capacitor DRAM cell
02/04/1998EP0822598A1 Single-chip contact-less read-only memory (rom) device and the method for fabricating the device
02/04/1998EP0822597A2 Integrated circuit including field effect transisitors
02/04/1998EP0822596A2 Improvements in or relating to integrated circuits
02/04/1998EP0822594A2 MOS transistor for DRAM cell
02/04/1998EP0822593A2 A method of manufacturing an insulated gate field effect transistor
02/04/1998EP0822592A2 A method of forming conductive lines on a semiconductor wafer
02/04/1998EP0822591A1 Insulated gate field effect transistor
02/04/1998EP0822590A2 Method and apparatus for releasing a workpiece from an electrostatic chuck
02/04/1998EP0822589A1 Carrier for a semiconductor wafer and its application
02/04/1998EP0822588A2 Doped silicon substrate
02/04/1998EP0822587A2 Method for making integrated capacitive structures
02/04/1998EP0822586A2 Improvements in or relating to integrated circuits
02/04/1998EP0822585A2 Stress control by fluorination of silica film
02/04/1998EP0822584A2 Method of surface treatment of semiconductor substrates
02/04/1998EP0822583A2 Improvements in or relating to the cleaning of semiconductor devices
02/04/1998EP0822582A2 Method of surface treatment of semiconductor substrates
02/04/1998EP0822581A2 A method of crystallizing a semiconductor film and of manufacturing a thin film transistor
02/04/1998EP0822580A2 High aspect ratio clamp
02/04/1998EP0822579A1 Method of fabricating integrated microstructures of semiconductor material
02/04/1998EP0822578A1 Method of fabricating integrated semiconductor devices comprising a chemoresistive gas microsensor
02/04/1998EP0822572A1 Method and apparatus for plasma treatment of a surface
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