| Patents for H01L 21 - Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof (658,974) |
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| 06/24/2003 | US6583504 Semiconductor die with attached heat sink and transfer mold |
| 06/24/2003 | US6583503 Semiconductor package with stacked substrates and multiple semiconductor dice |
| 06/24/2003 | US6583497 Surface treatment of c-doped SiO2 film to enhance film stability during O2 ashing |
| 06/24/2003 | US6583496 Single-control monolithic component for a composite bridge |
| 06/24/2003 | US6583495 Variable capacitor and memory device employing the same |
| 06/24/2003 | US6583494 Reduced base resistance in a bipolar transistor |
| 06/24/2003 | US6583492 Capacitor element having a contact hole structure in an electrode structure |
| 06/24/2003 | US6583491 Microelectronic fabrication having microelectronic capacitor structure fabricated therein |
| 06/24/2003 | US6583490 One time programmable semiconductor nonvolatile memory device and method for production of same |
| 06/24/2003 | US6583489 Method for forming interconnect structure with low dielectric constant |
| 06/24/2003 | US6583488 Low density, tensile stress reducing material for STI trench fill |
| 06/24/2003 | US6583487 Power component bearing interconnections |
| 06/24/2003 | US6583486 Higher levels of integration, improved noise tolerance and effective isolation margins |
| 06/24/2003 | US6583485 Schottky diode |
| 06/24/2003 | US6583484 Method of manufacturing photodiode CMOS image sensor |
| 06/24/2003 | US6583483 Semiconductor device and its manufacturing method |
| 06/24/2003 | US6583479 Sidewall NROM and method of manufacture thereof for non-volatile memory cells |
| 06/24/2003 | US6583478 Transfer circuit of semiconductor device and structure thereof |
| 06/24/2003 | US6583475 N-channel metal oxide transistor with surge protection cir-cuit connected in parallel preventing electrostatic breakdown |
| 06/24/2003 | US6583473 Semiconductor devices containing surface channel mos transistors |
| 06/24/2003 | US6583472 Semiconductor device and method of manufacturing thereof |
| 06/24/2003 | US6583471 Semiconductor device having first and second insulating films |
| 06/24/2003 | US6583469 Channel region with wider tappered source/drain abutments avoiding high overlap capacitance |
| 06/24/2003 | US6583468 Decreased dislocation density of epitaxially grown nitride layer; field effect transistors |
| 06/24/2003 | US6583467 Semiconductor integrated circuit device |
| 06/24/2003 | US6583466 Vertical split gate flash memory device in an orthogonal array of rows and columns with devices in columns having shared source regions |
| 06/24/2003 | US6583465 Code addressable memory cell in a flash memory device |
| 06/24/2003 | US6583464 Reduced fluctuations in retention time of stored charge |
| 06/24/2003 | US6583463 Semiconductor integrated circuit device with information storage capacitor having ruthenium dioxide lower electrode and crystallized TA2O5 capacitor insulator |
| 06/24/2003 | US6583462 Vertical DRAM having metallic node conductor |
| 06/24/2003 | US6583461 Semiconductor device and method of manufacturing the same |
| 06/24/2003 | US6583460 Method of forming a metal to polysilicon contact in oxygen environment |
| 06/24/2003 | US6583459 Random access memory cell and method for fabricating same |
| 06/24/2003 | US6583458 Semiconductor integrated circuit including a DRAM and an analog circuit |
| 06/24/2003 | US6583457 Recessed container cells and method of forming the same |
| 06/24/2003 | US6583455 Fabrication of low resistance, non-alloyed, OHMIC contacts to INP using non-stoichiometric INP layers |
| 06/24/2003 | US6583454 Nitride based transistors on semi-insulating silicon carbide substrates |
| 06/24/2003 | US6583453 Semiconductor device having a voltage-regulator device |
| 06/24/2003 | US6583451 Process for fabricating a network of nanometric lines made of single-crystal silicon and device obtained |
| 06/24/2003 | US6583450 Reduced stacking fault defects |
| 06/24/2003 | US6583448 Light emitting diode and method for manufacturing the same |
| 06/24/2003 | US6583444 Semiconductor packages having light-sensitive chips |
| 06/24/2003 | US6583441 Capacitor constructions comprising a nitrogen-containing layer over a rugged polysilicon layer |
| 06/24/2003 | US6583440 Soi substrate, element substrate, semiconductor device, electro-optical apparatus, electronic equipment, method of manufacturing the soi substrate, method of manufacturing the element substrate, and method of manufacturing the electro-optical apparatus |
| 06/24/2003 | US6583439 Semiconductor device |
| 06/24/2003 | US6583437 Semiconductor device and method of manufacturing the same |
| 06/24/2003 | US6583436 Tunable two dimensional lattice that can be replicated at periodic intervals along the growth direction to form three dimensional lattice |
| 06/24/2003 | US6583431 Charged particle beam lithography apparatus for forming pattern on semi-conductor |
| 06/24/2003 | US6583430 Electron beam exposure method and apparatus |
| 06/24/2003 | US6583414 Method of inspecting pattern and inspecting instrument |
| 06/24/2003 | US6583383 Method and apparatus for cutting a semiconductor wafer |
| 06/24/2003 | US6583355 Bladder insert for encapsulant displacement |
| 06/24/2003 | US6583201 Polymeric resin, a conductive filler, a curing agent, an optional (reactive) diluent, and as corrosion inhibitor, one of 6-hydroxyquinoline, 2-hydroxyquinoline or piperidene to improve contact resistance in harsh conditions |
| 06/24/2003 | US6583071 Ultrasonic spray coating of liquid precursor for low K dielectric coatings |
| 06/24/2003 | US6583067 Method of avoiding dielectric layer deterioration with a low dielectric constant |
| 06/24/2003 | US6583066 Methods for fabricating a semiconductor chip having CMOS devices and fieldless array |
| 06/24/2003 | US6583065 Sidewall polymer forming gas additives for etching processes |
| 06/24/2003 | US6583064 Low contamination high density plasma etch chambers and methods for making the same |
| 06/24/2003 | US6583063 Plasma etching of silicon using fluorinated gas mixtures |
| 06/24/2003 | US6583062 Method of improving an aspect ratio while avoiding etch stop |
| 06/24/2003 | US6583060 Dual depth trench isolation |
| 06/24/2003 | US6583059 Semiconductor device and method of manufacturing the same |
| 06/24/2003 | US6583058 Solid hermetic via and bump fabrication |
| 06/24/2003 | US6583057 Method of forming a semiconductor device having a layer deposited by varying flow of reactants |
| 06/24/2003 | US6583056 Storage electrode of a semiconductor memory device and method for fabricating the same |
| 06/24/2003 | US6583055 Method of forming stepped contact trench for semiconductor devices |
| 06/24/2003 | US6583054 Method for forming conductive line in semiconductor device |
| 06/24/2003 | US6583053 Use of a sacrificial layer to facilitate metallization for small features |
| 06/24/2003 | US6583052 Method of fabricating a semiconductor device having reduced contact resistance |
| 06/24/2003 | US6583051 Method of manufacturing an amorphized barrier layer for integrated circuit interconnects |
| 06/24/2003 | US6583050 Semiconductor wafer with improved flatness, and process for producing the semiconductor wafer |
| 06/24/2003 | US6583049 Semiconductor integrated circuit device and method for making the same |
| 06/24/2003 | US6583048 Chemical vapor deposition from a silyl ether, a silyl ether oligomer, or an organosilicon compound containing one or more reactive groups, to form an interlayer dielectric film having a dielectric constant of 3.5 or less. |
| 06/24/2003 | US6583047 Method for eliminating reaction between photoresist and OSG |
| 06/24/2003 | US6583046 Post-treatment of low-k dielectric for prevention of photoresist poisoning |
| 06/24/2003 | US6583045 Chip design with power rails under transistors |
| 06/24/2003 | US6583043 Dielectric between metal structures and method therefor |
| 06/24/2003 | US6583042 Semiconductor method of making electrical connection between an electrically conductive line and a node location, and integrated circuitry |
| 06/24/2003 | US6583040 Method of making a pillar in a laminated structure for a semiconductor chip assembly |
| 06/24/2003 | US6583039 Method of forming a bump on a copper pad |
| 06/24/2003 | US6583038 Polycide structure and method for forming polycide structure |
| 06/24/2003 | US6583037 Method for fabricating gate of semiconductor device |
| 06/24/2003 | US6583036 Method of manufacturing a semiconductor device |
| 06/24/2003 | US6583035 Semiconductor package with a controlled impedance bus and method of forming same |
| 06/24/2003 | US6583034 Semiconductor structure including a compliant substrate having a graded monocrystalline layer and methods for fabricating the structure and semiconductor devices including the structure |
| 06/24/2003 | US6583032 Method for manufacturing semiconductor chips |
| 06/24/2003 | US6583030 Method for producing an integrated circuit processed on both sides |
| 06/24/2003 | US6583029 Production method for silicon wafer and SOI wafer, and SOI wafer |
| 06/24/2003 | US6583028 Methods of forming trench isolation regions |
| 06/24/2003 | US6583027 Manufacturing method of semiconductor device and designing method of semiconductor device |
| 06/24/2003 | US6583026 Process for forming a low k carbon-doped silicon oxide dielectric material on an integrated circuit structure |
| 06/24/2003 | US6583025 Method of forming a trench isolation structure comprising annealing the oxidation barrier layer thereof in a furnace |
| 06/24/2003 | US6583024 High resistivity silicon wafer with thick epitaxial layer and method of producing same |
| 06/24/2003 | US6583023 Method for making semiconductor integrated circuits |
| 06/24/2003 | US6583022 Methods of forming roughened layers of platinum and methods of forming capacitors |
| 06/24/2003 | US6583021 Method of fabricating capacitor having hafnium oxide |
| 06/24/2003 | US6583020 Method for fabricating a trench isolation for electrically active components |
| 06/24/2003 | US6583018 Method of ion implantation |
| 06/24/2003 | US6583017 Self aligned channel implant, elevated S/D process by gate electrode damascene |
| 06/24/2003 | US6583016 Doped spacer liner for improved transistor performance |