| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 05/09/2002 | US20020055266 Controlled cleavage process using pressurized fluid |
| 05/09/2002 | US20020055265 Method of forming vias in silicon carbide and resulting devices and circuits |
| 05/09/2002 | US20020055264 Method for forming photoresist pattern and manufacturing method of magnetoresistive effect thin-film magnetic head |
| 05/09/2002 | US20020055263 Etching in a chamber with high frequency generated plasma of a fluorocarbon (C4F6) gas and an oxygen (O2) gas, and the ratio C4F6/O2 is specified; etch selectivity of the oxide film |
| 05/09/2002 | US20020055262 Method and composition for selectively etching against cobalt silicide |
| 05/09/2002 | US20020055261 Method of manufacturing semiconductor devices |
| 05/09/2002 | US20020055259 Method and apparatus for monitoring a process by employing principal component analysis |
| 05/09/2002 | US20020055258 Method of fabricating semiconductor device having opening filled up with filler |
| 05/09/2002 | US20020055257 Method for fabricating semiconductor device |
| 05/09/2002 | US20020055256 Reducing copper line resistivity by smoothing trench and via sidewalls |
| 05/09/2002 | US20020055255 Electrode forming method and bump electrode formable base used therefor |
| 05/09/2002 | US20020055254 Depositing a ruthenium film with excellent homogeneity and film quality, by reacting a ruthenium precursor and oxygen containing gas, controlling oxygen stoichiometry to prevent formation of the ruthenium oxide film |
| 05/09/2002 | US20020055252 Method for shrinking critical dimension |
| 05/09/2002 | US20020055251 Local interconnect structure for integrated circuit devices, source structure for the same, and method for fabricating the same |
| 05/09/2002 | US20020055250 Dielectric structure and method for minimizing erosion during chemical mechanical polishing of metals |
| 05/09/2002 | US20020055249 Method of manufacturing an integrated semiconductor device having a plurality of connection levels |
| 05/09/2002 | US20020055248 Method for forming a top interconnection level and bonding pads on an integrated circuit chip |
| 05/09/2002 | US20020055247 Method for fabricating a memory cell configuration |
| 05/09/2002 | US20020055246 Method and apparatus for reducing substrate bias voltage drop |
| 05/09/2002 | US20020055245 Method of a fabricating a semiconductor having a reduced leakage current flow between the accumulation electrode and the gate electrode |
| 05/09/2002 | US20020055244 Method of forming a substrate contact in a field effect transistor formed over a buried insulator layer |
| 05/09/2002 | US20020055243 Gap-type metallic interconnect and method of manufacture |
| 05/09/2002 | US20020055242 Solutions of metal-comprising materials, methods of forming metal-comprising layers, methods of storing metal-comprising materials, and methods of forming capacitors |
| 05/09/2002 | US20020055241 Method for fabricating semiconductor device |
| 05/09/2002 | US20020055240 Method of doping silicon, metal doped silicon, method of making solar cells, and solar cells |
| 05/09/2002 | US20020055239 Coupling the self-assembly of copolymers, in thin films with subsequent chemical modification to remove one component of the copolymer; magnetic storage media, magnetoresistance devices |
| 05/09/2002 | US20020055238 Process for producing semiconductor device |
| 05/09/2002 | US20020055237 Method for transferring semiconductor device layers to different substrates |
| 05/09/2002 | US20020055236 Method for fabricating shallow trench isolation |
| 05/09/2002 | US20020055235 Methods for forming and integrated circuit structures containing ruthenium and tungsten containing layers |
| 05/09/2002 | US20020055234 Encapsulated conductive pillar and method of formation |
| 05/09/2002 | US20020055233 Higher voltage drain extended MOS transistors with self-aligned channel and drain extensions |
| 05/09/2002 | US20020055232 Method of operation of punch-through field effect transistor |
| 05/09/2002 | US20020055231 Semiconductor structure having more usable substrate area and method for forming same |
| 05/09/2002 | US20020055230 Structure of NROM and fabricating method thereof |
| 05/09/2002 | US20020055229 Split gate flash memory with virtual ground array structure and method of fabricating the same |
| 05/09/2002 | US20020055228 Sidewall process to improve the flash memory cell performance |
| 05/09/2002 | US20020055227 Structure of a dram and a manufacturing process therefor |
| 05/09/2002 | US20020055226 Method of forming a three-dimensional polysilicon layer on a semiconductor wafer |
| 05/09/2002 | US20020055225 DRAM cell constructions |
| 05/09/2002 | US20020055224 Method for forming dual workfunction high-performance support MOSFETs in EDRAM arrays |
| 05/09/2002 | US20020055223 Semiconductor device and method for fabricating the same |
| 05/09/2002 | US20020055222 Semiconductor memory device having self-aligned contact and fabricating method thereof |
| 05/09/2002 | US20020055221 Semiconductor device and method for fabricating the same |
| 05/09/2002 | US20020055220 Integration of high voltage self-aligned MOS components |
| 05/09/2002 | US20020055217 Semiconductor device and its manufacturing method |
| 05/09/2002 | US20020055216 Methods for manufacturing semiconductor devices and semiconductor devices having trench isolation regions |
| 05/09/2002 | US20020055214 Stacked local interconnect structure and method of fabricating same |
| 05/09/2002 | US20020055213 Method for manufacturing compound semiconductor device |
| 05/09/2002 | US20020055212 Method for fabricating MOS device with halo implanted region |
| 05/09/2002 | US20020055211 Bottom gate thin film transistor, method of producing the transistor, and display device |
| 05/09/2002 | US20020055209 Thin film semiconductor device and production method for the same |
| 05/09/2002 | US20020055208 Process for fabricating semiconductor device |
| 05/09/2002 | US20020055207 Method for fabricating thin-film transistor |
| 05/09/2002 | US20020055206 Method for producing a semiconductor integrated circuit including a thin film transistor and a capacitor |
| 05/09/2002 | US20020055205 Method to fabricate a non-smiling effect structure in split-gate flash with self-aligned isolation |
| 05/09/2002 | US20020055204 Process for manufacturing a semiconductor wafer, a semiconductor wafer, process for manufacturing a semiconductor integrated circuit device, and semiconductor integrated circuit device |
| 05/09/2002 | US20020055202 Method for forming a dielectric layer in a semiconductor device by using etch stop layers |
| 05/09/2002 | US20020055201 Method and device for manufacturing ceramics, semiconductor device and piezoelectric device |
| 05/09/2002 | US20020055198 Semiconductor optical device and method for fabricating the same |
| 05/09/2002 | US20020055196 Method of power IC inspection |
| 05/09/2002 | US20020055194 Quality control method and system on production line for fabricating product |
| 05/09/2002 | US20020055192 Chemical mechanical polishing of a metal layer with polishing rate monitoring |
| 05/09/2002 | US20020055191 Dielectric element including oxide-based dielectric film and method of fabricating the same |
| 05/09/2002 | US20020055190 Magnetic memory with structures that prevent disruptions to magnetization in sense layer |
| 05/09/2002 | US20020055080 Temperature controlling method, thermal treating apparatus, and method of manufacturing semiconductor device |
| 05/09/2002 | US20020055065 Polymers having silicon-containing acetal or ketal functional groups |
| 05/09/2002 | US20020055064 Anti-reflective coating composition, multilayer photoresist material using the same, and method for forming pattern |
| 05/09/2002 | US20020055063 Coating composition for chemically amplified positive resist and method of patterning resist using the same |
| 05/09/2002 | US20020055048 For transferring a pattern onto a photosensitive layer by a photolithography process |
| 05/09/2002 | US20020055021 Ceramic substrate and sintered aluminum nitride |
| 05/09/2002 | US20020055016 Magneto-resistive element |
| 05/09/2002 | US20020055003 Zinc oxide films containing p-type dopant and process for preparing same |
| 05/09/2002 | US20020055001 Chemical vapor deposition method and related material |
| 05/09/2002 | US20020055000 Efficiency; coating materials for deep ultraviolet photolithography |
| 05/09/2002 | US20020054962 Plasma treatment to enhance adhesion and to minimize oxidation of carbon-containing layers |
| 05/09/2002 | US20020054956 Integrated dynamic blending apparatus |
| 05/09/2002 | US20020054955 Coating uninsulated portion of copper circuit with layer of ceramic having thickness for soldering without fluxing; integrated circuits |
| 05/09/2002 | US20020054717 Fluid bearings and vacuum chucks and methods for producing same |
| 05/09/2002 | US20020054703 Pattern inspection method and apparatus |
| 05/09/2002 | US20020054702 Automated photomask inspection apparatus |
| 05/09/2002 | US20020054660 Projection exposure apparatus and method, and illumination optical system thereof |
| 05/09/2002 | US20020054617 Nitride semiconductor laser device and optical device using the same |
| 05/09/2002 | US20020054529 Semiconductor integrated circuit device having efficiently arranged link program circuitry |
| 05/09/2002 | US20020054522 Semiconductor memory device |
| 05/09/2002 | US20020054517 Sequence circuit and semiconductor device using sequence circuit |
| 05/09/2002 | US20020054512 Semiconductor memory device, method of manufacturing the same and method of driving the same |
| 05/09/2002 | US20020054509 Semiconductor memory system |
| 05/09/2002 | US20020054507 Nonvolatile semiconductor memory device |
| 05/09/2002 | US20020054502 Memory cell using negative differential resistance field effect transistors |
| 05/09/2002 | US20020054295 Optical method for the determination of grain orientation in films |
| 05/09/2002 | US20020054284 Lithographic apparatus, device manufacturing method, and device manufactured thereby |
| 05/09/2002 | US20020054282 Projection exposure apparatus |
| 05/09/2002 | US20020054280 Driving apparatus and exposure apparatus |
| 05/09/2002 | US20020054247 Method for fabricating an array substrate of a liquid crystal display device |
| 05/09/2002 | US20020054231 Exposure method, exposure apparatus, and process of production of device |
| 05/09/2002 | US20020054226 CMOS image sensor and method for fabricating the same |
| 05/09/2002 | US20020054209 Method for aligning two objects, method for detecting superimposing state of two objects, and apparatus for aligning two objects |
| 05/09/2002 | US20020054037 Matrix array substrate |
| 05/09/2002 | US20020054009 Display device |