Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
09/2002
09/03/2002US6443811 High concentration of quaternary amine or amine salt cationic surfactant and minimum amount of abrasive particles in neutral to alkaline ph solution; chemisorbs to surface protecting from scratches and contamination
09/03/2002US6443808 Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device
09/03/2002US6443807 Polishing process for use in method of fabricating semiconductor device
09/03/2002US6443720 Apparatus for filling a gap between spaced layers of a semiconductor
09/03/2002US6443686 Material handling and transport system and process
09/03/2002US6443641 Substrate process method and substrate process apparatus
09/03/2002US6443440 Device for unilateral etching of a semiconductor wafer
09/03/2002US6443435 Vaporization of precursors at point of use
09/03/2002US6443400 Automatic transport system
09/03/2002US6443384 Wire brake
09/03/2002US6443350 Continuous mode solder jet apparatus
09/03/2002US6443302 Pellicle and storage case therefor having chemical traps
09/03/2002US6443298 Surface package type semiconductor package and method of producing semiconductor memory
09/03/2002US6443191 Vacuum processing methods
09/03/2002US6443171 Exhaust apparatus
09/03/2002US6443168 Plate-like specimen fluid-treating apparatus and plate-like specimen fluid-treating method
09/03/2002US6443059 Solder screen printing process
09/03/2002US6443002 Method and apparatus for testing of sheet material
09/03/2002US6442950 Cooling system of chamber with removable liner
09/03/2002US6442867 Apparatus and method for cleaning a vertical furnace pedestal and cap
09/03/2002US6442858 Positioning apparatus, exposure apparatus, device manufacturing method, and positioning method
09/03/2002CA2230903C Mounting assembly of integrated circuit device and method for production thereof
09/03/2002CA2067578C Epitaxially grown compound-semiconductor crystal
08/2002
08/29/2002WO2002067341A1 Method for increasing the curie temperature of magnetoresistive oxides having a double perovskite structure
08/29/2002WO2002067336A1 Memory film, method of manufacturing the memory film, memory element, semiconductor storage device, semiconductor integrated circuit, and portable electronic equipment
08/29/2002WO2002067335A1 Thin-film transistor structure, method for manufacturing the thin-film transistor structure, and display device using the thin-film transistor structure
08/29/2002WO2002067333A1 Semiconductor device and method of manufacturing the same
08/29/2002WO2002067332A2 Semiconductor devices having field shaping regions
08/29/2002WO2002067330A2 Electrode arrangement for charge storage and corresponding production method
08/29/2002WO2002067328A2 Organic light emitting diode display having shield electrodes
08/29/2002WO2002067327A2 Pixel current driver for organic light emitting diode displays
08/29/2002WO2002067320A1 Semiconductor storage device and semiconductor integrated circuit
08/29/2002WO2002067319A2 Copper interconnect structure having diffusion barrier
08/29/2002WO2002067317A1 Bumpless semiconductor device
08/29/2002WO2002067316A1 Method of bonding a semiconductor device to an electrically conductive plate
08/29/2002WO2002067314A2 High temperature short time curing of low dielectric constant materials using rapid thermal processing techniques
08/29/2002WO2002067313A1 Plasma etching method and device
08/29/2002WO2002067311A1 Plasma processing system
08/29/2002WO2002067310A1 Method and device for cleaning ceramics member
08/29/2002WO2002067309A1 Polishing compound and method for polishing substrate
08/29/2002WO2002067308A1 System and method for utilization of waste heat of semiconductor equipment and heat exchanger used for utilization of waste heat of semiconductor equipment
08/29/2002WO2002067307A1 Apparatus and method for surface polishing
08/29/2002WO2002067306A2 Non-arsenic n-type dopant implantation for improved source/drain interfaces with nickel silicides
08/29/2002WO2002067305A2 Reduction of metal silicide/silicon interface roughness by dopant implantation processing
08/29/2002WO2002067304A1 A method of forming resist patterns in a semiconductor device and a semiconductor washing liquid used in said method
08/29/2002WO2002067303A1 Exposure system, exposure device and device production method
08/29/2002WO2002067302A2 Rhodium-rich oxygen barriers
08/29/2002WO2002067301A1 Exhaust heat utilization system, exhaust heat utilization method and semiconductor production facility
08/29/2002WO2002067300A2 Singulation apparatus and method for manufacturing semiconductors
08/29/2002WO2002067299A2 Method and related apparatus of processing a substrate
08/29/2002WO2002067298A2 Consecutive deposition system
08/29/2002WO2002067296A1 Method for operating an optical analysis machine for microstructure-wafers, adapted machine
08/29/2002WO2002067295A1 Method and device for separating a semiconductor wafer from a carrier
08/29/2002WO2002067294A2 Arrangement and a method for reducing contamination with particles on a substrate in a process tool
08/29/2002WO2002067291A2 Arrangement of a semi-conductor chip on a substrate
08/29/2002WO2002067278A2 Electrolytic capacitors and method for making them
08/29/2002WO2002067266A2 Method for writing into magnetoresistive memory cells and magnetoresistive memory which can be written into according to said method
08/29/2002WO2002067198A1 Image matching method, image matching apparatus, and wafer processor
08/29/2002WO2002067055A2 Template for room temperature, low pressure micro- and nano-imprint lithography
08/29/2002WO2002067001A1 Multiple-capture dft system for detecting or locating crossing clock-domain faults during self-test or scan test
08/29/2002WO2002066714A2 Process for preparing single crystal silicon having improved gate oxide integrity
08/29/2002WO2002066408A2 Process for producing perfluorocarbons and use thereof
08/29/2002WO2002066176A1 Methods for cleaning microelectronic structures
08/29/2002WO2002049086B1 Transfer type substrate treating device
08/29/2002WO2002049079A3 System for preventing improper insertion of foup door into foup
08/29/2002WO2002044786A3 Catadioptric projection system for 157 nm lithography
08/29/2002WO2002044300A3 Cerium-based abrasive and production process thereof
08/29/2002WO2002043156A3 Hemt and communication system using the same
08/29/2002WO2002043155A3 Bipolar transistor with lattice matched base layer
08/29/2002WO2002043121A3 Bright field image reversal for contact hole patterning
08/29/2002WO2002041393A3 Method of forming shallow trench isolation in silicon
08/29/2002WO2002041368A3 Method of forming conductive interconnections wherein a barrier layer is removed by an etching process
08/29/2002WO2002039483A3 Single metal programmability in a customizable integrated circuit device
08/29/2002WO2002039455A3 Mram arrangement with selection transistors of large channel width
08/29/2002WO2002033385A3 Biochip excitation and analysis structure
08/29/2002WO2002029888A3 Vertical transistor trench capacitor dram cell and method of making the same
08/29/2002WO2002027777A3 Silicon oxide patterning using cvd photoresist
08/29/2002WO2002023289A3 Adaptive sampling method for improved control in semiconductor manufacturing
08/29/2002WO2002019422A3 Method for manufacturing diode subassemblies used in rectifier assemblies of engine driven generators
08/29/2002WO2002014846A3 Multiple beam inspection apparatus and method
08/29/2002WO2001098788A3 Diagnosting reliability of vias by e-beam probing
08/29/2002WO2001095387A3 Packaging tools and method for semiconductor carrier tape
08/29/2002WO2001095382A3 Diamond as a polish-stop layer for chemical-mechanical planarization in a damascene process flow
08/29/2002WO2001093313A3 Developing methods for photoresist, apparatuses for coating
08/29/2002WO2001088976B1 Wireless radio frequency testing methode of integrated circuits and wafers
08/29/2002WO2001081977A3 Optical reduction system with control of illumination polarization
08/29/2002WO2001043184A9 Electrostatic chucks with flat film electrode
08/29/2002WO2001005487A9 Auto-switching gas delivery system utilizing sub-atmospheric pressure gas supply vessels
08/29/2002WO2000072361A9 Apparatus and method for testing of sheet material
08/29/2002WO2000069761A9 Cassette buffering within a minienvironment
08/29/2002WO2000058999A9 Semiconductor structures having a strain compensated layer and method of fabrication
08/29/2002WO2000041037A9 Method of removing photoresist material with dimethyl sulfoxide
08/29/2002WO2000036666A9 Method for printing of transistor arrays on plastic substrates
08/29/2002WO2000031806A9 Wavelength-insensitive radiation coupling for multi-quantum well sensor based on intersubband absorption
08/29/2002WO2000031779A9 An improved high quality factor capacitor
08/29/2002WO1999060014A9 Methods and compounds for modulating nuclear receptor coactivator binding
08/29/2002WO1999030130A3 Method for investigating or structuring a surface layer
08/29/2002US20020120913 Computer readable storage medium
08/29/2002US20020120912 Method and apparatus for scalable interconnect solution
08/29/2002US20020120911 Pattern layout method of semiconductor device