Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
08/2013
08/01/2013WO2013111757A1 Semiconductor device
08/01/2013WO2013111756A1 Semiconductor device and method for manufacturing semiconductor device
08/01/2013WO2013111725A1 Semiconductor device and method for manufacturing same
08/01/2013WO2013111720A1 Substrate inspection device
08/01/2013WO2013111667A1 Fluorine-containing sulfonic acid salt, fluorine-containing sulfonic acid salt resin, resist composition, and pattern forming method using same
08/01/2013WO2013111642A1 Bonding wire and method for manufacturing same
08/01/2013WO2013111631A1 Blank for nanoimprint mold, nanoimprint mold, and methods for producing said blank and said nanoimprint mold
08/01/2013WO2013111626A1 Method for manufacturing inkjet head, and inkjet head
08/01/2013WO2013111609A1 High-purity copper-manganese alloy sputtering target
08/01/2013WO2013111606A1 Imprint apparatus and article manufacturing method using same
08/01/2013WO2013111592A1 Method for manufacturing semiconductor device
08/01/2013WO2013111569A1 Substrate treatment apparatus, liquid supply device used therein, and substrate treatment method
08/01/2013WO2013111568A1 Semiconductor device and method for producing same
08/01/2013WO2013111533A1 Thin film transistor substrate manufacturing method, and thin film transistor substrate manufactured by same
08/01/2013WO2013111499A1 Exposure optical system, exposure apparatus, and exposure method
08/01/2013WO2013111497A1 Chip component
08/01/2013WO2013111474A1 Microwave emission mechanism, microwave plasma source and surface wave plasma processing device
08/01/2013WO2013111463A1 Material for forming passivation film for semiconductor substrate, method of manufacturing semiconductor substrate comprising passivation film for semiconductor substrate, solar cell element, and method of manufacturing solar cell element
08/01/2013WO2013111461A1 Plasma treatment method and plasma treatment device
08/01/2013WO2013111452A1 Oxidation preventing gas spray unit
08/01/2013WO2013111434A1 Assembly and semiconductor module
08/01/2013WO2013111420A1 Method for processing base body to be processed
08/01/2013WO2013111363A1 Electrostatic chuck
08/01/2013WO2013111358A1 Substrate transfer system and substrate transfer method
08/01/2013WO2013111294A1 Semiconductor device and power conversion apparatus using same
08/01/2013WO2013111242A1 Bonded soi wafer manufacturing method
08/01/2013WO2013111241A1 Polyimide precursor and resin composition using same
08/01/2013WO2013111225A1 Thin film transistor array apparatus and el display apparatus using same
08/01/2013WO2013111212A1 Electronic component manufacturing method and electrode structure
08/01/2013WO2013110664A1 Overlay model for aligning and exposing semiconductor wafers
08/01/2013WO2013110582A1 Apparatus and method for treating plate-shaped process items
08/01/2013WO2013110533A1 Semiconductor device with internal substrate contact and method of production
08/01/2013WO2013110434A1 Method for producing electrically semiconductive or conductive layers with improved conductivity
08/01/2013WO2013110179A1 Method and apparatus for connecting memory dies to form a memory system
08/01/2013WO2013080106A3 Device and method for treating wafer-shaped articles
08/01/2013WO2013066669A3 Structures incorporating silicon nanoparticle inks, densified silicon materials from nanoparticle silicon deposits and corresponding methods
08/01/2013WO2012012530A3 Tracking spectrum features in two dimensions for endpoint detection
08/01/2013US20130197691 Transfer system
08/01/2013US20130196572 Conditioning a pad in a cleaning module
08/01/2013US20130196517 Drawing method and method of manufacturing article
08/01/2013US20130196516 Methods for uv-assisted conformal film deposition
08/01/2013US20130196515 Method of forming thin metal and semi-metal layers by thermal remote oxygen scavenging
08/01/2013US20130196514 Off-angled heating of the underside of a substrate using a lamp assembly
08/01/2013US20130196513 Processing method
08/01/2013US20130196512 Method and apparatus for manufacturing semiconductor device
08/01/2013US20130196511 Etching method and etching apparatus
08/01/2013US20130196510 Slotted electrostatic shield modification for improved etch and cvd process uniformity
08/01/2013US20130196509 Gas Cluster Ion Beam Etching Process for Etching Si-Containing, Ge-Containing, and Metal-Containing Materials
08/01/2013US20130196508 Methods of Forming SRAM Devices Using Sidewall Image Transfer Techniques
08/01/2013US20130196507 Method Of Depositing Metals Using High Frequency Plasma
08/01/2013US20130196506 Apparatuses and Methods for Gas Mixed Liquid Polishing, Etching, and Cleaning
08/01/2013US20130196505 Method of forming conformal metal silicide films
08/01/2013US20130196504 Transfer substrate for forming metal wiring and method for forming metal wiring using said transfer substrate
08/01/2013US20130196503 Semiconductor device and method for manufacturing semiconductor device
08/01/2013US20130196502 Selective formation of metallic films on metallic surfaces
08/01/2013US20130196501 Methods for forming interconnects in microelectronic workpieces and microelectronic workpieces formed using such methods
08/01/2013US20130196500 Method for forming a via contacting several levels of semiconductor layers
08/01/2013US20130196499 Method for building vertical pillar interconnect
08/01/2013US20130196498 Bumping process and structure thereof
08/01/2013US20130196495 Methods for fabricating mos devices with stress memorization
08/01/2013US20130196493 Silicon-on-insulator substrate and method of forming
08/01/2013US20130196492 Ion implantation method and ion implantation apparatus
08/01/2013US20130196491 Method of preventing dopant from diffusing into atmosphere in a bicmos process
08/01/2013US20130196490 Method and Apparatus for Growing a III-Nitride Layer
08/01/2013US20130196488 Fin Structures with Damage-Free Sidewalls for Multi-Gate Mosfets
08/01/2013US20130196487 Method for manufacturing nitride semiconductor crystal layer
08/01/2013US20130196486 Semiconductor Substrates Using Bandgap Material Between III-V Channel Material and Insulator Layer
08/01/2013US20130196485 Methods of epitaxial finfet
08/01/2013US20130196484 Process for producing a film, for example a single-crystal film, on a polymer substrate
08/01/2013US20130196483 Soi structures including a buried boron nitride dielectric
08/01/2013US20130196482 Method of manufacturing semiconductor device
08/01/2013US20130196481 Method of patterning for a semiconductor device
08/01/2013US20130196477 Methods of fabricating a semiconductor device including fine patterns
08/01/2013US20130196476 High threshold voltage nmos transistors for low power ic technology
08/01/2013US20130196474 Materials and processes for releasing printable compound semiconductor devices
08/01/2013US20130196473 Mold chase
08/01/2013US20130196472 Pre-cut wafer applied underfill film on dicing tape
08/01/2013US20130196471 Stress-engineered interconnect packages with activator-assisted molds
08/01/2013US20130196470 Chip package and fabrication method thereof
08/01/2013US20130196469 Low-Temperature Fabrication of Metal Oxide Thin Films and Nanomaterial-Derived Metal Composite Thin Films
08/01/2013US20130196463 Nano-devices formed with suspended graphene membrane
08/01/2013US20130196461 Manufacturing method of a light-emitting device
08/01/2013US20130196458 Method of testing through silicon vias (tsvs) of three dimensional integrated circuit (3dic)
08/01/2013US20130196457 Method of manufacturing semiconductor device
08/01/2013US20130196456 Method for Stressing a Thin Pattern and Transistor Fabrication Method Incorporating Said Method
08/01/2013US20130196455 Two-beam laser annealing with improved temperature performance
08/01/2013US20130196454 Vapor deposition method, vapor deposition device and organic el display device
08/01/2013US20130196452 Wire bonding method in circuit device
08/01/2013US20130196019 Silicon-containing block co-polymers, methods for synthesis and use
08/01/2013US20130195601 Transfer system
08/01/2013US20130195599 Robot
08/01/2013US20130195598 Transfer robot
08/01/2013US20130195588 Article Transport Facility
08/01/2013US20130195587 Wafer transfer device
08/01/2013US20130195584 Conveying system
08/01/2013US20130195140 Temperature Sensor
08/01/2013US20130194770 Mems vibration isolation system and method
08/01/2013US20130194761 Flexible Display Device and Method of Manufacturing the Same
08/01/2013US20130194752 System and method for an electronic package with a fail-open mechanism
08/01/2013US20130194557 Developing method
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