Patents
Sitemap › H01 - Basic electric elements › H01L - Semiconductor devices; Electric solid state devices not otherwise provided for › H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
12/2002
12/05/2002US20020182786 Memory structure with thin film transistor and method for fabricating the same
12/05/2002US20020182785 Method of manufacturing a semiconductor device
12/05/2002US20020182784 Method of manufacturing a semiconductor device
12/05/2002US20020182783 Semiconductor film, semiconductor device and method for manufacturing same
12/05/2002US20020182782 Stereolithographic methods for fabricating hermetic semiconductor device packages and semiconductor devices including stereolithographically fabricated hermetic packages
12/05/2002US20020182781 Chip on board and heat sink attachment methods
12/05/2002US20020182778 Flexible package fabrication method
12/05/2002US20020182777 Buried digit spacer separated capacitor array
12/05/2002US20020182776 Method of manufacturing a resin encapsulated semiconductor device to provide a vent hole in a base substrate
12/05/2002US20020182775 Methods of producing strained microelectronic and/or optical integrated and discrete devices
12/05/2002US20020182774 Die-attach method and assemblies using film and epoxy bonds
12/05/2002US20020182770 Lead-bond type chip package and manufacturing method thereof
12/05/2002US20020182769 Transparent solar cell and method of fabrication
12/05/2002US20020182767 Process for preparing a hydrogen sensor
12/05/2002US20020182766 Method for manufacturing liquid crystal display device
12/05/2002US20020182764 System and method for moving substrates in and out of a manufacturing process
12/05/2002US20020182762 Direct conversion/sampling at antenna
12/05/2002US20020182760 Methods and systems for determining a presence of macro defects and overlay of a specimen
12/05/2002US20020182759 Semiconductor device manufacturing method and semiconductor device sorting system to be used with the same
12/05/2002US20020182757 Effective channel length control using ion implant feed forward
12/05/2002US20020182756 Nonvolatile ferroelectric memory and method for fabricating the same
12/05/2002US20020182755 Self-aligned MRAM contact and method of fabrication
12/05/2002US20020182754 Semiconductor memory device and manufacturing method thereof
12/05/2002US20020182753 Method of forming a capacitor in a FeRAM
12/05/2002US20020182557 Heat-treating furnace with magnetic field and heat treatment method using same
12/05/2002US20020182545 Exposing a partial area of a resist film formed on a surface of a substrate to light of different intensities; developing the resist film exposed
12/05/2002US20020182542 Electron emission lithography apparatus and method using a selectively grown carbon nanotube
12/05/2002US20020182541 Used for producing integrated circuits
12/05/2002US20020182535 Resolution, sensitivity and smoothness on side surfaces of a transferred pattern; photolithography
12/05/2002US20020182534 Resist compositions with polymers having pendant groups containing plural acid labile moieties
12/05/2002US20020182531 Positive photoresist composition
12/05/2002US20020182521 Method of manufacturing semiconductor device
12/05/2002US20020182519 For use in projecting a circuit pattern on a photosensitive resist covered wafer having a transparent substrate with a reflective or dielectric layer thereon.
12/05/2002US20020182518 High reflectance areas for reflecting radiation of an alignment beam of radiation, and low reflectance areas for reflecting less radiation of the alignment beam, comprising scattering structures for scattering and absorbing radiation
12/05/2002US20020182517 Substrate with implantation openings through which the implantation energy can be projected onto a wafer; the critical dimension of the implantation openings is defined in a manner dependent on the respective implantation energy.
12/05/2002US20020182386 Etching process for making electrodes
12/05/2002US20020182363 Method to fabricate smooth-surfaced crystalline phase-change layer for atomic resolution storage device
12/05/2002US20020182360 Material for forming protective film
12/05/2002US20020182343 Silicon oxide film, method of forming the silicon oxide film, and apparatus for depositing the silicon oxide film
12/05/2002US20020182341 Amorphous silicon deposition for sequential lateral solidification
12/05/2002US20020182321 Contacting a thin film device with a gas phase fluoromonomer, and initiating polymerization with a free radical polymerization initiator
12/05/2002US20020182320 Method for preparing metal nitride thin films
12/05/2002US20020182125 Liquid scrubbing; removal impurities
12/05/2002US20020182052 Monitoring system for a conveying device that conveys flat articles, especially wafers
12/05/2002US20020182051 Tray input-output module
12/05/2002US20020182047 Air track conveyor system for disk production
12/05/2002US20020182041 Semiconductor wafer storage kiosk
12/05/2002US20020182040 Substrate processing apparatus and substrate processing method
12/05/2002US20020182038 Substrate processing apparatus, substrate support apparatus, substrate processing method, and substrate fabrication method
12/05/2002US20020182037 Substrate processing apparatus, substrate processing system, and substrate conveying method
12/05/2002US20020182036 Semiconductor wafer handling robot for linear transfer chamber
12/05/2002US20020182016 Method of loading a sputter pallet
12/05/2002US20020181915 Apparatus for generating an oscillating reference signal and method of manufacture therefore
12/05/2002US20020181828 Structure for an optically switched device utilizing the formation of a compliant substrate for materials used to form the same
12/05/2002US20020181827 Optically-communicating integrated circuits
12/05/2002US20020181826 Structure and method for fabricating a high-speed interface in semiconductor structures
12/05/2002US20020181825 Optical clock signal distribution
12/05/2002US20020181758 Die bonding apparatus with automatic die and lead frame image matching system
12/05/2002US20020181757 Appearance inspection machine and method for concurrently performing defect detection and classification
12/05/2002US20020181756 Method for analyzing defect data and inspection apparatus and review system
12/05/2002US20020181612 Monolithic, software-definable circuit including a power amplifier and method for use therewith
12/05/2002US20020181309 Enhanced fuse configurations for low-voltage flash memories
12/05/2002US20020181289 Data line disturbance free memory block divided flash memory and microcomputer having flash memory therein
12/05/2002US20020181287 Channel write/erase flash memory cell and its manufacturing method
12/05/2002US20020181286 Dual cell reading and writing technique
12/05/2002US20020181275 Data register and access method thereof
12/05/2002US20020181273 Semiconductor memory device
12/05/2002US20020181272 Semiconductor memory device
12/05/2002US20020181267 Nonvolatile semiconductor memory device
12/05/2002US20020181266 Steering gate and bit line segmentation in non-volatile memories
12/05/2002US20020181256 Oxide protection for a booster circuit
12/05/2002US20020181184 Wafer space supporting apparatus installed on electrostatic chuck and method for fabricating the same
12/05/2002US20020181125 Catadioptric objective
12/05/2002US20020181119 Systems and methods for scanning a beam of light across a specimen
12/05/2002US20020181092 Antistatic optical pellicle
12/05/2002US20020180991 Method and apparatus for characterization of ultrathin silicon oxide films using mirror-enhanced polarized reflectance fourier transform infrared spectroscopy
12/05/2002US20020180986 Methods and systems for determining a critical dimension, a presence of defects, and a thin film characteristic of a specimen
12/05/2002US20020180985 Methods and systems for determining at least one characteristic of defects on at least two sides of a specimen
12/05/2002US20020180961 Methods and systems for determining an adhesion characteristic and a thickness of a specimen
12/05/2002US20020180947 Multiple image reticle for forming layers
12/05/2002US20020180946 Motion feed-through into a vacuum chamber and its application in lithographic projection apparatus
12/05/2002US20020180944 Exposure device
12/05/2002US20020180943 Lithographic apparatus, device manufacturing method, and device manufactured thereby
12/05/2002US20020180940 Lithographic apparatus, device manufacturing method, and device manufactured thereby
12/05/2002US20020180903 Thin film transistor for a liquid crystal display device and a fabrication process thereof
12/05/2002US20020180672 Semiconductor display device
12/05/2002US20020180605 Wearable biomonitor with flexible thinned integrated circuit
12/05/2002US20020180513 Metal oxide semiconductor transistor circuit and semiconductor integrated circuit using the same
12/05/2002US20020180502 Clock distribution circuit
12/05/2002US20020180494 Voltage level converting circuit
12/05/2002US20020180477 Method for testing a semiconductor integrated circuit
12/05/2002US20020180476 Method for testing a semiconductor integrated circuit
12/05/2002US20020180474 Method of detecting carrier dose of a semiconductor wafer
12/05/2002US20020180466 Semiconductor manufacturing and inspecting device
12/05/2002US20020180450 RF power probe head with a thermally conductive bushing
12/05/2002US20020180449 Method and apparatus for manufacturing semiconductor device, method and apparatus for controlling the same, and method and apparatus for simulating manufacturing process of semiconductor device
12/05/2002US20020180432 Transpinnor-based switch and applications
12/05/2002US20020180386 XY table for a semiconductor manufacturing apparatus
12/05/2002US20020180366 Ion implanter
12/05/2002US20020180312 Low-mass and compact stage devices exhibiting six degrees of freedom of fine motion, and microlithography systems comprising same
1 ... 4854 4855 4856 4857 4858 4859 4860 4861 4862 4863 4864 4865 4866 4867 4868 4869 4870 4871 4872 4873 4874 ... 6590