Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
06/1999
06/24/1999DE19745228A1 Electronic component tray identification system
06/24/1999CA2605696A1 Process for producing semiconductor device
06/24/1999CA2315225A1 Spin coating method and apparatus for liquid carbon dioxide systems
06/24/1999CA2315057A1 Process for producing semiconductor device
06/23/1999EP0924970A2 Cleaning solution for electronic materials and method for using the same
06/23/1999EP0924773A1 Semiconductor device including a SOI MOSFET having source and drain electrodes comprising a metal silicide layer and method of making the same
06/23/1999EP0924772A1 Process for repairing data transmission lines of imagers
06/23/1999EP0924769A1 Method of transferring thin film devices, thin film device, thin film integrated circuit device, active matrix substrate, liquid crystal display, and electronic apparatus
06/23/1999EP0924768A2 Nonvolatile semiconductor memory device and method for driving the same
06/23/1999EP0924767A1 EEPROM device and method for manufacturing thereof
06/23/1999EP0924766A2 Memory cell array, method of its manufacture and method of its use
06/23/1999EP0924762A2 Interconnections in integrated circuit devices
06/23/1999EP0924760A2 Address transition detection circuit
06/23/1999EP0924759A2 Method for mounting and demounting a semiconductor wafer, and material suited for this method
06/23/1999EP0924758A2 Method and apparatus for quantifying proximity effect by measuring device performance
06/23/1999EP0924757A2 Fabrication of high power semiconductor device with a heat sink and integration with planar microstrip circuitry
06/23/1999EP0924756A2 Method of encapsulating a wire bonded die
06/23/1999EP0924755A2 Method of fabricating a multilayer circuit board
06/23/1999EP0924754A2 Low temperature system and method for CVD copper removal
06/23/1999EP0924753A2 Etching method
06/23/1999EP0924752A2 Method of fabrication of high dielectric constant capacitors
06/23/1999EP0924751A2 Well diffusion
06/23/1999EP0924750A2 Thermal processing jig for use in manufacturing semiconductor devices and method of manufacturing the same
06/23/1999EP0924749A2 Magnetic shield apparatus
06/23/1999EP0924748A2 Observation apparatus
06/23/1999EP0924710A2 Memory array with reduced charging current
06/23/1999EP0924709A2 Semiconductor memory
06/23/1999EP0924571A2 Exposing apparatus and method
06/23/1999EP0924567A1 Phase shift mask and phase shift mask blank
06/23/1999EP0924506A1 Method and system for measuring particles in a liquid sample
06/23/1999EP0924500A2 Method for the measurement of electromagnetic radiation
06/23/1999EP0924487A2 Vacuum drying of semiconductor material
06/23/1999EP0924282A1 Gas for removing a deposit and its use
06/23/1999EP0924148A1 Device for transferring small circular articles
06/23/1999EP0924030A2 Work unloading method and surface polishing apparatus with work unloading mechanism
06/23/1999EP0924029A1 Method to reach an almost linear wear and tool with almost linear wear
06/23/1999EP0923806A2 An amplified mos biasing circuit for avoiding latch-up
06/23/1999EP0923792A2 Silicon germanium semiconductor device and a method of manufacturing the same
06/23/1999EP0923791A1 Method for making a glued joint between an electronic component and a supporting substrate
06/23/1999EP0923438A1 Method for obtaining a wafer in semiconducting material of large dimensions and use of the resulting wafer for producing substrates of the semiconductor on insulator type
06/23/1999EP0785870B1 Process for changing the bend of anodically bonded flat composite bodies made of glass and metal or semiconductor materials
06/23/1999EP0766604A4 Method and apparatus for controlled particle deposition on wafers
06/23/1999EP0703623B1 Method of fabrication of a vertical integrated circuit structure
06/23/1999EP0700593B1 Releasing a workpiece from an electrostatic chuck
06/23/1999CN2325869Y T or H shaped electrode semiconductor chip sintering equipment
06/23/1999CN1220778A Conductors for integrated circuits
06/23/1999CN1220775A Method for manufacturing semicondcutor apparatus, and film carrier tape
06/23/1999CN1220774A Semiconductor device, film carrier tape, and method for manufacturing them
06/23/1999CN1220772A Method and device for plasma treatment
06/23/1999CN1220742A Attenuating embedded phase shift photomask blanks
06/23/1999CN1220708A Quartz glass compound used in production of semiconductor
06/23/1999CN1220496A Semiconductor device
06/23/1999CN1220495A Semiconductor integrated circuit device and process for fabricating thereof
06/23/1999CN1220494A Memory unit structure, its manufacturing method and operating method
06/23/1999CN1220493A Semiconductor device and manfacturing method thereof
06/23/1999CN1220491A Method for making four-step shaded read-only memory
06/23/1999CN1220490A Semiconductor integrated circuit and layout method thereof
06/23/1999CN1220489A Bulk and strained silicon on insulator using local selective oxidation
06/23/1999CN1220488A Improved silica stain test structures and methods therefor
06/23/1999CN1220487A Semi-conductor mounting apparatus with chip gripper travelling back and forth
06/23/1999CN1220486A Semiconductor device having simultaneously formed contacts on different impurity injected regions and method of forming contacts in semiconductor device
06/23/1999CN1220485A Method of manufacturing semiconductor device
06/23/1999CN1220484A Method of forming microcrystalline sillicon film, photovoltaic element, and method of producing same
06/23/1999CN1220483A Etching method
06/23/1999CN1220467A Voltage generator circuit
06/23/1999CN1220464A Semiconductor memory having hierarchical bitline architecture with interleaved master bitlines
06/23/1999CN1220414A Chemically amplified resist
06/23/1999CN1220365A Methods and systems for delivering ultra-pure gas to point of use
06/23/1999CN1043831C Chip supplying system of integrated circuit
06/23/1999CA2257513A1 Reactor for chemical vapour phase deposition
06/22/1999US5915231 Method in an integrated circuit (IC) manufacturing process for identifying and redirecting IC's mis-processed during their manufacture
06/22/1999US5915204 Method of manufacturing a semiconductor device including a metal silicide layer
06/22/1999US5915203 Method for producing deep submicron interconnect vias
06/22/1999US5915202 Blanket etching process for formation of tungsten plugs
06/22/1999US5915201 Trench surrounded metal pattern
06/22/1999US5915200 Film forming method and semiconductor device manufacturing method
06/22/1999US5915199 Method for manufacturing a CMOS self-aligned strapped interconnection
06/22/1999US5915198 Contact process using taper contact etching and polycide step
06/22/1999US5915197 Fabrication process for semiconductor device
06/22/1999US5915196 Method of forming shallow diffusion layers in a semiconductor substrate in the vicinity of a gate electrode
06/22/1999US5915195 Ion implantation process to improve the gate oxide quality at the edge of a shallow trench isolation structure
06/22/1999US5915194 Method for growth of crystal surfaces and growth of heteroepitaxial single crystal films thereon
06/22/1999US5915193 Exposing contaminated semiconductor wafer surface to hot aqueous periodic acid solution to oxidize organic residues and adsorb the resulting iodic acid onto semiconductor surface for improved hydrophilicity
06/22/1999US5915192 Method for forming shallow trench isolation
06/22/1999US5915191 Method for fabricating a semiconductor device with improved device integration and field-region insulation
06/22/1999US5915190 Methods for filling trenches in a semiconductor wafer
06/22/1999US5915189 Manufacturing method for semiconductor memory device having a storage node with surface irregularities
06/22/1999US5915188 Integrated inductor and capacitor on a substrate and method for fabricating same
06/22/1999US5915187 Method of manufacturing a semiconductor device with a pn junction provided through epitaxy
06/22/1999US5915186 Transistors on semiconductor substrate
06/22/1999US5915185 Method of producing MOSFET transistors by means of tilted implants
06/22/1999US5915184 Method of manufacturing semiconductor device having a peak concentration
06/22/1999US5915183 Forming structure using salicide gate conductor in the process
06/22/1999US5915182 MOSFET with self-aligned silicidation and gate-side air-gap structure
06/22/1999US5915181 Method for forming a deep submicron MOSFET device using a silicidation process
06/22/1999US5915180 Process for producing a semiconductor device having a single thermal oxidizing step
06/22/1999US5915179 Simplified formation of miniaturized schottky barrier diodes and field effect transistors
06/22/1999US5915178 Method for improving the endurance of split gate flash EEPROM devices via the addition of a shallow source side implanted region
06/22/1999US5915177 EPROM manufacturing process having a floating gate with a large surface area
06/22/1999US5915176 Method of making floating gate based memory device
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