| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/23/2003 | CN1106685C Method and device for introducing foreign substance, and method for mfg. semiconductor device |
| 04/23/2003 | CN1106669C Driving source for vacuum treatment chamber |
| 04/23/2003 | CN1106460C Apparatus for preventing heater electrode meltdown in single crystal pulling apparatus |
| 04/23/2003 | CN1106332C Wafer enclosure with door |
| 04/22/2003 | USRE38085 Exposure method and projection exposure apparatus |
| 04/22/2003 | US6553562 Method and apparatus for generating masks utilized in conjunction with dipole illumination techniques |
| 04/22/2003 | US6553560 Alleviating line end shortening in transistor endcaps by extending phase shifters |
| 04/22/2003 | US6553557 Inter-functional-block restriction high-speed extraction method and recording medium having stored thereon an inter-functional-block restriction high-speed extraction program |
| 04/22/2003 | US6553553 Method of designing layout of semiconductor device |
| 04/22/2003 | US6553530 Integrated circuit devices that include self-test apparatus for testing a plurality of functional blocks and methods of testing same |
| 04/22/2003 | US6553528 Test circuit for semiconductor integrated circuit |
| 04/22/2003 | US6553496 Integration of security modules on an integrated circuit |
| 04/22/2003 | US6553395 Reconfigurable processor devices |
| 04/22/2003 | US6553339 MOSFET simulation method |
| 04/22/2003 | US6553335 Method and apparatus for determining end-point in a chamber cleaning process |
| 04/22/2003 | US6553332 Process control; inexpensive, fast, reliable, accurate |
| 04/22/2003 | US6553323 Method and its apparatus for inspecting a specimen |
| 04/22/2003 | US6553280 Valve/sensor assemblies |
| 04/22/2003 | US6553277 Method and apparatus for vacuum treatment |
| 04/22/2003 | US6553274 Simultaneously patterning interconnection and dummy layers; uniform thickness and flatting insulating film |
| 04/22/2003 | US6553137 Method of increasing overlay accuracy in an exposure step and overlay displacement measuring device for determining optimum measurement focus plane by variation in magnitudes of displacement of two overlay inspection marks |
| 04/22/2003 | US6552958 Semiconductor integrated circuit device |
| 04/22/2003 | US6552953 High speed signal path and method |
| 04/22/2003 | US6552931 Low voltage flash EEPROM memory cell with improved data retention |
| 04/22/2003 | US6552930 Semiconductor memory device and storage method thereof |
| 04/22/2003 | US6552927 MRAM architecture and system |
| 04/22/2003 | US6552926 Magnetic random-access memory |
| 04/22/2003 | US6552892 Method and apparatus for the grounding of process wafers by the use of conductive regions created by ion implantation into the surface of an electrostatic clamp |
| 04/22/2003 | US6552862 Mounting device for an optical element |
| 04/22/2003 | US6552846 Catoptric optical element, illumination optical system equipped therewith, projection exposure apparatus and method for manufacturing semiconductor device |
| 04/22/2003 | US6552811 Cutting blade detection mechanism for a cutting machine |
| 04/22/2003 | US6552798 Position detecting method and system for use in exposure apparatus |
| 04/22/2003 | US6552775 Optical projecting system for projecting and synchronously scanning mask pattern; enhancing fineness |
| 04/22/2003 | US6552774 Exposure apparatus |
| 04/22/2003 | US6552773 Stage system with driving mechanism, and exposure apparatus having the same |
| 04/22/2003 | US6552768 Driver circuit of display device with channel width directions of buffer and sampling thin film transistors identical with scanning direction of a radiating laser beam |
| 04/22/2003 | US6552757 Liquid crystal display element and method for manufacturing the same |
| 04/22/2003 | US6552718 Contact structure of substrates of touch panel and method of bonding the same |
| 04/22/2003 | US6552694 Semiconductor device and fabrication method thereof |
| 04/22/2003 | US6552597 Integrated circuit with closely coupled high voltage output and offline transistor pair |
| 04/22/2003 | US6552561 Apparatus and method for controlling temperature in a device under test using integrated temperature sensitive diode |
| 04/22/2003 | US6552556 Prober for electrical measurement of potentials in the interior of ultra-fine semiconductor devices, and method of measuring electrical characteristics with said prober |
| 04/22/2003 | US6552551 Method of producing load for delay time calculation and recording medium |
| 04/22/2003 | US6552549 Method of reading electrical fuses/antifuses |
| 04/22/2003 | US6552527 Wafer map display apparatus and method for semiconductor test system |
| 04/22/2003 | US6552449 Precise position small angle controller; increased response; slim, small; robotics, inspection equipments, machine tools, semiconductor manufacturing |
| 04/22/2003 | US6552437 Semiconductor device and method of manufacture thereof |
| 04/22/2003 | US6552435 Integrated circuit with conductive lines disposed within isolation regions |
| 04/22/2003 | US6552434 Semiconductor device and manufacturing method thereof |
| 04/22/2003 | US6552432 Mask on a polymer having an opening width less than that of the opening in the polymer |
| 04/22/2003 | US6552431 Semiconductor structure with a titanium aluminum nitride layer and method for fabricating same |
| 04/22/2003 | US6552428 Semiconductor package having an exposed heat spreader |
| 04/22/2003 | US6552427 BGA package and method of fabrication |
| 04/22/2003 | US6552426 Semiconductor device and method of manufacturing same |
| 04/22/2003 | US6552425 Integrated circuit package |
| 04/22/2003 | US6552421 Semiconductor device and a method of manufacturing the same |
| 04/22/2003 | US6552419 Semiconductor device and liquid crystal module using the same |
| 04/22/2003 | US6552414 Semiconductor device with selectively diffused regions |
| 04/22/2003 | US6552411 DC or AC electric field assisted anneal |
| 04/22/2003 | US6552408 Methods, apparatuses, and substrate assembly structures for fabricating microelectronic components using mechanical and chemical-mechanical planarization processes |
| 04/22/2003 | US6552403 Binary non-crystalline oxide analogs of silicon dioxide for use in gate dielectrics |
| 04/22/2003 | US6552402 Composite MOS transistor device |
| 04/22/2003 | US6552401 Use of gate electrode workfunction to improve DRAM refresh |
| 04/22/2003 | US6552400 Semiconductor device and method of manufacturing the same |
| 04/22/2003 | US6552399 Dummy layer diode structures for ESD protection |
| 04/22/2003 | US6552398 T-Ram array having a planar cell structure and method for fabricating the same |
| 04/22/2003 | US6552396 Matched transistors and methods for forming the same |
| 04/22/2003 | US6552395 Silicon on insulator; beryllium oxide layer |
| 04/22/2003 | US6552394 Reduced cost |
| 04/22/2003 | US6552393 Power MOS transistor having increased drain current path |
| 04/22/2003 | US6552391 Low voltage dual-well trench MOS device |
| 04/22/2003 | US6552390 Semiconductor device |
| 04/22/2003 | US6552389 Offset-gate-type semiconductor device |
| 04/22/2003 | US6552388 Hafnium nitride gate dielectric |
| 04/22/2003 | US6552387 Non-volatile electrically erasable and programmable semiconductor memory cell utilizing asymmetrical charge trapping |
| 04/22/2003 | US6552386 Scalable split-gate flash memory cell structure and its contactless flash memory arrays |
| 04/22/2003 | US6552385 DRAM memory capacitor having three-layer dielectric, and method for its production |
| 04/22/2003 | US6552384 Thin-film capacitor element and electronic circuit board on which thin-film capacitor element is formed |
| 04/22/2003 | US6552383 Integrated decoupling capacitors |
| 04/22/2003 | US6552382 Scalable vertical DRAM cell structure and its manufacturing methods |
| 04/22/2003 | US6552381 Trench capacitors in SOI substrates |
| 04/22/2003 | US6552380 Semiconductor device and manufacturing method thereof |
| 04/22/2003 | US6552379 Semiconductor device and manufacturing method thereof |
| 04/22/2003 | US6552378 Ultra compact DRAM cell and method of making |
| 04/22/2003 | US6552377 Mos transistor with dual metal gate structure |
| 04/22/2003 | US6552376 Group III nitride compound semiconductor device |
| 04/22/2003 | US6552375 Blocking of boron diffusion through the emitter-emitter poly interface in PNP HBTs through use of a SiC layer at the top of the emitter epi layer |
| 04/22/2003 | US6552374 Method of manufacturing bipolar device and structure thereof |
| 04/22/2003 | US6552373 Hetero-junction field effect transistor having an intermediate layer |
| 04/22/2003 | US6552363 Polysilicon FET built on silicon carbide diode substrate |
| 04/22/2003 | US6552362 Semiconductor device and process for producing the same |
| 04/22/2003 | US6552360 Plurality of strips for uniform polishing pressure |
| 04/22/2003 | US6552352 Aligner |
| 04/22/2003 | US6552350 System and method for providing a lithographic light source for a semiconductor manufacturing process |
| 04/22/2003 | US6552337 Methods and systems for measuring microroughness of a substrate combining particle counter and atomic force microscope measurements |
| 04/22/2003 | US6552332 Image-sensing apparatus |
| 04/22/2003 | US6552308 Accuracy; increased throughput |
| 04/22/2003 | US6552297 RF matching network with distributed outputs |
| 04/22/2003 | US6552266 High performance chip packaging and method |
| 04/22/2003 | US6552264 High performance chip packaging and method |