Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2003
01/09/2003US20030008444 Protected against leakage of doped impurity to channel region; threshold voltage and electrical reliability
01/09/2003US20030008442 Method for improving inversion layer mobility in a silicon carbide metal-oxide semiconductor field-effect transistor
01/09/2003US20030008441 Method of forming an integrated circuit on a low loss substrate
01/09/2003US20030008440 GaInP epitaxial stacking structure and fabrication method thereof and a FET transistor using this structure
01/09/2003US20030008439 Method of manufacturing a semiconductor device
01/09/2003US20030008438 Method of forming a field effect transistor
01/09/2003US20030008437 Method of separating thin film device, method of transferring thin film device, thin film device, active matrix substrate and liquid crystal display device
01/09/2003US20030008436 Active matrix substrate and manufacturing method thereof
01/09/2003US20030008435 Process for producing silicon on insulator structure having intrinsic gettering by ion implantation
01/09/2003US20030008432 Method and device for securing a multi-dimensionally constructed chip stack and chip configuration
01/09/2003US20030008426 Method for fabricating a set of distributed feedback semiconductor lasers
01/09/2003US20030008425 Method for producing group III nitride compound semiconductor light-emitting element
01/09/2003US20030008422 Detection of nontransient processing anomalies in vacuum manufacturing process
01/09/2003US20030008419 Induction magnet for use in producing high-density plasma and method of manufacturing the same, and semiconductor manufacturing equipment comprising the induction magnet
01/09/2003US20030008417 Semiconductor integrated circuit device and method of manufacturing the same
01/09/2003US20030008404 Method of measuring an impurity profile of a semiconductor wafer and program for measuring an impurity profile of a semiconductor wafer
01/09/2003US20030008243 Ultra-large-scale-integration (ULSI) metallization; forming openings through first and second insulating layers, a tungsten nitride layer in contact with the openings, and providing a copper layer
01/09/2003US20030008242 Detecting the sidewall angles and comparing them with previously set threshold values set to guarantee a neglectable resist flow for any structure sizes on the pattern that will be projected onto the resist
01/09/2003US20030008237 Substrate coated with an ionic thermal acid generator and a resin with a photoresist layer overtop
01/09/2003US20030008233 Negative-working photoresist composition
01/09/2003US20030008232 (Meth)acrylate compounds having a norbornane, bicyclo(2.2.2) octane, 7-oxanorbornane or cyclohexane ring structure and a gamma-butyrolactone ring structure connected together by a linker, useful in forming polymer with high transparency
01/09/2003US20030008230 Thiophene-containing photo acid generators for photolithography
01/09/2003US20030008222 Includes identifying features for which phase shifting can be applied, automatically mapping the phase shifting regions for implementation of such features, resolving phase conflicts, applying sub-resolution assist features
01/09/2003US20030008219 Phase shift film is a multilayer film made of at least two types of layer alternately, each haivng a different composition and containing atleast one element selected from among metals, silicon, oxygen and nitrogen
01/09/2003US20030008218 Alternating phase mask
01/09/2003US20030008182 Comprises shrink-suppressing layers on main surface of presintered ceramic; efficiency; electronic
01/09/2003US20030008179 Non-c-axis oriented bismuth-layered perovskite ferroelectric structure epitaxially grown on buffered silicon
01/09/2003US20030008155 Method for the formation of silica film, silica film, insulating film, and semiconductor device
01/09/2003US20030008139 Pressure sensitive adhesive sheet for semiconductor wafer processing
01/09/2003US20030008133 Flip chips; conductive particles dispersed in binder
01/09/2003US20030008129 Dielectric material and process of insulating a semiconductor device using same
01/09/2003US20030008075 ULSI wiring and method of manufacturing the same
01/09/2003US20030008072 Atomic layer deposition using organometallic complex with beta-diketone ligand
01/09/2003US20030008070 Using organometallic compound; heating decomposition
01/09/2003US20030008069 Dual frequency plasma enhanced chemical vapor deposition of silicon carbide layers
01/09/2003US20030008066 Supplying mixture of solvent dissolved photoresist; rotating target; spreading radial; controlling thickness; semiconductors
01/09/2003US20030007849 Material handling and transport process
01/09/2003US20030007712 Diffraction-optical component, illumination system and exposure system comprising such a diffraction-optical component as well as an exposure method employing such an exposure system
01/09/2003US20030007677 Method and its apparatus for inspecting a pattern
01/09/2003US20030007596 Method for adjusting gap between two objects and exposure method using the same, gap adjusting apparatus, and exposure apparatus
01/09/2003US20030007532 Semiconductor laser device in which near-edge portion of upper cladding layer is insulated for preventing current injection
01/09/2003US20030007387 CG-WL voltage boosting scheme for twin MONOS
01/09/2003US20030007319 Electrode materials with improved hydrogen degradation resistance
01/09/2003US20030007308 Electrostatic chuck member and method of producing the same
01/09/2003US20030007253 Large-apertured projection lens with minimal diaphragm error
01/09/2003US20030007156 Interferometry system and method employing an angular difference in propagation between orthogonally polarized input beam components
01/09/2003US20030007153 Alignment system of semiconductor exposure apparatus and diaphragm unit of the alignment system
01/09/2003US20030007140 Stage apparatus and method of driving the same
01/09/2003US20030007138 Projection optical system, a projection exposure apparatus, and a projection exposure method
01/09/2003US20030007137 Illumination device, exposure apparatus and exposure method
01/09/2003US20030007136 Exposure apparatus
01/09/2003US20030007106 Method for manufacturing active matrix type liquid crystal display device
01/09/2003US20030006856 Integrated circuit interconnect system
01/09/2003US20030006849 Random number generator
01/09/2003US20030006833 Semiconductor integrated circuit
01/09/2003US20030006832 Semiconductor integrated circuit
01/09/2003US20030006825 Charge pump circuit for use in high voltage generating circuit
01/09/2003US20030006823 Semiconductor integrated circuit device having boosting circuit
01/09/2003US20030006819 Semiconductor integrated circuit device
01/09/2003US20030006811 Semiconductor integrated circuit device
01/09/2003US20030006798 Engagement probes
01/09/2003US20030006795 Semiconductor device, method of measuring the same, and method of manufacturing the same
01/09/2003US20030006787 Conductive contact
01/09/2003US20030006746 Reference voltage generator
01/09/2003US20030006529 Mold
01/09/2003US20030006513 Production method of electronic parts and water treatment apparatus
01/09/2003US20030006510 Semiconductor device, manufacturing method for semiconductor device and mounting method for the same
01/09/2003US20030006509 Semiconductor device
01/09/2003US20030006508 Electronic device including stacked microchips
01/09/2003US20030006507 Semiconductor device and method of manufacturing the same
01/09/2003US20030006506 Semiconductor structure having buried track conductors, and method for generating an electrical contact with buried track conductors
01/09/2003US20030006505 Bonding pad structure and method for making same
01/09/2003US20030006504 Contact structure, method of forming the same, semiconductor device, and method of manufacturing the same
01/09/2003US20030006503 Device having resin package and method of producing the same
01/09/2003US20030006501 Semiconductor device, method of manufacturing semiconductor device, lead frame, method of manufacturing lead frame, and method of manufacturing semiconductor device with lead frame
01/09/2003US20030006500 Circuit board, method for manufacturing same, and high-output module
01/09/2003US20030006499 Semiconductor chip package and method of fabricating same
01/09/2003US20030006496 Semiconductor/printed circuit board assembly, and computer system
01/09/2003US20030006493 Semiconductor device and manufacturing method thereof
01/09/2003US20030006492 Semiconductor device and method of manufacturing the same
01/09/2003US20030006490 Semiconductor integrated circuit device
01/09/2003US20030006489 Flexible wiring substrate interposed between semiconductor element and circuit substrate
01/09/2003US20030006487 Semiconductor device having element isolation structure
01/09/2003US20030006486 Silicon-germanium bipolar transistor with optimized germanium profile
01/09/2003US20030006485 Bipolar transistor
01/09/2003US20030006484 Bipolar transistor and method manufacture thereof
01/09/2003US20030006483 Short channel power MOSFET with increased breakdown voltage
01/09/2003US20030006481 Semiconductor integrated circuit, D-A converter device, and A-D converter device
01/09/2003US20030006480 MIMCap with high dielectric constant insulator
01/09/2003US20030006479 Laser programming of integrated circuits
01/09/2003US20030006477 Porous materials
01/09/2003US20030006476 Semiconductor device isolation structure and method of forming
01/09/2003US20030006475 Nonvolatile memory device with reduced floating gate and increased coupling ratio and manufacturing method thereof
01/09/2003US20030006474 Apparatus and methods for fabricating inductor for integrated circuit or integrated circuit package
01/09/2003US20030006473 Power diode having improved on resistance and breakdown voltage
01/09/2003US20030006471 Semiconductor device having silicon carbide layer of predetermined conductivity type and module device having the same
01/09/2003US20030006466 Semiconductor integrated circuit
01/09/2003US20030006465 Semiconductor device and method of making the same
01/09/2003US20030006463 Protection transistor with improved edge structure
01/09/2003US20030006462 Vertical source/drain contact semiconductor