| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 03/02/1999 | US5878191 Heat treatment apparatus for semiconductor wafers |
| 03/02/1999 | US5878105 X-ray mask |
| 03/02/1999 | US5878068 Energy quantity control method |
| 03/02/1999 | US5878048 Mask ROM having redundancy function |
| 03/02/1999 | US5877994 Space-efficient MDQ switch placement |
| 03/02/1999 | US5877986 Multi-state Flash EEprom system on a card that includes defective cell substitution |
| 03/02/1999 | US5877980 Nonvolatile memory device having a program-assist plate |
| 03/02/1999 | US5877978 Semiconductor memory device |
| 03/02/1999 | US5877964 Semiconductor device compensation system and method |
| 03/02/1999 | US5877943 Clustering adapter for spherical shaped devices |
| 03/02/1999 | US5877928 Electronic circuit device |
| 03/02/1999 | US5877833 Interconnection structure with raised perimeter portions |
| 03/02/1999 | US5877650 Booster circuit |
| 03/02/1999 | US5877648 Integrated circuit having a control circuit for controlling connection of monitor points to electrode pads |
| 03/02/1999 | US5877646 Method for the turn-on regulation of an IGBT and apparatus for carrying out the method |
| 03/02/1999 | US5877631 Evaluation of the quality of wiring formed in a test semiconductor device |
| 03/02/1999 | US5877559 Film carrier for fine-pitched and high density mounting and semiconductor device using same |
| 03/02/1999 | US5877558 Gallium nitride-based III-V group compound semiconductor |
| 03/02/1999 | US5877557 Low temperature aluminum nitride |
| 03/02/1999 | US5877555 Direct contact die attach |
| 03/02/1999 | US5877551 Semiconductor package having a ground or power ring and a metal substrate |
| 03/02/1999 | US5877550 Hybrid module and method of manufacturing the same |
| 03/02/1999 | US5877549 UFBGA package equipped with interface assembly including a photosoluble layer |
| 03/02/1999 | US5877544 Electronic micropackage for an electronic memory card |
| 03/02/1999 | US5877543 Device assembly structure with reinforced outer leads |
| 03/02/1999 | US5877542 Plastic molded type semiconductor device |
| 03/02/1999 | US5877540 Epitaxial-base bipolar transistor |
| 03/02/1999 | US5877539 Bipolar transistor with a reduced collector series resistance |
| 03/02/1999 | US5877538 Bidirectional trench gated power MOSFET with submerged body bus extending underneath gate trench |
| 03/02/1999 | US5877537 Semiconductor device having first transistor rows with second transistor rows connected therebetween |
| 03/02/1999 | US5877536 Level shifter capable of stably producing a level shifted voltage |
| 03/02/1999 | US5877535 CMOS semiconductor device having dual-gate electrode construction and method of production of the same |
| 03/02/1999 | US5877534 Method of forming electrostatic discharge protection device for integrated circuit |
| 03/02/1999 | US5877533 Hybrid integrated circuit component |
| 03/02/1999 | US5877532 Semiconductor device and method of manufacturing the same |
| 03/02/1999 | US5877531 MIS type semiconductor device and method for manufacturing same |
| 03/02/1999 | US5877530 Formation of gradient doped profile region between channel region and heavily doped source/drain contact region of MOS device in integrated circuit structure using a re-entrant gate electrode and a higher dose drain implantation |
| 03/02/1999 | US5877528 Structure to provide effective channel-stop in termination areas for trenched power transistors |
| 03/02/1999 | US5877527 Semiconductor device and method of producing the same |
| 03/02/1999 | US5877526 Semiconductor device having polysilicon thin-film |
| 03/02/1999 | US5877525 Flash EEPROM cell and method of making the same |
| 03/02/1999 | US5877524 Non-volatile semiconductor memory device |
| 03/02/1999 | US5877523 Multi-level split- gate flash memory cell |
| 03/02/1999 | US5877522 Dram composed of open-bit-line type capacitor-over-bit-line structure memory cells |
| 03/02/1999 | US5877519 Extended wavelength opto-electronic devices |
| 03/02/1999 | US5877518 Semiconductor device and inverter apparatus using the semiconductor device |
| 03/02/1999 | US5877516 Bonding of silicon carbide directly to a semiconductor substrate by using silicon to silicon bonding |
| 03/02/1999 | US5877514 Liquid crystal display device integrated with driving circuit and method for fabricating the same |
| 03/02/1999 | US5877513 Semiconductor integrated circuit |
| 03/02/1999 | US5877507 Optical detection device and lighting method with varied irradiation angle in optical detection process |
| 03/02/1999 | US5877505 Apparatus for determining mark position on wafer |
| 03/02/1999 | US5877419 Method for estimating the service life of a power semiconductor component |
| 03/02/1999 | US5877095 Method of fabricating a semiconductor device having a silicon nitride film made of silane, ammonia and nitrogen |
| 03/02/1999 | US5877094 Method for fabricating a silicon-on-sapphire wafer |
| 03/02/1999 | US5877093 Process for coating an integrated circuit device with a molten spray |
| 03/02/1999 | US5877092 Method for edge profile and design rules control |
| 03/02/1999 | US5877091 Multilayer routing method and structure for semiconductor integrated circuit |
| 03/02/1999 | US5877090 Selective plasma etching of silicon nitride in presence of silicon or silicon oxides using mixture of NH3 or SF6 and HBR and N2 |
| 03/02/1999 | US5877089 Slurry containing manganese oxide |
| 03/02/1999 | US5877088 Flattening method and apparatus for semiconductor device |
| 03/02/1999 | US5877087 Low temperature integrated metallization process and apparatus |
| 03/02/1999 | US5877086 Metal planarization using a CVD wetting film |
| 03/02/1999 | US5877085 Method of manufacturing semiconductor device |
| 03/02/1999 | US5877084 Germanium, aluminum, alloying |
| 03/02/1999 | US5877083 Method of manufacturing a semiconductor device |
| 03/02/1999 | US5877082 Method of manufacturing semiconductor device without plasma damage |
| 03/02/1999 | US5877081 Method of manufacturing semiconductor device |
| 03/02/1999 | US5877080 Method of manufacturing semiconductor device |
| 03/02/1999 | US5877079 Method for manufacturing a semiconductor device and a method for mounting a semiconductor device for eliminating a void |
| 03/02/1999 | US5877078 Method of manufacturing a semiconductor device |
| 03/02/1999 | US5877077 Heat resistance |
| 03/02/1999 | US5877076 Opposed two-layered photoresist process for dual damascene patterning |
| 03/02/1999 | US5877075 Semiconductors |
| 03/02/1999 | US5877074 Method for improving the electrical property of gate in polycide structure |
| 03/02/1999 | US5877073 Modified poly-buffered locos forming technology avoiding the positive charge trapping at the beak of field oxide |
| 03/02/1999 | US5877072 Process for forming doped regions from solid phase diffusion source |
| 03/02/1999 | US5877071 Masking methods during semiconductor device fabrication |
| 03/02/1999 | US5877070 Method for the transfer of thin layers of monocrystalline material to a desirable substrate |
| 03/02/1999 | US5877069 Method for electrochemical local oxidation of silicon |
| 03/02/1999 | US5877068 Method for forming isolating layer in semiconductor device |
| 03/02/1999 | US5877067 Method of manufacturing a semiconductor device |
| 03/02/1999 | US5877066 Narrow width trenches for field isolation in integrated circuits |
| 03/02/1999 | US5877065 Process for fabricating insulation-filled deep trenches in semiconductor substrates |
| 03/02/1999 | US5877063 Method of forming rough polysilicon surfaces |
| 03/02/1999 | US5877062 Methods of forming integrated circuit capacitors having protected diffusion barrier metal layers therein |
| 03/02/1999 | US5877061 Methods for roughening and volume expansion of trench sidewalls to form high capacitance trench cell for high density dram applications |
| 03/02/1999 | US5877060 Method for fabricating SRAM polyload |
| 03/02/1999 | US5877059 Method for forming an integrated circuit resistor comprising amorphous silicon |
| 03/02/1999 | US5877058 Method of forming an insulated-gate field-effect transistor with metal spacers |
| 03/02/1999 | US5877057 Method of forming ultra-thin oxides with low temperature oxidation |
| 03/02/1999 | US5877056 Ultra-short channel recessed gate MOSFET with a buried contact |
| 03/02/1999 | US5877055 Method for fabricating multi-stage ROM structure |
| 03/02/1999 | US5877054 Method of making nonvolatile semiconductor memory |
| 03/02/1999 | US5877053 Method of fabricating DRAM cell with capacitor having multiple concave structure |
| 03/02/1999 | US5877052 Resolution of hemispherical grained silicon peeling and row-disturb problems for dynamic random access memory, stacked capacitor structures |
| 03/02/1999 | US5877051 Methods of reducing alpha particle inflicted damage to SRAM cells, methods of forming integrated circuitry, and methods of forming SRAM cells |
| 03/02/1999 | US5877050 Method of making N-channel and P-channel devices using two tube anneals and two rapid thermal anneals |
| 03/02/1999 | US5877049 Method for forming advanced transistor structures with optimum short channel controls for high density/high performance integrated circuits |
| 03/02/1999 | US5877048 3-D CMOS transistors with high ESD reliability |
| 03/02/1999 | US5877047 Lateral gate, vertical drift region transistor |