Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
10/2002
10/10/2002US20020147520 Computer program for determining a corrected position of a measured alignment mark, device manufacturing method, and device manufactured thereby
10/10/2002US20020147478 Method for manufacturing hybrid electronic circuits for active implantable medical devices
10/10/2002US20020147264 Embedding resin
10/10/2002US20020146970 Polishing apparatus and methods having high processing workload for controlling polishing pressure applied by polishing head
10/10/2002US20020146965 Method and composition for polishing by CMP
10/10/2002US20020146920 Method of soldering contact pins and the contact pins
10/10/2002US20020146919 Micromachined springs for strain relieved electrical connections to IC chips
10/10/2002US20020146916 Semiconductor device having a high-dielectric gate insulation film and fabrication process thereof
10/10/2002US20020146915 Process for depositing layers on a semiconductor wafer
10/10/2002US20020146914 In-situ steam generation process for nitrided oxide
10/10/2002US20020146913 Forming a metal layer on a semiconductor substrate; oxidizing the metal laye so that exposed surface of the metal layer is changed into a mixed phase of metal and oxygen; heating
10/10/2002US20020146912 Method of manufacturing compound semiconductor substrate
10/10/2002US20020146911 Semiconductor device and method of manufacturing the same
10/10/2002US20020146910 Semiconductor processing methods of transferring patterns from patterned photoresists to materials, and structures comprising silicon nitride
10/10/2002US20020146909 Method of smoothing inter-metal dielectric layers in semiconductor devices
10/10/2002US20020146908 Apparatus and process for polishing a workpiece
10/10/2002US20020146906 Etching process for a two-layer metallization
10/10/2002US20020146905 Method of forming a crystalline phase material
10/10/2002US20020146904 Non-arsenic N-type dopant implantation for improved source/drain interfaces with nickel silicides
10/10/2002US20020146903 Deformation-susceptible substrate holder for low-pressure MOCVD and process for use thereof
10/10/2002US20020146902 Chemical vapor deposition apparatus
10/10/2002US20020146901 Semiconductor devices and methods for manufacturing semiconductor devices
10/10/2002US20020146900 Recessed thin film landing pad structure
10/10/2002US20020146899 Method of forming metal contact in semiconductor device
10/10/2002US20020146898 Bonding pad, semiconductor device and wire bonding method
10/10/2002US20020146897 Structure having reduced lateral spacer erosion
10/10/2002US20020146896 Metallizaton methods using foils
10/10/2002US20020146895 Providing silicon substrate having surface; forming by atomic layer deposition seed layer on surface of silicon substrate; forming by atomic layer deposition of layers of high dielectric constant oxide on seed layer
10/10/2002US20020146894 Semiconductor processing method, method of forming DRAM circuitry, method of depositing a tungsten comprising layer over a substrate, method of forming a transistor gate line over a substrate, method of forming a patterned substantially crystalline Ta2O5 comprising material, and method of forming a capacitor dielectric region comprising substantially crystalline Ta2O5 comprising material
10/10/2002US20020146893 Separation layer is irradiated with incident light so as to cause exfoliation in separation layer and/or at the interface, and to detach detached member from substrate
10/10/2002US20020146892 Semiconductor member manufacturing method and semiconductor device manufacturing method
10/10/2002US20020146891 Method for forming isolation trench
10/10/2002US20020146890 Method of fabricating gate oxide
10/10/2002US20020146889 Process for implanting a deep subcollector with self-aligned photo registration marks
10/10/2002US20020146888 Method of forming a semiconductor device using selective epitaxial growth
10/10/2002US20020146887 Method for forming magnetoresistive random access memory with magnetic tunnelling junction
10/10/2002US20020146886 Self aligned method of forming a semiconductor memory array of floating gate memory cells with vertical control gate sidewalls and insulation spacers, and a memory array made thereby
10/10/2002US20020146885 Method of fabricating a nitride read only memory cell
10/10/2002US20020146884 Non-volatile semiconductor memory device and manufacturing method thereof
10/10/2002US20020146883 Semiconductor devices having a non-volatile memory transistor and methods for manufacturing the same
10/10/2002US20020146882 Method for fabricating a capacitor of a semiconductor device
10/10/2002US20020146881 Methods for manufacturing semiconductor devices having a metal layer
10/10/2002US20020146880 Method for creating a useful bipolar junction transistor from a parasitic bipolar junction transistor on a MOSFET
10/10/2002US20020146879 Limiting Hydrogen ion diffusion using multiple layers of SiO2 and Si3N4
10/10/2002US20020146878 Semiconductor device
10/10/2002US20020146877 Method of simultaneously polishing a plurality of objects of a similar type, in particular silicon wafers, on a polishing installation
10/10/2002US20020146874 Method for manufacturing a semiconductor device
10/10/2002US20020146872 Method of manufacturing semiconductor device
10/10/2002US20020146871 Semiconductor device, method for manufacturing the same, and radiation detector
10/10/2002US20020146870 Polysilicon thin film transistor with a self-aligned ldd structure
10/10/2002US20020146869 Thin film transistor and method of manufacturing the same
10/10/2002US20020146868 Method for forming crystalline semiconductor layers, a method for fabricating thin film transistors, and a method for fabricating solar cells and active matrix liquid crystal devices
10/10/2002US20020146867 Integration process on a SOI substrate of a semiconductor device comprising at least a dielectrically isolated well
10/10/2002US20020146864 Semiconductor device and method of manufacturing the same
10/10/2002US20020146862 Device and method for stacking wire-bonded integrated circuit dice on flip-chip bonded integrated circuit dice
10/10/2002US20020146861 Wafer level insulation underfill for die attach
10/10/2002US20020146858 Semiconductor Device
10/10/2002US20020146856 Electrode, semiconductor device and methods for making them
10/10/2002US20020146855 Nitride-based semiconductor laser device and method of forming the same
10/10/2002US20020146851 Method of forming magnetic memory
10/10/2002US20020146850 Method for forming capacitor of semiconductor device
10/10/2002US20020146849 Method for forming minimally spaced MRAM structures
10/10/2002US20020146647 For use in photolithography; fabricating semiconductor device
10/10/2002US20020146646 Providing wafer that has contact pads exposed by a passivation layer formed on surface of wafer; forming a first mask film having a openings; filling solder material in openings; reflowing solder material into solder posts
10/10/2002US20020146645 Multilayered body for photolithographic patterning
10/10/2002US20020146641 Chemically amplifying type positive resist composition
10/10/2002US20020146639 Lithographic photoresist composition and process for its use
10/10/2002US20020146635 Suitable for direct plate making by means of a semiconductor laser or a YAG laser
10/10/2002US20020146512 Si seasoning to reduce particles, extend clean frequency, block mobile ions and increase chamber throughput
10/10/2002US20020146511 Chemisorption technique for atomic layer deposition
10/10/2002US20020146312 Method for loading a semiconductor processing system
10/10/2002US20020146309 Method and apparatus for the transfer of supports of electronic and/or computer components in the form of disks
10/10/2002US20020146304 Vacuum apparatus and transfer apparatus
10/10/2002US20020146303 Wafer handling system and apparatus
10/10/2002US20020145925 Semiconductor device capable of simple measurement of oscillation frequency
10/10/2002US20020145917 Device and method for using complementary bits in a memory array
10/10/2002US20020145915 Process for making and programming and operating a dual-bit multi-level ballistic flash memory
10/10/2002US20020145914 Process for making and programming and operating a dual-bit multi-level ballistic flash memory
10/10/2002US20020145904 Inductive storage capacitor
10/10/2002US20020145903 Ferroelectric memory device and method of driving the same
10/10/2002US20020145902 Magnetic memory device and magnetic substrate
10/10/2002US20020145834 Thin film magnetoresistive head with heat treated or oxygen treated insulative film
10/10/2002US20020145808 Optical beam guidance system and method for preventing contamination of optical components contained therein
10/10/2002US20020145740 Material independent optical profilometer
10/10/2002US20020145733 Apparatus for evaluating polysilicon film
10/10/2002US20020145722 Lithographic projection apparatus positioning system, method of manufacturing, device manufactured thereby and computer program
10/10/2002US20020145721 Stage system and stage driving method for use in exposure apparatus
10/10/2002US20020145719 DUV scanner linewidth control by mask error factor compensation
10/10/2002US20020145717 Lithographic projection apparatus, a grating module, a sensor module, a method of measuring wave front aberrations
10/10/2002US20020145716 Exposure method and apparatus, and device manufacturing method
10/10/2002US20020145714 Reticle chucks and methods for holding a lithographic reticle utilizing same
10/10/2002US20020145713 Scanning exposure apparatus, scanning exposure method, and device manufacturing method
10/10/2002US20020145712 Microdevice and structural components of the same
10/10/2002US20020145710 Exposure apparatus and device manufacturing method using the same
10/10/2002US20020145695 Liquid crystal display
10/10/2002US20020145694 Liquid crystal display device and method for manufacturing the same
10/10/2002US20020145599 Semiconductor integrated circuit with voltage generation circuit, liquid crystal display controller and mobile electric equipment
10/10/2002US20020145582 Display device and manufacturing method thereof
10/10/2002US20020145447 Semiconductor integrated circuit and method of switching source potential of transistor in semiconductor integrated circuit
10/10/2002US20020145444 Semi-custom-made semiconductor integrated circuit device, method for customization and method for redesign
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