Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
04/1998
04/15/1998CN1179010A Package of semiconductor device with grooved intraconnection
04/15/1998CN1179008A Semiconductor device, method for producing said semiconductor and sputtering device
04/15/1998CN1179007A Wafer delivery device with door
04/15/1998CN1179006A Probe card and tester using said card
04/15/1998CN1179005A Semiconductor producing system
04/15/1998CN1179003A Ion beam neutralizing method and apparatus
04/15/1998CN1038080C EPROM cell with isolation transistor and methods for making and operating same
04/15/1998CN1038074C Reading-only memory device
04/14/1998US5740488 Resist developing apparatus with selectable spray and drip nozzles
04/14/1998US5740315 Fluid heating apparatus
04/14/1998US5740272 Inspection apparatus of wiring board
04/14/1998US5740180 Circuit and test method for testing input cells
04/14/1998US5740116 Current limiting during block writes of memory circuits
04/14/1998US5740105 Memory cell array with LOCOS free isolation
04/14/1998US5740103 Electrically programmable memory cell
04/14/1998US5740102 Data retention circuit and semiconductor memory device using the same
04/14/1998US5740099 Semiconductor memory device having peripheral circuit and interface circuit fabricated on bulk region out of silicon-on-insulator region for memory cells
04/14/1998US5740068 Fidelity enhancement of lithographic and reactive-ion-etched images by optical proximity correction
04/14/1998US5740065 Method for manufacturing semiconductor device
04/14/1998US5740062 Wafer positioning system
04/14/1998US5740059 Method of transporting substrates and apparatus for transporting substrates
04/14/1998US5740053 Method of controlling monitor used in cleaning machine and object processing machine and monitor apparatus
04/14/1998US5740052 Method and apparatus for manufacture of semiconductor devices
04/14/1998US5740034 Positioning apparatus and process system having the same
04/14/1998US5740016 In a semiconductor processing system
04/14/1998US5740009 Apparatus for improving wafer and chuck edge protection
04/14/1998US5739964 Projection lens assembly
04/14/1998US5739886 Liquid crystal display with reverse staggered thin film transistors and opposite electrode, and fabrication method thereof
04/14/1998US5739877 Enhanced throughput and yield
04/14/1998US5739703 BiCMOS logic gate
04/14/1998US5739593 Voltage source circuit for generating a plurality of values of voltages
04/14/1998US5739591 Semiconductor device with a carrier body on which a substrate with a semiconductor element is fastened by means of a glue layer and on which a pattern of conductor tracks is fastened
04/14/1998US5739590 Semiconductor device having improved surface evenness
04/14/1998US5739589 Semiconductor integrated circuit device process for fabricating the same and apparatus for fabricating the same
04/14/1998US5739587 Semiconductor device having a multi-latered wiring structure
04/14/1998US5739584 Multiple pin die package
04/14/1998US5739580 High density; minimized formation of parasitic field transistors
04/14/1998US5739579 Method for forming interconnections for semiconductor fabrication and semiconductor device having such interconnections
04/14/1998US5739578 High power transistor with contact plugs extended from collectors through a substrate to have ends connected together in an indent in the substrate
04/14/1998US5739577 Resistive structure for integrated circuits and method of forming same
04/14/1998US5739576 Integrated chip multilayer decoupling capacitors
04/14/1998US5739575 Dielectrically isolated substrate and method for manufacturing the same
04/14/1998US5739574 SOI semiconductor device with low concentration of electric field around the mesa type silicon
04/14/1998US5739573 Semiconductor device with improved salicide structure and a method of manufacturing the same
04/14/1998US5739572 High voltage semiconductor device
04/14/1998US5739571 Semiconductor device having protection device for preventing the electrostatic breakdown of output buffer MOSFETs
04/14/1998US5739570 Integrated circuit
04/14/1998US5739569 Non-volatile memory cell with oxide and nitride tunneling layers
04/14/1998US5739568 Non-volatile memory having a cell applying to multi-bit data by double layered floating gate architecture and programming method for the same
04/14/1998US5739567 Highly compact memory device with nonvolatile vertical transistor memory cell
04/14/1998US5739566 Non-volatile semiconductor memory cell array
04/14/1998US5739565 Semiconductor device and manufacturing process therefor
04/14/1998US5739564 Semiconductor device having a static-random-access memory cell
04/14/1998US5739563 Ferroelectric type semiconductor device having a barium titanate type dielectric film and method for manufacturing the same
04/14/1998US5739559 Compound semiconductor integrated circuit with a particular high resistance layer
04/14/1998US5739558 High electron mobility transistor including asymmetrical carrier supply layers sandwiching a channel layer
04/14/1998US5739557 Non-gold ohmic contact metallization; include both enhancement mode and depletion mode devices
04/14/1998US5739549 Thin film transistor having offset region
04/14/1998US5739546 Semiconductor wafer
04/14/1998US5739544 Quantization functional device utilizing a resonance tunneling effect and method for producing the same
04/14/1998US5739068 Semiconductor processing method of making electrical contact to a node received within a mass of insulating dielectric material
04/14/1998US5739067 Method for forming active devices on and in exposed surfaces of both sides of a silicon wafer
04/14/1998US5739066 Semiconductor processing methods of forming a conductive gate and line
04/14/1998US5739064 Second implanted matrix for agglomeration control and thermal stability
04/14/1998US5739063 Employing hydrochloric acid to provide sufficient chlorine to reduce stacking fault
04/14/1998US5739062 Method of making bipolar transistor
04/14/1998US5739061 Method of manufacturing a semiconductor device using gate side wall as mask for self-alignment
04/14/1998US5739060 Method of fabricating a capacitor structure for a semiconductor memory device
04/14/1998US5739059 Method of forming a semiconductor device having high and low resistance polysilicon
04/14/1998US5739058 Method to control threshold voltage by modifying implant dosage using variable aperture dopant implants
04/14/1998US5739057 Method of making self-aligned dual gate MOSFET with an ultranarrow channel
04/14/1998US5739056 Oxidation, masking, photolithography, stripping, dopes
04/14/1998US5739055 Method for preparing a substrate for a semiconductor package
04/14/1998US5739053 Bonding, pressurizing, heating for alloying, transferring, realloying; packaging
04/14/1998US5739052 Apparatus and method for detecting defects in insulative layers of MOS active devices
04/14/1998US5739050 Method and apparatus for assembling a semiconductor package for testing
04/14/1998US5739049 Forming lower insulating layer over substrate, selectively removing dielectric film by etching to form contact hole to expose substrate, forming metal film, selectively removing to form electrode, surface oxidizing to form oxide film
04/14/1998US5739047 Isotropic etching
04/14/1998US5739046 Providing dielectric coating on semiconductor substrate, opening contact holes, depositing titanium layer, annealing to form titanium nitride and titanium silicide
04/14/1998US5739045 Semiconductor device with increased on chip decoupling capacitance
04/14/1998US5739044 Method of manufacturing semiconductor device
04/14/1998US5738975 Mixture containing (meth)acrylate terpolymer having group which reacts with an acid to convert polarity of polymer, photo acid generating compound, solvent
04/14/1998US5738972 Blend of binder, dissolution inhibitor, photosensitivr compound, base, phenolic resin and solvent
04/14/1998US5738968 Positive photoresist composition
04/14/1998US5738942 Semiconductor silicon wafer and process for producing it
04/14/1998US5738928 Tape automated bonding tape comprising metal plate support, conductor pattern, insulating adhesive layer; nondeforming
04/14/1998US5738917 Process for in-situ deposition of a Ti/TiN/Ti aluminum underlayer
04/14/1998US5738915 Curing polymer layers on semiconductor substrates using variable frequency microwave energy
04/14/1998US5738909 Method of forming high-integrity ultrathin oxides
04/14/1998US5738800 Polishing with aqueous slurry of abrasive particles containing complexing agent to increase selectivity
04/14/1998US5738771 Used to form first metal oxide film by non-reactive sputtering and second metal oxide by reactive sputtering, and forming a semiconductor on second metal oxide
04/14/1998US5738757 Planar masking for multi-depth silicon etching
04/14/1998US5738756 Sampling signals produced by photosensitive equipment, digitally filtering and cross-correlating data, normalizing data
04/14/1998US5738752 System and method for plasma etching
04/14/1998US5738751 Substrate support having improved heat transfer
04/14/1998US5738729 Coating chamber, accompanying substrate carrier, vacuum evaporation and coating method
04/14/1998US5738722 III-V system compound semiconductor device and method for manufacturing the semiconductor device
04/14/1998US5738721 Liquid precursor and method for forming a cubic-phase passivating/buffer film
04/14/1998US5738720 Method of manufacturing microstructure pattern of molecular material high orientation aggregate with the aid of difference of growth rate by substrate material
04/14/1998US5738702 Apparatus for holding a hollow cylinder of silicon dioxide soot