Patents
Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974)
01/2003
01/22/2003EP1277238A2 Device and method for tempering several process goods
01/22/2003EP1277237A2 Device and method for tempering at least one process good
01/22/2003EP1277236A1 Electrostatic discharge (esd) protection circuit
01/22/2003EP1277233A2 Method of depositing metal film and metal deposition cluster tool including supercritical drying/cleaning module
01/22/2003EP1277232A1 Three dimensional device integration method and integrated device
01/22/2003EP1277231A1 A method and apparatus for selectively oxidizing a silicon/metal composite film stack
01/22/2003EP1277230A1 Method for producing capacitor structures
01/22/2003EP1277229A2 Method for producing an integrated capacitor
01/22/2003EP1277228A2 Heat management in wafer processing equipment using thermoelectric device
01/22/2003EP1277227A1 Device and method for treating semiconductor wafers
01/22/2003EP1277226A1 System and method for illuminating a semiconductor processing system
01/22/2003EP1277225A1 System and method for illuminating a semiconductor processing system
01/22/2003EP1277223A2 Highly efficient compact capacitance coupled plasma reactor/generator and method
01/22/2003EP1277222A1 Uniform charged particle exposure device and method using translatable stage and faraday cup
01/22/2003EP1277209A2 Method of forming memory capacitor contact openings
01/22/2003EP1277116A1 Enhanced programmable core model with integrated graphical debugging functionality
01/22/2003EP1277088A1 Optical reduction system with elimination of reticle diffraction induced bias
01/22/2003EP1277085A1 Method for measuring diffusion of photogenerated catalyst in chemically amplified resists
01/22/2003EP1277073A2 Optical reduction system with control of illumination polarization
01/22/2003EP1277036A2 Technique for determining curvatures of embedded line features on substrates
01/22/2003EP1276826A2 Slurries of abrasive inorganic oxide particles and method for polishing copper containing surfaces
01/22/2003EP1276799A2 Flame retardant epoxy molding compositions
01/22/2003EP1276592A2 Method of polishing and cleaning glass
01/22/2003EP1192433B1 Apparatus and method for evaluating a target larger than a measuring aperture of a sensor
01/22/2003EP1053510B1 Process for producing a photoresist composition having a reduced tendency to produce particles
01/22/2003EP0988129B1 Method and device for repairing defective soldered joints
01/22/2003CN1393037A Ferroelectric memory device and its manufacturing method, and hybrid device
01/22/2003CN1393036A Combined transistor-capactor structure in deep sub-micro CMOS for power amplifier
01/22/2003CN1393034A Alignment apparatus
01/22/2003CN1393033A Semiconductor jointing substrate-use tape with adhesive and copper-clad laminate sheet using it
01/22/2003CN1393032A Method for manufacturing thin-film semiconductor device
01/22/2003CN1393022A Method of manufacturing spin valve structure
01/22/2003CN1392973A Developing solution for photoresist
01/22/2003CN1392954A 缺陷知识库 Defects Knowledge
01/22/2003CN1392754A Plasma processing device with very-high frequency parallel resonance antenna
01/22/2003CN1392618A Magnetic resistance element and magnetic random access storage using said element
01/22/2003CN1392614A Gate without dopant permeated to its insulating layer and its manufacture
01/22/2003CN1392613A Semiconductor device with capactor and its producing method
01/22/2003CN1392612A Signal jitter preventor
01/22/2003CN1392611A Semiconductor device and its producing method
01/22/2003CN1392610A Semiconductor device and its producing method
01/22/2003CN1392609A Semiconductor packaging piece and its producing method
01/22/2003CN1392607A Bottom buffering metal lug structure
01/22/2003CN1392605A Method for producing mosaic inner connection structure
01/22/2003CN1392604A Method for elimianting leakage current of shallow channel isolation area
01/22/2003CN1392603A Method for improving leakage current and cllapse voltage of shallow channel isolation area
01/22/2003CN1392602A Method for producing circuit device
01/22/2003CN1392600A Method for producing circuit device
01/22/2003CN1392599A Method for producing circuit device
01/22/2003CN1392598A Method for producing circuit device
01/22/2003CN1392597A Method for producing compound semiconductor device
01/22/2003CN1392596A Organic film forming method
01/22/2003CN1392595A Chemical vapor deposition equipment and chemical vapor deposition method
01/22/2003CN1392594A Coating device and method for controlling film thickness to realize uniform film thickness
01/22/2003CN1392593A Mixed exposure method of combining contact exposure and direct electronic beam writing technology
01/22/2003CN1392592A Method for forming T-shaped gate with multilayer film and through once electronic beam exposure and multiple developing
01/22/2003CN1392454A Substrate processing device, liquid processing device and liquid processing method
01/22/2003CN1392435A Laser radiation table, device, method and method for producing semiconductor device
01/22/2003CN1392288A Method for forming silicon containing film by using tri(dimethylamino) silicane atomic shell deposition
01/22/2003CN1392215A Metal grinding liquid material, metal grinding liquid, its producing method and grinding method using it
01/22/2003CN1392214A Stripping film and adhesive film using stripping film
01/22/2003CN1392051A Ink jet printing head plate, ink jet printing head and ink jet printing equipment
01/22/2003CN1392025A Forming method for high resolution welding lug
01/22/2003CN1392024A Forming method for high resolution welding lug
01/22/2003CN1099754C Piezoelectric oscillator voltage-control oscillator, and manufacturing process thereof
01/22/2003CN1099720C Nonradiation dielectric transmission line apparatus and instrument for measuring characteristics of circuit board
01/22/2003CN1099714C 半导体存储器件及其制造方法 The semiconductor memory device and manufacturing method thereof
01/22/2003CN1099713C MOS unit, multiple cell transistor and IC chip using N-sided polygonal cell lay-out
01/22/2003CN1099712C Semiconductor device having protection circuit
01/22/2003CN1099710C 半导体器件 Semiconductor devices
01/22/2003CN1099707C Method for manufacturing semiconductor device having capacitor on metal structure
01/22/2003CN1099706C Method for producing isolation shed field effect transistor
01/22/2003CN1099705C Production method for fast flash memory unit
01/22/2003CN1099702C Method for manufacturing semiconductor device
01/22/2003CN1099701C Process for using sulfur to passivate surface of semiconductor made of group IIIA-VA compounds
01/22/2003CN1099700C Method for forming semiconductor device wiring
01/22/2003CN1099699C Method for production of SOI (silicon on insulator) substrate by pasting and SOI substrate
01/22/2003CN1099698C Method for making semiconductor substrate
01/22/2003CN1099697C Process for producing semiconductor device
01/22/2003CN1099696C Metal layer patterns of semiconductor device and method for forming the same
01/22/2003CN1099675C Optical disc, recording apparatus, and computer readable recording medium
01/22/2003CN1099614C Method for providing sacrificial spacer for micro-mechanical devices
01/22/2003CN1099613C Photomask blanks
01/22/2003CN1099612C Method for producing active matrix liquid crystal displayer
01/22/2003CN1099476C Process and apparatus for controlling oxygen content in silicon wafers heavily doped with antimony or arsenic
01/22/2003CN1099325C Ultrasonic cleaning apparatus
01/21/2003US6510549 Method of designing a semiconductor integrated circuit device in a short time
01/21/2003US6510542 Method of placing a repeater cell in an electricalcircuit
01/21/2003US6510541 Database having a hierarchical structure utilized for designing system-on-chip integrated circuit devices and a method of designing the same
01/21/2003US6510534 Method and apparatus for testing high performance circuits
01/21/2003US6510404 Gate delay calculation apparatus and method thereof using parameter expressing RC model source resistance value
01/21/2003US6510365 Carrier system positioning method
01/21/2003US6510359 Method and system for self-replicating manufacturing stations
01/21/2003US6510193 Charge transfer device and a semiconductor circuit including the device
01/21/2003US6510089 Voltage-level shifter and semiconductor memory using the same
01/21/2003US6510086 Nonvolatile semiconductor memory
01/21/2003US6510081 Electrically-eraseable programmable read-only memory having reduced-page-size program and erase
01/21/2003US6510079 MRAM configuration
01/21/2003US6510078 Memory cell array and method for manufacturing it
01/21/2003US6510075 Memory cell with increased capacitance