| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 03/25/1998 | CN1037881C Method for forming contact holes of a semiconductor device |
| 03/24/1998 | USRE35753 Optical lithographical imaging system including optical transmission diffraction devices |
| 03/24/1998 | US5732028 In a semiconductor device |
| 03/24/1998 | US5732026 Semiconductor memory device including main/sub-bit line arrangement |
| 03/24/1998 | US5732021 Programmable and convertible non-volatile memory array |
| 03/24/1998 | US5732016 Memory cell structure in a magnetic random access memory and a method for fabricating thereof |
| 03/24/1998 | US5732012 Rom cell with reduced drain capacitance |
| 03/24/1998 | US5732009 Semiconductor integrated circuit device including a DRAM in which a cell selection transistor has a stabilized threshold voltage |
| 03/24/1998 | US5731962 Semiconductor device free from short-circuit due to resin pressure in mold |
| 03/24/1998 | US5731949 Structure of capacitor and method of frabricating same |
| 03/24/1998 | US5731856 Methods for forming liquid crystal displays including thin film transistors and gate pads having a particular structure |
| 03/24/1998 | US5731803 Array with light active units sized to eliminate artifact from size difference |
| 03/24/1998 | US5731747 Electronic component having a thin-film structure with passive elements |
| 03/24/1998 | US5731734 Zero power fuse circuit |
| 03/24/1998 | US5731720 Semiconductor integrated circuit device capable of reducing power consumption |
| 03/24/1998 | US5731701 Analog autonomous test bus framework for testing integrated circuits on a printed circuit board |
| 03/24/1998 | US5731697 In-situ monitoring of the change in thickness of films |
| 03/24/1998 | US5731678 Processing head for semiconductor processing machines |
| 03/24/1998 | US5731641 Linear motor driven vertical lift stage |
| 03/24/1998 | US5731637 Semiconductor device |
| 03/24/1998 | US5731636 Semiconductor bonding package |
| 03/24/1998 | US5731635 Semiconductor device having a carrier and a multilayer metallization |
| 03/24/1998 | US5731634 Semiconductor device having a metal film formed in a groove in an insulating film |
| 03/24/1998 | US5731633 Thin multichip module |
| 03/24/1998 | US5731632 Semiconductor device having a plastic package |
| 03/24/1998 | US5731631 Semiconductor device with tape automated bonding element |
| 03/24/1998 | US5731630 Tape carrier for increasing the number of terminals between the tape carrier and a substrate |
| 03/24/1998 | US5731628 Semiconductor device having element with high breakdown voltage |
| 03/24/1998 | US5731626 Process for controlling dopant diffusion in a semiconductor layer and semiconductor layer formed thereby |
| 03/24/1998 | US5731623 Semiconductor device |
| 03/24/1998 | US5731620 Semiconductor device with reduced parasitic substrate capacitance |
| 03/24/1998 | US5731619 CMOS structure with FETS having isolated wells with merged depletions and methods of making same |
| 03/24/1998 | US5731618 Semiconductor device and method of manufacturing thereof |
| 03/24/1998 | US5731617 Semiconductor device having bipolar transistor and field effect transistor |
| 03/24/1998 | US5731614 Electrostatic protective device having elongate gate electrodes in a ladder structure |
| 03/24/1998 | US5731613 Semiconductor device having a monocrystalline layer composed of carbon, oxygen, hydrogen and nitrogen atoms |
| 03/24/1998 | US5731612 Insulated gate field effect transistor structure having a unilateral source extension |
| 03/24/1998 | US5731611 MOSFET transistor cell manufactured with selectively implanted punch through prevent and threshold reductoin zones |
| 03/24/1998 | US5731610 Semiconductor device having improved contacts to a thin conductive layer |
| 03/24/1998 | US5731609 MOS random access memory having array of trench type one-capacitor/one-transistor memory cells |
| 03/24/1998 | US5731608 One transistor ferroelectric memory cell and method of making the same |
| 03/24/1998 | US5731604 Semiconductor device MOS gated |
| 03/24/1998 | US5731603 Lateral IGBT |
| 03/24/1998 | US5731598 Single electron tunnel device and method for fabricating the same |
| 03/24/1998 | US5731592 Exhaust system for an ion implanter |
| 03/24/1998 | US5731591 Beam exposure system having improved mask unit |
| 03/24/1998 | US5731577 Illumination apparatus and projection exposure apparatus using the same |
| 03/24/1998 | US5731547 Circuitized substrate with material containment means and method of making same |
| 03/24/1998 | US5731247 Method for manufacturing a semiconductor device including pre-oxidation process |
| 03/24/1998 | US5731246 Protection of aluminum metallization against chemical attack during photoresist development |
| 03/24/1998 | US5731245 High aspect ratio low resistivity lines/vias with a tungsten-germanium alloy hard cap |
| 03/24/1998 | US5731244 Laser wire bonding for wire embedded dielectrics to integrated circuits |
| 03/24/1998 | US5731243 Method of cleaning residue on a semiconductor wafer bonding pad |
| 03/24/1998 | US5731242 Self-aligned contact process in semiconductor fabrication |
| 03/24/1998 | US5731241 Self-aligned sacrificial oxide for shallow trench isolation |
| 03/24/1998 | US5731240 Manufacturing method for semiconductor depositing device |
| 03/24/1998 | US5731239 Method of making self-aligned silicide narrow gate electrodes for field effect transistors having low sheet resistance |
| 03/24/1998 | US5731238 Integrated circuit having a jet vapor deposition silicon nitride film and method of making the same |
| 03/24/1998 | US5731237 Method of producing an EPROM with a trench insulating layer |
| 03/24/1998 | US5731236 Process to integrate a self-aligned contact structure, with a capacitor structure |
| 03/24/1998 | US5731235 Methods of forming a silicon nitrite film, a capacitor dielectric layer and a capacitor |
| 03/24/1998 | US5731234 Process for global planarization of memory and globally planarized memory |
| 03/24/1998 | US5731233 Semiconductor device having MOS transistor and method of manufacturing the same |
| 03/24/1998 | US5731232 Method for concurrently making thin-film-transistor (TFT) gate electrodes and ohmic contacts at P/N junctions for TFT-static random |
| 03/24/1998 | US5731231 Semiconductor apparatus, fabrication method therefor and board frame |
| 03/24/1998 | US5731230 Method for processing and/or shipping integrated circuit devices |
| 03/24/1998 | US5731227 Chip on board package with top and bottom terminals |
| 03/24/1998 | US5731226 Low temperature method of manufacturing epitaxial titanium silicide |
| 03/24/1998 | US5731225 Tungsten plug |
| 03/24/1998 | US5731224 Method for manufacturing ohmic contacts for compound semiconductors |
| 03/24/1998 | US5731223 Array of solder pads on an integrated circuit |
| 03/24/1998 | US5731221 Isolation method in a semiconductor device |
| 03/24/1998 | US5731220 Method of making barium strontium titanate (BST) thin film by erbium donor doping |
| 03/24/1998 | US5731218 Method for producing a contact hole to a doped region |
| 03/24/1998 | US5731216 Method of making an active matrix display incorporating an improved TFT |
| 03/24/1998 | US5731214 Manufacture of semiconductor device with self-aligned doping |
| 03/24/1998 | US5731209 Method for the determination of nitrogen concentration in compound semiconductor |
| 03/24/1998 | US5731132 Containing anionic and nonionic surfactants; for photoresist layers |
| 03/24/1998 | US5731131 Method of manufacturing semiconductor devices |
| 03/24/1998 | US5731130 Method for fabricating stacked capacitors on dynamic random access memory cells |
| 03/24/1998 | US5731125 For forming resist film |
| 03/24/1998 | US5731113 Method of reducing registration error in exposure step of semiconductor device |
| 03/24/1998 | US5731109 Pattern structure of photomask comprising a sawtooth pattern |
| 03/24/1998 | US5731041 Method for producing silicon coating having high surface area |
| 03/24/1998 | US5730852 Preparation of cuxinygazsen (X=0-2, Y=0-2, Z=0-2, N=0-3) precursor films by electrodeposition for fabricating high efficiency solar cells |
| 03/24/1998 | US5730847 Arc ion plating device and arc ion plating system |
| 03/24/1998 | US5730835 Sputtering from conductive layer |
| 03/24/1998 | US5730834 Fluorine residue removal after tungsten etchback |
| 03/24/1998 | US5730804 Process gas supply apparatus |
| 03/24/1998 | US5730803 Apparatus and method for transferring heat from a hot electrostatic chuck to an underlying cold body |
| 03/24/1998 | US5730802 Vapor growth apparatus and vapor growth method capable of growing good productivity |
| 03/24/1998 | US5730801 Compartnetalized substrate processing chamber |
| 03/24/1998 | US5730799 Device for producing single crystals |
| 03/24/1998 | US5730798 Ozone, air, oxidation |
| 03/24/1998 | US5730792 Methylsilane triol condensate |
| 03/24/1998 | US5730575 Convertible wafer transfer machine |
| 03/24/1998 | US5730574 Transfer apparatus for and method of transferring substrate |
| 03/24/1998 | US5730573 Clean transfer method and apparatus therefor |
| 03/24/1998 | US5730162 Apparatus and method for washing substrates |
| 03/24/1998 | US5730113 Dicing saw alignment for array ultrasonic transducer fabrication |