| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 05/16/2000 | US6062239 Fan blades on the rotor blow air over the wafers, to move any remaining fluid droplets away from the wafer centers, to allow centrifugal force to fling the fluid droplets off of the wafers. |
| 05/16/2000 | US6062237 Polymer removal from top surfaces and sidewalls of a semiconductor wafer |
| 05/16/2000 | US6062163 Plasma initiating assembly |
| 05/16/2000 | US6062119 Method for handling and manipulating microelectronic components |
| 05/16/2000 | US6062099 Robot for handling |
| 05/16/2000 | US6061889 Device and method for removing heatspreader from an integrated circuit package |
| 05/16/2000 | CA2201737C Heterojunction energy gradient structure |
| 05/16/2000 | CA2139187C Semiconductor substrate and process for producing same |
| 05/16/2000 | CA2129288C Phosphonooxymethyl esters of taxane derivatives |
| 05/16/2000 | CA2118147C Method for lowering the phase transformation temperature of a metal silicide |
| 05/16/2000 | CA2057490C Laminated diamond substrate |
| 05/11/2000 | WO2000026974A2 Semiconductor processing chamber calibration tool |
| 05/11/2000 | WO2000026970A1 Mos capacitor, liquid crystal display, integrated circuit and method of manufacture thereof |
| 05/11/2000 | WO2000026969A1 Ferroelectric transistor and method for the production thereof |
| 05/11/2000 | WO2000026963A1 Dimpled contacts for metal-to-semiconductor connections, and methods for fabricating same |
| 05/11/2000 | WO2000026962A1 Method for semiconductor manufacturing |
| 05/11/2000 | WO2000026961A1 Wafer support device in semiconductor manufacturing device |
| 05/11/2000 | WO2000026960A1 Vacuum processor apparatus |
| 05/11/2000 | WO2000026959A1 Semiconductor device, method of manufacture thereof, circuit board and electronic device |
| 05/11/2000 | WO2000026958A1 System for assembling substrates to bonding zones provided with cavities |
| 05/11/2000 | WO2000026957A1 Method of manufacturing a multi-layered ceramic substrate |
| 05/11/2000 | WO2000026956A1 A method and apparatus for etching a substrate |
| 05/11/2000 | WO2000026955A1 Fabrication of a transistor having an ultra-thin gate dielectric |
| 05/11/2000 | WO2000026954A1 Method of reducing stop layer loss in a photoresist stripping process using hydrogen as a fluorine scavenger |
| 05/11/2000 | WO2000026953A1 Thin film forming method, and semiconductor light emitting device manufacturing method |
| 05/11/2000 | WO2000026952A1 Method for in-situ, post deposition surface passivation of a chemical vapor deposited film |
| 05/11/2000 | WO2000026950A1 Method and device for ion implanting |
| 05/11/2000 | WO2000026949A1 Semiconductor wafer and its manufacturing method |
| 05/11/2000 | WO2000026948A1 Semiconductor wafer and vapor growth apparatus |
| 05/11/2000 | WO2000026947A1 Method and system to control the concentration of dissolved gas in a liquid |
| 05/11/2000 | WO2000026946A1 Dual surface reflector |
| 05/11/2000 | WO2000026944A1 Method and apparatus for hf-hf cleaning |
| 05/11/2000 | WO2000026943A1 Vacuum processing apparatus with low particle generating wafer holder |
| 05/11/2000 | WO2000026941A2 Word line driver for semiconductor memories |
| 05/11/2000 | WO2000026938A1 Apparatus for ion implantation |
| 05/11/2000 | WO2000026850A1 Electronics assembly apparatus with stereo vision linescan sensor |
| 05/11/2000 | WO2000026724A1 Organic-solvent-based photosensitive resist composition and method of forming resist pattern |
| 05/11/2000 | WO2000026646A1 Method and apparatus for improved defect detection |
| 05/11/2000 | WO2000026640A1 Electronics assembly apparatus with improved imaging system |
| 05/11/2000 | WO2000026613A1 Optical monitoring of radial ranges in chemical mechanical polishing a metal layer on a substrate |
| 05/11/2000 | WO2000026609A2 Method and apparatus for measuring substrate layer thickness during chemical mechanical polishing |
| 05/11/2000 | WO2000026592A1 Pfc type gas recovery method and device |
| 05/11/2000 | WO2000026444A1 Copper metallization structure and method of construction |
| 05/11/2000 | WO2000026443A2 Method and apparatus for electrochemical mechanical deposition |
| 05/11/2000 | WO2000026430A1 Sputtering apparatus |
| 05/11/2000 | WO2000026311A1 Solution for forming silica coating film, process for producing the same, and silica coating film and process for producing the same |
| 05/11/2000 | WO2000026000A1 Method and device for separating into two slices a wafer of material, in particular semiconductor material |
| 05/11/2000 | WO2000025984A1 Chemical mechanical polishing a substrate having a filler layer and a stop layer |
| 05/11/2000 | WO2000025983A1 Use of zeta potential during chemical mechanical polishing for end point detection |
| 05/11/2000 | WO2000025981A1 Unpolished work holding board and production method thereof and work polishing method and device |
| 05/11/2000 | WO2000025980A1 Method and apparatus for grinding wafer |
| 05/11/2000 | WO2000025978A1 Monitoring system for dicing saws |
| 05/11/2000 | WO2000025625A2 Method and apparatus for insertion and retainment of pomade within a dispenser |
| 05/11/2000 | WO2000019535B1 Semiconductor structure for semiconductor components |
| 05/11/2000 | WO2000013190A8 Conductive paste, conductive structure using the same, electronic part, module, circuit board, method for electrical connection, method for manufacturing circuit board, and method for manufacturing ceramic electronic part |
| 05/11/2000 | WO2000008671A3 Device for coating panel-shaped substrates |
| 05/11/2000 | WO2000008225A3 Organocopper precursors for chemical vapor deposition |
| 05/11/2000 | WO2000000992A3 Focus ring arrangement for substantially eliminating unconfined plasma in a plasma processing chamber |
| 05/11/2000 | DE19953620A1 Low voltage MOS gate controlled semiconductor component, useful for a direct voltage/direct voltage converter, employs planar strip technology and has a minimal power index |
| 05/11/2000 | DE19952273A1 Copper connection film, e.g. for an ultra large scale integration, is produced by high pressure grain growth heat treatment of a deposited film while suppressing pore formation |
| 05/11/2000 | DE19951993A1 Halbleiter-Isolator-Struktur mit reduzierter Störkapazität und ein Verfahren zu deren Herstellung Semiconductor-insulator structure with reduced parasitic capacitance and a method for their preparation |
| 05/11/2000 | DE19929606A1 Production of a printed circuit comprises using a protective layer made of plastic to encapsulate the printed circuit unit and a section of the lead frame |
| 05/11/2000 | DE19900980C1 Verification method for integrated circuit layout especially LSI circuits |
| 05/11/2000 | DE19851873A1 Verfahren zum Aufwachsen einer kristallinen Struktur A method of growing a crystalline structure |
| 05/11/2000 | DE19851749A1 Polarisationsoptisch kompensiertes Objektiv Optical polarization compensated lens |
| 05/11/2000 | DE19851280A1 Structured metal oxide layer useful as capacitor dielectric in semiconductor memories is produced by structuring an amorphous metal oxide layer, and then heat treating to the polycrystalline state |
| 05/11/2000 | DE19850873A1 Verfahren zum Bearbeiten eines Erzeugnisses der Halbleitertechnik A method for processing a product of semiconductor technology |
| 05/11/2000 | DE19850852A1 Ferroelektrischer Transistor und Verfahren zu dessen Herstellung Ferroelectric transistor and method of producing the |
| 05/11/2000 | DE19850144A1 Optical surface analysis method for semiconductor wafers |
| 05/11/2000 | DE19849586C1 Three-dimensional IC production comprises opening of filled trenches before cutting a three-dimensional circuit structure into individual circuits |
| 05/11/2000 | DE19849542A1 Verfahren zur Herstellung eines Kondensators A method for manufacturing a capacitor |
| 05/11/2000 | DE19848999A1 Speicherzellenanordnung und Implantationsmaske zum Herstellen von dieser Memory cell array and implantation mask for making this |
| 05/11/2000 | DE19847848C1 Vorrichtung und Erzeugung angeregter/ionisierter Teilchen in einem Plasma Device and generating excited / ionized particles in a plasma |
| 05/11/2000 | CA2349559A1 Method for semiconductor manufacturing |
| 05/10/2000 | WO2000059022A1 Process for the formation of silicon oxide films |
| 05/10/2000 | EP0999729A2 Process for laser soldering and for temperature monitoring of semi-conductor chips, and chip cards manufactured according to this process |
| 05/10/2000 | EP0999597A1 Ferroelectric nonvolatile transistor and method of making same |
| 05/10/2000 | EP0999595A2 Semiconductor device and manufacturing method therefor |
| 05/10/2000 | EP0999594A1 Integrated circuit having MOS field-effect transistors comprising regions doped with nitrogen and method of making the same |
| 05/10/2000 | EP0999592A1 Fuse layout for improved fuse blow process window |
| 05/10/2000 | EP0999589A2 Silicon nitride circuit board |
| 05/10/2000 | EP0999588A2 Semiconductor device and method for assembling the same |
| 05/10/2000 | EP0999587A2 Production of semiconductor device |
| 05/10/2000 | EP0999586A2 Semiconductor device and method of producing same |
| 05/10/2000 | EP0999585A1 DRAM memory and MOS transistor fabrication |
| 05/10/2000 | EP0999584A2 Method for manufacturing semiconductor device |
| 05/10/2000 | EP0999583A2 Increasing stability of a substrate by a supporting element |
| 05/10/2000 | EP0999582A2 N Type impurity doping using implantation of P2+ions or As2+ions |
| 05/10/2000 | EP0999581A2 Simulation method executable with less time |
| 05/10/2000 | EP0999580A2 Simplified high q inductor substrate |
| 05/10/2000 | EP0999579A2 An inductor or low loss interconnect in an integrated circuit |
| 05/10/2000 | EP0999578A2 Sample processing system |
| 05/10/2000 | EP0999577A2 Sample processing system |
| 05/10/2000 | EP0999576A2 Sample processing system |
| 05/10/2000 | EP0999575A2 Sample separating apparatus and method, and substrate manufacturing method |
| 05/10/2000 | EP0999572A2 Electrostatic deflector for electron beam exposure apparatus |
| 05/10/2000 | EP0999475A2 Position detecting system and exposure apparatus using the same |
| 05/10/2000 | EP0999474A1 Compounds for photoresist and resin composition for photoresist |
| 05/10/2000 | EP0999472A2 Method and apparatus for dry-etching half-tone phase-shift films, half-tone phase-shift photomasks and method for the preparation thereof, and semiconductor circuits and method for the fabrication thereof |
| 05/10/2000 | EP0999451A2 Connecting apparatus, method of fabricating wiring film with holder, inspection system and method of fabricating semiconductor element |