Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
04/1998
04/14/1998US5738574 Continuous processing system for chemical mechanical polishing
04/14/1998US5738528 IC carrier
04/14/1998US5738269 Method for forming a solder bump
04/14/1998US5738267 Apparatus and method for removing known good die using hot shear process
04/14/1998US5738165 Substrate holding apparatus
04/14/1998US5738128 Centrifugal wafer carrier cleaning apparatus
04/14/1998US5737846 For a water jet deflasher apparatus
04/14/1998US5737833 Selective forming electroconductive metal bumps by photolithography
04/14/1998CA1339817C Curing and passivation of spin-on-glasses by a plasma process, and product produced thereby
04/09/1998WO1998015160A1 Apparatus and method for automated manufacture of multi-layer electrical and electronic devices
04/09/1998WO1998015014A1 Capacitor with an electrode core and a thin noble metal layer used as a first electrode
04/09/1998WO1998015013A1 Semiconductor device with a protected barrier for a stack cell
04/09/1998WO1998015012A1 Capacitor with an oxygen barrier layer and a first base metal electrode
04/09/1998WO1998015011A1 Power mos component
04/09/1998WO1998015009A1 Uniform ballast resistance for a thermally balanced radio frequency power transistor
04/09/1998WO1998015008A1 Process for producing barrier-free semiconductor storage assemblies
04/09/1998WO1998015007A1 Integrated semiconductor storage assembly with buried-plate electrode
04/09/1998WO1998015003A1 Process for producing barrier-free semiconductor storage assemblies
04/09/1998WO1998015002A1 Process for producing barrier-free semiconductor storage assemblies
04/09/1998WO1998015001A1 Semiconductor read only memory and method for the production thereof
04/09/1998WO1998015000A1 Dram capacitor with stacked electrodes and method for the production thereof
04/09/1998WO1998014999A1 Variable high temperature chuck for high density plasma chemical vapor deposition
04/09/1998WO1998014996A1 Storage assembly with self-aligning non-integrated capacitor arrangement
04/09/1998WO1998014995A1 Flip chip assembly method
04/09/1998WO1998014994A1 Semiconductor fabrication
04/09/1998WO1998014993A1 PROCESS FOR THE MANUFACTURE OF A HIGHLY ε DIELECTRIC OR FERROELECTRIC COATING
04/09/1998WO1998014992A1 Process for producing a semiconductor device
04/09/1998WO1998014991A1 Semiconductor device with a layer of precious metal and a process for production of same
04/09/1998WO1998014990A1 MULTI LAYERED ELECTRODES COMPOSED OF Pt AND A BASE METAL FOR STORAGE CAPACITORS
04/09/1998WO1998014989A1 Memory cell with a polymer capacitor
04/09/1998WO1998014988A1 Process for wet chemical etching or surface cleaning of mixed crystal compounds containing arsenic
04/09/1998WO1998014987A1 Cerium oxide abrasive and method of abrading substrates
04/09/1998WO1998014986A1 Method for separating two material layers and electronic components produced therewith
04/09/1998WO1998014985A1 Wafer cleaning system
04/09/1998WO1998014984A1 Method for identifying wafers in chip manufacturing and device for its implementation
04/09/1998WO1998014980A1 Particle controlling method and plasma processing chamber
04/09/1998WO1998014977A1 An arc chamber for an ion implantation system
04/09/1998WO1998014834A1 Antireflective coating for photoresist compositions
04/09/1998WO1998014833A1 Light sensitive composition containing an arylhydrazo dye
04/09/1998WO1998014832A1 Bottom antireflective coatings containing an arylhydrazo dye
04/09/1998WO1998014821A1 Apparatus for press-bonding liquid crystal panel and method of production of liquid crystal device
04/09/1998WO1998014645A1 A METHOD FOR PRODUCING A REGION DOPED WITH BORON IN A SiC-LAYER
04/09/1998WO1998014637A1 Method and devices for the electrolytic formation of a deposit on an assembly of selected electrodes
04/09/1998WO1998014636A1 Apparatus for reducing polymer deposition on substrate support
04/09/1998WO1998014632A1 Conveyor and delivery device
04/09/1998WO1998014304A1 Polishing pad and method for making polishing pad with elongated microcolumns
04/09/1998WO1998014282A1 Method and device for treating substrates
04/09/1998DE4345305C2 Semiconductor device with lead-on-chip-structure
04/09/1998DE19743737A1 Thick layer circuit board, e.g. for IC ignition, motor control
04/09/1998DE19728617A1 Semiconductor component with chip fastened or bond island
04/09/1998DE19721515A1 Equipment for production of chemically pure dry air
04/09/1998DE19717369A1 Probe card and probe device using such probe card
04/09/1998DE19706990A1 Semiconductor wafer processing system
04/09/1998DE19701999C1 Method of determining generation lifetime and doping profile using simultaneous high frequency capacity voltage measurements on metal insulator semiconducting structures
04/09/1998DE19643905C1 Charge storage capacitor for dynamic memory device
04/09/1998DE19641288A1 Verfahren zum anisotropen Plasmaätzen verschiedener Substrate A method for anisotropic plasma etching of different substrates
04/09/1998DE19641070A1 Silicon wafer defects determining method for manufacture
04/09/1998DE19640243A1 Kondensator mit einer Sauerstoff-Barriereschicht und einer ersten Elektrode aus einem Nichtedelmetall Capacitor having an oxygen-barrier layer and a first electrode made of a non-noble metal
04/09/1998DE19640235A1 Halbleiter-Festwertspeicher und Verfahren zu seiner Herstellung Semiconductor read-only memory and method for its preparation
04/09/1998DE19639934A1 Verfahren zur Flipchip-Kontaktierung eines Halbleiterchips mit geringer Anschlußzahl A method for flip chip bonding of a semiconductor chip with a low-port-count
04/09/1998DE19639026C1 Selbstjustierte nichtflüchtige Speicherzelle Self-aligned non-volatile memory cell
04/09/1998CA2267298A1 Uniform ballast resistance for a thermally balanced radio frequency power transistor
04/09/1998CA2267082A1 An arc chamber for an ion implantation system
04/08/1998EP0834929A2 Ohmic contact to n-GaN related compound semiconductor and its manufacturing method
04/08/1998EP0834928A1 Integrated circuit diode with a charge injecting node
04/08/1998EP0834927A2 Semiconductor IC device
04/08/1998EP0834926A2 Semiconductor device controllable by field effect
04/08/1998EP0834924A2 SRAM memory structure and manufacturing method thereof
04/08/1998EP0834921A2 Multi-layer circuit construction method and structures with customization features and components for use therein
04/08/1998EP0834920A1 Improvements in or relating to semiconductor device metallization and interconnects
04/08/1998EP0834919A2 Semiconductor element having a bump electrode
04/08/1998EP0834918A1 Multilayer tamperproof electronic coating
04/08/1998EP0834917A1 Film carrier and semiconductor device using the same
04/08/1998EP0834916A2 Method for manufacturing a semiconductor structure comprising regions formed with low dielectric constant material
04/08/1998EP0834915A1 Fabrication method of multi-layered wiring
04/08/1998EP0834914A2 Electronic coatings
04/08/1998EP0834913A1 Semiconductor device
04/08/1998EP0834912A2 Dry-etching-free process for high dielectric and ferroelectric memory cell capacitor
04/08/1998EP0834911A2 Opaque ceramic coatings
04/08/1998EP0834910A2 Method and apparatus for wet treating semiconductor wafers
04/08/1998EP0834909A2 Method of enhancing the withstanding voltage of a multilayered semiconductor device
04/08/1998EP0834908A1 Method and arrangement for drying substrates
04/08/1998EP0834907A2 High vacuum dual stage load lock and method for loading and unloading wafers using a high vacuum dual stage load lock
04/08/1998EP0834906A2 Device for transferring a semiconductor wafer
04/08/1998EP0834883A2 Semiconductor nonvolatile memory device
04/08/1998EP0834823A1 Method and apparatus for efficiently implementing complex function blocks in integrated circuit designs
04/08/1998EP0834773A2 Focusing and tilting adjustment system for lithography aligner, manufacturing apparatus or inspection apparatus
04/08/1998EP0834772A2 Exposure apparatus
04/08/1998EP0834771A1 Apparatus and method for projection exposure
04/08/1998EP0834770A2 Dyed photoresists and methods and articles of manufacture comprising same
04/08/1998EP0834751A2 Optical element manufacturing method
04/08/1998EP0834605A1 Oxide single crystal and method of manufacturing thereof
04/08/1998EP0834489A1 Thick opaque ceramic coatings
04/08/1998EP0834243A1 Photolithographically patterned spring contact
04/08/1998EP0834196A1 Integrated circuit comprising a substrate and a wiring layer with a buffer layer between the substrate and the wiring layer
04/08/1998EP0834195A1 Flexible leads for tape ball grid array circuit
04/08/1998EP0834194A1 Semiconductor device fabrication
04/08/1998EP0834193A1 Electron-beam processed films for microelectronics structures
04/08/1998EP0834192A1 Method for forming salicides
04/08/1998EP0834191A1 Removal of material by polarized radiation and back side application of radiation