| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 04/07/1998 | US5736418 Anisotropic etching the polysilicon and silicon dioxide barrier layer, forming a v-shaped groove |
| 04/07/1998 | US5736417 Method of fabricating double photoresist layer self-aligned heterojunction bipolar transistor |
| 04/07/1998 | US5736416 Fabrication process for MOSFET using oblique rotation ion implantation |
| 04/07/1998 | US5736415 Method for manufacturing input/output port devices having low body effect |
| 04/07/1998 | US5736414 Forming a silicon semiconductor layer on the substrate, a dielctric layer, a gate electrode of aluminum, surface layer of aluminum oxide, doping silcon layer twice by masking first by anodized layer, removing it, doping again |
| 04/07/1998 | US5736301 Method for patterning a photoresist material wherein an anti-reflective coating comprising a copolymer of bisphenol A and benzophenone is used |
| 04/07/1998 | US5736300 Irradiating coherent ultraviolet light beam to surface of phase shift mask having enlarged mask pattern, projecting light transmitted to form reduced pattern image on photoresist film overlying integrated circuit wafer, transferring pattern |
| 04/07/1998 | US5736297 Positive-working radiation-sensitive mixture and recording material produced therewith |
| 04/07/1998 | US5736292 Radiation-sensitive positive resist composition comprising an alkali soluble resin made from m-cresol, 2,3,5-trimethyl phenol and optionally p-cresol and a polyphenol compound having alkyl or alkoxy side groups |
| 04/07/1998 | US5736281 Dose modification proximity effect compensation (PEC) technique for electron beam lithography |
| 04/07/1998 | US5736280 Projecting masking pattern onto resist-covered wafer by exposure to light of predetermined intensity, then development, for improved resolution |
| 04/07/1998 | US5736277 Method of making mask pattern data and process for manufacturing the mask |
| 04/07/1998 | US5736276 Forming shielding layer on transparent substrate, injecting oxygen ions into surface of layer, converting to oxidation layer |
| 04/07/1998 | US5736236 Magnetic multilayer film and magnetoresistance element |
| 04/07/1998 | US5736195 Method of coating a thin film on a substrate |
| 04/07/1998 | US5736192 Embedded electroconductive layer and method for formation thereof |
| 04/07/1998 | US5736074 Drops of two materials are merged in flight forming coating of lower melting temperature material on drop of higher melting temperature material; high density electronics |
| 04/07/1998 | US5736061 Semiconductor element mount and producing method therefor |
| 04/07/1998 | US5736021 Electrically floating shield in a plasma reactor |
| 04/07/1998 | US5736018 Device for holding components during electrode application |
| 04/07/1998 | US5736002 Methods and equipment for anisotropic, patterned conversion of copper into selectively removable compounds and for removal of same |
| 04/07/1998 | US5735993 Plasma processing apparatus for dry etching of semiconductor wafers |
| 04/07/1998 | US5735963 Using hydroxylamine to oxidize metal while gamma alumina is employed to abrade the oxidized metal |
| 04/07/1998 | US5735962 Silicon substrate cleaning method and apparatus |
| 04/07/1998 | US5735961 For controlling native oxide layer within load-lock chamber |
| 04/07/1998 | US5735951 Single crystal pulling apparatus |
| 04/07/1998 | US5735950 Method for producing a precise alloy composition from input variables under nonlinear incorporation conditions |
| 04/07/1998 | US5735949 Vapor depositing a monocrystalline layer on substrate, separated by a dielectric amorphous layer |
| 04/07/1998 | US5735731 For planarizing a semiconductor wafer |
| 04/07/1998 | US5735662 Adjustable wafer transfer machine |
| 04/07/1998 | US5735649 Machine tool cutter position adjustment device |
| 04/07/1998 | US5735449 Method and apparatus for bonding semiconductor electronic devices |
| 04/07/1998 | US5735339 Semiconductor processing apparatus for promoting heat transfer between isolated volumes |
| 04/07/1998 | US5735332 Method for making a ceramic metal composite |
| 04/07/1998 | US5735196 Apparatus for applying a force to a workpiece |
| 04/07/1998 | CA2058076C Styrene/maleates terpolymers |
| 04/02/1998 | WO1998014036A1 Fluorine assisted stripping and residue removal in sapphire downstream plasma asher |
| 04/02/1998 | WO1998013912A1 Method of manufacturing an optoelectronic semiconductor device comprising a mesa |
| 04/02/1998 | WO1998013893A1 Device with circuit element and transmission line |
| 04/02/1998 | WO1998013880A1 POLY-Si/POLY-SiGe GATE FOR CMOS DEVICES |
| 04/02/1998 | WO1998013878A1 Self-aligned non-volatile storage cell |
| 04/02/1998 | WO1998013877A1 Semiconductor storage arrangement with stacked capacitor |
| 04/02/1998 | WO1998013876A1 Hybrid microwave-frequency integrated circuit |
| 04/02/1998 | WO1998013875A1 Hybrid microwave-frequency integrated circuit |
| 04/02/1998 | WO1998013871A1 Array of solder pads on an integrated circuit |
| 04/02/1998 | WO1998013865A1 Method of producing a mos transistor |
| 04/02/1998 | WO1998013863A1 Process for flip chip bonding of a semiconductor chip with a small number of contacts |
| 04/02/1998 | WO1998013862A1 Semiconductor device and production method thereof |
| 04/02/1998 | WO1998013861A1 Screening oxide for source and drain regions formed from solid dopant source |
| 04/02/1998 | WO1998013860A1 Process for joining inorganic substrates in a permanent manner |
| 04/02/1998 | WO1998013856A1 Plasma processing apparatus |
| 04/02/1998 | WO1998013829A1 Two-transistor flash eprom cell |
| 04/02/1998 | WO1998013811A1 Display device |
| 04/02/1998 | WO1998013300A1 Ferroelectric material, method of manufacturing the same, semiconductor memory, and method of manufacturing the same |
| 04/02/1998 | WO1998013289A1 Coaxial drive elevator |
| 04/02/1998 | WO1998013218A1 Composition and method for polishing a composite |
| 04/02/1998 | WO1998013149A1 Washing means using liquefied gas of high density |
| 04/02/1998 | DE19743236A1 Exposure projector for integrated circuit production |
| 04/02/1998 | DE19743013A1 Ceramic circuit substrate arrangement |
| 04/02/1998 | DE19742181A1 Semiconductor component manufacturing method for IGBT, DMOSFET |
| 04/02/1998 | DE19742120A1 Semiconductor component wiring for DRAM cell with capacitor over-under bit line |
| 04/02/1998 | DE19741520A1 Alignment apparatus for loading semiconductor wafer with notch onto cassette |
| 04/02/1998 | DE19736145A1 Semiconductor wafer smoothing method |
| 04/02/1998 | DE19724221A1 Non volatile memory device |
| 04/02/1998 | DE19720413A1 Thinner composition used in removal of photoresists |
| 04/02/1998 | DE19716707A1 Halbleiterkristallscheiben -Wärmebehandlungsvorrichtung Semiconductor crystal wafers -Wärmebehandlungsvorrichtung |
| 04/02/1998 | DE19706532A1 Sputtering device for semiconductor component manufacture |
| 04/02/1998 | DE19646148A1 Planar semiconductor component for monolithic integrated circuit |
| 04/02/1998 | DE19640594A1 Licht-induzierte Grenzflächenzersetzung zur Strukturierung und Trennung von Halbleitermaterialien Light-induced interfacial decomposition to structure and separation of semiconductor materials |
| 04/02/1998 | DE19640488A1 Ceramic cooler for power semiconductor component |
| 04/02/1998 | DE19640425A1 Verfahren zur Waferidentifizierung in der Chipfertigung und Vorrichtung zur Durchführung des Verfahrens A method for identifying in wafer and chip production device for implementing the method |
| 04/02/1998 | DE19640422A1 Verfahren zur nass-chemischen Ätzung bzw. Oberflächenreinigung von arsenhaltigen Mischkristallverbindungen Method for the wet chemical etching or surface cleaning of arsenic mixed crystal compounds |
| 04/02/1998 | DE19640413A1 Verfahren zur Herstellung barrierenfreier Halbleiterspeicheranordnungen A process for preparing barrier-free semiconductor memory devices |
| 04/02/1998 | DE19640308A1 Leistungs-MOS-Bauelement Power MOS device |
| 04/02/1998 | DE19640255A1 Electronic module manufacturing method for contactless motor vehicle pedal switch contg. Hall sensor |
| 04/02/1998 | DE19640246A1 Halbleiteranordnung mit geschützter Barriere für eine Stapelzelle A semiconductor device with a protected barrier to cell stack |
| 04/02/1998 | DE19640244A1 Kondensator mit einem Elektrodenkern und einer dünnen Edelmetallschicht als erster Elektrode Capacitor with an electrode core and a thin noble metal layer as the first electrode |
| 04/02/1998 | DE19640240A1 Halbleiteranordnung mit einer Schicht aus einem Edelmetall und Verfahren zum Herstellen derselben A semiconductor device comprising a layer of a noble metal and method of manufacturing the same |
| 04/02/1998 | DE19640239A1 Speicherzelle mit Polymerkondensator Memory cell with polymer capacitor |
| 04/02/1998 | DE19640218A1 Integrierte Halbleiterspeicheranordnung Integrated semiconductor memory arrangement |
| 04/02/1998 | DE19640212A1 Semiconductor device production process involving impurity gettering |
| 04/02/1998 | DE19640211A1 Verfahren zur Herstellung barrierenfreier Halbleiterspeicheranordnungen A process for preparing barrier-free semiconductor memory devices |
| 04/02/1998 | DE19640192A1 Verfahren zur Flip-Chip-Montage A method for flip-chip mounting |
| 04/02/1998 | DE19640006A1 Production of directly printed circuit board-mounted, wire-bonded optical diodes with encapsulation |
| 04/02/1998 | DE19639899A1 Speicheranordnung Memory array |
| 04/02/1998 | DE19639875C1 Verfahren zur Herstellung eines MOS-Transistors A process for producing a MOS transistor |
| 04/02/1998 | DE19639682A1 Verfahren zum dauerhaften Verbinden von anorganischen Substraten A method for permanently joining inorganic substrates |
| 04/02/1998 | DE19639438A1 Halbleiterkörper mit Lotmaterialschicht Semiconductor body having solder layer |
| 04/02/1998 | DE19639432A1 Smooth surfaced poly-silicon layer production |
| 04/02/1998 | DE19638671A1 Semiconductor chip housing leads deforming jig and method |
| 04/02/1998 | DE19638669A1 Packaging frame-mounted chip in plastic housing |
| 04/02/1998 | DE19638371A1 One-side electroplating of chip module tape |
| 04/02/1998 | DE19632835C1 Verfahren zur Herstellung eines Kondensators in einer Halbeiteranordnung A method for manufacturing a capacitor in a semiconductor arrangement |
| 04/01/1998 | EP0833395A2 Method of fabricating a device including compound semiconductor crystal and method of fabricating a compound semiconductor layer structure |
| 04/01/1998 | EP0833393A1 Floating gate non-volatile memory cell with low erasing voltage and manufacturing method |
| 04/01/1998 | EP0833392A2 Field effect controllable vertical semiconductor device |
| 04/01/1998 | EP0833391A1 Semiconductor device on III-V semiconductor substrate and method for fabricating it |
| 04/01/1998 | EP0833388A2 Amplifying gate thyristor with lateral resistance |
| 04/01/1998 | EP0833384A2 Semiconductor body having a solder layer |
| 04/01/1998 | EP0833382A1 Plastic package for electronic devices |