| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 01/23/2003 | US20030015732 Integrated circuits having self-aligned metal contact structures and methods of fabricating the same |
| 01/23/2003 | US20030015731 Process for fabricating semiconductor structures and devices utilizing the formation of a compliant substrate used to form the same and in-situ annealing |
| 01/23/2003 | US20030015729 Structure and method for fabricating dielectric resonators on a compliant substrate |
| 01/23/2003 | US20030015728 Photonic biasing and integrated solar charging networks for integrated circuits |
| 01/23/2003 | US20030015726 Semiconductor device and surface emitting semiconductor laser device |
| 01/23/2003 | US20030015725 Structure and method for fabricating semiconductor structures and devices utilizing the formation of a compliant substrate and ion beam assisted deposition for materials used to form the same |
| 01/23/2003 | US20030015722 Structure and method for fabricating semiconductor structures and devices for dispersing a radiant energy transmission |
| 01/23/2003 | US20030015720 Structure and method for fabricating a printed circuit board utilizing a semiconductor structure and an embedded waveguide |
| 01/23/2003 | US20030015719 Zinc oxide semiconductor member formed on silicon substrate |
| 01/23/2003 | US20030015718 Laminated lead frame, and optical communication module and method of manufacturing the same |
| 01/23/2003 | US20030015716 Structure and method for fabricating an optical bus |
| 01/23/2003 | US20030015714 Structure and process for fabricating semiconductor structures and devices utilizing the formation of a compliant substrate for materials used to form the same and including surface treatment of an oxide layer |
| 01/23/2003 | US20030015712 Fabrication of an optical communication device within a semiconductor structure |
| 01/23/2003 | US20030015711 Structure and method for fabricating semiconductor structures and devices utilizing the formation of a complaint substrate with an intermetallic layer |
| 01/23/2003 | US20030015710 Fabrication of a wavelength locker within a semiconductor structure |
| 01/23/2003 | US20030015709 Structure and method for fabricating semiconductor structures, devices, and packaging utilizing the formation of a compliant substrates for materials used to form the same |
| 01/23/2003 | US20030015707 Integrated radio frequency , optical, photonic, analog and digital functions in a semiconductor structure and method for fabricating semiconductor structure utilizing the formation of a compliant substrate for materials used to form the same |
| 01/23/2003 | US20030015706 Semiconductor film, method of forming semiconductor film, and method of manufacturing semiconductor device |
| 01/23/2003 | US20030015705 Structure and method for fabricating semiconductor structures and devices with an energy source |
| 01/23/2003 | US20030015704 Structure and process for fabricating semiconductor structures and devices utilizing the formation of a compliant substrate for materials used to form the same including intermediate surface cleaning |
| 01/23/2003 | US20030015703 Semiconductor device, and electronic apparatus |
| 01/23/2003 | US20030015702 Structure and method for fabricating epitaxial semiconductor on insulator (SOI) structures and devices utilizing the formation of a compliant substrate for materials used to form same |
| 01/23/2003 | US20030015701 Cerdip type of solid-state image sensing device, structure and method for gripping cerdip type of solid-state image sensing device |
| 01/23/2003 | US20030015700 Suitable semiconductor structure for forming multijunction solar cell and method for forming the same |
| 01/23/2003 | US20030015699 Integrated critical dimension control for semiconductor device manufacturing |
| 01/23/2003 | US20030015697 Fabrication of an optical transmitter within a semiconductor structure |
| 01/23/2003 | US20030015675 Semiconductor device |
| 01/23/2003 | US20030015674 Measuring configuration and method for measuring a critical dimension of at least one feature on a semiconductor wafer |
| 01/23/2003 | US20030015670 Clean room arrangement for electron beam lithography |
| 01/23/2003 | US20030015669 Tunable radiation source providing a VUV wavelength planar illumination pattern for processing semiconductor wafers |
| 01/23/2003 | US20030015660 Method and system for monitoring a semiconductor device manufacturing process |
| 01/23/2003 | US20030015628 Single-handed cord/cable management device |
| 01/23/2003 | US20030015572 Successive integration of multiple devices process and product |
| 01/23/2003 | US20030015569 Apparatus and method for bond force control |
| 01/23/2003 | US20030015567 Ultra fine pitch capillary |
| 01/23/2003 | US20030015553 Method and apparatus for dispensing adhesive on microelectronic substrate supports |
| 01/23/2003 | US20030015517 Wafer heating apparatus |
| 01/23/2003 | US20030015516 Heater member for mounting heating object and substrate processing apparatus using the same |
| 01/23/2003 | US20030015515 Ceramic substrate for semiconductor manufacture/inspection apparatus, ceramic heater, electrostatic clampless holder, and substrate for wafer prober |
| 01/23/2003 | US20030015496 Plasma etching process |
| 01/23/2003 | US20030015494 Single layer resist lift-off process and apparatus for submicron structures |
| 01/23/2003 | US20030015493 System and method for wafer-based controlled patterning of features with critical dimensions |
| 01/23/2003 | US20030015459 Air-suspended die sorter |
| 01/23/2003 | US20030015435 An electro-etching process for a semiconductor wafer |
| 01/23/2003 | US20030015342 Multilayer printed wiring board and method for producing multilayer printed wiring board |
| 01/23/2003 | US20030015294 Rapid heating and cooling of workpiece chucks |
| 01/23/2003 | US20030015293 Apparatus for plasma treatment |
| 01/23/2003 | US20030015291 Semiconductor device fabrication apparatus having multi-hole angled gas injection system |
| 01/23/2003 | US20030015290 Substrate processing apparatus, substrate processing method, and exposure apparatus |
| 01/23/2003 | US20030015289 Method and apparatus for cleaning a web-based chemical mechanical planarization system |
| 01/23/2003 | US20030015288 Sealable surface method and device |
| 01/23/2003 | US20030015287 Inner wall protection member for chamber and plasma procressing apparatus |
| 01/23/2003 | US20030015286 Wafer demount receptacle for separation of thinned wafer from mounting carrier |
| 01/23/2003 | US20030015250 Bulk gas built-in purifier with dual valve bulk container |
| 01/23/2003 | US20030015234 Photovoltaic device |
| 01/23/2003 | US20030015227 Shock wave generating apparatus and apparatus for removing foreign objects on solid body surface using shock wave |
| 01/23/2003 | US20030015224 A fluid delivery ring to be utilized in semiconductor wafer spin, rinse, and dry modules for optimizing the rinsing operation of a substrate surface while minimizing the surface recontamination |
| 01/23/2003 | US20030015218 Wafer cleaning |
| 01/23/2003 | US20030015217 Method of cleaning contaminants from the surface of a substrate |
| 01/23/2003 | US20030015216 Megasonic cleaner probe system with gasified fluid |
| 01/23/2003 | US20030015142 Apparatus for fabricating a semiconductor device |
| 01/23/2003 | US20030015141 Wafer supporting device in semiconductor manufacturing device |
| 01/23/2003 | US20030015138 Substrate processing apparatus and method for manufacturing semiconductor device |
| 01/23/2003 | US20030015137 Chemical vapor deposition apparatus and chemical vapor deposition method |
| 01/23/2003 | US20030015134 Semiconductor structure for edge mounting applications and process for fabrication |
| 01/23/2003 | US20030015133 Method for annealing a semiconductor |
| 01/23/2003 | US20030015033 Wire bonded sensor and method for manufacturing wire bonded sensor |
| 01/23/2003 | US20030014985 Helium management control system |
| 01/23/2003 | US20030014863 Method for manufacturing a printed circuit board |
| 01/23/2003 | DE10145826C1 Method, for connecting component to substrate, involves applying underfill material by immersing at least part of component into tank of underfill material before placing component onto substrate |
| 01/23/2003 | CA2453318A1 Aluminum gallium nitride/gallium nitride high electron mobility transistors having a gate contact on a gallium nitride based cap segment and methods of fabricating same |
| 01/23/2003 | CA2441093A1 Low dielectric constant organic dielectrics based on cage-like structures |
| 01/22/2003 | EP1278247A2 A method to form an air-gap under the edges of a gate electrode by using disposable spacer/liner |
| 01/22/2003 | EP1278245A1 Method and apparatus for producing bonded dielectric separation wafer |
| 01/22/2003 | EP1278243A2 Multichip Module assembled in COB structure, especially Compact Flash Card with high memory capacity and Method of Manufacturing the same |
| 01/22/2003 | EP1278241A2 Method for planarizing deposited film |
| 01/22/2003 | EP1278240A2 Transfering method of a component onto a connection support by welding without supplying material |
| 01/22/2003 | EP1278239A1 Process for forming self-adjusting masking layers |
| 01/22/2003 | EP1278238A1 Method for sealing fine groove with siliceous material and substrate having siliceous coating formed thereon |
| 01/22/2003 | EP1278237A1 Method for residue removal on ferroelectric materials |
| 01/22/2003 | EP1278236A1 Method of dicing a compound semiconductor wafer and compound semiconductor substrate thereby formed |
| 01/22/2003 | EP1278235A1 Manufacturing method of compound semiconductor device |
| 01/22/2003 | EP1278234A2 MOS transistor and method of manufacturing |
| 01/22/2003 | EP1278233A1 Production method of iii nitride compound semiconductor substrate and semiconductor device |
| 01/22/2003 | EP1278232A2 Apparatus and method for bond force control |
| 01/22/2003 | EP1278231A2 Substrate processing apparatus, substrate precessing method, and exposure apparatus |
| 01/22/2003 | EP1278230A2 Dual wafer load lock |
| 01/22/2003 | EP1278214A1 Composition for forming low dielectric constant insulating film, method of forming insulting film using the insulating film produced thereby |
| 01/22/2003 | EP1278202A2 Nonvolatile semiconductor storage device |
| 01/22/2003 | EP1278137A1 A method and apparatus for generating a solid state circuit layout with in-design variability associated to the setting of analog signal processing parameters |
| 01/22/2003 | EP1278104A1 Grating-grating interferometric alignment system |
| 01/22/2003 | EP1278094A2 Geometrical beamsplitter and method for manufacturing the same |
| 01/22/2003 | EP1278089A2 Lithographic apparatus and device manufacturing method |
| 01/22/2003 | EP1278005A1 Bulk gas built-in purifier with dual valve bulk container |
| 01/22/2003 | EP1277850A2 Sprayed film of yttria-alumina complex oxide and method of production of said film |
| 01/22/2003 | EP1277830A1 Detergent composition |
| 01/22/2003 | EP1277819A1 Connecting material |
| 01/22/2003 | EP1277696A2 Spring with conductive coating |
| 01/22/2003 | EP1277284A2 High voltage cmos signal driver system and method |
| 01/22/2003 | EP1277239A1 Method for producing a solar cell, and solar cell |