Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2013
08/14/2013CN103247565A Shallow groove isolation structure and manufacturing method thereof
08/14/2013CN103247564A Substrate processing apparatus and substrate processing method
08/14/2013CN103247563A Electrostatic chuck with multi-zone control
08/14/2013CN103247562A Grain turret type picking up and placing device
08/14/2013CN103247561A Clean conveyance system
08/14/2013CN103247560A Substrate processing apparatus, substrate processing method and storage medium
08/14/2013CN103247559A Substrate transfer apparatus, substrate transfer method, and non-transitory storage medium
08/14/2013CN103247558A Substrate processing apparatus and substrate processing method
08/14/2013CN103247557A Carrier device
08/14/2013CN103247556A Carrier device
08/14/2013CN103247555A IGBT (Insulated Gate Bipolar Transistor) encapsulating tray and IGBT module encapsulating method
08/14/2013CN103247554A Substrate treatment apparatus and substrate treatment method
08/14/2013CN103247553A Wet treating device
08/14/2013CN103247552A Die bonding device, bracket, and die bonding method
08/14/2013CN103247551A Roughness regeneration method for bell jar in semi-conductor processing process
08/14/2013CN103247550A Test module and method for monitoring processing procedure stability
08/14/2013CN103247549A Method for monitoring height of step formed by photosensitive mask etched silicon carbide material in real time
08/14/2013CN103247548A Wafer defect detecting device and method
08/14/2013CN103247547A No-flow underfill for package with interposer frame
08/14/2013CN103247546A Chip scale packaging method for semiconductor device
08/14/2013CN103247545A Semiconductor device and method thereof
08/14/2013CN103247544A Package-on-package type semiconductor packages and methods for fabricating the same
08/14/2013CN103247543A Assembly fixture for semiconductor device and method for manufacturing semiconductor device by means of the assembly fixture
08/14/2013CN103247542A Manufacturing method for leading-out terminals of ceramic integrated circuit encapsulation casing and special lead framework
08/14/2013CN103247541A Semiconductor device and method of manufacturing thereof
08/14/2013CN103247540A Device, system and method for encapsulating IGBT module
08/14/2013CN103247539A Method of preventing epoxy bleed out of lead frame and lead frame manufactured by using the same
08/14/2013CN103247538A Split-gate trench power MOS (Metal Oxide Semiconductor) device integrating schottky
08/14/2013CN103247537A Method of fabricating a FINFET and the FINFET
08/14/2013CN103247536A Method for manufacturing silicon carbide semiconductor device
08/14/2013CN103247535A Dislocation SMT for FinFET device
08/14/2013CN103247534A Manufacturing method of power transistor device with super junction
08/14/2013CN103247533A Method of manufacturing power transistor device
08/14/2013CN103247532A Thin film transistor, fabricating method thereof and display
08/14/2013CN103247531A Thin film transistor, fabricating method thereof and display
08/14/2013CN103247530A Manufacturing method of semiconductor device
08/14/2013CN103247529A Groove field effect device and manufacturing method thereof
08/14/2013CN103247528A Manufacturing method for metal-oxide-semiconductor field effect transistor (MOSFET)
08/14/2013CN103247527A Method for removing silicone nanocrystals
08/14/2013CN103247526A Method for gate dielectric etching suitable for submicro gate length semiconductor device production
08/14/2013CN103247525A Method for etching organic hardmasks
08/14/2013CN103247524A Manufacturing method of Sigma-shaped groove
08/14/2013CN103247523A Method of fabricating a semiconductor structure
08/14/2013CN103247522A Ion implantation method, transporting container and ion implantation apparatus
08/14/2013CN103247521A Method for implementing aluminium diffusion on silicon chip and thyristor chip made by same
08/14/2013CN103247520A Method for preparing grapheme on basis of controlling ion implantation energy
08/14/2013CN103247519A Low-temperature polycrystalline silicon thin film, thin film transistor, preparing method of thin film and display panel
08/14/2013CN103247518A Novel design of tool function to improve FAB process in semiconductor manufacturing
08/14/2013CN103247517A Semiconductor structure and forming method thereof
08/14/2013CN103247516A Semiconductor structure and forming method thereof
08/14/2013CN103247507A Compound plasma focusing ring and method for replacing same
08/14/2013CN103246171A Multiple-grid exposure method
08/14/2013CN103246156A Method for forming self-aligned overlay mark
08/14/2013CN103243393A Air preheating device, diffusion furnace and inlet air preheating method
08/14/2013CN103243314A Film deposition apparatus
08/14/2013CN103243292A Systems and methods for rapid liquid phase deposition of films
08/14/2013CN103242981A Stripping composition, method of producing stripping composition
08/14/2013CN103242751A Binding tape
08/14/2013CN103241956A Apparatus for etching substrate
08/14/2013CN103240817A Resin sealing apparatus and resin sealing method
08/14/2013CN103240806A Wafer cutting method
08/14/2013CN103240805A Apparatus and method for simultaneously slicing a multiplicity of slices from a workpiece
08/14/2013CN103240732A Robot
08/14/2013CN103240561A Suspended gold wire ball bonding workbench
08/14/2013CN103240529A Laser processing apparatus
08/14/2013CN103240481A Welding fixture part
08/14/2013CN103240244A Surface cleaning device and method
08/14/2013CN102487001B Method for improving uniformity of dielectric layer
08/14/2013CN102446721B Method for realizing stepped doping concentration distribution by multi-energy ion implantation
08/14/2013CN102427046B Electro-chemical deposition result determination method
08/14/2013CN102420137B Method for forming metal oxide semiconductor (MOS) transistor
08/14/2013CN102420136B Forming method of MOS (Metal Oxide Semiconductor) transistor
08/14/2013CN102412306B Trench gate JFET and manufacture method thereof
08/14/2013CN102412121B Fabrication method for silicon nanotubes
08/14/2013CN102403353B Trench metal oxide semiconductor field-effect transistor and manufacturing method for same
08/14/2013CN102403225B Manufacturing method and device of channel double-diffusion metal oxide semiconductor
08/14/2013CN102386223B High-threshold voltage gallium nitride (GaN) enhancement metal oxide semiconductor heterostructure field effect transistor (MOSHFET) device and manufacturing method
08/14/2013CN102386097B Metal oxide semiconductor (MOS) transistor and manufacturing method thereof
08/14/2013CN102386064B Manufacturing method of metal-oxide-metal capacitor
08/14/2013CN102376631B Method for producing dual damascene structure
08/14/2013CN102376630B Semiconductor device and method for manufacturing local interconnect structure thereof
08/14/2013CN102376573B NMOS transistor and formation method thereof
08/14/2013CN102371254B Cleaning system and method
08/14/2013CN102368470B Discharge control device in assembly line of integrated circuit lead frame
08/14/2013CN102354687B Barrier medium material used for thick film circuit and preparation method thereof
08/14/2013CN102347227B Metal gate formation method
08/14/2013CN102339868B Metal semiconductor field effect transistor with inverse isolating layer structure and manufacturing method thereof
08/14/2013CN102339748B Method for reducing etching damages of grid groove of HEMT (high electron mobility transistor) device
08/14/2013CN102332393B Diffusion method for prolonging minority carrier lifetime of battery plate in process of manufacturing solar battery
08/14/2013CN102324399B 半导体器件及其制作方法 Semiconductor device and manufacturing method thereof
08/14/2013CN102315140B Slurry mixing system as well as drainage pipe and cleaning method applied to same
08/14/2013CN102290434B Metal-semiconductor field effect transistor with under-grid buffer layer structure and manufacturing method
08/14/2013CN102270598B Field region isolation method used for manufacturing integrated circuit
08/14/2013CN102270593B Loading and unloading pallet of mechanical arm of ion implanter
08/14/2013CN102263039B Method for manufacturing crystal grain assembly
08/14/2013CN102246272B System and method for recycling a gas used to deposit a semiconductor layer
08/14/2013CN102239563B Vertical junction field effect transistors having sloped sidewalls and methods of making same
08/14/2013CN102232127B Method for improving the adhesion between silver surfaces and resin materials
08/14/2013CN102222676B Solid-state image pickup device and electronic apparatus
08/14/2013CN102222658B Multi-circle arranged IC (integrated circuit) chip packaging member and producing method thereof
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