| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 02/24/1998 | US5721091 Composition for forming an electrically conductive layer to be used in patterning |
| 02/24/1998 | US5721090 Method of etching a substrate |
| 02/24/1998 | US5721079 Length of optical path is adjusted such that the magnification factor in the emission of nonexposure light matches the magnification factor in emission of exposure light |
| 02/24/1998 | US5721075 Forming phase shift layer such that its transmittance with respect to exposure light has a specific value, changing transmittance of halftone layer material to desired transmittance value |
| 02/24/1998 | US5721074 Method for fabricating a light exposure mask comprising the use of a process defect inspection system |
| 02/24/1998 | US5721043 Method of forming improved thin film dielectrics by Pb doping |
| 02/24/1998 | US5721021 Method of depositing titanium-containing conductive thin film |
| 02/24/1998 | US5721009 Reacting organic acid anhydride, mixture of metal alkoxides, removing by-products, adding solvent to form metal-organic decomposition material for forming ceramic films |
| 02/24/1998 | US5720849 Wafer mounting device |
| 02/24/1998 | US5720846 Construction of a chamber casing in a plasma etching system |
| 02/24/1998 | US5720845 Wafer polisher head used for chemical-mechanical polishing and endpoint detection |
| 02/24/1998 | US5720843 Electrical interconnection method |
| 02/24/1998 | US5720818 Conduits for flow of heat transfer fluid to the surface of an electrostatic chuck |
| 02/24/1998 | US5720814 Photoresist coating apparatus |
| 02/24/1998 | US5720810 Double-walled crucible, inverted conical flow guide cover, short passage, flow guide cylinder |
| 02/24/1998 | US5720590 Articulated arm transfer device |
| 02/24/1998 | US5720424 Wire bonding apparatus |
| 02/24/1998 | US5720324 Filling of assemblies |
| 02/24/1998 | US5720271 Process for the orientation of single crystals for cutting in a cutting machine and device for practicing this process |
| 02/24/1998 | US5720100 Assembly having a frame embedded in a polymeric encapsulant and method for forming same |
| 02/24/1998 | US5720099 Thin film fabrication technique for implantable electrodes |
| 02/24/1998 | CA2074001C Master slice lsi with fault detection circuitry |
| 02/19/1998 | WO1998007231A1 Process for providing a glass dielectric layer on an electrically conductive substrate and electrostatic chucks made by the process |
| 02/19/1998 | WO1998007194A1 Ultra-low power-delay product nnn/ppp logic devices |
| 02/19/1998 | WO1998007190A1 Process for dividing a semiconductor wafer |
| 02/19/1998 | WO1998007189A1 Semiconductor trench isolation structure having improved upper surface planarity |
| 02/19/1998 | WO1998007188A1 Wafer frame |
| 02/19/1998 | WO1998007187A1 Process for producing semiconductor bodies with a movpe-layer sequence |
| 02/19/1998 | WO1998007186A1 Method and device for manufacturing semiconductor device |
| 02/19/1998 | WO1998007185A1 Improved delineation pattern for epitaxial depositions |
| 02/19/1998 | WO1998007184A1 Process for manufacturing a capacitor in a semiconductor arrangement |
| 02/19/1998 | WO1998007113A1 Chip card, process for manufacturing a chip card and semiconductor chip for use in a chip card |
| 02/19/1998 | WO1998007071A1 Aqueous antireflective coatings for photoresist compositions |
| 02/19/1998 | WO1998007070A1 Antireflective coatings for photoresist compositions |
| 02/19/1998 | WO1998007065A1 Method for coating semiconductor element with resin, coating resin, and liquid crystal display device |
| 02/19/1998 | WO1998007040A1 Membrane probing system with local contact scrub |
| 02/19/1998 | WO1998006889A2 Superheated vapor dryer system |
| 02/19/1998 | DE19735041A1 Integrated circuit microcomponents separating method, e.g. for microphone, pressure sensor transducer |
| 02/19/1998 | DE19734879A1 Silicon etching with alkaline etchant containing metal additive |
| 02/19/1998 | DE19734485A1 Cleaning set for highly integrated semiconductor component |
| 02/19/1998 | DE19720272A1 Semiconductor memory device with capacitor, for DRAM |
| 02/19/1998 | DE19720270A1 Semiconductor memory device with capacitor |
| 02/19/1998 | DE19720230A1 Semiconductor memory device with capacitor |
| 02/19/1998 | DE19720227A1 Semiconductor memory device with capacitor |
| 02/19/1998 | DE19720220A1 Semiconductor memory device with capacitor |
| 02/19/1998 | DE19720219A1 Semiconductor memory device manufacturing method with capacitor |
| 02/19/1998 | DE19720218A1 Semiconductor memory device with capacitor |
| 02/19/1998 | DE19720215A1 Semiconductor component manufacturing method for power IBGT, MOSFET in e.g. motor drive, robotics, lighting control |
| 02/19/1998 | DE19720213A1 Semiconductor memory device with capacitor |
| 02/19/1998 | DE19720210A1 Semiconductor memory device with capacitor |
| 02/19/1998 | DE19720204A1 Manufacturing method of semiconductor memory device with capacitor |
| 02/19/1998 | DE19720202A1 Semiconductor memory device with capacitor formation method, for e.g. DRAM |
| 02/19/1998 | DE19720195A1 Semiconductor memory device with capacitor (4) |
| 02/19/1998 | DE19720194A1 Manufacturing semiconductor memory device with capacitor, for DRAM |
| 02/19/1998 | DE19720166A1 Manufacturing semiconductor memory device with capacitor |
| 02/19/1998 | DE19651768C1 Voltage boost circuit for semiconductor memory |
| 02/19/1998 | DE19640448C1 Stacked cell capacitor-containing integrated circuit production |
| 02/19/1998 | DE19640215C1 Integrated semiconductor memory array with buried plate electrode |
| 02/19/1998 | DE19633184A1 Halbleiterbauelement mit durch Ionenimplantation eingebrachten Fremdatomen und ein Verfahren zu dessen Herstellung Semiconductor component introduced by ion implantation with impurity atoms, and a process for its preparation |
| 02/19/1998 | DE19633183A1 Halbleiterbauelement mit durch Ionenimplantation eingebrachten Fremdatomen und Verfahren zu dessen Herstellung Semiconductor component introduced by ion implantation with impurity atoms and process for its preparation |
| 02/19/1998 | DE19632626A1 Verfahren zum Herstellen von Halbleiterkörpern mit MOVPE-Schichtenfolge A method for manufacturing semiconductor bodies by MOVPE layer sequence |
| 02/19/1998 | DE19632113C1 Chipkarte, Verfahren zur Herstellung einer Chipkarte und Halbleiterchip zur Verwendung in einer Chipkarte Chip card, process for manufacturing a smart card, and semiconductor chip for use in a smart card |
| 02/19/1998 | CA2263357A1 Semiconductor supercapacitor system, method for making same and articles produced therefrom |
| 02/18/1998 | EP0824272A2 Semiconductor memory and method of producing the same |
| 02/18/1998 | EP0824271A1 Dielectric isolation substrate and method for manufacturing the same |
| 02/18/1998 | EP0824270A2 A method of mounting a plurality of electronic parts on a circuit board |
| 02/18/1998 | EP0824269A2 Method for etching an Al metallization by a C12/HC1 based plasma |
| 02/18/1998 | EP0824268A2 Method of fabricating a gate oxide layer |
| 02/18/1998 | EP0824267A1 Lift-off device for flat pieces and its use |
| 02/18/1998 | EP0824266A2 Substrate processing apparatus |
| 02/18/1998 | EP0824223A1 Photosensitive resin composition for far-ultraviolet exposure |
| 02/18/1998 | EP0824144A1 Aqueous working liquid composition for wire saw |
| 02/18/1998 | EP0824056A2 Dicing machine |
| 02/18/1998 | EP0824053A1 Apparatus for chemical mechanical polishing of wafers |
| 02/18/1998 | EP0823983A1 Precision clamp, and method for clamping thyristors and similar electronic power components |
| 02/18/1998 | EP0823977A1 Lithopraphic apparatus for step-and-scan imaging of a mask pattern |
| 02/18/1998 | CN1173948A Thin-film semiconductor device, its method for making the same, liquid crystal display equipment and method for making the same |
| 02/18/1998 | CN1173741A Epitaxial wafer for gap light-emitting element and gap light-emitting element |
| 02/18/1998 | CN1173740A S. C. I. C. device |
| 02/18/1998 | CN1173739A Semiconductor device and its manufacturing method |
| 02/18/1998 | CN1173737A Method of packaging fragile devices with gel medium confined by rim member |
| 02/18/1998 | CN1173736A Connter-fusing component and its mfg. method |
| 02/18/1998 | CN1173735A Method of wire bonding integrated circuit to ultraflexible substrate |
| 02/18/1998 | CN1173734A Contact mask for manufacturing semiconductor device |
| 02/18/1998 | CN1173733A Radiant polishing block heater |
| 02/18/1998 | CN1173732A Method and apparatus for transporting and using semiconductor substrate carrier |
| 02/18/1998 | CN1173647A Photoresist composition |
| 02/18/1998 | CN1173556A Apparatus for pulling silicon single crystal |
| 02/18/1998 | CN1173550A Plasma treatment appts. |
| 02/18/1998 | CN1173546A Gold alloy wire and method for making bump |
| 02/17/1998 | US5719991 System for compensating against wafer edge heat loss in rapid thermal processing |
| 02/17/1998 | US5719952 Inspection system for cross-sectional imaging |
| 02/17/1998 | US5719888 Memory system |
| 02/17/1998 | US5719811 Semiconductor memory device |
| 02/17/1998 | US5719808 Flash EEPROM system |
| 02/17/1998 | US5719796 System for monitoring and analyzing manufacturing processes using statistical simulation with single step feedback |
| 02/17/1998 | US5719733 ESD protection for deep submicron CMOS devices with minimum tradeoff for latchup behavior |
| 02/17/1998 | US5719617 Illumination system for superposing light beams one upon another on a surface using a projecting system having different focal point positions |
| 02/17/1998 | US5719534 Semiconductor integrated circuit having low power consumption oscillator |
| 02/17/1998 | US5719530 High power bipolar transistor device |