Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
11/1999
11/28/1999CA2273459A1 Composite substrate carrier
11/25/1999WO1999060830A1 Multiple printed panel for electronic components, and method for constructing bumps, soldering frames, spacers and similar on said multiple printed panel
11/25/1999WO1999060829A2 Method and apparatus for making electrical traces, circuits and devices
11/25/1999WO1999060631A1 Nrom cell with improved programming, erasing and cycling
11/25/1999WO1999060628A1 Power mos transistor with overtemperature protection circuit
11/25/1999WO1999060626A1 Semiconductor device
11/25/1999WO1999060625A1 Method and apparatus for wafer transportation, exposure system, micro device, and reticle library
11/25/1999WO1999060624A1 System for testing semiconductor device formed on semiconductor wafer
11/25/1999WO1999060623A1 Aligner
11/25/1999WO1999060621A1 Method and apparatus for treating a semi-conductor substrate
11/25/1999WO1999060620A1 Semiconductor device fabrication process
11/25/1999WO1999060619A1 Semiconductor device and method of manufacture thereof
11/25/1999WO1999060618A1 Semiconductor device and method of manufacture thereof
11/25/1999WO1999060617A1 Sputtering apparatus and magnetron unit
11/25/1999WO1999060615A2 Process for the preparation of epitaxial wafers for resistivity measurements
11/25/1999WO1999060614A1 A wafer buffer station and a method for a per-wafer transfer between work stations
11/25/1999WO1999060613A2 Method and apparatus for minimizing plasma destabilization within a semiconductor wafer processing system
11/25/1999WO1999060612A1 Method and apparatus for substrate transfer and processing
11/25/1999WO1999060611A1 In-situ substrate transfer shuttle
11/25/1999WO1999060610A1 An automated substrate processing system
11/25/1999WO1999060609A2 Multi-function chamber for a substrate processing system
11/25/1999WO1999060608A2 Dram cell with vertical transistor and method for the production thereof
11/25/1999WO1999060607A2 Tool for wafer bonding in a vacuum
11/25/1999WO1999060605A2 A method of forming a thin layer of semiconductor material
11/25/1999WO1999060601A1 Reduction of metal oxide in dual frequency plasma etch chamber
11/25/1999WO1999060448A1 Silicate-containing alkaline compositions for cleaning microelectronic substrates
11/25/1999WO1999060447A1 Stripping compositions for semiconductor substrates
11/25/1999WO1999060184A1 Substrate support and lift apparatus and method
11/25/1999WO1999060165A1 Chemically assembled nano-scale devices
11/25/1999WO1999060083A1 Cleaning composition and method for removing residues
11/25/1999WO1999060014A2 Methods and compounds for modulating nuclear receptor coactivator binding
11/25/1999WO1999059928A2 Substrate transfer shuttle
11/25/1999WO1999059776A1 Substrate retainer
11/25/1999WO1999059693A1 Apparatus and method for recovering photoresist developers and strippers
11/25/1999WO1999046821A3 Semiconductor switch devices and their manufacture
11/25/1999WO1999039373A3 Fabrication of organic semiconductor devices using ink jet printing
11/25/1999WO1999019777A9 Automated substrate processing systems and methods
11/25/1999DE19922802A1 Vertical double diffused MOSFET
11/25/1999DE19922759A1 Conductive structure, especially for ICs, memories and optical components with nanometer size individual conductive elements, is produced
11/25/1999DE19922653A1 Focussed ion beam control method for semiconductor device manufacture
11/25/1999DE19922545A1 Multicolumn electron-beam lithography system
11/25/1999DE19922437A1 Nonvolatile ferroelectric memory device
11/25/1999DE19921110A1 Semiconductor device, especially highly integrated semiconductor chip, production process
11/25/1999DE19919384A1 Verfahren zum Trockenätzen und Vakuumbehandlungsreaktor A method for dry etching and vacuum treatment reactor
11/25/1999DE19918193A1 Producing a multicolor organic light emitting device incorporating light-emitting polymers
11/25/1999DE19914776A1 Integrated circuit transfer mechanism for inspection purpose
11/25/1999DE19914347A1 Wash unit for semiconductor wafer, LCD glass substrate
11/25/1999DE19913683A1 Large area membrane mask, especially a lithographic stencil mask, is produced from a multilayer semiconductor wafer
11/25/1999DE19912047A1 Negative resist composition useful in microlithography for producing (very) large scale integrated circuits
11/25/1999DE19908980A1 Verfahren und Vorrichtung zum Ausrichten eines Wafers Method and apparatus for aligning a wafer
11/25/1999DE19854911A1 Double gate oxide MOS transistor manufacture method using photolithography
11/25/1999DE19846691C1 Microstructured glass used in the production of sensors
11/25/1999DE19843089A1 Malonate dissolution inhibitor for use in photolithography
11/25/1999DE19825009C1 Semiconductor chip bond pad testing device
11/25/1999DE19822345A1 Circuit board connection with hybrid device
11/25/1999DE19821901A1 Integrated circuit with memory cell
11/25/1999DE19821834A1 Power MOS transistor (PMT) with integral overheat protection
11/25/1999DE19821395A1 Ultra-fine gold alloy wire for wire bonding or flip-chip bonding of semiconductor devices
11/25/1999DE19821338A1 Transportsystem und Verfahren zum Transportieren von Gegenständen in einen Arbeitsraum hinein oder aus einem Arbeitsraum heraus Transport system and method for transporting goods from one work area or out of a working space out
11/25/1999DE19821007A1 Apparatus and method for heat treatment of substrates, in particular, semiconductor wafers
11/25/1999DE19820049A1 Thermomechanisches Verfahren zum Planarisieren einer fototechnisch strukturierbaren Schicht, insbesondere Verkapselung für elektronische Bauelemente A thermo-mechanical method for planarizing a photo technically be structured layer, in particular encapsulation of electronic components
11/25/1999CA2332891A1 Multiple blank for electronic components, in particular surface acoustic wave components, and method of building up bumps, solder frames, spacers and the like on the multiple blank
11/25/1999CA2332390A1 Stripping compositions for semiconductor substrates
11/25/1999CA2332245A1 Apparatus and method for recovering photoresist developers and strippers
11/25/1999CA2323575A1 Methods and compounds for modulating nuclear receptor coactivator binding
11/24/1999EP0959653A2 Storage facility for keeping electronic parts
11/24/1999EP0959504A2 Solid state imager including TFTS with variably doped contact layer system for reducing leakage current and increasing mobility
11/24/1999EP0959503A1 Field effect transistor, control method for controlling such a field affect transistor and a frequency mixer means including such a field effect transistor
11/24/1999EP0959501A2 System and method of manufacturing semicustom integrated circuits using reticle primitives and interconnect reticles
11/24/1999EP0959499A1 Method for manufacturing bump leaded film carrier type semiconductor device
11/24/1999EP0959498A1 Semiconductor device, semiconductor chip mounting substrate, methods of manufacturing the device and substrate, adhesive, and adhesive double coated film
11/24/1999EP0959497A1 A method of forming an ultra-thin soi electrostatic discharge protection device
11/24/1999EP0959496A2 Methods for forming self-planarized dielectric layer for shallow trench integration
11/24/1999EP0959495A1 Container and loader for substrate
11/24/1999EP0959494A1 Semiconductor and method for manufacturing the same
11/24/1999EP0959493A2 Deposition of insulating films by CVD
11/24/1999EP0959492A1 Process for forming porous silicon in a silicon substrate, for improving the performance of an inductive circuit
11/24/1999EP0959491A2 Production method of electronic parts and water treatment apparatus
11/24/1999EP0959490A2 A semiconductor device washing apparatus and a method of washing a semiconductordevice
11/24/1999EP0959487A2 Multi-cusp ion source
11/24/1999EP0959422A2 Method for process simulation
11/24/1999EP0959390A1 Photoresist removal process.
11/24/1999EP0959151A2 Thin film forming apparatus
11/24/1999EP0959150A2 Apparatus for depositing thin films
11/24/1999EP0959149A2 Apparatus for depositing thin films
11/24/1999EP0959117A1 Energy beam curable hydrophilic pressure sensitive adhesive composition and use thereof
11/24/1999EP0959116A2 A polishing compound and a method for polishing
11/24/1999EP0959040A1 Method for producing nitrogen trifluoride by gas-solid reaction
11/24/1999EP0958889A2 Apparatus and method for chamfering wafer
11/24/1999EP0958613A2 Semiconductor component for high voltage
11/24/1999EP0958611A1 High density trenched dmos transistor
11/24/1999EP0958610A1 A BIPOLAR SEMICONDUCTOR DEVICE HAVING SEMICONDUCTOR LAYERS OF SiC AND A METHOD FOR PRODUCING A SEMICONDUCTOR DEVICE OF SiC
11/24/1999EP0958609A2 A FIELD CONTROLLED SEMICONDUCTOR DEVICE OF SiC AND A METHOD FOR PRODUCTION THEREOF
11/24/1999EP0958607A1 Transferred flexible integrated circuit
11/24/1999EP0958606A1 Solder alloy or tin contact bump structure for unencapsulated microcircuits as well as a process for the production thereof
11/24/1999EP0958603A1 Vibrating template method of placing solder balls on the i/o pads of an integrated circuit package
11/24/1999EP0958602A1 Method for producing a transistor with self-aligned contacts and field insulation
11/24/1999EP0958601A1 A method for producing a channel region layer in a voltage controlled semiconductor device
11/24/1999EP0958600A1 A capacitor and methods of forming a capacitor
11/24/1999EP0958599A1 Polysilicon plug sram load