Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2013
08/08/2013US20130203186 Heat treatment apparatus and method of manufacturing semiconductor device
08/08/2013US20130202959 Electrophoretic assembly of electrochemical devices
08/08/2013US20130202898 Method for fabricating semiconductor nanowire and semiconductor nanostructure
08/08/2013US20130202518 Single crystal diamond prepared by cvd
08/08/2013US20130202388 Substrate processing apparatus, substrate processing method and non-transitory storage medium
08/08/2013US20130202387 Substrate processing system, transfer module, substrate processing method, and method for manufacturing semiconductor element
08/08/2013US20130202386 Substrate processing apparatus, substrate processing method and non-transitory computer-readable storage medium
08/08/2013US20130202248 Optical semiconductor device and method of manufacturing optical semiconductor device
08/08/2013US20130202136 Chip with integrated circuit and micro-silicon condenser microphone integrated on single substrate and method for making the same
08/08/2013US20130202005 Laser using locally strained germanium on silicon for opto-electronic applications
08/08/2013US20130201597 Electrostatic chuck
08/08/2013US20130201596 Electrostatic Chuck with Multi-Zone Control
08/08/2013US20130201466 Lithographic Apparatus and Device Manufacturing Method
08/08/2013US20130201249 Liquid ejection head and method of manufacturing the same
08/08/2013US20130200910 3-dimensional integrated circuit testing using mems switches with tungsten cone contacts
08/08/2013US20130200786 Plasma Cell and Method of Manufacturing a Plasma Cell
08/08/2013US20130200559 Suction apparatus, polishing apparatus, semiconductor device, and method of manufacturing a semiconductor device
08/08/2013US20130200534 Sealant laminated composite, sealed semiconductor devices mounting substrate, sealed semiconductor devices forming wafer, semiconductor apparatus, and method for manufacturing semiconductor apparatus
08/08/2013US20130200532 Semiconductor Device Using Diffusion Soldering
08/08/2013US20130200529 Semiconductor Device Packaging Methods and Structures Thereof
08/08/2013US20130200528 Semiconductor Device and Method of Forming a Vertical Interconnect Structure for 3-D FO-WLCSP
08/08/2013US20130200523 Semiconductor device and manufacturing method thereof
08/08/2013US20130200521 Inductors and wiring structures fabricated with limited wiring material
08/08/2013US20130200519 Through silicon via structure and method of fabricating the same
08/08/2013US20130200518 Devices Including Metal-Silicon Contacts Using Indium Arsenide Films and Apparatus and Methods
08/08/2013US20130200517 Interposer frame and method of manufacturing the same
08/08/2013US20130200513 No-flow underfill for package with interposer frame
08/08/2013US20130200512 Package with interposer frame and method of making the same
08/08/2013US20130200510 Semiconductor device, heat radiation member, and manufacturing method for semiconductor device
08/08/2013US20130200504 Electronic component module and method for producing same
08/08/2013US20130200503 Protective layers in semiconductor packaging
08/08/2013US20130200502 Semiconductor Device and Method of Manufacturing Thereof
08/08/2013US20130200501 In-situ active wafer charge screening by conformal grounding
08/08/2013US20130200500 Resist pattern thickening material, method for forming resist pattern, semiconductor device and method for manufacturing the same
08/08/2013US20130200498 Methods and apparatus for lithography using a resist array
08/08/2013US20130200497 Multi-layer metal support
08/08/2013US20130200496 Multi-layer metal support
08/08/2013US20130200495 Buffer layer structures suited for iii-nitride devices with foreign substrates
08/08/2013US20130200494 Variable capacitance chamber component incorporating a semiconductor junction and methods of manufacturing and using thereof
08/08/2013US20130200490 Capacitor Structure and Method of Forming the Same
08/08/2013US20130200489 Capacitor arrays for minimizing gradient effects and methods of forming the same
08/08/2013US20130200485 Semiconductor device and method for manufacturing the same
08/08/2013US20130200484 Process for manufacturing a wafer by annealing of buried channels
08/08/2013US20130200483 Fin structure and method of forming the same
08/08/2013US20130200482 Shallow trench isolation for device including deep trench capacitors
08/08/2013US20130200481 Semiconductor device having groove-shaped via-hole
08/08/2013US20130200471 Alignment tolerant semiconductor contact and method
08/08/2013US20130200470 Semiconductor structure and method of fabricating the same
08/08/2013US20130200468 Integration of SMT in Replacement Gate FINFET Process Flow
08/08/2013US20130200467 Dual metal fill and dual threshold voltage for replacement gate metal devices
08/08/2013US20130200466 Integrated circuit having silicide block resistor
08/08/2013US20130200461 Semiconductor Device and Method of Forming the Same
08/08/2013US20130200459 Strained channel for depleted channel semiconductor devices
08/08/2013US20130200456 Semiconductor Substrate, Integrated Circuit Having the Semiconductor Substrate, and Methods of Manufacturing the Same
08/08/2013US20130200455 Dislocation smt for finfet device
08/08/2013US20130200454 Replacement-gate finfet structure and process
08/08/2013US20130200453 Semiconductor devices including bipolar transistors, cmos transistors and dmos transistors, and methods of manufacturing the same
08/08/2013US20130200452 Lateral double-diffused mosfet
08/08/2013US20130200451 Nano mosfet with trench bottom oxide shielded and third dimensional p-body contact
08/08/2013US20130200449 Finfet structure with novel edge fins
08/08/2013US20130200448 Meander Line Resistor Structure
08/08/2013US20130200447 Adjustable Meander Line Resistor
08/08/2013US20130200444 Schottky barrier field effect transistor with carbon-containing insulation layer and method for fabricating the same
08/08/2013US20130200443 Interface Engineering to Optimize Metal-III-V Contacts
08/08/2013US20130200442 Salicide formation using a cap layer
08/08/2013US20130200441 Integrated circuit contact structure and method
08/08/2013US20130200437 Method of forming nanogap pattern, biosensor having the nanogap pattern, and method of manufacturing the biosensor
08/08/2013US20130200435 Semiconductor devices with field plates
08/08/2013US20130200433 Strained channel for depleted channel semiconductor devices
08/08/2013US20130200432 Semiconductor component, substrate and method for producing a semiconductor layer sequence
08/08/2013US20130200431 Selective Area Growth of Germanium and Silicon-Germanium in Silicon Waveguides for On-chip Optical Interconnect Applications
08/08/2013US20130200430 Electronic device with mircofilm antenna and related methods
08/08/2013US20130200429 Epitaxy level packaging
08/08/2013US20130200428 Programmable scr for esd protection
08/08/2013US20130200427 Transistors and methods of manufacturing the same
08/08/2013US20130200424 Compound semiconductor devices and methods for fabricating the same
08/08/2013US20130200401 Circuit substrate, method for manufacturing the same, and electrooptical device
08/08/2013US20130200393 Semiconductor structure and process thereof
08/08/2013US20130200392 Semicondictor Device with Edge Termination and Method for Manufacturing a Semiconductor Device
08/08/2013US20130200391 Gallium nitride based structures with embedded voids and methods for their fabrication
08/08/2013US20130200384 Atomic layer deposition epitaxial silicon growth for tft flash memory cell
08/08/2013US20130200383 Thin film transistor array substrate and manufacturing method for the same
08/08/2013US20130200382 Thin-film transistor substrate and method of manufacturing a thin-film transistor substrate
08/08/2013US20130200379 Thin film transistor array substrate, organic light-emitting display device including the same and method of manufacturing the thin film transistor array substrate
08/08/2013US20130200377 Thin film transistor array substrate and method for manufacturing the same
08/08/2013US20130200375 Semiconductor device and method for manufacturing semiconductor device
08/08/2013US20130200374 Thin Film Transistor, Thin Film Transistor Substrate and Method for Manufacturing the Same
08/08/2013US20130200372 Thin film transistor and manufacturing method thereof
08/08/2013US20130200330 Self-aligned process to fabricate a memory cell array with a surrounding-gate access transistor
08/08/2013US20130200322 Memory arrays and methods of forming the same
08/08/2013US20130200134 Wire loop forming systems and methods of using the same
08/08/2013US20130199891 Dynamic load lock with cellular structure for discrete substrates
08/08/2013US20130199729 Processing gas diffusing and supplying unit and substrate procesisng apparatus
08/08/2013US20130199728 Plasma processing apparatus
08/08/2013US20130199726 Apparatus and a method for treating a substrate
08/08/2013US20130199442 Apparatus for flexible substrate position control
08/08/2013US20130199301 Vertical Pressure Sensitive Structure
08/08/2013US20130199051 Manufacturing method and fluid supply system for treating substrate
08/08/2013DE112011103660T5 Widerstands-Feldeffekttransistor mit einer ultrasteilen Unterschwellenflanke und Verfahren zu seiner Herstellung Resistance field-effect transistor having an ultra-sharing sub-threshold slope and process for its preparation
08/08/2013DE112011103629T5 Integriertes Substratreinigungssystem und Verfahren Integrated substrate cleaning system and method