Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
02/1998
02/11/1998EP0823659A1 Negative type image recording material
02/11/1998EP0823607A2 Method and apparatus for drying flat objects
02/11/1998EP0823584A1 Gas filling method and facility
02/11/1998EP0823492A2 Zone heating system with feedback control
02/11/1998EP0823491A2 Gas injection system for CVD reactors
02/11/1998EP0823465A2 Polishing composition for chemical mechanical polishing
02/11/1998EP0823327A2 Positive photosensitive composition, positive photosensitive lithographic printing plate and method for making positive photosensitive lithographic printing plate
02/11/1998EP0823309A1 Method and apparatus for controlling flatness of polished semiconductor wafers
02/11/1998EP0823308A1 Method for fabricating silicon semiconductor discrete wafer
02/11/1998EP0823279A2 Method and apparatus for treating exhaust gases from CVD, PECVD or plasma etch reactors
02/11/1998EP0823193A1 Arrangement for the manufacture of multilayers
02/11/1998EP0823131A1 Read-only storage cell arrangement and process for its production
02/11/1998EP0823130A1 Encapsulation of transmitter and receiver modules
02/11/1998EP0823127A1 High speed diamond-based machining of silicon semiconductor die in wafer and packaged form for backside emission microscope detection
02/11/1998EP0823126A1 Bottom electrode structure for dielectric capacitors and method of making the same
02/11/1998EP0823125A2 Self-alignment technique for junction isolation and wells
02/11/1998EP0823098A2 Laminating device for joining a metal strip and an insulating material strip
02/11/1998EP0823073A1 Illumination unit for an optical apparatus
02/11/1998EP0822995A1 Modification of surfaces of polymers, metal or ceramic
02/11/1998EP0822884A1 A polishing cloth and a method for attaching/detaching the polishing cloth to/from a base plate of a polishing machine
02/11/1998EP0822881A1 Method and apparatus for step and repeat exposures
02/11/1998EP0700580A4 Method for fabricating suspension members for micromachined sensors
02/11/1998CN1173107A Method and apparatus for ion formation in ion implanter
02/11/1998CN1173044A Semiconductor elemetn and data processing equipment ted used it
02/11/1998CN1173043A Semiconductor memory device
02/11/1998CN1173042A Direct chip attach for low alpha emission interconnect system
02/11/1998CN1173041A Method for manufacturing for semiconductor device
02/11/1998CN1173039A Wafer carrier
02/11/1998CN1172973A Electron column optics for multibeam electron lithography system
02/11/1998CN1037386C Thin silcon chip material on diamond film and its preparing method
02/10/1998US5717928 System and a method for obtaining a mask programmable device using a logic description and a field programmable device implementing the logic description
02/10/1998US5717696 Circuit for testing a semiconductor chip having embedded arrays intermixed with logic
02/10/1998US5717652 Semiconductor memory device capable of high speed plural parallel test, method of data writing therefor and parallel tester
02/10/1998US5717635 High density EEPROM for solid state file
02/10/1998US5717634 Programmable and convertible non-volatile memory array
02/10/1998US5717628 Nitride cap formation in a DRAM trench capacitor
02/10/1998US5717581 Charge pump circuit with feedback control
02/10/1998US5717573 Interconnection card and methods for manufacturing and connecting the card
02/10/1998US5717559 Input/output protection device for use in semiconductor device
02/10/1998US5717492 Position detecting apparatus and a method for manufacturing semiconductor devices using the apparatus
02/10/1998US5717485 Foreign substance inspection apparatus
02/10/1998US5717483 Illumination optical apparatus and method and exposure apparatus using the illumination optical apparatus and method
02/10/1998US5717482 Stage apparatus and method of mounting a substrate on a substrate holding surface of a substrate chuck in which a substrate is mounted in a Z-axis direction
02/10/1998US5717477 Support bearing electric conductors having an electronic component with contact warts coated with graphite contacting the conductors and method of contacting
02/10/1998US5717359 Semiconductor integrated circuit having elongated fixed potential lines to reduce noise on the lines
02/10/1998US5717346 Low skew multiplexer network and programmable array clock/reset application thereof
02/10/1998US5717329 Analog autonomous test bus framework for testing integrated circuits on a printed circuit board
02/10/1998US5717324 Intermediate potential generation circuit
02/10/1998US5717323 Resistance reference circuit
02/10/1998US5717294 For processing a target surface of a substrate
02/10/1998US5717255 Semiconductor device
02/10/1998US5717254 Semiconductor device including a plurality of transistors
02/10/1998US5717253 Structure for forming an improved quality silicidation layer
02/10/1998US5717251 Semiconductor integrated circuit device having minature multi-level wiring structure low in parasitic capacitance
02/10/1998US5717250 Sputter and CVD deposited titanium nitride barrier layer between a platinum layer and a polysilicon plug
02/10/1998US5717247 Microcircuit via interconnect
02/10/1998US5717245 Ball grid array arrangement
02/10/1998US5717244 Semiconductor device having layers with varying lifetime characteristics
02/10/1998US5717242 Integrated circuit having local interconnect for reduing signal cross coupled noise
02/10/1998US5717241 For an integrated circuit
02/10/1998US5717240 Static semiconductor memory device
02/10/1998US5717238 Substrate with controlled amount of noble gas ions to reduce channeling and/or diffusion of a boron dopant forming P-LDD region of a PMOS device
02/10/1998US5717237 PN junction floating gate EEPROM, flash EPROM device
02/10/1998US5717236 Semiconductor memory including stacked capacitor having a flat surface
02/10/1998US5717235 Non-volatile memory device having ferromagnetic and piezoelectric properties
02/10/1998US5717234 Ferroelectric layer of mixed oxide of barium, stronium and titanium is sandwhiched between top and bottom electrodes of oxides of barium, stronium and ruthenium; excellent film uniformity, high density, and high deposition rate
02/10/1998US5717233 Semiconductor device having capacitior and manufacturing method thereof
02/10/1998US5717232 Semiconductor device sealed with molded resin
02/10/1998US5717231 Antenna having elements with improved thermal impedance
02/10/1998US5717228 Heterojunction bipolar transistor with crystal orientation
02/10/1998US5717227 Bipolar junction transistors having insulated gate electrodes
02/10/1998US5717224 Preventing the light illuminating by an interlayer shield consisting of silicon nitride, aluminum oxide, aluminum nitride
02/10/1998US5717223 Array with amorphous silicon TFTs in which channel leads overlap insulating region no more than maximum overlap
02/10/1998US5717163 Plastic material pouring device for forming electronic components
02/10/1998US5717162 IC carrier having a movable and stationary corner rulers
02/10/1998US5717054 Quick-setting
02/10/1998US5717034 Polymerizable monomers, perfluorinated hydrocarbon polymer, curing catalyst; dielectrics
02/10/1998US5716891 Heating, low pressure vapor depositing a dielectric silica layer
02/10/1998US5716890 Structure and method for fabricating an interlayer insulating film
02/10/1998US5716889 Method of arranging alignment marks
02/10/1998US5716887 Method of manufacturing BiCMOS device
02/10/1998US5716886 Method of fabricating a high voltage metal-oxide semiconductor (MOS) device
02/10/1998US5716885 Method for manufacturing NAND type mask-ROM having improved cell current
02/10/1998US5716884 Process for fabricating a stacked capacitor
02/10/1998US5716883 Method of making increased surface area, storage node electrode, with narrow spaces between polysilicon columns
02/10/1998US5716882 Method for forming a DRAM capacitor by forming a trench in a polysilicon layer
02/10/1998US5716881 Process to fabricate stacked capacitor DRAM and low power thin film transistor SRAM devices on a single semiconductor chip
02/10/1998US5716880 Method for forming vertical polysilicon diode compatible with CMOS/BICMOS formation
02/10/1998US5716879 Method of making a thin film transistor
02/10/1998US5716876 Method for manufacturing completely circular semiconductor wafers
02/10/1998US5716875 Forming a protective barrier layer after hydrogen annealing transistor and before oxygen annealing capacitors
02/10/1998US5716874 Method of fabricating EPROM memory by individually forming gate oxide and coupling insulator
02/10/1998US5716873 Covering front surface of water with protective coating before removing impurities from back surface
02/10/1998US5716872 Method of manufacturing multilayer interconnection structure having a dielectric film with improved flatness
02/10/1998US5716871 Semiconductor device and method of forming the same
02/10/1998US5716870 Method for producing titanium thin films by low temperature plasma-enhanced chemical vapor deposition using a rotating susceptor reactor
02/10/1998US5716869 Method of forming a wiring layer of a semiconductor device using reflow process
02/10/1998US5716868 Fabrication method of semiconductor device with trench isolation structure
02/10/1998US5716867 Solid state image sensor
02/10/1998US5716866 Method of forming a semiconductor device