| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
|---|
| 04/26/2000 | EP0995343A2 Compact microwave downstream plasma system |
| 04/26/2000 | EP0995342A1 Method for improved cleaning of substrate processing systems |
| 04/26/2000 | EP0995340A1 Frequency selected, variable output inductor heater system and method |
| 04/26/2000 | EP0995235A1 Contact and method for producing a contact |
| 04/26/2000 | EP0995228A1 Dual damascene etch process |
| 04/26/2000 | EP0995227A1 A controlled cleavage process |
| 04/26/2000 | EP0995226A1 Heat-transfer enhancing features for semiconductor carriers and devices |
| 04/26/2000 | EP0995219A1 Plasma processing apparatus |
| 04/26/2000 | EP0995217A1 Scanning wheel for ion implantation process chamber |
| 04/26/2000 | EP0995214A1 Method and apparatus for neutralising space charge in an ion beam |
| 04/26/2000 | EP0994755A1 Inspection handler apparatus and method |
| 04/26/2000 | EP0961928A4 Method of scanning semiconductor wafers to inspect for defects |
| 04/26/2000 | EP0843894A4 Encapsulant with fluxing properties and method of use |
| 04/26/2000 | EP0835274B1 Process for making hydroxy-substituted ethynylated biphenyls |
| 04/26/2000 | EP0808230B1 Chemical-mechanical polishing of thin materials using a pulse polishing technique |
| 04/26/2000 | EP0784543B1 Lithographic surface or thin layer modification |
| 04/26/2000 | CN1251470A Method for producing transistor |
| 04/26/2000 | CN1251468A Method for producing lower electrode of capacitor |
| 04/26/2000 | CN1251419A Gas-floating device, gas-floating conveying device and heat-treatment device thereof |
| 04/26/2000 | CN1251380A Abrasive thick liquid and preparation method thereof |
| 04/26/2000 | CN1051903C Method and apparatus for ignition of CVD plasmas |
| 04/26/2000 | CN1051882C Insulation-grid film transistor |
| 04/26/2000 | CN1051880C Dipolar integrated circuit with VR-tube and mfg. method thereof |
| 04/26/2000 | CN1051879C Double-layer polycrystalline silicon CMOS digital-analog hybrid integrated circuit and mfg. method |
| 04/26/2000 | CN1051878C Semiconductor device and its mfg. method, and mfg. method for transparent film |
| 04/26/2000 | CN1051877C Semiconductor device and method for producing same |
| 04/25/2000 | US6055655 Semiconductor integrated circuit device and method of testing the same |
| 04/25/2000 | US6055463 Control system and method for semiconductor integrated circuit test process |
| 04/25/2000 | US6055460 Semiconductor process compensation utilizing non-uniform ion implantation methodology |
| 04/25/2000 | US6055368 Batch execution control programming device and method |
| 04/25/2000 | US6055367 Semiconductor device compensation system and method |
| 04/25/2000 | US6055197 Semiconductor memory device with simultaneously activated elements and a redundancy scheme thereof |
| 04/25/2000 | US6055182 Semiconductor memory cell and method of manufacturing the same |
| 04/25/2000 | US6055181 Nonvolatile semiconductor memory device capable of storing multi-value data of more than one bit in a memory cell |
| 04/25/2000 | US6055178 Magnetic random access memory with a reference memory array |
| 04/25/2000 | US6055175 Nonvolatile ferroelectric memory |
| 04/25/2000 | US6055150 Multi-electrode electrostatic chuck having fuses in hollow cavities |
| 04/25/2000 | US6055055 Cross optical axis inspection system for integrated circuits |
| 04/25/2000 | US6055038 Exposure system and method of forming fluorescent surface using same |
| 04/25/2000 | US6054872 Semiconductor integrated circuit with mixed gate array and standard cell |
| 04/25/2000 | US6054784 Positioning device having three coil systems mutually enclosing angles of 120° and lithographic device comprising such a positioning device |
| 04/25/2000 | US6054773 Semiconductor device and method of manufacturing the same |
| 04/25/2000 | US6054771 Interconnection system in a semiconductor device |
| 04/25/2000 | US6054770 Electric solid state device and method for manufacturing the device |
| 04/25/2000 | US6054763 Semiconductor device |
| 04/25/2000 | US6054760 Surface-connectable semiconductor bridge elements and devices including the same |
| 04/25/2000 | US6054756 Connection components with frangible leads and bus |
| 04/25/2000 | US6054755 Semiconductor package with improved moisture vapor relief function and method of fabricating the same |
| 04/25/2000 | US6054753 Plastic-encapsulated semiconductor device equipped with LOC package structure |
| 04/25/2000 | US6054752 Semiconductor device |
| 04/25/2000 | US6054751 Semiconductor integrated circuit |
| 04/25/2000 | US6054749 Thin film device repaired using enhanced repair process |
| 04/25/2000 | US6054748 High voltage semiconductor power device |
| 04/25/2000 | US6054744 Grain boundary stuffing provides for structural film stability required during severe thermal cycles that occur during subsequent processing of semiconductors |
| 04/25/2000 | US6054743 High voltage MOS transistor |
| 04/25/2000 | US6054741 Substrate and isulation/masking structure for a semiconductor device |
| 04/25/2000 | US6054740 Protection against overvoltages of an integrated MOS power transistor |
| 04/25/2000 | US6054739 Semiconductor device having channel refractive index in first and second directions |
| 04/25/2000 | US6054737 High density MOS technology power device |
| 04/25/2000 | US6054736 Semiconductor device |
| 04/25/2000 | US6054735 Very thin PECVD SiO2 in 0.5 micron and 0.35 micron technologies |
| 04/25/2000 | US6054734 Non-volatile memory cell having dual gate electrodes |
| 04/25/2000 | US6054733 Method for fabricating a flash EEPROM |
| 04/25/2000 | US6054731 Floating gate non-volatile memory cell with low erasing voltage and manufacturing method |
| 04/25/2000 | US6054730 Semiconductor device |
| 04/25/2000 | US6054729 Gallium antimonide complementary HFET |
| 04/25/2000 | US6054722 Complementary field effect devices for eliminating or reducing diode effect |
| 04/25/2000 | US6054719 An electronic component with a semiconductor composite structure in which a doped semiconductor layer is in proximity to an undoped diamond layer |
| 04/25/2000 | US6054713 Electron beam exposure apparatus |
| 04/25/2000 | US6054688 Hybrid heater with ceramic foil serrated plate and gas assist |
| 04/25/2000 | US6054684 Ultra fast temperature ramp up and down in a furnace using interleaving shutters |
| 04/25/2000 | US6054545 Modified cellulose compound and photopolymerizable resin composition containing the same |
| 04/25/2000 | US6054398 Semiconductor interconnect barrier for fluorinated dielectrics |
| 04/25/2000 | US6054397 BPSG planarization method having improved planarity and reduced chatter mark defects |
| 04/25/2000 | US6054396 Semiconductor processing method of reducing thickness depletion of a silicide layer at a junction of different underlying layers |
| 04/25/2000 | US6054394 Method of fabricating a dynamic random access memory capacitor |
| 04/25/2000 | US6054393 Method for improving the wet process chemical sequence |
| 04/25/2000 | US6054392 Active matrix substrate and method of forming a contact hole in the same |
| 04/25/2000 | US6054391 Masking with titanium |
| 04/25/2000 | US6054390 Grazing incident angle processing method for microelectronics layer fabrication |
| 04/25/2000 | US6054389 Method of forming metal conducting pillars |
| 04/25/2000 | US6054387 Method for forming a silicide region |
| 04/25/2000 | US6054386 Process for forming silicon-on-insulator devices using a nitriding agent |
| 04/25/2000 | US6054385 Elevated local interconnect and contact structure |
| 04/25/2000 | US6054384 Use of hard masks during etching of openings in integrated circuits for high etch selectivity |
| 04/25/2000 | US6054383 Fabrication method of semiconductor device |
| 04/25/2000 | US6054382 Alternating titanium, titanium nitride layers |
| 04/25/2000 | US6054381 Semiconductor device, and method of manufacturing same |
| 04/25/2000 | US6054380 Method and apparatus for integrating low dielectric constant materials into a multilevel metallization and interconnect structure |
| 04/25/2000 | US6054379 Method of depositing a low k dielectric with organo silane |
| 04/25/2000 | US6054378 Method for encapsulating a metal via in damascene |
| 04/25/2000 | US6054377 Method for forming an inlaid via in a semiconductor device |
| 04/25/2000 | US6054376 Method of sealing a semiconductor substrate |
| 04/25/2000 | US6054375 Method for making laser synthesized ceramic electronic devices and circuits |
| 04/25/2000 | US6054374 Controlled oxidation; forming sacrificial dielectrics; doping; oxidation |
| 04/25/2000 | US6054373 Method of and apparatus for removing metallic impurities diffused in a semiconductor substrate |
| 04/25/2000 | US6054371 Method of manufacturing a semiconductor device by detachably mounting substrates to a holder board |
| 04/25/2000 | US6054370 Method of delaminating a pre-fabricated transistor layer from a substrate for placement on another wafer |
| 04/25/2000 | US6054369 Lifetime control for semiconductor devices |
| 04/25/2000 | US6054368 Method of making an improved field oxide isolation structure for semiconductor integrated circuits having higher field oxide threshold voltages |