| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 04/16/2003 | EP1302985A1 Method for producing bonded wafer and bonded wafer |
| 04/16/2003 | EP1302984A1 Protection structure against electrostatic discharges (ESD) for an electronic device integrated on a SOI substrate and corresponding integration process |
| 04/16/2003 | EP1302982A1 Method of producing a vertical field effect transistor device |
| 04/16/2003 | EP1302981A2 Method of manufacturing semiconductor device having silicon carbide film |
| 04/16/2003 | EP1302980A1 Spool case for bonding wire, and method of handling spool using same |
| 04/16/2003 | EP1302979A2 Method of forming through-hole or recess in silicon substrate |
| 04/16/2003 | EP1302978A2 Method of making a self-aligned ferroelectric memory transistor |
| 04/16/2003 | EP1302977A2 Method for producing group III nitride compound semiconductor |
| 04/16/2003 | EP1302976A1 Single crystal wafer and solar battery cell |
| 04/16/2003 | EP1302975A2 Method for thinning wafers |
| 04/16/2003 | EP1302974A2 Chip alignment and placement apparatus for integrated circuit, MEMS, photonic or other devices |
| 04/16/2003 | EP1302972A2 Method and scanning electron microscope for measuring width of material on sample |
| 04/16/2003 | EP1302962A1 Quantum size effect type micro electron gun and flat display unit using it and method for manufacturing the same |
| 04/16/2003 | EP1302955A1 Inductance and its manufacturing method |
| 04/16/2003 | EP1302954A1 Process for manufacturing an inductance and a via hole in an integrated circuit |
| 04/16/2003 | EP1302832A1 Semiconductor device with temperature compensation circuit |
| 04/16/2003 | EP1302810A2 Photosemiconductor device and method for fabricating the same |
| 04/16/2003 | EP1302777A2 Dual mode ASIC BIST Controller |
| 04/16/2003 | EP1302561A1 Method and apparatus for forming a layer on a substrate by high-density plasma chemical vapor deposition (HDP-CVD) |
| 04/16/2003 | EP1302522A2 Gel-free colloidal abrasive and polishing compositions and methods of using them |
| 04/16/2003 | EP1302249A1 Dust-incompatible article transfer container cleaner |
| 04/16/2003 | EP1302248A2 Method and appartus for plasma deposition |
| 04/16/2003 | EP1301950A1 Method for the production and configuration of organic field-effect transistors (ofet) |
| 04/16/2003 | EP1301948A2 Semiconductor element comprising a sequence of layers for converting acoustic or thermal signals and electrical voltage changes into each other and method for producing the same |
| 04/16/2003 | EP1301947A2 Group iii nitride compound semiconductor device |
| 04/16/2003 | EP1301944A2 Nanoscale patterning for the formation of extensive wires |
| 04/16/2003 | EP1301943A2 Method and apparatus for modeling thickness profiles and controlling subsequent etch process |
| 04/16/2003 | EP1301942A1 Electronic chip component comprising an integrated circuit and a method for producing the same |
| 04/16/2003 | EP1301941A2 High dielectric constant metal silicates formed by controlled metal-surface reactions |
| 04/16/2003 | EP1301938A2 A plasma reactor having a symmetric parallel conductor coil antenna |
| 04/16/2003 | EP1301928A2 Mram architectures for increased write selectivity |
| 04/16/2003 | EP1301838A2 Apparatus and method for controlling temperature in a wafer and a device under test using integrated temperature sensitive diode |
| 04/16/2003 | EP1301830A2 Method for characterizing optical systems using holographic reticles |
| 04/16/2003 | EP1301829A1 Radiation sensitive compositions containing image quality and profile enhancement additives |
| 04/16/2003 | EP1301827A1 Photolithographically-patterned out-of-plane coil structures and method of making |
| 04/16/2003 | EP1301818A2 Apparatus, system, and method for active compensation of aberrations in an optical system |
| 04/16/2003 | EP1301569A1 Absorbing compounds for spin-on glass anti-reflective coatings for photolithography |
| 04/16/2003 | EP1301314A1 Robot having independent end effector linkage motion |
| 04/16/2003 | EP1301289A1 Edge bead removal for spin-on materials using carbon-dioxide cleaning |
| 04/16/2003 | EP1301262A1 Air management system and method for chemical containment and contamination reduction in a semiconductor manufacturing facility |
| 04/16/2003 | EP1224618B1 Method for production of contactless chip cards and for production of electrical units comprising chips with contact elements |
| 04/16/2003 | EP1210690B1 Electronic device comprising a chip fixed on a support and method for making same |
| 04/16/2003 | EP1166174B1 Active matrix substrate for liquid crystal display and method for making the same |
| 04/16/2003 | EP1151155B1 Cdv method of and reactor for silicon carbide monocrystal growth |
| 04/16/2003 | EP1114210A4 Low-temperature process for forming an epitaxial layer on a semiconductor substrate |
| 04/16/2003 | EP0957400B1 Photosensitive resin composition, method for producing pattern therefrom, electronic devices produced by using the same, and method for production thereof |
| 04/16/2003 | EP0938716B1 Computer assisted method of partitioning an electrical circuit |
| 04/16/2003 | EP0932911B1 Control mechanisms for dosimetry control in ion implantation systems |
| 04/16/2003 | EP0925529B1 Alkysulfonyloximes for high-resolution i-line photoresists of high sensitivity |
| 04/16/2003 | EP0584143B2 Process and device for manufacturing plastic mouldings having wall regions of reduced thickness |
| 04/16/2003 | CN1411613A Device and method for tempering several process goods |
| 04/16/2003 | CN1411612A Method for raw etching silicon solar cells |
| 04/16/2003 | CN1411611A Metal-insulator-metal capacitor and method for producing same |
| 04/16/2003 | CN1411610A Multilayer capacitor structure having array of concentric ring-shaped plates for deep sub-micron CMOS |
| 04/16/2003 | CN1411607A Method and structure for adhering MSQ to liner oxide |
| 04/16/2003 | CN1411602A Method to provide reduced constant E-field during erase of EEPROM for reliability improvement |
| 04/16/2003 | CN1411589A Reinforced integrated circuit |
| 04/16/2003 | CN1411514A Method of cleaning and conditioning plasma reaction chamber |
| 04/16/2003 | CN1411497A Preparations containing fine particulate inorganic oxides |
| 04/16/2003 | CN1411420A Robots for microelectronic workpiece handling |
| 04/16/2003 | CN1411333A Electronic element welder and method, circuit board and electronic element mounting device |
| 04/16/2003 | CN1411285A Calibration method of electric charge coupler response linearity |
| 04/16/2003 | CN1411138A Semiconductor device with temp compensating circuit |
| 04/16/2003 | CN1411077A Nano titanium dioxide film and its manufacturing method |
| 04/16/2003 | CN1411076A Semiconductor device and mfg. method thereof |
| 04/16/2003 | CN1411075A 半导体装置 Semiconductor device |
| 04/16/2003 | CN1411074A Shared bit line cross point storage array |
| 04/16/2003 | CN1411072A Semiconductor storage apparatus containing image RAM |
| 04/16/2003 | CN1411069A 半导体装置 Semiconductor device |
| 04/16/2003 | CN1411067A Semiconductor device and mfg. method thereof |
| 04/16/2003 | CN1411066A Semiconductor device and mfg. method thereof |
| 04/16/2003 | CN1411065A 半导体集成电路 The semiconductor integrated circuit |
| 04/16/2003 | CN1411064A 半导体集成电路装置 The semiconductor integrated circuit device |
| 04/16/2003 | CN1411060A Semiconductor device and mfg. method thereof |
| 04/16/2003 | CN1411056A Film substrate, semiconductor device, circuit substrate and mfg. method thereof |
| 04/16/2003 | CN1411054A Semiconductor integrated circuit, method and apparatus for mfg. same |
| 04/16/2003 | CN1411052A Semiconductor integrated circuit and mfg. method thereof |
| 04/16/2003 | CN1411051A Method for mfg. semiconductor device and structure thereof |
| 04/16/2003 | CN1411050A Method for mfg. semiconductor device with silicon carbide film |
| 04/16/2003 | CN1411049A Semiconductor device containing porous insulative material and mfg. method thereof |
| 04/16/2003 | CN1411048A 半导体装置 Semiconductor device |
| 04/16/2003 | CN1411047A Miniature pattern inspection apparatus and method CD-SEM managing apparatus and method |
| 04/16/2003 | CN1411045A Semiconductor device |
| 04/16/2003 | CN1411044A Method of connecting conductive wire to semiconductor chip |
| 04/16/2003 | CN1411043A Method for mounting semiconductor element |
| 04/16/2003 | CN1411042A Threshold valtage regulating method for ultrathin epitaxial silicon metal oxide semiconductor transistor based on insulator |
| 04/16/2003 | CN1411041A Method of treating fluorosilicic glass surface layer |
| 04/16/2003 | CN1411040A Dry etching method for manufacturing semi-conductor component element |
| 04/16/2003 | CN1411039A Electrolysis polishing method |
| 04/16/2003 | CN1411038A Polishing method and apparatus |
| 04/16/2003 | CN1411037A Adhesive film for protecting simiconductor wafer surface and method for protecting wafer with same |
| 04/16/2003 | CN1411036A Mathod of manufacturing semi conductor device having composite buffer layer |
| 04/16/2003 | CN1411035A Single crystal gallium nitride substrate, method for growing single crystal gallium nitride and method for mfg. substrate thereof |
| 04/16/2003 | CN1411034A Mask pattern making method and semiconductor device making method |
| 04/16/2003 | CN1411033A Substrate producing method for semiconductor device and substrate for semiconductor device |
| 04/16/2003 | CN1411032A Auxiliary designing method of contact hole photoetching |
| 04/16/2003 | CN1411026A Method and device for clamping substrate |
| 04/16/2003 | CN1411025A Charged beam apparatus, pattern testing method and pattern display method |
| 04/16/2003 | CN1411000A Film magnetic storage of shared storage element between multiple storage locations |
| 04/16/2003 | CN1410962A Dynamic matrix-type display |