| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/15/2003 | EP1276138A2 Single wafer type substrate cleaning method and apparatus |
| 01/15/2003 | EP1276134A2 A method for determining depression/protrusion of sample and charged particle beam apparatus therefor |
| 01/15/2003 | EP1276060A2 Method of designing a timing budget |
| 01/15/2003 | EP1276031A1 Gas delivery metering tube |
| 01/15/2003 | EP1276030A2 Fluid control device |
| 01/15/2003 | EP1276016A2 Exposure apparatus |
| 01/15/2003 | EP1276015A2 Stage apparatus and method of driving the same |
| 01/15/2003 | EP1275995A2 Optical system with a plurality of optical elements |
| 01/15/2003 | EP1275755A1 Silicon wafer and method for producing silicon single crystal |
| 01/15/2003 | EP1275618A1 Ceramic film and method for its preparation, and semiconductor device and piezoelectric element |
| 01/15/2003 | EP1275168A2 Method and apparatus for integrated-battery devices |
| 01/15/2003 | EP1275156A2 Process for fabricating thin film transistors |
| 01/15/2003 | EP1275155A1 Hetero bipolar transistor with a t-shaped emitter contact and method for the production thereof |
| 01/15/2003 | EP1275154A2 Interdigitated multilayer capacitor structure for deep-sub-micron cmos |
| 01/15/2003 | EP1275152A2 Bonding pad in semiconductor device |
| 01/15/2003 | EP1275151A2 Bonding pad in semiconductor device |
| 01/15/2003 | EP1275150A2 Shaped springs and methods of fabricating and using shaped springs |
| 01/15/2003 | EP1275147A1 Method of manufacturing a semiconductor device |
| 01/15/2003 | EP1275146A1 Method of joining components |
| 01/15/2003 | EP1275144A1 Method and apparatus for control of critical dimension using feedback etch control |
| 01/15/2003 | EP1275143A2 Process for forming electrical/mechanical connections |
| 01/15/2003 | EP1275142A1 Method for low temperature bonding and bonded structure |
| 01/15/2003 | EP1275141A1 Electronic device manufacture comprising a thin-film-transistor |
| 01/15/2003 | EP1275140A2 A method of improving adhesion of a cap layer to a porous material layer on a wafer |
| 01/15/2003 | EP1275139A1 Uv pretreatment process of ultra-thin oxynitride for formation of silicon nitride films |
| 01/15/2003 | EP1275138A1 Method of forming structures on a semiconductor substrate |
| 01/15/2003 | EP1275137A1 Method of manufacturing a semiconductor device |
| 01/15/2003 | EP1275136A2 Multilayered capacitor structure with alternately connected concentric lines for deep submicron cmos |
| 01/15/2003 | EP1275135A1 Methods and apparatus for thermally processing wafers |
| 01/15/2003 | EP1275133A1 Device and method for the etching of a substrate by means of an inductively coupled plasma |
| 01/15/2003 | EP1275129A1 E-beam/microwave gas jet pecvd method and apparatus for depositing and/or surface modification of thin film materials |
| 01/15/2003 | EP1275032A1 Mitigation of photoresist outgassing in vacuum lithography |
| 01/15/2003 | EP1275031A1 A substrate for and a process in connection with the product of structures |
| 01/15/2003 | EP1275030A1 Device for homogeneous heating of an object |
| 01/15/2003 | EP1275029A1 Scanning framing blade apparatus |
| 01/15/2003 | EP1275010A2 Method and apparatus for testing signal paths between an integrated circuit wafer and a wafer tester |
| 01/15/2003 | EP1274963A1 Method and apparatus for high-pressure wafer processing and drying |
| 01/15/2003 | EP1274877A2 A method of determining the end point of a plasma cleaning operation |
| 01/15/2003 | EP1274876A2 Cleaning of a plasma processing system silicon roof |
| 01/15/2003 | EP1274875A2 Method and apparatus for providing uniform gas delivery to substrates in cvd and pecvd processes |
| 01/15/2003 | EP1274808A1 Die-attaching paste and semiconductor device |
| 01/15/2003 | EP1274807A2 Polishing agent and method for producing planar layers |
| 01/15/2003 | EP1274755A2 Low dielectric constant organic dielectrics based on cage-like structures |
| 01/15/2003 | EP1274647A1 Micromechanical component and corresponding production method |
| 01/15/2003 | EP1274542A1 Process for reducing surface variations for polished wafer |
| 01/15/2003 | EP1274540A1 Polishing method using a rehydrated dry particulate polishing composition |
| 01/15/2003 | EP1274529A1 Device for monitoring and calibrating oxide charge measurement equipment and method therefor |
| 01/15/2003 | EP1242165A4 Gas purification system with an integrated hydrogen sorption and filter assembly |
| 01/15/2003 | EP1144737B1 Production of bulk single crystals of aluminum nitride, silicon carbide and aluminum nitride:silicon carbide alloy |
| 01/15/2003 | EP1078454B1 Planar resist structure, especially an encapsulation for electric components and a thermomechanical method for the production thereof |
| 01/15/2003 | EP1038048B1 Gas feeding system for chemical vapor deposition reactor and method of controlling the same |
| 01/15/2003 | EP0917597B1 Method for producing conductor track structures, especially fine conductor track structures, arranged on a nonconductive support material |
| 01/15/2003 | EP0916160B1 Silicon carbide metal-insulator semiconductor field effect transistor |
| 01/15/2003 | EP0645072B1 High performance horizontal diffusion furnace system |
| 01/15/2003 | EP0529097B1 Method of manufacturing two-layer tab tape |
| 01/15/2003 | CN2531524Y Metal contact spacer of semiconductor element |
| 01/15/2003 | CN1391704A Surface mount IC stacking method and device |
| 01/15/2003 | CN1391703A Semiconductor chip having bond pad located on active device |
| 01/15/2003 | CN1391702A 半导体器件 Semiconductor devices |
| 01/15/2003 | CN1391701A Self-aligned method for forming deep trenches in shallow trenches for isolation of semiconductor devices |
| 01/15/2003 | CN1391697A X射线变焦镜头 X-ray lens |
| 01/15/2003 | CN1391664A Ultraviolet and vacuum ultraviolet transparent polymer compositions and their uses |
| 01/15/2003 | CN1391506A Conditioner for polishing pad and method for manufacturing the same |
| 01/15/2003 | CN1391428A Printing circuit boards and their manufacture |
| 01/15/2003 | CN1391347A Switch circuit device with semiconductor compound |
| 01/15/2003 | CN1391294A Magnetic resistance effect film and memory therewith |
| 01/15/2003 | CN1391286A Non-contact flash memory unit structure with channel writing/erasing and its preparing process |
| 01/15/2003 | CN1391285A Process for preparing read-only flash memory unit structure with groove-type separation grid and its operation method |
| 01/15/2003 | CN1391284A Process for preparing quasi-dynamic flash memory unit structure with channel writing and erasing, and its operation method |
| 01/15/2003 | CN1391283A Semiconductor device and manufacture thereof |
| 01/15/2003 | CN1391282A Semiconductive compound switch circuit devices |
| 01/15/2003 | CN1391281A Multi-layer integrated circuit for join of substrates with wide gaps |
| 01/15/2003 | CN1391278A Semiconductor device and manufacture thereof |
| 01/15/2003 | CN1391277A Internal connecting line structure with dual-layer electric partition and its preparing process |
| 01/15/2003 | CN1391276A Internal Connecting line structure with dielectric partition and its preparing process |
| 01/15/2003 | CN1391275A Internal connecting line structure with metallic partitions and its preparing process |
| 01/15/2003 | CN1391274A Chip package structure and its preparing process |
| 01/15/2003 | CN1391272A Multi-layer substrate of IC and arrangement method of holes on dielectric layers |
| 01/15/2003 | CN1391271A Non-volatile memory with float gate wall and its preparing process |
| 01/15/2003 | CN1391270A Process for preparing double-metal inlaid structure |
| 01/15/2003 | CN1391269A Process for preventing over-etch of window in dielectric layer and its structure |
| 01/15/2003 | CN1391268A Circuit and method for regulating working frequency of chip |
| 01/15/2003 | CN1391267A Manufacture procedure of flash memory units |
| 01/15/2003 | CN1391266A Process for generating window in ligh-molecular diectric layer and its structure |
| 01/15/2003 | CN1391265A Process for removing antireflecting inorganic layer |
| 01/15/2003 | CN1391264A Photoetching method for nanoparticle pattern based on self organization |
| 01/15/2003 | CN1391263A Washing water and method for cleaning wafers |
| 01/15/2003 | CN1391262A Method and device for removing useless materials from semiconductor wafers |
| 01/15/2003 | CN1391261A Barrier cover of lower metal block |
| 01/15/2003 | CN1391260A Manufacturing method for semiconductor device |
| 01/15/2003 | CN1391259A Process for growing P-type ZnO crystal film by real-time doping nitrogen |
| 01/15/2003 | CN1391258A Manufacturing method for semiconductor device |
| 01/15/2003 | CN1391237A Process for growing Ge nanoline by aluminium oxide template |
| 01/15/2003 | CN1391235A Porous material |
| 01/15/2003 | CN1391234A Method for preparing tip of silicon with three protective surfaces at its bottom |
| 01/15/2003 | CN1391233A Novolatile semiconductor memory device |
| 01/15/2003 | CN1391232A Nonvolatile semiconductor memory device |
| 01/15/2003 | CN1391139A Substrate processing devices |
| 01/15/2003 | CN1391138A Substrate processing devices |
| 01/15/2003 | CN1391128A Videograph processing devices |