| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/21/2003 | US6509246 Production of semiconductor integrated circuit |
| 01/21/2003 | US6509245 Electronic device with interleaved portions for use in integrated circuits |
| 01/21/2003 | US6509244 Method for forming storage node electrode using a polysilicon hard mask on a sacrificial insulation film |
| 01/21/2003 | US6509243 Method for integrating high-voltage device and low-voltage device |
| 01/21/2003 | US6509242 Heterojunction bipolar transistor |
| 01/21/2003 | US6509241 Process for fabricating an MOS device having highly-localized halo regions |
| 01/21/2003 | US6509240 Angle implant process for cellular deep trench sidewall doping |
| 01/21/2003 | US6509239 Method of fabricating a field effect transistor |
| 01/21/2003 | US6509238 Method for manufacturing a MOS device with improved well control stability |
| 01/21/2003 | US6509237 Flash memory cell fabrication sequence |
| 01/21/2003 | US6509236 Laser fuseblow protection method for silicon on insulator (SOI) transistors |
| 01/21/2003 | US6509235 Method for making an embedded memory MOS |
| 01/21/2003 | US6509234 Method of fabricating an ultra-thin fully depleted SOI device with T-shaped gate |
| 01/21/2003 | US6509233 Method of making trench-gated MOSFET having cesium gate oxide layer |
| 01/21/2003 | US6509232 Formation of STI (shallow trench isolation) structures within core and periphery areas of flash memory device |
| 01/21/2003 | US6509231 Nitride ready only memory cell with two top oxide layers and the method for manufacturing the same |
| 01/21/2003 | US6509230 Non-volatile memory semiconductor device including a graded, grown, high quality oxide layer and associated methods |
| 01/21/2003 | US6509229 Method for forming self-aligned contacts using consumable spacers |
| 01/21/2003 | US6509228 Etching procedure for floating gate formation of a flash memory device |
| 01/21/2003 | US6509227 Formation of conductive rugged silicon |
| 01/21/2003 | US6509226 Process for protecting array top oxide |
| 01/21/2003 | US6509225 Semiconductor device and method of manufacturing the same |
| 01/21/2003 | US6509224 Semiconductor device and method for manufacturing thereof |
| 01/21/2003 | US6509223 Method for making an embedded memory MOS |
| 01/21/2003 | US6509222 Process for manufacturing electronic devices comprising nonvolatile memory cells of reduced dimensions |
| 01/21/2003 | US6509221 Method for forming high performance CMOS devices with elevated sidewall spacers |
| 01/21/2003 | US6509220 Method of fabricating a high-voltage transistor |
| 01/21/2003 | US6509219 Fabrication of notched gates by passivating partially etched gate sidewalls and then using an isotropic etch |
| 01/21/2003 | US6509218 Front stage process of a fully depleted silicon-on-insulator device |
| 01/21/2003 | US6509217 Inexpensive, reliable, planar RFID tag structure and method for making same |
| 01/21/2003 | US6509216 Memory structure with thin film transistor and method for fabricating the same |
| 01/21/2003 | US6509215 TFT substrate with low contact resistance and damage resistant terminals |
| 01/21/2003 | US6509213 Methods of forming transistors and connections thereto |
| 01/21/2003 | US6509212 Method for laser-processing semiconductor device |
| 01/21/2003 | US6509211 Semiconductor device having SOI structure and method of fabricating the same |
| 01/21/2003 | US6509210 Semiconductor device and method for fabricating the same |
| 01/21/2003 | US6509206 Method and apparatus for manufacturing semiconductor device, and semiconductor device manufactured by the method |
| 01/21/2003 | US6509205 Apparatus and method for providing mechanically pre-formed conductive leads |
| 01/21/2003 | US6509204 Transparent solar cell and method of fabrication |
| 01/21/2003 | US6509202 Method and system for qualifying an ONO layer in a semiconductor device |
| 01/21/2003 | US6509201 Method and apparatus for monitoring wafer stress |
| 01/21/2003 | US6509200 Method of appraising a dielectric film, method of calibrating temperature of a heat treatment device, and method of fabricating a semiconductor memory device |
| 01/21/2003 | US6509199 Spatial averaging technique for ellipsometry and reflectometry |
| 01/21/2003 | US6509198 Method of power IC inspection |
| 01/21/2003 | US6509141 Removal of photoresist and photoresist residue from semiconductors using supercritical carbon dioxide process |
| 01/21/2003 | US6509137 For increasing photolithography process window magnitude; photoresist layer is formed on substrate, exposed through a photomask, followed by developing and stabilization; repeated until desired thickness obtained |
| 01/21/2003 | US6509127 Method of electron-beam exposure |
| 01/21/2003 | US6509124 Method of producing diamond film for lithography |
| 01/21/2003 | US6509069 Method of reducing the cleaning requirements of a dielectric chuck surface |
| 01/21/2003 | US6508990 In situ monitoring and controlling removal of contaminants from semiconductor surface using infrared radiation |
| 01/21/2003 | US6508970 Liquid transfer molding system for encapsulating semiconductor integrated circuits |
| 01/21/2003 | US6508953 Slurry for chemical-mechanical polishing copper damascene structures |
| 01/21/2003 | US6508952 Chemical mechanical abrasive composition for use in semiconductor processing |
| 01/21/2003 | US6508949 Method for correcting characteristics of attenuated phase-shift mask |
| 01/21/2003 | US6508948 For performing microfabrication of semiconductor based logic, memory and optoelectronic devices and micromechanical systems |
| 01/21/2003 | US6508924 Control of breakdown products in electroplating baths |
| 01/21/2003 | US6508920 Apparatus for low-temperature annealing of metallization microstructures in the production of a microelectronic device |
| 01/21/2003 | US6508919 Optimized liners for dual damascene metal wiring |
| 01/21/2003 | US6508913 Gas distribution apparatus for semiconductor processing |
| 01/21/2003 | US6508911 Diamond coated parts in a plasma reactor |
| 01/21/2003 | US6508890 Method of enhancing the conductivity of a conductive surface |
| 01/21/2003 | US6508887 Resist removing composition and resist removing method using the same |
| 01/21/2003 | US6508884 Wafer holder for semiconductor manufacturing apparatus, method of manufacturing wafer holder, and semiconductor manufacturing apparatus |
| 01/21/2003 | US6508883 Throughput enhancement for single wafer reactor |
| 01/21/2003 | US6508878 GaN system compound semiconductor and method for growing crystal thereof |
| 01/21/2003 | US6508845 Preparation of a chip scale package; heatable pressing plate movable to press against the solder balls to planarize |
| 01/21/2003 | US6508696 Wafer-polishing head and polishing apparatus having the same |
| 01/21/2003 | US6508695 Polishing a semiconductor wafer, |
| 01/21/2003 | US6508693 Part of the semiconductor body is removed by means of powder blasting |
| 01/21/2003 | US6508686 Method of manufacturing pixel electrode for reflection type display device |
| 01/21/2003 | US6508472 Multi-channel rotary joint |
| 01/21/2003 | US6508259 Inverted pressure vessel with horizontal through loading |
| 01/21/2003 | US6508258 Method and apparatus for cleaning flat workpieces within a semiconductor manufacturing system |
| 01/21/2003 | US6508199 Plasma processing apparatus |
| 01/21/2003 | US6508154 Integrated circuit package separators |
| 01/21/2003 | US6508084 Method for producing optical quartz glass for excimer lasers and vertical-type heating furnace |
| 01/21/2003 | US6508062 Thermal exchanger for a wafer chuck |
| 01/21/2003 | US6508014 Method of drying substrates |
| 01/21/2003 | US6507996 Apparatus for positioning electronic components |
| 01/21/2003 | US6507989 Self-assembly of mesoscale objects |
| 01/21/2003 | CA2225226C Photodetector involving a mosfet having a floating gate |
| 01/21/2003 | CA2221100C Process for producing semiconductor article |
| 01/20/2003 | CA2393668A1 Semiconductor component |
| 01/16/2003 | WO2003005786A1 Method for manufacturing printed wiring board |
| 01/16/2003 | WO2003005782A2 Stackable microcircuit and method of making the same |
| 01/16/2003 | WO2003005523A2 Electrostatic discharge (esd) protection device with simultaneous and distributed self-biasing for multi-finger turn-on |
| 01/16/2003 | WO2003005459A1 Nitride semiconductor device |
| 01/16/2003 | WO2003005453A1 Tft substrate, liquid crystal display using the same, and its manufacturing method |
| 01/16/2003 | WO2003005452A2 Power mosfet having a trench gate electrode and method of making the same |
| 01/16/2003 | WO2003005451A1 Field-effect transistor constituting channel by carbon nano tubes |
| 01/16/2003 | WO2003005450A2 Nanoscale wires and related devices |
| 01/16/2003 | WO2003005449A1 Substrate connection in an integrated power circuit |
| 01/16/2003 | WO2003005447A2 Structure and method of fabricating embedded vertical dram arrays with silicided bitline and polysilicon interconnect |
| 01/16/2003 | WO2003005443A2 Composite structure with a uniform crystal orientation and the method of controlling the crystal orientation of one such structure |
| 01/16/2003 | WO2003005441A1 Coating material of semiconductor chip, coating method of semiconductor chip and semiconductor device |
| 01/16/2003 | WO2003005440A2 Non-volatile memory |
| 01/16/2003 | WO2003005439A2 Method of manufacturing a semiconductor device comprising mos-transistors having gate oxides of different thicknesses |
| 01/16/2003 | WO2003005438A2 Improved metal barrier behavior by sic:h deposition on porous materials |
| 01/16/2003 | WO2003005437A2 Interconnect system and method of fabrication |
| 01/16/2003 | WO2003005436A1 Coating material of semiconductor chip for controlling magnetic disc drive and method of coating semiconductor chip for controlling magnetic disc drive |