| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/14/2003 | US6506097 Reflectance traces indicate that oxide layer has been completely exposed; |
| 01/14/2003 | US6506009 Semiconductor substrates stored in cassettes |
| 01/14/2003 | US6505914 Microactuator based on diamond |
| 01/14/2003 | US6505823 Apparatus for positioning a semiconductor pellet |
| 01/14/2003 | US6505741 Tray for receiving semiconductor devices |
| 01/14/2003 | US6505636 Apparatus for wafer carrier in-process clean and rinse |
| 01/14/2003 | US6505635 Lifting and rinsing a wafer |
| 01/14/2003 | US6505634 Semiconductor wafer cleaning apparatus |
| 01/14/2003 | US6505528 Device for fast taking out and putting in |
| 01/14/2003 | US6505478 Heat exchanger having sloped deflection surface for directing refrigerant |
| 01/14/2003 | US6505417 Method for controlling airflow on a backside of a semiconductor wafer during spin processing |
| 01/14/2003 | US6505415 Vacuum processing apparatus |
| 01/14/2003 | US6505400 Method of making chip scale package with heat spreader |
| 01/14/2003 | US6505397 Die holding mechanism for a die with connecting wires thereon |
| 01/14/2003 | US6505395 Apparatus and method for removing carrier tape from a singulated die |
| 01/09/2003 | WO2003003800A1 Successive integration of multiple devices process and product |
| 01/09/2003 | WO2003003798A1 Joining method using anisotropic conductive adhesive |
| 01/09/2003 | WO2003003480A1 Arrangement for reducing the piezoelectric effects in at least one electrical component which is sensitive to piezoelectric effects and arranged in an active layer of semiconductor material |
| 01/09/2003 | WO2003003475A2 Semiconductor device comprising a mim capacitor and an interconnect structure |
| 01/09/2003 | WO2003003474A1 Silicon carbide schottky barrier diode and method of making |
| 01/09/2003 | WO2003003473A1 Nonvolatile semiconductor memory cell and semiconductor memory and method for fabricating nonvolatile semiconductor memory |
| 01/09/2003 | WO2003003472A2 Transistor-arrangement, method for operating a transistor-arrangement as a data storage element and method for producing a transistor-arrangement |
| 01/09/2003 | WO2003003470A2 Field effect transistor and method for the production thereof |
| 01/09/2003 | WO2003003465A1 Integrated arrays of modulators and lasers on electronics |
| 01/09/2003 | WO2003003464A2 Hv-soi ldmos device with integrated diode to improve reliability and avalanche ruggedness |
| 01/09/2003 | WO2003003462A2 Trench capacitor and corresponding method of production |
| 01/09/2003 | WO2003003461A1 Semiconductor integrated circuit device and method for reducing noise |
| 01/09/2003 | WO2003003458A2 Power pads for application of high current per bond pad in silicon technology |
| 01/09/2003 | WO2003003457A2 Design of lithography alignment and overlay measurement marks on damascene surface |
| 01/09/2003 | WO2003003451A1 Isolation of sonos devices |
| 01/09/2003 | WO2003003450A1 Semiconductor device and production method therefor |
| 01/09/2003 | WO2003003449A2 Ceramic electrostatic chuck and method of fabricating same |
| 01/09/2003 | WO2003003448A2 High temperature electrostatic chuck |
| 01/09/2003 | WO2003003447A2 System and method for active control of spacer deposition |
| 01/09/2003 | WO2003003446A2 Control of solid state dimensional features |
| 01/09/2003 | WO2003003445A1 Sheet for underfill, method for underfilling semiconductor chip, and method for mounting semiconductor chip |
| 01/09/2003 | WO2003003444A2 Method for producing a substrate arrangement |
| 01/09/2003 | WO2003003443A1 Process for forming fusible links |
| 01/09/2003 | WO2003003442A1 Field effect transistor and method for production thereof |
| 01/09/2003 | WO2003003441A1 Production method for anneal wafer and anneal wafer |
| 01/09/2003 | WO2003003440A1 Semiconductor device and production method therefor |
| 01/09/2003 | WO2003003439A1 Method of making thin films dielectrics using a process for room temperature wet chemical growth of sio based oxides on a substrate |
| 01/09/2003 | WO2003003438A1 Low metallic impurity sio based thin film dielectrics on semiconductor substrates using a room temperature wet chemical growth process, method and applications thereof |
| 01/09/2003 | WO2003003437A1 Method of predicting processed results and processing device |
| 01/09/2003 | WO2003003436A1 Sidewall spacer definition of gates |
| 01/09/2003 | WO2003003435A2 Method for improving inversion layer mobility in a silicon carbide metal-oxide semiconductor field-effect transistor |
| 01/09/2003 | WO2003003434A1 Method of producing semiconductor thin film and method of producing solar cell |
| 01/09/2003 | WO2003003433A1 Chamber sensor port, chamber, and electron beam processor |
| 01/09/2003 | WO2003003431A1 Relaxed sige films by surfactant mediation |
| 01/09/2003 | WO2003003430A2 Film or layer made of semi-conductive material and method for producing said film or layer |
| 01/09/2003 | WO2003003428A2 Apparatus, process and method for mounting and treating a substrate |
| 01/09/2003 | WO2003003427A1 Opto-electronic device integration |
| 01/09/2003 | WO2003003426A1 Opto-electronic device integration |
| 01/09/2003 | WO2003003425A1 Opto-electronic device integration |
| 01/09/2003 | WO2003003423A1 Topside active optical device apparatus and method |
| 01/09/2003 | WO2003003421A2 Optical chip packaging via through hole |
| 01/09/2003 | WO2003003420A1 Opto-electronic device integration |
| 01/09/2003 | WO2003003419A2 Four-bar linkage wafer clamping mechanism |
| 01/09/2003 | WO2003003418A2 Locator pin integrated with sensor for detecting semiconductor substrate carrier |
| 01/09/2003 | WO2003003416A2 Method and apparatus for accessing a multiple chamber semiconductor wafer processing system |
| 01/09/2003 | WO2003003415A2 Method and apparatus for providing distributed material management and flow control in an integrated circuit factory |
| 01/09/2003 | WO2003003414A2 Directed gas injection apparatus for semiconductor processing |
| 01/09/2003 | WO2003003413A2 Growing copper vias or lines within a patterned resist using a copper seed layer |
| 01/09/2003 | WO2003003407A1 Self contained sensing apparatus and system |
| 01/09/2003 | WO2003003405A1 Apparatus and method for radio frequency de-coupling and bias voltage control in a plasma reactor |
| 01/09/2003 | WO2003003404A2 Process chamber components having textured internal surfaces and method of manufacture |
| 01/09/2003 | WO2003003403A1 Configurable plasma volume etch chamber |
| 01/09/2003 | WO2003003377A2 Low-voltage and interface damage-free polymer memory device |
| 01/09/2003 | WO2003003258A2 I.c. cell and library identification |
| 01/09/2003 | WO2003003208A1 Device for and method of storing identification data in an integrated circuit |
| 01/09/2003 | WO2003003124A1 Photoresist stripper composition |
| 01/09/2003 | WO2003003120A1 Thiophene-containing photo acid generators for photolithography |
| 01/09/2003 | WO2003003119A1 Repair of amplitude defects in a multilayer coating |
| 01/09/2003 | WO2003003118A2 Mask repair with electron beam-induced chemical etching |
| 01/09/2003 | WO2003003072A2 Optical element and manufacturing method therefor |
| 01/09/2003 | WO2003002990A2 Using scatterometry to develop real time etch image |
| 01/09/2003 | WO2003002860A2 Directed gas injection apparatus for semiconductor processing |
| 01/09/2003 | WO2003002688A1 Process for removing contaminant from a surface and composition useful therefor |
| 01/09/2003 | WO2003002629A1 Prduction method for copolymer film, copolymer film produced by the forming method, and semiconductor device using copolymer film |
| 01/09/2003 | WO2003002301A1 End point detection system for chemical mechanical polishing applications |
| 01/09/2003 | WO2003002000A1 Medical x-ray device and power module therefor |
| 01/09/2003 | WO2002093624A3 Apparatus for regulating temperature of a process kit in a semiconductor wafer-processing chamber |
| 01/09/2003 | WO2002093605A3 Cylinder-based plasma processing system |
| 01/09/2003 | WO2002089190A3 Method for minimizing tungsten oxide evaporation during selective sidewall oxidation of tungsten-silicon gates |
| 01/09/2003 | WO2002089185A3 Triple chamber load lock |
| 01/09/2003 | WO2002089184A3 Method for manufacturing a semiconductor device and support plate therefor |
| 01/09/2003 | WO2002085790A3 Gas dissolved water producing apparatus and method thereof for use in ultrasonic cleaning equipment |
| 01/09/2003 | WO2002084743A8 Metal insulator power semiconductor component (mis) and a method for producing the same |
| 01/09/2003 | WO2002080264A3 Method and apparatus for controlling feature critical dimensions based on scatterometry derived profile |
| 01/09/2003 | WO2002073661A9 Extraction method of defect density and size distributions |
| 01/09/2003 | WO2002073318A9 Method and device for vibration control |
| 01/09/2003 | WO2002068145A8 Controlled attenuation capillary |
| 01/09/2003 | WO2002066408A3 Process for producing perfluorocarbons and use thereof |
| 01/09/2003 | WO2002061809A3 Configurable patterning device and a method of making integrated circuits using such a device |
| 01/09/2003 | WO2002059926A3 Fabrication of high resistivity structures using focused ion beams |
| 01/09/2003 | WO2002041391A3 Amorphized barrier layer for integrated circuit interconnects |
| 01/09/2003 | WO2002037559A3 Low temperature hillock suppression method in integrated circuit interconnects |
| 01/09/2003 | WO2002031875A3 Dielectric interface films and methods therefor |
| 01/09/2003 | WO2002031545A1 Filter member manufacturing method, filter member cutting method, filter chip cutting method, and filter chip manufacturing method |
| 01/09/2003 | WO2002027797A3 Shallow trench transistor deep trench capacitor memory cell |