Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
03/1998
03/24/1998US5729896 Method for attaching a flip chip on flexible circuit carrier using chip with metallic cap on solder
03/24/1998US5729856 Semiconductor wafer cleaning apparatus
03/19/1998WO1998011610A1 Ultra short trench transistors and process for making same
03/19/1998WO1998011609A1 Lateral dmos transistor for rf/mircrowave applications
03/19/1998WO1998011608A1 Charge coupled device, and method of manufacturing such a device
03/19/1998WO1998011607A1 Stacked read-only memory
03/19/1998WO1998011604A1 Method for producing a dram cellular arrangement
03/19/1998WO1998011603A1 Liquid source formation of thin films using hexamethyl-disilazane
03/19/1998WO1998011602A1 Method for producing integrated cmos circuits or transducers containing cmos circuits
03/19/1998WO1998011601A1 Semiconductor device and method of manufacturing the same
03/19/1998WO1998011600A1 Method for working semiconductor wafer
03/19/1998WO1998011599A1 Integrated circuit tray with flexural bearings
03/19/1998WO1998011598A1 Molecular contamination control system
03/19/1998WO1998011594A1 Thin film electrostatic shield for inductive plasma processing
03/19/1998WO1998011449A1 Wafer scale high density probe assembly, apparatus for use thereof and methods of fabrication thereof
03/19/1998WO1998011446A1 Integrated compliant probe for wafer level test and burn-in
03/19/1998WO1998011425A1 Apparatus and method for detecting micro defects in semi-conductors
03/19/1998WO1998011276A1 Gas mixture and method of dry etching metals, in particular copper, at low temperatures
03/19/1998WO1998010925A1 Memory device using movement of protons
03/19/1998WO1998010893A1 Aerodynamic aerosol chamber
03/19/1998WO1998010886A1 Laser removal of foreign materials from surfaces
03/19/1998DE19739994A1 Verfahren zur Bearbeitung eines Werkstückes A method for machining a workpiece
03/18/1998EP0829934A1 Method for fabricating an optoelectrical semiconductor device and a device or matrix of devices fabricated using said method
03/18/1998EP0829910A2 Method and device for forming semiconductor thin films, and photovoltaic elements
03/18/1998EP0829908A2 Field-effect transistor and method of producing the same
03/18/1998EP0829906A2 Junction high electron mobility transistor-heterojunction bipolar transistor (jhemt-hbt) monolithic microwave integrated circuit (mmic) and single growth method of fabrication
03/18/1998EP0829905A2 A large area active matrix array
03/18/1998EP0829904A2 Improved substrate cooldown chamber
03/18/1998EP0829903A2 Cassette chamber
03/18/1998EP0829880A2 Semiconductor memory device with an increased band width
03/18/1998EP0829784A1 Adaptive temperature controller and method of operation
03/18/1998EP0829768A1 Non-corrosive cleaning composition for removing plasma etching residues
03/18/1998EP0829766A2 Novel polymers and photoresist compositions
03/18/1998EP0829561A1 Process for producing silicon single crystal
03/18/1998EP0829560A2 A susceptor for a gas phase growth apparatus
03/18/1998EP0829559A1 Method for producing silicon wafers with a low defect-density
03/18/1998EP0829328A2 Polymeric substrate with polymeric microelements
03/18/1998EP0829312A2 Improvements in or relating to semiconductor devices
03/18/1998EP0829097A1 Method of transfer molding electronic packages and packages produced thereby
03/18/1998EP0829054A1 Automated generation of megacells in an integrated circuit design system
03/18/1998EP0829036A1 Lithographic scanning exposure projection apparatus
03/18/1998EP0829035A1 Scanning-slit exposure device
03/18/1998EP0829034A1 Process for producing a structured mask
03/18/1998EP0828999A1 Semiconductor substrate processing system and method providing shielded optical pyrometry
03/18/1998EP0828618A1 Method and apparatus for cleaning surfaces with a glow discharge plasma at one atmosphere of pressure
03/18/1998EP0828582A1 Ribbon-like core interconnection elements
03/18/1998EP0786071A4 On-axis mask and wafer alignment system
03/18/1998CN1176625A Method and apparatus for transporting lead frame, and in-line system using them
03/18/1998CN1176494A Semiconductor device and method for fabricating the same
03/18/1998CN1176493A Semiconductor integrated-circuit apparatus and its producing method
03/18/1998CN1176492A Chip-size semiconductor package and fabrication method thereof
03/18/1998CN1176491A Semi-conductor element of non-resistance characteristic material for realizing electrostatic discharge protection
03/18/1998CN1176490A Semiconductor integrated circuit
03/18/1998CN1176488A Gapfill and planarization process for shallow trench isolation
03/18/1998CN1176487A Production method of high-density metallic-gate MOS
03/18/1998CN1176486A Surface wave plasma processing apparatus
03/18/1998CN1176485A Cleaning apparatus of semiconductor device
03/18/1998CN1176467A Method for testing semiconductor memory device and semiconductor memory device
03/18/1998CN1176465A Internal voltage generating circuit
03/18/1998CN1176317A Gas injection system for CVD reactors
03/18/1998CN1176283A Abrasive composition and use of the same
03/18/1998CN1176282A Slurry using Mn oxide abrasives and fabrication process of semiconductor device using such slurry
03/18/1998CN1176239A Large ceramic article and method of manufacturing
03/18/1998CN1176214A Semiconductor device transporting and handling apparatus
03/18/1998CN1037774C Phosphonooxymethyl ethers derivatives of taxane
03/17/1998US5729496 Nonvolatile semiconductor memory element and method for fabricating the same
03/17/1998US5729440 Solder hierarchy for chip attachment to substrates
03/17/1998US5729437 Electronic part including a thin body of molding resin
03/17/1998US5729435 Semiconductor device and assembly board having through-holes filled with filling core
03/17/1998US5729423 Puncture resistant electrostatic chuck
03/17/1998US5729337 Inclination detecting apparatus
03/17/1998US5729325 Pellicle for a mask or substrate
03/17/1998US5729315 Circuit assembly and process for production thereof
03/17/1998US5729308 Active matrix display device
03/17/1998US5729172 For use in a semiconductor integrated circuit device
03/17/1998US5729150 Low-current probe card with reduced triboelectric current generating cables
03/17/1998US5729126 Master slice LSI with integrated fault detection circuitry
03/17/1998US5729056 Low cycle time CMOS process
03/17/1998US5729055 Integrated circuitry having a thin film polysilicon layer in ohmic contact with a conductive layer
03/17/1998US5729054 Conductive noble-metal-insulator-alloy barrier layer for high-dielectric-constant material electrodes
03/17/1998US5729052 Integrated ULSI heatsink
03/17/1998US5729045 In an integrated circuit
03/17/1998US5729043 Shallow trench isolation with self aligned PSG layer
03/17/1998US5729041 Protective film for fuse window passivation for semiconductor integrated circuit applications
03/17/1998US5729040 Semiconductor device having groups of element regions in the semiconductor substrate
03/17/1998US5729039 SOI transistor having a self-aligned body contact
03/17/1998US5729038 Integrated circuit
03/17/1998US5729037 MOSFET structure and fabrication process for decreasing threshold voltage
03/17/1998US5729036 Integrated circuit transistor having drain junction offset
03/17/1998US5729035 Non-volatile semiconductor device with multi-layered capacitor insulating film
03/17/1998US5729034 Semiconductor DRAM cell having a capacitor
03/17/1998US5729033 Fully self-aligned submicron heterojunction bipolar transistor
03/17/1998US5729032 Field effect type semiconductor device and manufacturing method thereof
03/17/1998US5729030 Semiconductor device
03/17/1998US5729028 Ion accelerator for use in ion implanter
03/17/1998US5729027 Ion implanter
03/17/1998US5728940 Leakage gas detector for semiconductor device and leakage gas detecting method using the same
03/17/1998US5728631 Method for forming a low capacitance dielectric layer
03/17/1998US5728630 Method of making a semiconductor device
03/17/1998US5728629 Process for preventing deposition on inner surfaces of CVD reactor
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