| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 09/03/2002 | US6443811 High concentration of quaternary amine or amine salt cationic surfactant and minimum amount of abrasive particles in neutral to alkaline ph solution; chemisorbs to surface protecting from scratches and contamination |
| 09/03/2002 | US6443808 Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device |
| 09/03/2002 | US6443807 Polishing process for use in method of fabricating semiconductor device |
| 09/03/2002 | US6443720 Apparatus for filling a gap between spaced layers of a semiconductor |
| 09/03/2002 | US6443686 Material handling and transport system and process |
| 09/03/2002 | US6443641 Substrate process method and substrate process apparatus |
| 09/03/2002 | US6443440 Device for unilateral etching of a semiconductor wafer |
| 09/03/2002 | US6443435 Vaporization of precursors at point of use |
| 09/03/2002 | US6443400 Automatic transport system |
| 09/03/2002 | US6443384 Wire brake |
| 09/03/2002 | US6443350 Continuous mode solder jet apparatus |
| 09/03/2002 | US6443302 Pellicle and storage case therefor having chemical traps |
| 09/03/2002 | US6443298 Surface package type semiconductor package and method of producing semiconductor memory |
| 09/03/2002 | US6443191 Vacuum processing methods |
| 09/03/2002 | US6443171 Exhaust apparatus |
| 09/03/2002 | US6443168 Plate-like specimen fluid-treating apparatus and plate-like specimen fluid-treating method |
| 09/03/2002 | US6443059 Solder screen printing process |
| 09/03/2002 | US6443002 Method and apparatus for testing of sheet material |
| 09/03/2002 | US6442950 Cooling system of chamber with removable liner |
| 09/03/2002 | US6442867 Apparatus and method for cleaning a vertical furnace pedestal and cap |
| 09/03/2002 | US6442858 Positioning apparatus, exposure apparatus, device manufacturing method, and positioning method |
| 09/03/2002 | CA2230903C Mounting assembly of integrated circuit device and method for production thereof |
| 09/03/2002 | CA2067578C Epitaxially grown compound-semiconductor crystal |
| 08/29/2002 | WO2002067341A1 Method for increasing the curie temperature of magnetoresistive oxides having a double perovskite structure |
| 08/29/2002 | WO2002067336A1 Memory film, method of manufacturing the memory film, memory element, semiconductor storage device, semiconductor integrated circuit, and portable electronic equipment |
| 08/29/2002 | WO2002067335A1 Thin-film transistor structure, method for manufacturing the thin-film transistor structure, and display device using the thin-film transistor structure |
| 08/29/2002 | WO2002067333A1 Semiconductor device and method of manufacturing the same |
| 08/29/2002 | WO2002067332A2 Semiconductor devices having field shaping regions |
| 08/29/2002 | WO2002067330A2 Electrode arrangement for charge storage and corresponding production method |
| 08/29/2002 | WO2002067328A2 Organic light emitting diode display having shield electrodes |
| 08/29/2002 | WO2002067327A2 Pixel current driver for organic light emitting diode displays |
| 08/29/2002 | WO2002067320A1 Semiconductor storage device and semiconductor integrated circuit |
| 08/29/2002 | WO2002067319A2 Copper interconnect structure having diffusion barrier |
| 08/29/2002 | WO2002067317A1 Bumpless semiconductor device |
| 08/29/2002 | WO2002067316A1 Method of bonding a semiconductor device to an electrically conductive plate |
| 08/29/2002 | WO2002067314A2 High temperature short time curing of low dielectric constant materials using rapid thermal processing techniques |
| 08/29/2002 | WO2002067313A1 Plasma etching method and device |
| 08/29/2002 | WO2002067311A1 Plasma processing system |
| 08/29/2002 | WO2002067310A1 Method and device for cleaning ceramics member |
| 08/29/2002 | WO2002067309A1 Polishing compound and method for polishing substrate |
| 08/29/2002 | WO2002067308A1 System and method for utilization of waste heat of semiconductor equipment and heat exchanger used for utilization of waste heat of semiconductor equipment |
| 08/29/2002 | WO2002067307A1 Apparatus and method for surface polishing |
| 08/29/2002 | WO2002067306A2 Non-arsenic n-type dopant implantation for improved source/drain interfaces with nickel silicides |
| 08/29/2002 | WO2002067305A2 Reduction of metal silicide/silicon interface roughness by dopant implantation processing |
| 08/29/2002 | WO2002067304A1 A method of forming resist patterns in a semiconductor device and a semiconductor washing liquid used in said method |
| 08/29/2002 | WO2002067303A1 Exposure system, exposure device and device production method |
| 08/29/2002 | WO2002067302A2 Rhodium-rich oxygen barriers |
| 08/29/2002 | WO2002067301A1 Exhaust heat utilization system, exhaust heat utilization method and semiconductor production facility |
| 08/29/2002 | WO2002067300A2 Singulation apparatus and method for manufacturing semiconductors |
| 08/29/2002 | WO2002067299A2 Method and related apparatus of processing a substrate |
| 08/29/2002 | WO2002067298A2 Consecutive deposition system |
| 08/29/2002 | WO2002067296A1 Method for operating an optical analysis machine for microstructure-wafers, adapted machine |
| 08/29/2002 | WO2002067295A1 Method and device for separating a semiconductor wafer from a carrier |
| 08/29/2002 | WO2002067294A2 Arrangement and a method for reducing contamination with particles on a substrate in a process tool |
| 08/29/2002 | WO2002067291A2 Arrangement of a semi-conductor chip on a substrate |
| 08/29/2002 | WO2002067278A2 Electrolytic capacitors and method for making them |
| 08/29/2002 | WO2002067266A2 Method for writing into magnetoresistive memory cells and magnetoresistive memory which can be written into according to said method |
| 08/29/2002 | WO2002067198A1 Image matching method, image matching apparatus, and wafer processor |
| 08/29/2002 | WO2002067055A2 Template for room temperature, low pressure micro- and nano-imprint lithography |
| 08/29/2002 | WO2002067001A1 Multiple-capture dft system for detecting or locating crossing clock-domain faults during self-test or scan test |
| 08/29/2002 | WO2002066714A2 Process for preparing single crystal silicon having improved gate oxide integrity |
| 08/29/2002 | WO2002066408A2 Process for producing perfluorocarbons and use thereof |
| 08/29/2002 | WO2002066176A1 Methods for cleaning microelectronic structures |
| 08/29/2002 | WO2002049086B1 Transfer type substrate treating device |
| 08/29/2002 | WO2002049079A3 System for preventing improper insertion of foup door into foup |
| 08/29/2002 | WO2002044786A3 Catadioptric projection system for 157 nm lithography |
| 08/29/2002 | WO2002044300A3 Cerium-based abrasive and production process thereof |
| 08/29/2002 | WO2002043156A3 Hemt and communication system using the same |
| 08/29/2002 | WO2002043155A3 Bipolar transistor with lattice matched base layer |
| 08/29/2002 | WO2002043121A3 Bright field image reversal for contact hole patterning |
| 08/29/2002 | WO2002041393A3 Method of forming shallow trench isolation in silicon |
| 08/29/2002 | WO2002041368A3 Method of forming conductive interconnections wherein a barrier layer is removed by an etching process |
| 08/29/2002 | WO2002039483A3 Single metal programmability in a customizable integrated circuit device |
| 08/29/2002 | WO2002039455A3 Mram arrangement with selection transistors of large channel width |
| 08/29/2002 | WO2002033385A3 Biochip excitation and analysis structure |
| 08/29/2002 | WO2002029888A3 Vertical transistor trench capacitor dram cell and method of making the same |
| 08/29/2002 | WO2002027777A3 Silicon oxide patterning using cvd photoresist |
| 08/29/2002 | WO2002023289A3 Adaptive sampling method for improved control in semiconductor manufacturing |
| 08/29/2002 | WO2002019422A3 Method for manufacturing diode subassemblies used in rectifier assemblies of engine driven generators |
| 08/29/2002 | WO2002014846A3 Multiple beam inspection apparatus and method |
| 08/29/2002 | WO2001098788A3 Diagnosting reliability of vias by e-beam probing |
| 08/29/2002 | WO2001095387A3 Packaging tools and method for semiconductor carrier tape |
| 08/29/2002 | WO2001095382A3 Diamond as a polish-stop layer for chemical-mechanical planarization in a damascene process flow |
| 08/29/2002 | WO2001093313A3 Developing methods for photoresist, apparatuses for coating |
| 08/29/2002 | WO2001088976B1 Wireless radio frequency testing methode of integrated circuits and wafers |
| 08/29/2002 | WO2001081977A3 Optical reduction system with control of illumination polarization |
| 08/29/2002 | WO2001043184A9 Electrostatic chucks with flat film electrode |
| 08/29/2002 | WO2001005487A9 Auto-switching gas delivery system utilizing sub-atmospheric pressure gas supply vessels |
| 08/29/2002 | WO2000072361A9 Apparatus and method for testing of sheet material |
| 08/29/2002 | WO2000069761A9 Cassette buffering within a minienvironment |
| 08/29/2002 | WO2000058999A9 Semiconductor structures having a strain compensated layer and method of fabrication |
| 08/29/2002 | WO2000041037A9 Method of removing photoresist material with dimethyl sulfoxide |
| 08/29/2002 | WO2000036666A9 Method for printing of transistor arrays on plastic substrates |
| 08/29/2002 | WO2000031806A9 Wavelength-insensitive radiation coupling for multi-quantum well sensor based on intersubband absorption |
| 08/29/2002 | WO2000031779A9 An improved high quality factor capacitor |
| 08/29/2002 | WO1999060014A9 Methods and compounds for modulating nuclear receptor coactivator binding |
| 08/29/2002 | WO1999030130A3 Method for investigating or structuring a surface layer |
| 08/29/2002 | US20020120913 Computer readable storage medium |
| 08/29/2002 | US20020120912 Method and apparatus for scalable interconnect solution |
| 08/29/2002 | US20020120911 Pattern layout method of semiconductor device |